CN101165869B - 硅片装卸装置 - Google Patents
硅片装卸装置 Download PDFInfo
- Publication number
- CN101165869B CN101165869B CN2007101462101A CN200710146210A CN101165869B CN 101165869 B CN101165869 B CN 101165869B CN 2007101462101 A CN2007101462101 A CN 2007101462101A CN 200710146210 A CN200710146210 A CN 200710146210A CN 101165869 B CN101165869 B CN 101165869B
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- Prior art keywords
- graphite boat
- silicon chip
- unloading device
- silicon
- base plate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Chemical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
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Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007101462101A CN101165869B (zh) | 2007-08-29 | 2007-08-29 | 硅片装卸装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007101462101A CN101165869B (zh) | 2007-08-29 | 2007-08-29 | 硅片装卸装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101165869A CN101165869A (zh) | 2008-04-23 |
CN101165869B true CN101165869B (zh) | 2010-11-03 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007101462101A Expired - Fee Related CN101165869B (zh) | 2007-08-29 | 2007-08-29 | 硅片装卸装置 |
Country Status (1)
Country | Link |
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CN (1) | CN101165869B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102328827B (zh) * | 2011-06-15 | 2013-02-27 | 湖南红太阳光电科技有限公司 | 用于pecvd自动装卸片系统的石墨舟小车 |
CN102280396B (zh) * | 2011-09-14 | 2013-04-10 | 江阴鑫辉太阳能有限公司 | 一种石墨舟饱和处理工艺 |
CN112680721B (zh) * | 2020-02-10 | 2023-04-07 | 拉普拉斯新能源科技股份有限公司 | 一种pecvd镀膜机 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1924659A (zh) * | 2005-08-31 | 2007-03-07 | 东京毅力科创株式会社 | 基板处理装置以及基板处理系统 |
CN101006572A (zh) * | 2004-11-15 | 2007-07-25 | 株式会社尼康 | 基板搬运装置、基板搬运方法以及曝光装置 |
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2007
- 2007-08-29 CN CN2007101462101A patent/CN101165869B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101006572A (zh) * | 2004-11-15 | 2007-07-25 | 株式会社尼康 | 基板搬运装置、基板搬运方法以及曝光装置 |
CN1924659A (zh) * | 2005-08-31 | 2007-03-07 | 东京毅力科创株式会社 | 基板处理装置以及基板处理系统 |
Also Published As
Publication number | Publication date |
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CN101165869A (zh) | 2008-04-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20090213 Address after: Jiangsu city of Jintan Province Yao Tang Zhen Jin Hongwu Road No. 18 Applicant after: Changzhou EGing Photovoltaic Technology Co., Ltd. Address before: Jiangsu city of Jintan Province Yao Tang Town Industrial Park Jin Wu Road No. 18 Applicant before: Xi Jian Hua Co-applicant before: Liu Zhigang |
|
ASS | Succession or assignment of patent right |
Owner name: CHANGZHOU YIJING OPTO-ELECTRICAL SCIENCE CO., LTD. Free format text: FORMER OWNER: XUN JIANHUA Effective date: 20090213 |
|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101103 Termination date: 20150829 |
|
EXPY | Termination of patent right or utility model |