CN1971253A - Digital holographic micro-measuring device - Google Patents
Digital holographic micro-measuring device Download PDFInfo
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- CN1971253A CN1971253A CN 200610117319 CN200610117319A CN1971253A CN 1971253 A CN1971253 A CN 1971253A CN 200610117319 CN200610117319 CN 200610117319 CN 200610117319 A CN200610117319 A CN 200610117319A CN 1971253 A CN1971253 A CN 1971253A
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Abstract
The invention relates to a digital holographic microscopy measuring device. It includes a laser beam splitting system which is connected with a digital microscopic image register system via a holographic microscopy system, said digital holographic microscopy system comprises object light transmission path, reference light transmission path and digital holographic image register system , the output of holographic microscopy system is connected with a object microscopic image visual system. The invention can realize the configuration measurement and the deformation detection of transparent microscopic object, and monitor the shape change of transparent microscopic object, the visual and digital recording of the microscopic image are also realized. The device can realize the non-contacting gauge of transparent substance fine texture which is based on the digital holographic microscopy; the dynamic property is well, substance to be measured don't need preparation of fluorescence and section.
Description
Technical field
The present invention relates to a kind of microstructure measurement mechanism, particularly a kind ofly be used to measure transparent substance, as the microstructure of active somatic cell, phase place material.
Background technology
Realize that at present the key instrument that the material microstructure is measured has confocal scan microscope, non-scanning confocal microscope, scanning probe microscopy and interference microscope etc.Confocal scan microscope has had the high resolving power of super diffraction limit, high image contrast and can tomography at present, and sweep velocity is one of main restricted condition, and requires high and complicated as the scanning implement device to system's accessory.Though confocal non-flying-spot microscope has saved complicated scanning process, but need multiple image equally, its processing time is equal to sweep time, the further raising of its speed depends on the frame picking rate of image acquisition device, and because need multiple image, so neither be fit to the kinetic measurement of biological specimen.
Scanning probe microscopy, as atomic force microscope, compare with other surface analysis technique, have some distinct advantages, as the atom level high resolving power, promptly can tell single atom, in real time obtain 3-D view, can realize the situation surface structure analysis of atom or molecular layer.But also there are some problems, need strictly control as the point blank of probe and sample; The probe tip size is bigger to the precision influence; Necessary Mechanical Driven link has been introduced big noise, and has reduced the real-time of measuring, and is unsuitable for dynamic observing of living body biological sample; For the measurement of living body biological sample, need cure process, and because the close contact of probe and sample, the insecurity of " invasion " is arranged more or less.
Traditional interference microscope can only the microstructural interferogram of visual reflection material, can realize the microstructural measurement of material though introduce the interference microscope of phase-shifting technique, needs to gather several phase shifting interferences and calculates.Its lateral resolution is subject to the diffraction limit of microcobjective.
Compare with scan-probe technology, cofocus scanning technology and confocal non-scanning technique, though the digital micro-analysis holographic technique remains the limitation of low resolution at present, but for the distortion or pattern or spatial position measuring of MEMS (micro electro mechanical system) (MEMS) device, space particulate, biological specimen, its resolution can satisfy, and the digital micro-analysis holographic technique has simple, the non-invasion of measurement mechanism and is suitable for the characteristics of kinetic measurement.
Only the Lynceetec company of Switzerland has released the DHM-1000 microscope at present, also is based on the digital micro-analysis holographic technique, has had above-mentioned advantage, can realize the dynamic test of the structure of matter.This device has object micro-image digital recording system, and do not have object micro-image visual system, can carry out the micro-image digital recording, and not be suitable for the visual micro-image that dynamic observes, and, limited the degree of depth between neighbouring sample point because this device adopts is the LASER Light Source of monochrome.
Summary of the invention
The purpose of apparatus of the present invention is the defective at the prior art existence, a kind of digital holographic micro-measuring device is provided, can be used to realize the visual and digital recording of material micro-image, have that dynamic is good, the characteristics of noncontact, the non-preparation of test substance, can gather the multi-wavelength digital hologram, enlarge the depth survey scope.
For achieving the above object, the present invention adopts following technical proposals;
A kind of digital holographic micro-measuring device, connecting an object micro-image digital recording system (3) by a laser beam splitter system (1) through a holographic microscope system (2) constitutes, described holographic microscope system (2) is made up of thing light transmission light path (5), reference light transmission light path (6) and digital hologram chart recording system (7), it is characterized in that the output of described holographic microscope system (2) also is connected to an object micro-image visual system (4).
In above-mentioned digital holographic micro-measuring device, described object microhologram is that a catoptron (23) connects an eyepiece (19) formation through an imaging mirror group (22) as visual system (4).
In above-mentioned digital holographic micro-measuring device, described laser beam splitter system (1) is connected the splitting optical fiber assembly by a semiconductor laser with tunable (8) through a transmissibility of adjustable attenuation piece (9), a steering reflection mirror (10) and a fiber coupler (11); Described splitting optical fiber assembly is that an optical fiber (12) that connects fiber coupler (11) output connects two splitting optical fibers (14,15) formation through a fiber optic splitter (13).
In above-mentioned digital holographic micro-measuring device, described thing light transmission light path (5) is to connect a described splitting optical fiber (15) by a fiber adjusting mount (16) import, and the sample on the objective table (17) is aimed in outlet, and aligned beneath settles microcobjective (21) and spectroscope (24) to constitute.
In above-mentioned digital holographic micro-measuring device, the structure of described reference light transmission light path (6) is: described another root splitting optical fiber (14) connects the input port of a fiber adjusting mount (26), fiber adjusting mount (26) delivery outlet is aimed at the spectroscope (29) of digital hologram record system (7) through an attenuator (27) and lens (28), fiber adjusting mount (26) connects a piezoelectric ceramics (25), piezoelectric ceramics (25) connects a piezoelectric ceramics controller (32), and piezoelectric ceramics controller (32) connects the computing machine (33) of digital hologram record system (7).
In above-mentioned digital holographic micro-measuring device, the structure of described digital hologram chart recording system (7) is: a spectroscope (29) input reference light and thing light, a ccd video camera (30) is aimed in output, and the output of ccd video camera (30) is connected to computing machine (33) through image pick-up card (31).
In above-mentioned digital holographic micro-measuring device, the structure of described object micro-image digital recording system (3) is: one of a ccd video camera (18) alignment lens is in the Amici prism gummed group (20) on the light path between the imaging mirror group (22) of object micro-image visual system (4) and the eyepiece (19), and the output of ccd video camera (18) is connected to computing machine (33) through image pick-up card (31).
Apparatus of the present invention compared with prior art have following characteristics: 1, can finish the digital recording of off-axis hologram or in-line hologram, the digital recording of micro-image and the visualization of micro-image simultaneously; 2, the reconstruct of single width hologram can be finished, also the phase shift holographic technique can be realized; 3, semiconductor laser with tunable wavelength-tunable can be utilized two (many) wavelength interferometry technology, enlarges the depth survey scope; 4, can finish transparent micro-contour of object and measure and deformation detection, also can monitor the metamorphosis of the transparent micro-object of live body in real time; 5, whole measuring system have that dynamic is good, the characteristics of noncontact, the non-preparation of test substance, device is simple compact, easy to operate.
Description of drawings
Fig. 1 is the structured flowchart of one embodiment of the invention.
Fig. 2 is the structural drawing of Fig. 1 example.
Embodiment
Details are as follows for a preferential embodiment of the present invention:
Referring to Fig. 1, this digital holographic micro-measuring device connects an object micro-image digital recording system (3) by a laser beam splitter system (1) through a micro-holophotal system (2) and constitutes, described micro-holophotal system (2) connects an object micro-image digital recording system (3) by a laser beam splitter system (1) through a holographic microscope system (2) and constitutes, described holographic microscope system (2) is by thing light transmission light path (5), reference light transmission light path (6) and digital hologram chart recording system (7) are formed, and it is characterized in that the output of described holographic microscope system (2) also is connected to an object micro-image visual system (4).
Referring to Fig. 2, above-mentioned object micro-image visual system (4) is to connect an eyepiece (19) by a catoptron (23) through an imaging mirror group (22) to constitute.Above-mentioned laser beam splitter system (1) is connected the splitting optical fiber assembly by a semiconductor laser with tunable (8) through a transmissibility of adjustable attenuation piece (9), a steering reflection mirror (10) and a fiber coupler (11); Described splitting optical fiber assembly is that an optical fiber (12) that connects fiber coupler (11) output connects two splitting optical fibers (14,15) formation through a fiber optic splitter (13).Above-mentioned thing light transmission light path (5) is to connect a described splitting optical fiber (15) by a fiber adjusting mount (16) import, and the sample on the objective table (17) is aimed in outlet, and aligned beneath settles microcobjective (21) and spectroscope (24) to constitute.The structure of above-mentioned reference light transmission light path (6) is: described another root splitting optical fiber (14) connects the input port of a fiber adjusting mount (26), fiber adjusting mount (26) delivery outlet is aimed at the spectroscope (29) of digital hologram record system (7) through an attenuator (27) and lens (28), fiber adjusting mount (26) connects a piezoelectric ceramics (25), piezoelectric ceramics (25) connects a piezoelectric ceramics controller (32), and piezoelectric ceramics controller (32) connects the computing machine (33) of digital hologram record system (7).The structure of above-mentioned digital hologram chart recording system (7) is: a spectroscope (29) input reference light and thing light, and a ccd video camera (30) is aimed in output, and the output of ccd video camera (30) is connected to computing machine (33) through image pick-up card (31).The structure of above-mentioned object micro-image digital recording system (3) is: one of a ccd video camera (18) alignment lens is in the Amici prism gummed group (20) on the light path between the imaging mirror group (22) of object micro-image visual system (4) and the eyepiece (19), and the output of ccd video camera (18) is connected to computing machine (33) through image pick-up card (31).
This device groundwork process: semiconductor laser with tunable (8) sends laser and enters fiber coupler (11) through transmissibility of adjustable attenuation piece (9) and steering reflection mirror (10), through optical fiber (12) and fiber optic splitter (13), be divided into first via splitting optical fiber (14) and the second road splitting optical fiber (15).Require maintenance certain coherence and identical polarization state and direction between this two bundles beam splitting light.The light beam that first via splitting optical fiber (14) sends enters spectroscope (29), as the reference light wave through fiber adjusting mount (26), attenuator (27) and collimation lens (28).The second road splitting optical fiber (15) is behind fiber adjusting mount (16), micro-sample on the irradiation objective table (17) amplifies through microcobjective (21), forms the thing light wave and enters spectroscope (24), reflection enters spectroscope (29) and reference light wave junction interference, forms hologram by CCD (30) record.This CCD (30) requires to be installed on the extend neck moving up and down, to realize the change of record distance.The thing light wave that transmits from spectroscope (24) enters Amici prism gummed group (20) through steering reflection mirror (23) and imaging mirror group (22), and transmitted light enters eyepiece (19), carries out the object micro-image and observes.The reflecting light of Amici prism gummed group (20) enters CCD (18), finishes the digital recording of object micro-image.CCD (18) and CCD (30) are stored in hologram and micro-image in the computing machine (33) through multichannel image capture card (31).Computing machine (33) is controlled piezoelectric ceramics controller (32) simultaneously, produces voltage control signal, promotes piezoelectric ceramics (25) work, changes ginseng light light wave, finishes phase shift.
In apparatus of the present invention, the effect and the related request of laser instrument (8) are: measurement light source is provided, and can be single-frequency laser, also can be Wavelength tunable laser.Utilize single-frequency laser can realize neighbouring sample point depth difference is no more than the sample measurement of a wavelength; Wavelength tunable laser can provide the different wave length LASER Light Source, can utilize two (many) wavelength technology, realizes neighbouring sample point depth difference is surpassed the sample measurement of a wavelength;
In apparatus of the present invention, the effect and the related request of transmissibility of adjustable attenuation piece (9) and (28) are: realize incident beam is carried out beam split, require the strong splitting ratio of two-beam adjustable continuously, obtain suitable outgoing beam;
In apparatus of the present invention, the effect and the related request of fiber coupler (11) are: realize the optimum coupling of LASER Light Source and optical fiber, obtain the transmission light source of peak power.It is sextuple accurate adjustable to require coupling mechanism to realize;
In apparatus of the present invention, the effect and the related request of fiber optic splitter (13) are: realize by different proportion (as 3 to 7) optical fiber source being carried out beam split, the ratio of the thing light wave of feasible interference after the transmission of different paths and ginseng light light wave is near 1 to 1;
In apparatus of the present invention, the effect and the related request of Amici prism gummed group (20) are: realize the beam split function of 45 degree, the splitting ratio of visual direction is bigger than CCD receive direction.Require to be common spectroscope.
In apparatus of the present invention, the effect and the related request of microcobjective (21) are: the multiplying power that realizes micro-sample is amplified.It is interchangeable to require design to go up microcobjective, does not receive but do not influence follow-up signal;
In apparatus of the present invention, the effect and the related request of imaging mirror group (22) are: realize the secondary imaging of micro-object and the adjustment of imaging beam bore;
In apparatus of the present invention, the effect and the related request of spectroscope (24) and spectroscope (29) are: realize 1 to 1 beam split, require to be the depolarization spectroscope;
In apparatus of the present invention, the effect of piezoelectric ceramics (25) with related request is: the phase shift holographic technique is realized mutually in the position of change reference light wave.Require the piezoelectric ceramics line in the efficient working range of a wavelength, to have good linearty.
Claims (7)
1. digital holographic micro-measuring device, connecting an object micro-image digital recording system (3) by a laser beam splitter system (1) through a holographic microscope system (2) constitutes, described holographic microscope system (2) is made up of thing light transmission light path (5), reference light transmission light path (6) and digital hologram chart recording system (7), it is characterized in that the output of described holographic microscope system (2) also is connected to an object micro-image visual system (4).
2. according to claim 1 described digital holographic micro-measuring device, it is characterized in that described object microhologram is to connect an eyepiece (19) by a catoptron (23) through an imaging mirror group (22) to constitute as visual system (4).
3. according to claim 1 described digital holographic micro-measuring device, it is characterized in that described laser beam splitter system (1) is connected the splitting optical fiber assembly by a semiconductor laser with tunable (8) through a transmissibility of adjustable attenuation piece (9), a steering reflection mirror (10) and a fiber coupler (11); Described splitting optical fiber assembly is that an optical fiber (12) that connects fiber coupler (11) output connects two splitting optical fibers (14,15) formation through a fiber optic splitter (13).
4. according to claim 1 described digital holographic micro-measuring device, it is characterized in that described thing light transmission light path (5) is to connect a described splitting optical fiber (15) by a fiber adjusting mount (16) import, and the sample on the objective table (17) is aimed in outlet, and aligned beneath settles microcobjective (21) and spectroscope (24) to constitute.
5. according to claim 1 described digital holographic micro-measuring device, the structure that it is characterized in that described reference light transmission light path (6) is: described another root splitting optical fiber (14) connects the input port of a fiber adjusting mount (26), fiber adjusting mount (26) delivery outlet is aimed at the spectroscope (29) of digital hologram record system (7) through an attenuator (27) and lens (28), fiber adjusting mount (26) connects a piezoelectric ceramics (25), piezoelectric ceramics (25) connects a piezoelectric ceramics controller (32), and piezoelectric ceramics controller (32) connects the computing machine (33) of digital hologram record system (7).
6. according to claim 1 described digital holographic micro-measuring device, the structure that it is characterized in that described digital hologram chart recording system (7) is: a spectroscope (29) input reference light and thing light, a ccd video camera (30) is aimed in output, and the output of ccd video camera (30) is connected to computing machine (33) through image pick-up card (31).
7. according to claim 1 described digital holographic micro-measuring device, the structure that it is characterized in that described object micro-image digital recording system (3) is: one of a ccd video camera (18) alignment lens is in the Amici prism gummed group (20) on the light path between the imaging mirror group (22) of object micro-image visual system (4) and the eyepiece (19), and the output of ccd video camera (18) is connected to computing machine (33) through image pick-up card (31).
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| WO2009148407A1 (en) * | 2008-06-06 | 2009-12-10 | Aem Singapore Pte Ltd | A digital holographic microscopy system and a method of digital holographic microscopy |
| CN101634548B (en) * | 2009-09-01 | 2011-06-01 | 北京航空航天大学 | Digital hologram three-dimensional microscopy observation device with optical fiber-space light synthetic aperture |
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| CN101634548B (en) * | 2009-09-01 | 2011-06-01 | 北京航空航天大学 | Digital hologram three-dimensional microscopy observation device with optical fiber-space light synthetic aperture |
| CN102122063A (en) * | 2011-03-09 | 2011-07-13 | 北京工业大学 | Inverted digital holographic microscope |
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