CN100437392C - Method and apparatus for stabilizing holographic interference fringes by control apparatus - Google Patents
Method and apparatus for stabilizing holographic interference fringes by control apparatus Download PDFInfo
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- CN100437392C CN100437392C CNB2006100399676A CN200610039967A CN100437392C CN 100437392 C CN100437392 C CN 100437392C CN B2006100399676 A CNB2006100399676 A CN B2006100399676A CN 200610039967 A CN200610039967 A CN 200610039967A CN 100437392 C CN100437392 C CN 100437392C
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Abstract
The present invention relates to a method and a device for stabilizing holographic interference fringes by a control device. External disturbance often causes the random drift of interference fringes, and therefore, the quality of a shot holographic grating is decreased. A linear array CCD acquires the image information of the interference fringes and transmits the image information to the control device, and the control device calculates the drift amount of the fringes and controls piezoelectric ceramics connected with a refletor to move and compensate phases. The drift of the interference fringes can be greatly reduced, the purpose of stabilizing the interference fringes in an exposure zone is achieved, and exposure time is allowed being greatly prolonged.
Description
Technical field
The present invention relates generally to a kind of antihunt means and device of holographic interference fringes, relates in particular to a kind of method and device with the control device stabilizing holographic interference fringes.
Background technology
When taking large-sized holographic grating and since take light intensity a little less than, need exposure for a long time.But extraneous vibration, flowing of air, factors such as the fluctuation of temperature all can make the relative phase of thing light and reference light change, random drift can take place in the interference fringe that they form, thereby the contrast of recorded fringe is descended, drift value that it is generally acknowledged striped should be less than 1/8 wavelength, otherwise the holographic interference fringes quality that causes easily writing down reduces, even can't note interference fringe.Present holographic platform can't guarantee that all random drift at long-time internal interference striped less than 1/8 wavelength, therefore for long exposure status, also needs to take some indemnifying measures to weaken the drift of interference fringe.
The method that adopts the control system stabilizing holographic interference fringes that contains two light intensity detectors is arranged in the prior art.This method is subject to the Moire fringe thickness, the detector riding position, and photoelectric device itself non-linear, the influences such as drift of amplifying circuit temperature, control accuracy is relatively poor relatively, and the time exposure reliability is not high, uses inconvenient yet.
Summary of the invention
The object of the invention provides a kind of method and device with the control device stabilizing holographic interference fringes.Utilize line array CCD to gather interference fringe, by control device the drift information of interference fringe is handled, and sent control signal, the control piezoelectric ceramics drives the motion that the thing light reflection mirror makes to change thing light light path, reaches the purpose of stablizing interference fringe.
The present invention can be implemented by the following technical programs:
Design a kind of method with the control device stabilizing holographic interference fringes, it may further comprise the steps:
A, laser is divided into thing light and reference light by beam splitter, thing light becomes the thing angle pencil of ray behind thing light reflection mirror, thing light beam-expanding system, be radiated on the master record dry plate; Reference light becomes with reference to angle pencil of ray behind reference light catoptron, reference light beam-expanding system, also is radiated on the master record dry plate; Thing angle pencil of ray and interfere mutually on the master record dry plate with reference to angle pencil of ray and to form interference fringe for the first time;
B, the reference dry plate that will expose take out, and through developing, photographic fixing is handled the back and formed with reference to grating, will be placed into the position of putting originally with reference to the dry plate place with reference to grating again;
C, repeating step a, this moment the thing angle pencil of ray with the reference grating that shines gained behind the step b with reference to angle pencil of ray once more on, receive the interference fringe second time that the zero level transmitted light of thing angle pencil of ray and first-order diffraction light with reference to angle pencil of ray form at the Background Region of reference grating;
D, utilize line array CCD that the image information of the interference fringe for the third time that forms in step c is gathered, adjusting is with reference to the position of grating, make described line array CCD can collect the image information of described interference fringe for the third time, and described image information is sent in the control device, compare by the drift value of the described interference fringe for the third time of control device calculating and with setting value, when the drift value of described interference fringe for the third time during greater than setting value, control device sends control signal, control is moved with the piezoelectric ceramics that the thing light reflection mirror links together, make the thing light reflection mirror do to change the motion of thing light light path, carry out phase compensation, until the drift value of described interference fringe for the third time smaller or equal to setting value, thereby make the drift value of the described interference fringe for the third time that on the master record dry plate, forms satisfy the requirement of holographic grating record.
By control device the drift information of the described interference fringe for the third time that collected by line array CCD is handled in the described steps d, disposal route is to utilize secondary or high order curve to go the information of match interference fringe trough part, obtains the drift value of striped; Described setting value is 0～1/10 cycle of described interference fringe for the third time.
The control signal that described control device sends to piezoelectric ceramics is a voltage control signal, and the motion of described piezoelectric ceramics becomes positive relationship with an alive size.
The present invention can also be able to further enforcement by the following technical programs:
Manufacture and design a kind of device, comprise with the control device stabilizing holographic interference fringes
Beam splitter, described beam splitter are used for laser beam splitter is become thing light and reference light;
The thing light reflection mirror, described thing light reflection mirror is positioned on the direction of illumination of thing light, and described thing light reflection mirror is used for reverberation light;
Thing light beam-expanding system, described thing light beam-expanding system are positioned on the light path of the thing light after the reflection, and described thing light beam-expanding system is used for the thing angle pencil of ray is restrainted in the expansion of the thing light after the reflection;
The reference light catoptron, described reference light catoptron is positioned on the direction of illumination of reference light, and described reference light catoptron is used to reflect reference light;
Reference light beam-expanding system, described reference light beam-expanding system are positioned on the light path of the reference light after the reflection, and described reference light beam-expanding system is used for the expansion of the reference light after the reflection is restrainted with reference to angle pencil of ray;
Master record dry plate, described master record dry plate are positioned at the thing angle pencil of ray and with reference to the interference region of angle pencil of ray;
With reference to grating, describedly also be positioned at the thing angle pencil of ray and with reference to the interference region of angle pencil of ray with reference to grating, and be positioned at same exposure region with described master record dry plate, form the zero level transmitted light of thing angle pencil of ray and first-order diffraction light with reference to angle pencil of ray at described Background Region with reference to grating, described zero level transmitted light and first-order diffraction light are in the interference fringe for the third time of this formation;
Line array CCD, described line array CCD is positioned at the Background Region with reference to grating, and described line array CCD is used to gather the image information of described interference fringe;
Piezoelectric ceramics, described piezoelectric ceramics are connected on the thing light reflection mirror, and described piezoelectric ceramics drives the thing light reflection mirror and moves the light path that is used for instrumentality light;
Control device, described control device one end links to each other with line array CCD, and the other end is connected with piezoelectric ceramics.Described control device is used to calculate the drift value of described interference fringe for the third time and compares with setting value, when the drift value of described interference fringe for the third time during greater than setting value, described control device control is moved with the piezoelectric ceramics that the thing light reflection mirror links together, make the thing light reflection mirror do the motion of the light path of change thing light, smaller or equal to setting value, described setting value is 0～1/10 cycle of interference fringe for the third time until the drift value of described interference fringe for the third time.
The present invention compared with prior art has following advantage: utilize line array CCD to gather interference fringe for the third time, by control device the drift information of interference fringe is for the third time handled, described control device calculates the drift value of interference fringe for the third time and compares with setting value, when the drift value of interference fringe for the third time during greater than setting value, described control device control is moved with the piezoelectric ceramics that the thing light reflection mirror links together, move the position that makes the thing light reflection mirror make the light path of change thing light, smaller or equal to setting value, reach the stable purpose of interference fringe for the third time of phase compensation until the drift value of interference fringe for the third time.Compared with prior art, the drift of interference fringe reduces greatly to adopt the method and device can make for the third time, and the time shutter will allow to prolong greatly.
Description of drawings
Accompanying drawing 1 is the light path synoptic diagram when being used to make with reference to grating of the present invention
Accompanying drawing 2 is the light path synoptic diagram that is used for the recording holographic grating of the present invention
Accompanying drawing 3 is the control flow chart of interference fringe systems stabilisation of the present invention
Accompanying drawing 4 is not for adopting the interference fringe surface of intensity distribution of the present invention, and wherein X represent pixel, Y represent light intensity;
Accompanying drawing 5 is not for adopting interference fringe drift value of the present invention with exposure time change figure, and wherein P represents the time shutter;
S represents chronomere-second, and Q represents the stripe drifting amount;
Accompanying drawing 6 does not adopt the holographic grating Electronic Speculum picture that writes down when of the present invention;
The holographic grating Electronic Speculum picture that writes down when accompanying drawing 7 employings are of the present invention.
Wherein: 1, thing light; 2, reference light; 3, thing light reflection mirror; 4, piezoelectric ceramics; 5, thing light beam-expanding system; 6, thing angle pencil of ray; 7, master record dry plate; 8, reference light catoptron; 9, reference light beam-expanding system; 10, with reference to angle pencil of ray; 11, with reference to dry plate; 12, with reference to grating; 13, interference fringe for the third time; 14, line array CCD; 15, control device; 16, beam splitter; 17, first-order diffraction light; 18, zero level transmitted light.
Embodiment
As Fig. 1, Fig. 2, a kind of method shown in Figure 3 with the control device stabilizing holographic interference fringes, it may further comprise the steps:
A, laser is divided into thing light 1 and reference light 2 by beam splitter 16, thing light 1 becomes thing angle pencil of ray 6 behind thing light reflection mirror 3, thing light beam-expanding system 5, be radiated on the master record dry plate 7; Reference light 2 becomes with reference to angle pencil of ray 10 behind reference light catoptron 8, reference light beam-expanding system 9, also is radiated on the master record dry plate 7; Thing angle pencil of ray 6 and interfere mutually with reference to angle pencil of ray 10 and on master record dry plate 7, to form interference fringe for the first time;
With described master record dry plate 7 same planes on also be provided with reference to dry plate 11, described thing angle pencil of ray 6 with also be radiated at reference on the dry plate 11 thing angle pencil of ray 6 and interfere mutually with reference to angle pencil of ray 10 and also on reference dry plate 11, to form interference fringes for the second time with reference to angle pencil of ray 10;
B, the reference dry plate 11 that will expose take out, and through developing, photographic fixing is handled the back and formed with reference to grating 12, will be placed into the position of putting originally with reference to dry plate 11 places with reference to grating 12 again;
C, repeating step a, this moment thing angle pencil of ray 6 with the reference grating 12 that shines gained behind the step b with reference to angle pencil of ray 10 once more on, receive the interference fringe for the third time 13 that the zero level transmitted light 18 of thing angle pencil of ray 6 and first-order diffraction light 17 with reference to angle pencil of ray 10 form at the Background Region of reference grating 12;
Utilize the image information of the interference fringe for the third time 13 that 14 pairs of line array CCDs form in step c to gather, adjusting is with reference to the position of grating 12, make described line array CCD 14 can collect the image information of interference fringe 13 for the third time, and described image information is sent in the control device 15, calculate the drift value of interference fringe 13 for the third time and compare by control device 15 with setting value, when the drift value of interference fringe 13 for the third time during greater than setting value, control device 15 sends control signal, control is moved with the piezoelectric ceramics 4 that thing light reflection mirror 3 links together, make thing light reflection mirror 3 do to change the motion of thing light 1 light path, carry out phase compensation, until the drift value of interference fringe 13 for the third time smaller or equal to setting value, thereby make the drift value of the interference fringe that on master record dry plate 7, forms satisfy the requirement of holographic grating record.
Shine with reference on the grating 12 time with thing light 1 and reference light 2 among the described step c, the zero level transmitted light 18 that can receive thing light 1 at the Background Region of reference grating 12 will form interference fringe 13 for the third time with the first-order diffraction light 17 of reference light 2, and the spacing A of interference fringe 13 is for the third time:
λ is a recording wavelength in the formula, θ
OBe the incident angle of thing angle pencil of ray 6, θ '
RFirst-order diffraction light emergence angle for reference angle pencil of ray 10.When accurately resetting with reference to grating 12, θ
O=θ '
R, the spacing infinity of interference fringe 13 for the third time, line array CCD 14 can not collect the image information of interference fringe 13 for the third time.Therefore to adjust position, make line array CCD 14 can collect the image information of interference fringe 13 for the third time with reference to grating 12.Be to move with reference to grating 12 a little generally speaking, the emergence angle of first-order diffraction light 17 at this moment will change, and can form thicker interference fringe, and for example the cycle of interference fringe can be adjusted to 10mm.The size of the general single pixel of line array CCD is about 10um, and the light distribution that at this moment utilizes line array CCD to gather this interference fringe is to be relatively easy to.
The drift information of the interference fringe for the third time 13 that is collected by 15 pairs of control device in the described steps d is handled, the image of the interference fringe for the third time 13 that is collected by CCD14 as can be known, interference fringe 13 is not to be a perfect smooth cosine curve for the third time, many little secondary peaks are arranged on the curve, as shown in Figure 4, recommendation selects for use least square method that the light intensity curve that collects from CCD is carried out secondary or high order match, and the trough part of the described light intensity curve of match only, by the quadratic curve equation after the match, can solve the coordinate of trough, when interference fringe 13 generation drifts for the third time, the coordinate of its trough can drift about thereupon, the variable quantity of trough coordinate has been represented the drift value of interference fringe 13 for the third time fully.
The control signal that described control device 15 sends to piezoelectric ceramics 4 is a voltage control signal, and the motion of described piezoelectric ceramics 4 becomes positive relationship with an alive size, but is not linear relationship.Only multiply by certain coefficient according to the drift value of interference fringe 13 for the third time and carry out phase compensation, effect is unfavorable.In order more accurately to control the drift of interference fringe, system adopts PID proportional-integral-differential method to control.Proportional control is used for reducing steady-state error, improves the dynamic responding speed of system; Integration control is used for the steady-state error of the system of eliminating; Differential control can prediction deviation, produces leading corrective action, improves dynamic property.Controller output voltage signal U (t
i) be:
K in the formula
1Be scale-up factor, K
2Be differential coefficient, X
iBe t
iMoment stripe drifting amount.
K
1Find the solution and can need change magnitude of voltage and determine by moving a striped in the experiment.K
2Find the solution and determine difficulty relatively because extraneous random motion is to the more complicated that influences of interference fringe 13 for the third time, to find the solution scale-up factor be very difficult by setting up mathematical model that disturbance changes, can utilize computing machine to write the Automatic Optimal program and determine.For example, give K in advance
2An initial value is by the exposure of a period of time, to the whole stripe drifting amount Xs that collect of this section in the time
iAsk meansquaredeviation
x:
Change K at set intervals one time
2Numerical value, and calculate their mean square deviations respectively, mean square deviation is more little, and K is described
2The unreasonable of selection thought, finally can obtain more satisfactory coefficient.
As shown in Figure 2, a kind of device with the control device stabilizing holographic interference fringes comprises
Thing light reflection mirror 3, described thing light reflection mirror 3 is positioned on the direction of illumination of thing light 1, and described thing light reflection mirror 3 is used for reverberation light 1;
Thing light beam-expanding system 5, described thing light beam-expanding system 5 are positioned on the light path of the thing light 1 after the reflection, and described thing light beam-expanding system 5 is used for thing angle pencil of ray 6 is restrainted in 1 expansion of the thing light after the reflection;
Reference light beam-expanding system 9, described reference light beam-expanding system 9 are positioned on the light path of the reference light 2 after the reflection, and described reference light beam-expanding system 9 is used for 2 expansions of the reference light after the reflection are restrainted with reference to angle pencil of ray 10;
Master record dry plate 7, described master record dry plate 7 are positioned at thing angle pencil of ray 6 and with reference to the interference region of angle pencil of ray 10;
With reference to grating 12, describedly also be positioned at thing angle pencil of ray 6 and with reference to the interference region of angle pencil of ray 10 with reference to grating 12, and be positioned at same exposure region with described master record dry plate 7, form the zero level transmitted light 18 of thing angle pencil of ray 6 and first-order diffraction light 17, described zero level transmitted light 18 and for the third time interference fringe 13 of first-order diffraction light 17 at described Background Region with reference to grating 12 in this formation with reference to angle pencil of ray 10;
Piezoelectric ceramics 4, described piezoelectric ceramics 4 is connected on the thing light reflection mirror 3, and described piezoelectric ceramics 4 drives thing light reflection mirror 3 and moves the light path that is used for instrumentality light 1;
In order to verify the result of use of holographic interference fringes systems stabilisation, to do two groups of experiments respectively and compare, the empty of grating is 1480lp/mm frequently, the time shutter is 2000 seconds.First group of experiment adopt as shown in Figure 1 do not use interference fringe systems stabilisation of the present invention, the holographic grating Electronic Speculum picture of record is seen Fig. 6, photoresist mask height is very low, poor quality.Second group of experiment adopts light path shown in Figure 2 to take holographic grating interference fringe systems stabilisation of the present invention, and the holographic grating Electronic Speculum picture of record is seen Fig. 7, and photoresist mask height is very high, and effect is fine.Data analysis to the interference fringe drift value shows that this system makes interference fringe drift mean square deviation be better than λ/60, and as shown in Figure 5, the naturalization cycle of interference fringe is 100 among the figure.
Claims (5)
1, a kind of method with the control device stabilizing holographic interference fringes, it may further comprise the steps:
A, laser is divided into thing light (1) and reference light (2) by beam splitter (16), thing light (1) becomes thing angle pencil of ray (6) behind thing light reflection mirror (3), thing light beam-expanding system (5), be radiated on the master record dry plate (7); Reference light (2) becomes with reference to angle pencil of ray (10) behind reference light catoptron (8), reference light beam-expanding system (9), also is radiated on the master record dry plate (7); Thing angle pencil of ray (6) and mutually interfere to go up with reference to angle pencil of ray (10) and form interference fringe for the first time at master record dry plate (7);
It is characterized in that:
With the same plane of described master record dry plate (7) on also be provided with reference to dry plate (11), described thing angle pencil of ray (6) with also be radiated at reference on the dry plate (11) thing angle pencil of ray (6) and mutually interfere also to go up with reference to angle pencil of ray (10) and form interference fringe for the second time at reference dry plate (11) with reference to angle pencil of ray (10);
B, the reference dry plate (11) that will expose take out, and through developing, photographic fixing is handled the back and formed with reference to grating (12), will be placed into the position of putting originally with reference to dry plate (11) place with reference to grating (12) again;
C, repeating step a, thing angle pencil of ray this moment (6) with shine once more with reference to angle pencil of ray (10) on the reference grating (12) of gained behind the step b, receive the interference fringe for the third time (13) that the zero level transmitted light (18) of thing angle pencil of ray (6) and first-order diffraction light (17) with reference to angle pencil of ray (10) form at the Background Region of reference grating (12);
D, utilize line array CCD (14) that the image information of the interference fringe for the third time (13) that forms in step c is gathered, adjusting is with reference to the position of grating (12), make described line array CCD (14) can collect the image information of described interference fringe for the third time (13), and described image information is sent in the control device (15), calculate the drift value of interference fringe (13) for the third time and compare by control device (15) with setting value, when the drift value of described interference fringe for the third time (13) during greater than setting value, control device (15) sends control signal, control is moved with the piezoelectric ceramics (4) that thing light reflection mirror (3) links together, make thing light reflection mirror (3) do to change the motion of thing light (1) light path, carry out phase compensation, until the drift value of described interference fringe for the third time (13) smaller or equal to setting value, thereby make the drift value of going up the interference fringe that forms at master record dry plate (7) satisfy the requirement of holographic grating record.
2, the method with the control device stabilizing holographic interference fringes according to claim 1, it is characterized in that: by control device (15) the drift information of the interference fringe for the third time (13) that collected by line array CCD (14) is handled in the described steps d, disposal route is to utilize secondary or high order curve to go the described interference fringe for the third time of match (13) trough information partly, obtains the drift value of striped; Described setting value is 0～1/10 cycle of described interference fringe for the third time (13).
3, the method with the control device stabilizing holographic interference fringes according to claim 1, it is characterized in that: the control signal that described control device (15) sends to piezoelectric ceramics (4) is a voltage control signal, and the motion of described piezoelectric ceramics (4) becomes positive relationship with an alive size.
4, a kind of device with the control device stabilizing holographic interference fringes is characterized in that: comprise
Beam splitter (16), described beam splitter (16) are used for laser beam splitter is become thing light (1) and reference light (2);
Thing light reflection mirror (3), described thing light reflection mirror (3) is positioned on the direction of illumination of thing light (1), and described thing light reflection mirror (3) is used for reverberation light (1);
Thing light beam-expanding system (5), described thing light beam-expanding system (5) are positioned on the light path of the thing light (1) after the reflection, and described thing light beam-expanding system (5) is used for thing angle pencil of ray (6) is restrainted in the expansion of the thing light (1) after the reflection;
Reference light catoptron (8), described reference light catoptron (8) is positioned on the direction of illumination of reference light (2), and described reference light catoptron (8) is used to reflect reference light (2);
Reference light beam-expanding system (9), described reference light beam-expanding system (9) are positioned on the light path of the reference light (2) after the reflection, and described reference light beam-expanding system (9) is used for the expansion of the reference light (2) after the reflection is restrainted with reference to angle pencil of ray (10);
Master record dry plate (7), described master record dry plate (7) are positioned at thing angle pencil of ray (6) and with reference to the interference region of angle pencil of ray (10);
With reference to grating (12), describedly also be positioned at thing angle pencil of ray (6) and with reference to the interference region of angle pencil of ray (10) with reference to grating (12), and be positioned at same exposure region with described master record dry plate (7), form the zero level transmitted light (18) of thing angle pencil of ray (6) and first-order diffraction light (17) with reference to angle pencil of ray (10) at described Background Region with reference to grating (12), described zero level transmitted light (18) forms interference fringe (13) for the third time with first-order diffraction light (17) at described Background Region with reference to grating;
Line array CCD (14), described line array CCD (14) is positioned at the Background Region with reference to grating (12), and described line array CCD (14) is used to gather the image information of described interference fringe for the third time (13);
Piezoelectric ceramics (4), described piezoelectric ceramics (4) are connected on the thing light reflection mirror (3), and described piezoelectric ceramics (4) drives thing light reflection mirror (3) and moves the light path that is used for instrumentality light (1);
Control device (15), described control device (15) one ends link to each other with line array CCD (14), and the other end is connected with piezoelectric ceramics (4).Described control device (15) is used to calculate the drift value of described interference fringe for the third time (13) and compares with setting value, when the drift value of described interference fringe for the third time (13) during greater than setting value, described control device (15) control is moved with the piezoelectric ceramics (4) that thing light reflection mirror (3) links together, make thing light reflection mirror (3) do change the motion of the light path of thing light (1), until the drift value of interference fringe (13) for the third time smaller or equal to setting value.
5, the device with the control device stabilizing holographic interference fringes according to claim 4, it is characterized in that: described setting value is 0～1/10 cycle of described interference fringe for the third time (13).
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| CN1971253B (en) * | 2006-10-19 | 2010-08-11 | 上海大学 | Digital holographic micro-measuring device |
| CN100523916C (en) * | 2006-10-20 | 2009-08-05 | 中山大学 | Control method for light field in holographic printing technology and its system |
| JP4970190B2 (en) * | 2007-08-16 | 2012-07-04 | 富士フイルム株式会社 | Interference fringe forming method, interference fringe forming apparatus, and interference fringe forming medium manufacturing method |
| CN102636968A (en) * | 2012-05-08 | 2012-08-15 | 上海理工大学 | Holographic exposure device of any groove grating structure and exposure method thereof |
| CN103698835B (en) * | 2013-12-17 | 2015-10-28 | 中国科学院长春光学精密机械与物理研究所 | Adopt the holographic grating exposure method that heterodyne system locking of interference fringe controls |
| CN103698983B (en) * | 2013-12-17 | 2015-06-10 | 中国科学院长春光学精密机械与物理研究所 | Holographic grating exposed interference fringe phase shifting and locking device |
| CN103792606B (en) | 2014-01-26 | 2016-02-10 | 清华大学深圳研究生院 | A kind of exposure method of holographic grating and exposure light path |
| CN103957050B (en) * | 2014-04-23 | 2017-01-18 | 武汉虹拓新技术有限责任公司 | Dual-Sagnac loop chromatic dispersion measuring device and method |
| CN103955128B (en) * | 2014-04-29 | 2017-04-12 | 苏州大学 | Holographic grating three-dimensional active stability control recording method |
| CN107884872A (en) * | 2017-12-28 | 2018-04-06 | 武汉光谷航天三江激光产业技术研究院有限公司 | The device and method of apodization fiber grating is made based on piezoelectric ceramics actuator |
| CN108761603B (en) * | 2018-05-22 | 2020-06-16 | 苏州大学 | Photoetching system for manufacturing parallel equidistant stripe holographic grating |
| CN108761602B (en) * | 2018-05-22 | 2020-06-16 | 苏州大学 | Adjusting method for auto-collimation of interference light path in holographic grating photoetching system |
| CN109100026B (en) * | 2018-07-19 | 2020-10-20 | 西安电子科技大学 | Device and method for inhibiting phase-dropping effect in heterodyne detection based on CCD camera |
| CN109521655B (en) * | 2018-12-24 | 2020-10-09 | 苏州大学 | Fringe locking type holographic interference lithography system and fringe locking method |
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| CN1737612A (en) * | 2005-09-08 | 2006-02-22 | 上海交通大学 | Method for making grating strain floriation |
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| SU1401432A1 (en) * | 1985-12-09 | 1988-06-07 | Гродненский Государственный Университет | Apparatus for processing the holograms of phased objects |
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| CN1737612A (en) * | 2005-09-08 | 2006-02-22 | 上海交通大学 | Method for making grating strain floriation |
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