CN102620649A - Digital microscopic holographic measuring device with dual functions and method thereof - Google Patents
Digital microscopic holographic measuring device with dual functions and method thereof Download PDFInfo
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- CN102620649A CN102620649A CN2012100912200A CN201210091220A CN102620649A CN 102620649 A CN102620649 A CN 102620649A CN 2012100912200 A CN2012100912200 A CN 2012100912200A CN 201210091220 A CN201210091220 A CN 201210091220A CN 102620649 A CN102620649 A CN 102620649A
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Abstract
The invention relates to a digital microscopic holographic measuring device with dual functions and a method thereof. The device is composed of a laser, a light beam collimating beam expanding device, a tridimensional objective table, a CCD (charge coupled device) camera, a microobjective, a neutral density wedge light filter, two 180-degree reflecting devices, two spectroscopes and six reflecting mirrors.
Description
Technical field
The present invention relates to a kind of digital micro-analysis holographic measurement apparatus and method that integrate transmission-type and reflective dual-use function.This measurement mechanism can realize that its each functional module simply freely switches, thereby realizes the detection to all kinds of small sample, belongs to the small items detection range.
Background technology
The digital micro-analysis holographic technique is the fusion of Digital Holography and light microscope technique, and the interference of light of utilization and diffraction characteristic write down and reproduce the strength information and the phase information of original object wave.Its advantage is: equipment is simple, and cost is cheap relatively, and can accomplish complete non-invasion three-D profile observation to sample; Simple operation is measured fast, can under single exposure, write down the complete information of sample, can accomplish the dynamic change of real-time monitor sample etc.The digital micro-analysis holographic technique mainly contains two kinds of forms: transmission-type and reflective is applied to dissimilar detection samples respectively.The digital micro-analysis holographic product of using that both are combined together is seldom arranged in the existing instrument product more; The sample (transparent sample and reflection-type sample) of measuring different character also just is described; Must use the instrument product of two different modes, this has increased cost undoubtedly and has brought the use inconvenience.In a lot of places, people's expectation can be accomplished projection-type and emanant combining together, and can realize freely switching.Therefore, to the further investigation that the digital micro-analysis holographic technique is correlated with, develop and a kind ofly integrate transmission-type and reflective many seeming with the digital micro-analysis holographic apparatus is extremely important.In view of the development and the market demand of China,, will have very active operation significance and economic worth if can improve the theoretical system of digital micro-analysis holography and the measurement of correlation instrument that development has independent intellectual property right.
The present invention relates to a kind of collection transmission-type, reflective dual-use function is in the digital micro-analysis holographic measurement device of one.This measurement mechanism can realize that its each functional module simply freely switches, thereby realizes the detection to all kinds of small sample.
Collect transmission-type at present, reflective dual-use function is not seen the pertinent literature report in one and measurement of correlation device that can freely switch.
Summary of the invention
The object of the invention is the defective to the prior art existence; A kind of dual-use function digital micro-analysis holographic measurement apparatus and method are provided; Realization utilizes same table apparatus just can realize the detection to the exterior contour of all kinds of small sample, thereby research cost is practiced thrift in the research that is convenient for people to.
For achieving the above object, design of the present invention is: design and a kind ofly integrate transmission-type and the micro-holographic measurement device of reflective multifunctional digital is realized the detection to all kinds of small sample exterior contours.
Utilize the peripheral profile of the transparent sample of transmission-type detection, utilize the exterior contour of reflective detection of reflected type sample.Through the changing over to and producing of catoptron, realize freely changing of reflective and transmission-type.
According to inventive concept, the present invention adopts following technical scheme:
A kind of have a dual-use function digital micro-analysis holographic measurement device, by 1 laser instrument, and 1 beam collimation parallel beam expand device; 1 three-dimensional objective table, 1 ccd video camera, 1 microcobjective; 1 neutral density gradual filter, 2 180 degree reflection units, 2 spectroscopes; Form with 6 catoptrons, it is characterized in that laser instrument directly over be the beam collimation parallel beam expand device, be first catoptron directly over the beam collimation parallel beam expand device; The just right-hand of first catoptron is first spectroscope, first spectroscopical just right-hand be the first half of the 2 180 ° of reflection unit, under be second catoptron and the 3rd catoptron successively; The positive left of the Lower Half of the 2 180 ° of reflection unit is one the 6th catoptron, is neutral density gradual filter and the 5th catoptron under the 6th catoptron.The positive left of the 5th catoptron is second spectroscope; Second is CCD directly over spectroscopical; Under be successively microcobjective, objective table and the 4th catoptron, just right-hand be the 1 the degree reflection unit Lower Half, the 1 the degree reflection unit the just right-hand of the first half be second catoptron; 1. second catoptron changes light path over to, and device is adjusted to reflective-mode, is used to measure the reflection-type sample; 2. second catoptron produces light path, and device is adjusted to transmission mode, is used to detect transparent sample; Transmission-type and reflectively can produce light path through changing over to of second catoptron is freely switched.
A kind of have a dual-use function digital micro-analysis holographic measurement method; Adopting said apparatus to carry out transmission mode measures; It is characterized by earlier and generate beam of laser, behind beam expander collimator apparatus beam-expanding collimation, again by first mirror reflects by laser instrument; Through first spectroscope, be divided into a branch of reference light and a branch of downward thing light to the right.Downward thing light, shines on the sample on the objective table again through the 4th mirror reflects earlier through the 3rd mirror reflects, and the thing light that sees through sample amplifies through microcobjective again, sees through second spectroscope, shines on the CCD; Reference light to the right through the 2 180 degree reflection unit and the 6th mirror reflects, sees through the neutral density gradual filter earlier, through the 5th catoptron and the reflection of second spectroscope, shines CCD again, with the thing interference of light, thereby by the CCD hologram recorded.
A kind of have a dual-use function digital micro-analysis holographic measurement method; Adopting said apparatus to carry out reflective-mode measures; It is characterized by earlier and generate beam of laser, behind beam expander collimator apparatus beam-expanding collimation, again by first mirror reflects by laser instrument; Through first spectroscope, be divided into a branch of reference light and a branch of thing light; Downward thing light is earlier through second catoptron and the one 180 degree reflection unit reflection, and is downward through microcobjective through the reflection of second spectroscope again, the irradiation sample, and the thing light that sample reflects amplifies through microcobjective, through second spectroscope, shines CCD; Reference light to the right through the 2 180 degree reflection unit and the 6th mirror reflects, sees through the neutral density gradual filter earlier, through the 5th catoptron and the reflection of second spectroscope, shines CCD again, with the thing interference of light, thereby by the CCD hologram recorded.
The present invention compared with prior art has following conspicuous outstanding substantive distinguishing features and marked improvement: 1, collection transmission-type, and reflective in one, and can freely switch, can realize that exterior contour detects to all kinds of samples; 2, equipment is simple, and is easy to operate; 3, applicability is strong; 4, has good using value.
Description of drawings
Fig. 1 is the light path synoptic diagram of measurement mechanism of the present invention.
Embodiment
The preferred embodiments of the present invention combine detailed description of the drawings following:
Embodiment one:
Referring to Fig. 1, originally have dual-use function digital micro-analysis holographic measurement device, by 1 laser instrument (1), 1 beam collimation parallel beam expand device (2); 1 three-dimensional objective table (9), 1 ccd video camera (12), 1 microcobjective (10), 1 neutral density gradual filter (14); 2 180 degree reflection units (6,16), 2 spectroscopes (4,11); With 6 catoptrons (3,5,7,8; 13,15) form, it is characterized in that laser instrument (1) directly over be beam collimation parallel beam expand device (2), be first catoptron (3) directly over the beam collimation parallel beam expand device; The just right-hand of first catoptron (3) is first spectroscope (4), and the just right-hand of first spectroscope (4) is the first half of the 2 180 ° of reflection unit (16), under be second catoptron (5) and the 3rd catoptron (7) successively; The positive left of Lower Half of the 2 180 ° of reflection unit (16) is one the 6th catoptron (15), is neutral density gradual filter (14) and the 5th catoptron (13) under the 6th catoptron (15).The positive left of the 5th catoptron (13) is second spectroscope (11); Directly over second spectroscope (11) CCD (12); Under be successively microcobjective (10), objective table (9) and the 4th catoptron (8), just right-hand be the 1 the degree reflection unit (6) Lower Half, the 1 the degree reflection unit (6) the just right-hand of the first half be second catoptron (5); 1. second catoptron (5) changes light path over to, and device is adjusted to reflective-mode, is used to measure the reflection-type sample; 2. second catoptron (5) produces light path, and device is adjusted to transmission mode, is used to detect transparent sample; Transmission-type and reflectively can produce light path through changing over to of second catoptron (5) is freely switched.
Embodiment two:
Originally has dual-use function digital micro-analysis holographic measurement method; Adopt and according to claim 1ly have dual-use function digital micro-analysis holographic measurement device and carry out transmission mode and measure; It is characterized by earlier and generate beam of laser, behind beam expander collimator apparatus (2) beam-expanding collimation, reflect by first catoptron (3) again by laser instrument (1); Through first spectroscope (4), be divided into a branch of reference light (17) and a branch of downward thing light (18) to the right.Downward thing light (18) reflects through the 3rd catoptron (7) earlier; Reflect through the 4th catoptron (8) again; Shine on the sample on the objective table (9); The thing light (18) that sees through sample passes through microcobjective (10) again and amplifies, and sees through second spectroscope (11), shines on the CCD (12); Reference light to the right (17) is earlier through the 2 180 degree reflection unit (16) and the 6th catoptron (15) reflection; See through neutral density gradual filter (14); Again through the 5th catoptron (13) and second spectroscope (11) reflection; Shine CCD (12), interfere with thing light (18), thereby by CCD (12) hologram recorded.
Embodiment three
Originally has dual-use function digital micro-analysis holographic measurement method; Adopt and according to claim 1ly have dual-use function digital micro-analysis holographic measurement device and carry out reflective-mode and measure; It is characterized by earlier and generate beam of laser, behind beam expander collimator apparatus (2) beam-expanding collimation, reflect by first catoptron (3) again by laser instrument (1); Through first spectroscope (4), be divided into a branch of reference light (17) and a branch of thing light (18); Downward thing light (18) is earlier through second catoptron (5) and the one 180 degree reflection unit (6) reflection; Pass through microcobjective (10) downwards through second spectroscope (11) reflection again; The irradiation sample; The thing light (18) that sample reflects amplifies through microcobjective (10), sees through second spectroscope (11), shines CCD (12); Reference light to the right (17) is earlier through the 2 180 degree reflection unit (16) and the 6th catoptron (15) reflection; See through neutral density gradual filter (14); Again through the 5th catoptron (13) and second spectroscope (11) reflection; Shine CCD (12), interfere with thing light (18), thereby by CCD (12) hologram recorded.
Embodiment four:
Referring to Fig. 1, generate beam of laser by laser instrument 1 earlier, through beam collimation parallel beam expand device 2,,, be divided into to the right a branch of reference light 17 and downward a branch of thing light 18 through divided beams 4 again by catoptron 3 reflections.When 1. detecting transparent sample, need produce light path to catoptron 5, the furnishing transmission mode.Downward thing light 18 by catoptron 8 reflections, shines on the sample on the objective table 9 earlier through catoptron 7 reflections again, and the thing light 18 that sees through sample amplifies through microcobjective 10, sees through spectroscope 11, shines on the CCD12.Reference light 17 to the right through 180 degree reflection units 16 and catoptron 15 reflections, sees through neutral density gradual filter 14 earlier, through catoptron 13 and spectroscope 11 reflections, shines CCD12 again, interfere with thing light 18, thereby by the CCD12 hologram recorded.2. during detection of reflected type sample; Change catoptron 5 over to, the furnishing reflective-mode: downward thing light 18 through catoptron 5 and 6 reflections of 180 degree reflection units, is reflected downwards through microcobjective 10 by spectroscope 11 earlier again; The irradiation sample; The thing light 18 that sample reflects amplifies through microcobjective 10, sees through spectroscope 11, shines CCD12.Reference light 17 to the right through 180 degree reflection units 16 and catoptron 15 reflections, sees through neutral density gradual filter 14 earlier, through catoptron 13 and spectroscope 11 reflections, shines CCD12 again, interfere with thing light 18, thereby by the CCD12 hologram recorded.
Claims (3)
1. one kind has dual-use function digital micro-analysis holographic measurement device, by 1 laser instrument (1), and 1 beam collimation parallel beam expand device (2), 1 three-dimensional objective table (9); 1 ccd video camera (12), 1 microcobjective (10), 1 neutral density gradual filter (14), 2 180 degree reflection units (6; 16), 2 spectroscopes (4,11) and 6 catoptrons (3; 5,7,8,13; 15) form, it is characterized in that laser instrument (1) directly over be beam collimation parallel beam expand device (2), be first catoptron (3) directly over the beam collimation parallel beam expand device; The just right-hand of first catoptron (3) is first spectroscope (4), and the just right-hand of first spectroscope (4) is the first half of the 2 180 ° of reflection unit (16), under be second catoptron (5) and the 3rd catoptron (7) successively; The positive left of Lower Half of the 2 180 ° of reflection unit (16) is one the 6th catoptron (15), is neutral density gradual filter (14) and the 5th catoptron (13) under the 6th catoptron (15);
The positive left of the 5th catoptron (13) is second spectroscope (11); Directly over second spectroscope (11) CCD (12); Under be successively microcobjective (10), objective table (9) and the 4th catoptron (8), just right-hand be the 1 the degree reflection unit (6) Lower Half, the 1 the degree reflection unit (6) the just right-hand of the first half be second catoptron (5); 1. second catoptron (5) changes light path over to, and device is adjusted to reflective-mode, is used to measure the reflection-type sample; 2. second catoptron (5) produces light path, and device is adjusted to transmission mode, is used to detect transparent sample; Transmission-type and reflectively can produce light path through changing over to of second catoptron (5) is freely switched.
2. one kind has dual-use function digital micro-analysis holographic measurement method; Adopt and according to claim 1ly have dual-use function digital micro-analysis holographic measurement device and carry out transmission mode and measure; It is characterized by earlier and generate beam of laser, behind beam expander collimator apparatus (2) beam-expanding collimation, reflect by first catoptron (3) again by laser instrument (1); Through first spectroscope (4), be divided into a branch of reference light (17) and a branch of downward thing light (18) to the right;
Downward thing light (18) reflects through the 3rd catoptron (7) earlier; Reflect through the 4th catoptron (8) again; Shine on the sample on the objective table (9); The thing light (18) that sees through sample passes through microcobjective (10) again and amplifies, and sees through second spectroscope (11), shines on the CCD (12); Reference light to the right (17) is earlier through the 2 180 degree reflection unit (16) and the 6th catoptron (15) reflection; See through neutral density gradual filter (14); Again through the 5th catoptron (13) and second spectroscope (11) reflection; Shine CCD (12), interfere with thing light (18), thereby by CCD (12) hologram recorded.
3. one kind has dual-use function digital micro-analysis holographic measurement method; Adopt and according to claim 1ly have dual-use function digital micro-analysis holographic measurement device and carry out reflective-mode and measure; It is characterized by earlier and generate beam of laser, behind beam expander collimator apparatus (2) beam-expanding collimation, reflect by first catoptron (3) again by laser instrument (1); Through first spectroscope (4), be divided into a branch of reference light (17) and a branch of thing light (18); Downward thing light (18) is earlier through second catoptron (5) and the one 180 degree reflection unit (6) reflection; Pass through microcobjective (10) downwards through second spectroscope (11) reflection again; The irradiation sample; The thing light (18) that sample reflects amplifies through microcobjective (10), sees through second spectroscope (11), shines CCD (12); Reference light to the right (17) is earlier through the 2 180 degree reflection unit (16) and the 6th catoptron (15) reflection; See through neutral density gradual filter (14); Again through the 5th catoptron (13) and second spectroscope (11) reflection; Shine CCD (12), interfere with thing light (18), thereby by CCD (12) hologram recorded.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102914257A (en) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | Light-splitting synchronous phase shifting interference microscopy device and detection method |
| CN102914259A (en) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | Interference detection device based on light-splitting synchronous phase shifting and detection method |
| CN102914256A (en) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | Synchronous phase shifting interference detection device based on orthogonal double grating and detection method |
| CN102914258A (en) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | Synchronous phase shifting interference microscopy detection device and detection method based on orthogonal double-grating |
| CN102954757A (en) * | 2012-10-30 | 2013-03-06 | 哈尔滨工程大学 | Microscopic interference detecting device based on synchronous carrier phase shift and detecting method of microscopic interference detecting device |
| CN102967258A (en) * | 2012-10-30 | 2013-03-13 | 哈尔滨工程大学 | Common light path interference microscopy detection device and method based on synchronization carrier frequency phase shift |
| CN107463081A (en) * | 2017-06-16 | 2017-12-12 | 重庆理工大学 | A kind of real-time micro-imaging detecting system of three-dimensional using Digital Holography |
| CN107796302A (en) * | 2017-10-16 | 2018-03-13 | 西安交通大学 | A kind of dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber |
| CN107966110A (en) * | 2017-11-21 | 2018-04-27 | 北京理工大学 | A kind of bimodal Digital holographic microscopy device |
| CN109557074A (en) * | 2019-01-10 | 2019-04-02 | 华东师范大学 | A kind of acquisition method of Raman high spectrum image |
| CN110360949A (en) * | 2019-07-19 | 2019-10-22 | 东北大学 | A kind of multifunctional holographic interferometer measuration system |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102914257A (en) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | Light-splitting synchronous phase shifting interference microscopy device and detection method |
| CN102914259A (en) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | Interference detection device based on light-splitting synchronous phase shifting and detection method |
| CN102914256A (en) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | Synchronous phase shifting interference detection device based on orthogonal double grating and detection method |
| CN102914258A (en) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | Synchronous phase shifting interference microscopy detection device and detection method based on orthogonal double-grating |
| CN102954757A (en) * | 2012-10-30 | 2013-03-06 | 哈尔滨工程大学 | Microscopic interference detecting device based on synchronous carrier phase shift and detecting method of microscopic interference detecting device |
| CN102967258A (en) * | 2012-10-30 | 2013-03-13 | 哈尔滨工程大学 | Common light path interference microscopy detection device and method based on synchronization carrier frequency phase shift |
| CN107463081A (en) * | 2017-06-16 | 2017-12-12 | 重庆理工大学 | A kind of real-time micro-imaging detecting system of three-dimensional using Digital Holography |
| CN107463081B (en) * | 2017-06-16 | 2020-01-17 | 重庆理工大学 | Three-dimensional real-time microscopic imaging detection system using digital holographic technology |
| CN107796302A (en) * | 2017-10-16 | 2018-03-13 | 西安交通大学 | A kind of dual-purpose type telecentric structure digital holographic micro-measuring device based on optical fiber |
| CN107966110A (en) * | 2017-11-21 | 2018-04-27 | 北京理工大学 | A kind of bimodal Digital holographic microscopy device |
| CN109557074A (en) * | 2019-01-10 | 2019-04-02 | 华东师范大学 | A kind of acquisition method of Raman high spectrum image |
| CN110360949A (en) * | 2019-07-19 | 2019-10-22 | 东北大学 | A kind of multifunctional holographic interferometer measuration system |
| CN110360949B (en) * | 2019-07-19 | 2020-10-20 | 东北大学 | Multifunctional holographic interference measurement system |
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Application publication date: 20120801 |