CN110332904A - Line style micro-interference spectral measurement system and method based on plane grating light splitting - Google Patents
Line style micro-interference spectral measurement system and method based on plane grating light splitting Download PDFInfo
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- CN110332904A CN110332904A CN201910649339.7A CN201910649339A CN110332904A CN 110332904 A CN110332904 A CN 110332904A CN 201910649339 A CN201910649339 A CN 201910649339A CN 110332904 A CN110332904 A CN 110332904A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The invention discloses a kind of line style micro-interference spectral measurement systems based on plane grating light splitting, including light source unit, interference unit, optical path spectrophotometric unit, monitoring unit, light spectrum image-forming unit and data processing unit, the system has intercepted the interference light through slit, monochromatic light is being broken down into after grating, the spectrum picture imaged on high speed camera is analyzed and processed, the present invention can quick obtaining sample profile information, realize high-precision surface topography measurement.
Description
Technical field
The invention belongs to optical precision measurement fields, are related to a kind of line style micro-interference light based on plane grating light splitting
Spectral measurement system and method.
Background technique
With the development of Ultraprecision Machining, precise detection technology also in the concern of more researchers quickly into
Step.Relative to traditional detection technique, what precise detection technology was more concerned about is the device of micro-or nano size, and measurement object includes several
What parameter, length, depth-to-width ratio such as structure；Dynamic parameter, such as acceleration, resonance frequency；Material property, such as Young mould
Amount, hardness；Mechanical characteristic, such as stress distribution, strain.Currently, ultraprecise detection field has developed many detection techniques
And equipment, be divided into contact and contactless, contact type measurement such as atomic force microscope according to measurement method, be allow probe along
Sample surface profiles are scanned, easy to use, and measurement range is big, but due to contacting sample surfaces always, are easy to sample
It damages.Non-contact measurement is generally basede on optical principle, and the method therein that represents is optical microphotograph interferometry, it is optics
The combination of interferometry and optical microscopy, have the characteristics that high-precision, it is quick, lossless.It mainly includes monochromatic light phase shift interference
Interfere with white light scanning, monochromatic light phase shift interference is only applicable to the relatively flat sample in surface, and white light scanning interference overcomes phase
The uncertain problem in position, but need to carry out wide range scanning, develop white-light spectrum interference again on this basis, utilizes spectrum phase
Position information solves sample surface morphology information, the speed of spectrum and the precision of white light interference is combined, in micro-nano device
There is consequence in measurement.
The mode of spectrum is obtained first is that inciting somebody to action according to the chromatic dispersion principle of light using beam splitters such as grating, prism and optical filters
A branch of polychromatic light resolves into the monochromatic light of different wave length, is known as color dispersion-type spectrometer using the spectrometer of grating and prismatic decomposition,
It is known as optical filter type spectrometer using the spectrometer that optical filter is divided；Another way is the principle of interference according to light, is changed dry
Path difference is related to, a series of scanning figure of different locations is obtained, Fourier transformation is carried out to it, to obtain the spectrum of different frequency
Figure, is known as Fourier-type spectrometer according to spectrometer made of the principle.
In practical applications, such as the HR2000+ of Ocean Optics, belong to color dispersion-type spectrometer, it is white to be chiefly used in optical fiber type
Light spectral interference, but since it is inputted by optical fiber, the bore of optical fiber is smaller, and the final result is the list after being averaged
Point data obtains sample surface profiles if necessary, it is still necessary to one-dimensional scanning is carried out to it, time of measuring increases, and makes it by outer
Boundary's environmental disturbances influence to increase, and spectrometer is expensive, is also unfavorable for small integrated.
Summary of the invention
To overcome the shortcomings of technology, the line style micro-interference spectral measurement system based on plane grating light splitting and side are proposed
Method, the system have intercepted the interference light through slit, monochromatic light are being broken down into after grating, to imaging on high speed camera
Spectrum picture be analyzed and processed, can quick obtaining sample surface topography information.
For this reason, the technical scheme adopted by the present invention is that:
It is proposed a kind of line style micro-interference spectral measurement system based on plane grating light splitting, including light source unit, interference
Unit, optical path spectrophotometric unit, monitoring unit, light spectrum image-forming unit and data processing unit.
Wherein the light source unit carries out light source input, plays a role in lighting；
The interference unit is Michelson interference structure, by changing the optical path difference between measurement end and reference end, is produced
The raw interference light for carrying sample surface information；
Interference light is divided into two-way by the optical path spectrophotometric unit, all the way input monitoring unit, the imaging of another way input spectrum
Unit；
The monitoring unit realizes the real-time observation to sample, facilitates adjustment with reference to mirror angle；
The light spectrum image-forming unit is to carry out wavelength division to the interference light of the strip after slit, forms spectrogram
Picture images on high speed camera.
The data processing unit is analyzed and processed to the spectrum picture of light spectrum image-forming unit, to obtain sample wheel
Wide information.
The interference unit is by object lens, Amici prism, reference mirror, objective table, one-dimensional scanning motor, piezoelectric ceramics locator
Composition, wherein；Object lens, Amici prism, reference mirror constitute optical path spectrophotometric unit described in Michelson interference objective by first point
Light prism, the second Amici prism and turn back microscope group at；The light beam of light source unit output enters interference after the second Amici prism
Unit；By the interference light of interference unit output after the second Amici prism, the light of half enters the first Amici prism, at this
Position is divided again, all the way input spectrum imaging unit, another way input monitoring unit after mirror of turning back.
The light spectrum image-forming unit is made of Guan Jing, slit, collimation lens, plane grating, imaging len and high speed camera.
In order to solve technical problem, the present invention can also use such technical solution:
A method of the line style micro-interference spectral measurement system based on plane grating light splitting, specific steps are as follows:
S1, it is measured using the line style micro-interference spectral measurement system being divided based on plane grating, computer control pressure
Electroceramics locator carries out five step phase shifts, generates the five frame interference signals that phase difference is pi/2,
I1=Ibg+Ibgγcos(δ(k)-π)
Wherein IbgIndicate background light intensity, γ indicates contrast, and δ indicates the phase difference between measurement end and reference end, i.e. institute
The phase information needed；
S2, spectrum camera acquired image is handled, every a line of spectrum picture is the spectrum that represent the point
Information extracts phase information using five step phase shift methods；
S3, according to the relationship between phase and wave number, obtain the absolute distance of the point；
S4, repeatedly step 2,3 can be obtained the profile information of sample after obtaining the absolute distance of each point line by line.
Compared with the prior art, the technical features and effects of the present invention are:
1. sample surface profiles information can be directly obtained, without carrying out motor scanning, time of measuring is not only shortened, simultaneously
Also reduce the interference of external environment.
2. system simple structure, overall structure are at low cost.
3. being conducive to small integrated.
Detailed description of the invention
Fig. 1 is test system structure figure.
Specific embodiment
As shown in Figure 1, the present invention provide it is a kind of based on plane grating light splitting line style micro-interference spectral measurement system with
Method, the system include: light source unit 101, interference unit 201, optical path spectrophotometric unit 301, monitoring unit 401, light spectrum image-forming
Unit 501 and data processing unit 601.Wherein:
To beam collimation after the progress of the light source unit 101 light source input；The unit is by light source 102 and collimation lens
103 compositions.Light source selects white light source, and light beam dissipates reduction after collimation lens 103, enables light with maximal efficiency coupling
It closes into interference unit；
The interference unit 201 is passed after generating interference light by changing the optical path difference between optical path and reference path
It casts to optical path below and carries out subsequent processing；The unit is by object lens 202, Amici prism 203, reference mirror 204, objective table 205, one
Scan module 206, the composition of piezoelectric ceramics locator 207 are tieed up, wherein object lens 202, Amici prism 203, reference mirror 204 constitute
Michelson interference objective.The light beam a part exported by light source unit 101 is incident to sample to be tested surface, and another part enters
It is incident upon reference mirror surface, and by adjusting optical path difference and the angle of reference mirror, may make this two-way light beam at Amici prism 203
Interference is generated, piezoelectric ceramics locator 207 carries out accurate displacement, extracts spectrum phase, one-dimensional scanning for realizing time-phase displacement
Motor 206 is scanned to the sample being placed on objective table 205, realizes the measurement of sample three-dimensional appearance.
The optical path spectrophotometric unit 301 is divided to interference light, is propagated to different light paths and is handled；It is described
Unit is made of the first Amici prism 302, the second Amici prism 303 and mirror 304 of turning back.The light beam warp that light source unit 101 exports
Enter interference unit 201 after crossing the second Amici prism 303；The interference light exported by interference unit 201 is by the second Amici prism
After 303, the light of half enters the first Amici prism 302, is divided again in the position, all the way input spectrum imaging unit
501, another way input monitoring unit after mirror 304 of turning back.
The monitoring unit 401 realizes the real-time observation to sample characteristic, and fast and easy finds position to be measured, feeds back simultaneously
Striped density situation is adjusted in time with reference to mirror angle；The unit is made of pipe mirror 402 and high speed camera 403.Interfering beam warp
It crosses after pipe mirror 402 and is imaged on high speed camera, it can be achieved that observation sample state.
The interference light of strip is decomposed in the realization of light spectrum image-forming unit 501, is divided into a lateral direction
Different wave length finally images in the spectrum picture on high speed camera；The unit is by pipe mirror 502, slit 503, collimation lens
504, plane grating 505, imaging len 506 and high speed camera 507 form.Interference light is converged after pipe mirror 502, is penetrated
Become strip shaped light beam after slit 503, is equivalent to a certain column interference light for having intercepted and having carried sample surface information, lengthwise position
What is represented is sample position information, and light beam is collimated after collimation lens 504, effectively increases light beam coupling efficiency, reenters
It is incident upon on 505 surface of grating and is divided in a lateral direction, form spectrum, therefore transverse direction represents wavelength information,
Sample position information is still represent in longitudinal direction, the light beam after light splitting is converged in into high speed phase after imaging len 506
It is imaged on machine 507, what image represented is the spectral information at sample different location at this time.
The data processing unit 601 by computer control piezoelectric ceramics locator 207 realize phase shift, in addition to spectrum at
As the image that unit 501 finally exports is handled, the profile information of sample is obtained.
The invention proposes a kind of line style micro-interference spectral measurement method based on plane grating light splitting, specific steps
Are as follows:
1. computer controls piezoelectricity using being measured based on the line style micro-interference spectral measurement system that plane grating is divided
Ceramic locator carries out five step phase shifts, generates the five frame interference signals that phase difference is pi/2,
I1=Ibg+Ibgγcos(δ(k)-π)
Wherein IbgIndicate background light intensity, γ indicates contrast, and δ indicates the phase difference between measurement end and reference end, i.e. institute
The phase information needed.
2. a pair spectrum camera acquired image is handled, every a line of spectrum picture is the spectrum letter that represent the point
Breath, extracts phase information using five step phase shift methods；
3. obtaining the absolute distance of the point according to the relationship between phase and wave number；
4. repeating step 2,3 line by line, after obtaining the absolute distance of each point, that is, the profile information of sample is obtained.
5. breath breath.
It should be pointed out that for those of ordinary skill in the art, without departing from the inventive concept of the premise,
Various modifications and improvements can be made, and these are all within the scope of protection of the present invention.Therefore, the scope of protection of the patent of the present invention
It should be determined by the appended claims.
Claims (5)
1. a kind of line style micro-interference spectral measurement system based on plane grating light splitting, including light source unit, interference unit, light
Road spectrophotometric unit, monitoring unit, light spectrum image-forming unit and data processing unit, it is characterised in that:
The light source unit carries out light source input；
The interference unit is Michelson interference structure, and by changing the optical path difference between measurement end and reference end, generation is taken
The interference light of carry sample surface information；
Interference light is divided into two-way by the optical path spectrophotometric unit, all the way input monitoring unit, another way input spectrum imaging unit；
The monitoring unit realizes the real-time observation to sample；
The light spectrum image-forming unit is to carry out wavelength division to the interference light of the strip after slit, forms spectrum picture,
It images on high speed camera；
The data processing unit is analyzed and processed to the spectrum picture of light spectrum image-forming unit, to obtain the profile of sample
Information.
2. a kind of line style micro-interference spectral measurement system based on plane grating light splitting according to claim 1, special
Sign is: the interference unit is by object lens, Amici prism, reference mirror, objective table, one-dimensional scanning motor, piezoelectric ceramics locator
Composition, wherein；Object lens, Amici prism, reference mirror constitute Michelson interference objective.
3. a kind of line style micro-interference spectral measurement system based on plane grating light splitting according to claim 1, special
Sign is: the optical path spectrophotometric unit by the first Amici prism, the second Amici prism and turn back microscope group at；Light source unit output
Light beam enters interference unit after the second Amici prism；By the interference light of interference unit output after the second Amici prism,
The light of half enters the first Amici prism, is divided again in the position, all the way input spectrum imaging unit, another way warp
Cross input monitoring unit after turning back mirror.
4. a kind of line style micro-interference spectral measurement system based on plane grating light splitting according to claim 1, special
Sign is: the light spectrum image-forming unit is made of Guan Jing, slit, collimation lens, plane grating, imaging len and high speed camera.
5. a kind of method of the line style micro-interference spectral measurement system based on plane grating light splitting, specific steps are as follows:
S1, it is measured using the line style micro-interference spectral measurement system being divided based on plane grating, computer controls piezoelectricity pottery
Porcelain locator carries out five step phase shifts, generates the five frame interference signals that phase difference is pi/2,
I1=Ibg+Ibgγcos(δ(k)-π)
Wherein IbgIndicate background light intensity, γ indicates contrast, and δ indicates the phase difference between measurement end and reference end, i.e., required
Phase information；
S2, spectrum camera acquired image being handled, every a line of spectrum picture is the spectral information that represent the point,
Phase information is extracted using five step phase shift methods；
S3, according to the relationship between phase and wave number, obtain the absolute distance of the point；
S4, repeatedly step 2,3 can be obtained the profile information of sample after obtaining the absolute distance of each point line by line.
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