CN208704671U - A kind of fast illuminated whole audience white light interference micro-measurement apparatus - Google Patents
A kind of fast illuminated whole audience white light interference micro-measurement apparatus Download PDFInfo
- Publication number
- CN208704671U CN208704671U CN201821516832.9U CN201821516832U CN208704671U CN 208704671 U CN208704671 U CN 208704671U CN 201821516832 U CN201821516832 U CN 201821516832U CN 208704671 U CN208704671 U CN 208704671U
- Authority
- CN
- China
- Prior art keywords
- light
- dispersion
- white light
- spectrum
- axial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model discloses a kind of fast illuminated whole audience white light interference micro-measurement apparatus.It is on the basis of white light interference micrometering method and fast illuminated light spectrum image-forming detection art, successively dispersion and different axial depth positions is focused on correspondingly along axial direction after axial color dispersion-type interference optics using secondary color directional light, and the white light interference signal strength on spectral domain reaches maximum with wavelength change and near a certain monochromatic light position of focal plane of axial dispersion, uniqueness coding between " white light interference signal-spectrum-depth " three needed for establishing measurement, multiframe or single-frame snapshots formula dispersion spectrum is only needed to encode white light interference image, the machinery-free type scanning to the distribution of detected element three-dimensional appearance can be realized, the whole audience is non-contact, quickly (dynamic even transient state) high-acruracy survey.
Description
Technical field
The present invention relates to a kind of measuring technique of microstructure appearance, especially a kind of fast micro- survey of illuminated whole audience white light interference
Method and device thereof are measured, advanced manufacture and detection technique field are belonged to.
Background technique
In the fields such as industrial production, defense military, health care, service for life, such as MEMS
(Microelectromechanical systems, MEMS), diffraction optical element (Diffractive optical
Element, DOE) etc. have a wide range of applications.Complexity microstructure existing for these element surfaces, with the residual stress of element,
The intrinsic characteristics such as service life, damage threshold are closely related.It can be related for element to the ultraprecise detection of its microstructure appearance
The Pre-Evaluation of performance and control provide guidance and help.Thus, for correlation-detection system and technology research more by people
Attention.
In numerous detection techniques, interference of light micrometering method because it has many advantages, such as that the whole audience is non-contact, high-precision, at
For a kind of strong microscopic appearance Precision measurement tool.Traditional scheme mostly using the preferable laser of monochromaticjty as light source, in conjunction with
Shift-phase interferometry, axial face shape measurement accuracy is up to sub-nanometer magnitude.However, the use of Single wavelength laser limits to a certain extent
Its application in terms of the element D surface contouring that surface has complex micro structure (such as ladder-like) is made.Although having unique
The vertical scanning white light interference microscopy of zero optical path difference position can effectively overcome the above problem, but its detection is needed by high-precision
The micro positioner (such as piezoelectric ceramic stack, Piezoelectric transducer, PZT) of degree makees fine scanning realization along axial direction.
It is longer so as to cause entire measurement process, it is easily influenced by external air flow disturbance, vibration etc., is only applicable to the inspection of static object plane
It surveys, and the structure of system is also complex, testing cost is higher.
In order to overcome the above problem, the W. Lyda et al. at Stuttgart University, Germany Application Optics center proposes one kind
Colour is copolymerized burnt spectrointerferometer (CCSI).The measurement method combines copolymerization coke and each leisure of white light interference laterally and axially divides
Advantage in resolution will be modulated to wave-number domain by the axial dispersion and the interference of light of polychromatic light by the depth information of micro-measuring structure
In white light interference signal, without doing axially vertical scanning, it can be realized and axial direction similar in vertical scanning white light interference microscopy
Measurement accuracy.However due to the use of traditional slit-type spectrometer, the single cross measure of CCSI is limited in scope.Although the center
The lateral dispersed light spectral encoding interferometer (LCDSEI) that proposes of M. Gronle et al., detection is improved by x wire measurement
Efficiency, the difficulty but measurement of the whole audience, single frames remains unchanged.
How to realize that the machinery-free type for being distributed the element three-dimensional appearance that surface has complex micro structure scans, the whole audience is non-to connect
Touching, quickly (dynamic even transient state) high-acruracy survey, just gradually become the research hotspot and trend of this field.
Summary of the invention
The utility model is in view of the deficienciess of the prior art, provide a kind of without mechanical scanning component progress micro-structure shape
The device of looks measurement can be realized complicated, discrete micro-structured component surface microscopic shape to micro-structure, especially face deformationization
The whole audience of looks is non-contact, quick (dynamic even transient state) high-acruracy survey.
For achieving the above object, it is white that the technical solution that the utility model uses is to provide a kind of fast illuminated whole audience
Interference of light micro-measurement apparatus, it includes that broad spectrum light source, collimator and extender smoothing mirror head, beam splitter, the interference of axial color dispersion-type are aobvious
Speck mirror, objective table, imaging coupling camera lens, fast illuminated light spectrum image-forming detector, Data Transmission Controlling line, computer；
Detected element is placed on objective table, and detected element and broad spectrum light source respective positions are measuring spectral region used
Central wavelength under meet Nonimage Conjugate Relations；Collimator and extender smoothing mirror head, beam splitter, axial color dispersion-type interference microcobjective,
In light channel structure altogether between imaging coupling camera lens and fast illuminated light spectrum image-forming detector；
Broad spectrum light source is located at the front focal plane position of collimator and extender smoothing mirror head, and the polychromatic light that broad spectrum light source issues is through standard
Direct expansion beam smoothing mirror head becomes directional light and is uniformly incident to splitter surface；The beam splitter is by parallel, uniform polychromatic light is anti-
It injects and interferes microcobjective into axial color dispersion-type, export a curb axial direction dispersion respectively and focus to the measurement of different depth position
The secondary color reference light of light and all the way shaftless crossed disperstion；The measurement light of axial dispersion is reflected by detected element to be returned, and is referred to secondary color
Light warp beam crossed disperstion type interference microcobjective is mixed to form interference signal, then passes sequentially through beam splitter and imaging coupling camera lens transmission
To fast illuminated light spectrum image-forming detector, fast illuminated light spectrum image-forming detector is by acquired image data through Data Transmission Controlling line
It is transmitted to computer.
Fast illuminated light spectrum image-forming detector described in the utility model is multiple aperture spectral filtering camera, tunable ladder light
Grid imager, spectrally resolved detector array, computed tomography imaging spectrometer, fast illuminated code aperture optical spectrum imagers, storehouse
Filtering spectrum decomposes instrument, recombination imaging fiber spectrometer, lens array field of integration imaging spectrometer, image and folds imaging spectral
One of instrument, image mapping spectrometer, multispectral Sagnac spectrometer, fast illuminated EO-1 hyperion Fourier transformation imager.
The axial color dispersion-type interference microcobjective is based on the Michelson type of axial diffraction optical element, Mirau
One of type, Linik type interference microcobjective.
The broad spectrum light source is one of halogen lamp, white light LEDs, super continuous spectrums laser.
Complicated, the non-company using fast illuminated whole audience white light interference micro-measurement apparatus opposite provided by the utility model deformationization
When the microscopic appearance on continuous micro-structured component surface measures, following steps can be used:
The first step, the pre- calibration of " spectrum-depth " corresponding relationship:
Before measurement, interferes the reference path in microcobjective to be blocked axial color dispersion-type, it is made only to work in axial dispersion
Mode；The polychromatic light that broad spectrum light source issues is collimated to expand smoothing mirror head, beam splitter and axial color dispersion-type interference microcobjective
Expose to the standard flat reflecting mirror on objective table；Standard flat reflecting mirror is under the drive of micro positioner, along microcobjective
Optical axis direction does axial scan, and the optical signal of axial dispersion is reflected into microcobjective and beam splitter, then received by spectrometer,
Measurement obtains the wavelength value of each monochromatic optical signal, the axis of micro positioner when each monochrome optical signal reaches peak value during writing scan
To shift position, one group of " spectrum-depth " data is obtained；" spectrum-depth " is obtained using multinomial or spline-fit method
Corresponding relationship curve, completion system are demarcated in advance；
Second step, the acquisition of fast illuminated dispersion spectrum coding white light interference image:
When measurement, blocking for reference path in axial color dispersion-type interference microcobjective is removed, works at the same time it in axial direction
Dispersion and interference pattern；Detected element is placed on objective table, the position of objective table is adjusted both axially and radially, makes detected element
Meet Nonimage Conjugate Relations under the central wavelength for measuring spectral region used with broad spectrum light source respective positions；Wide spectrum light
Collimated smoothing mirror head, beam splitter and the axial color dispersion-type interference microcobjective of expanding of the polychromatic light that source issues forms curb axial direction
Dispersion and the measurement light and the secondary color reference light of shaftless crossed disperstion all the way for focusing to different depth position；The measurement light of axial dispersion
By detected element reflect return, and with secondary color reference light warp beam crossed disperstion type interference microcobjective be mixed to form it is white on spectral domain
Optical interference signals data cube；Fast illuminated light spectrum image-forming detector acquisition and the white light interference signal data cube on spectral domain
The corresponding multiframe of body or single-frame snapshots formula dispersion spectrum encode white light interference image, and are transmitted to computer storage and processing；
Third step, the demodulation of fast illuminated dispersion spectrum coding white light interference image:
According to the specific constructive form of used fast illuminated light spectrum image-forming detector, using corresponding fast illuminated spectrum at
As data processing algorithm, carried out by multiframe or single-frame snapshots formula dispersion spectrum coding white light interference image of the computer to acquisition
Demodulation, is finally inversed by spectral domain white light interference signal data cube；Using spectral domain white light interference signal processing algorithm, to spectrum
Domain white light interference signal data cube is handled, based on spectral domain white light interference signal strength with wavelength change and in axial direction
The a certain monochromatic light position of focal plane of dispersion nearby reaches maximum, obtains the depth coding spectral information of each point on measured object；According to
It demarcates " spectrum-depth " relation curve obtained in advance according to the first step, demodulates the depth information of each point on corresponding tested surface,
It is finally completed the measurement of detected element microstructure appearance.
Spectral region used in the measurement of the utility model is ultraviolet band, visible light wave range or infrared band.
The measuring principle of measuring device provided by the utility model, foundation is: in white light interference micrometering method and fastly
Illuminated light spectrum image-forming detect art on the basis of, using secondary color directional light after axial color dispersion-type interference optics along axial direction according to
Secondary dispersion simultaneously focuses on the white light interference signal strength on different axial depth position and spectral domain with wave correspondingly
Long variation and reach maximum near a certain monochromatic light position of focal plane of axial dispersion, establishes needed for measurement that " white light is dry
Relate to signal-spectrum-depth " uniqueness coding between three；This method only needs multiframe or single-frame snapshots formula dispersion spectrum to compile
Code white light interference image can be realized non-contact, quick to the machinery-free type scanning of detected element three-dimensional appearance distribution, the whole audience
(dynamic even transient state) high-acruracy survey.
Compared with prior art, the remarkable advantage of the utility model is:
1. measuring device provided by is not necessarily to axial mechanical scanning component, with lateral planar survey instead of existing transverse direction
The measurement of point/line, the system single of increasing can laterally survey range, by axial color dispersion-type interfere microcobjective and fast illuminated spectrum at
As detector, the uniqueness coding between " white light interference signal-spectrum-depth " three is realized from system hardware, in turn
Complete it is non-contact to the whole audience of micro-structure (especially face deformationization complicated, discrete micro-structure) element surface microscopic appearance,
Quick (the dynamic even transient state) of high precision measuring data obtains, and effectively because mechanical part scans, the mobile measurement introduced is missed for inhibition
Difference, the controllability and anti-interference ability of lifting system.
2. measuring device provided by the utility model detects art in white light interference micrometering method and fast illuminated light spectrum image-forming
On the basis of, using secondary color directional light along axial direction successively dispersion and correspondingly after axial color dispersion-type interference optics
The white light interference signal strength on different axial depth position and spectral domain is focused on wavelength change and in axial dispersion
A certain monochromatic light position of focal plane nearby reach maximum, establish measurement needed for " white light interference signal-spectrum-depth "
Uniqueness coding between three, it is only necessary to which correlation can be completed in multiframe or single-frame snapshots formula dispersion spectrum coding white light interference image
The whole audience of pattern is non-contact, quick (dynamic even transient state), high-precision detect, so as to avoid it is time-consuming in existing method, vulnerable to
External interference, flexible lower axial mechanical scanning and crosswise spots/line scanning, reduce the measurement error thus introduced, significantly mention
High detection efficiency.
Detailed description of the invention
Fig. 1 is a kind of structural representation of fast illuminated whole audience white light interference micro-measurement apparatus provided in an embodiment of the present invention
Figure；
Fig. 2 is that a kind of Michelson type interference based on axial diffraction optical element provided in an embodiment of the present invention is micro-
The structural schematic diagram of object lens；
Fig. 3 is " spectrum-depth " relation curve provided in an embodiment of the present invention；
Fig. 4 is that fast illuminated dispersion spectrum provided in an embodiment of the present invention encodes white light interference image data acquisition and processing stream
Journey schematic diagram.
Wherein: 1, broad spectrum light source；2, collimator and extender smoothing mirror head；3, beam splitter；4, axial color dispersion-type interferes micro- object
Mirror；5, detected element；6, objective table；7, imaging coupling camera lens；8, fast illuminated light spectrum image-forming detector；9, Data Transmission Controlling
Line；10, computer；41, light beam coupling imaging lens；42, Amici prism；43, reference planes reflecting mirror；44, axial diffraction light
Learn element.
Specific embodiment
With reference to the accompanying drawings and embodiments to a kind of fast illuminated whole audience white light interference micrometering described in the utility model
Device and measurement method be described in further detail.
Embodiment 1
Referring to attached drawing 1, it is the structural representation of fast illuminated whole audience white light interference micro-measurement apparatus provided in this embodiment
Figure.The measuring device by broad spectrum light source 1, collimator and extender smoothing mirror head 2, beam splitter 3, axial color dispersion-type interference microcobjective 4,
Objective table 6, imaging coupling camera lens 7, fast illuminated light spectrum image-forming detector 8, Data Transmission Controlling line 9 and computer 10 are constituted.
Computer 10 is connected through Data Transmission Controlling line 9 with fast illuminated light spectrum image-forming detector 8；Detected element 5 is placed in load
On object platform 6, detected element 5 and 1 respective positions of broad spectrum light source meet object under the central wavelength for measuring spectral region used
Image conjugate relationship；Collimator and extender smoothing mirror head 2, beam splitter 3, axial color dispersion-type interference microcobjective 4, imaging coupling 7 and of camera lens
In light channel structure altogether between fast illuminated light spectrum image-forming detector 8；Broad spectrum light source 1 is located at the preceding coke of collimator and extender smoothing mirror head 2
Face position, the polychromatic light that broad spectrum light source 1 issues is collimated to be expanded smoothing mirror head 2 and is uniformly incident to beam splitter 3 as directional light
Surface；Parallel, uniform polychromatic light is reflected into axial color dispersion-type and interferes microcobjective 4 by the beam splitter 3, exports one respectively
The dispersion of curb axial direction and the measurement light and the secondary color reference light of shaftless crossed disperstion all the way for focusing to different depth position；Axial dispersion
Measurement light by detected element 5 reflect return, with secondary color reference light warp beam crossed disperstion type interference microcobjective 4 be mixed to form interference
Signal, then pass sequentially through beam splitter 3 and imaging coupling camera lens 7 is transmitted to fast illuminated light spectrum image-forming detector 8, fast illuminated spectrum at
As acquired image data are transmitted to computer 10 through Data Transmission Controlling line 9 by detector 8.
In the present embodiment, fast illuminated light spectrum image-forming detector 8 is multiple aperture spectral filtering camera (Multiaperture
Filtered camera, MAFC), tunable echelon imager (Tunable echelle imager, TEI), spectrum point
Distinguish detector array (Spectrally resolving detector arrays, SRDA), computed tomography imaging spectrometer
(Computed tomographic imaging spectrometry, CTIS), fast illuminated code aperture optical spectrum imagers
(Coded aperture snapshot spectral imager, CASSI), Stack Filtering spectral resolution instrument (Filter
Stack spectral decomposer, FSSD), recombination imaging fiber spectrometer (Fiber-reformatting imaging
Spectrometry, FRIS), lens array field of integration imaging spectrometer (Integral field spectroscopy with
Lenslet arrays, IFS-L), image fold imaging spectrometer (Image-replicating imaging
Spectrometry, IRIS), image map spectrometer (Image mapping spectrometry, IMS), multispectral Sa lattice
Nanogram spectrometer (Multispectral Sagnac interferometry, MSI), fast illuminated EO-1 hyperion Fourier transformation at
As in instrument (Snapshot hyperspectral imaging Fourier transform spectrometer, SHIFT)
One kind realizing the quick obtaining to target " space-spectrum " information and measurement；Axial color dispersion-type interference microcobjective 4 be based on
The Michelson type of axial diffraction optical element (Axial diffractive optical elements, ADOE), Mirau
One of type, Linik type interference microcobjective；Broad spectrum light source 1 is halogen lamp, white light emitting diode (Light
Emitting diode, LED) or super continuous spectrums laser；Beam splitter is the semi-transparent semi-reflecting Amici prism of 1:1.
In the present embodiment, axial color dispersion-type interference microcobjective 4 is the Michelson based on axial diffraction optical element
Type interferes microcobjective, and referring to attached drawing 2, the knot of microcobjective is interfered for the Michelson type based on axial diffraction optical element
Structure schematic diagram；It includes light beam coupling imaging lens 41, Amici prism 42, reference planes reflecting mirror 43 and axial diffraction optics member
Part 44；Incident secondary color directional light is divided into two through light beam coupling imaging lens 41 and Amici prism 42；All the way for without axial color
Scattered polychromatic light, and returned by the reflection of reference planes reflecting mirror 43 and form reference optical signal；Another way is by axial diffraction optics
Element 44 becomes along axial dispersion and focuses to each monochromatic light of different depth position, and is returned and formed by the reflection of detected element 5
Measure optical signal；Secondary color reference optical signal and the measurement optical signal of axial dispersion are mixed to form on spectral domain through Amici prism 42 again
White light interference signal data cube.
The method that microstructure appearance is measured using 1 shown device of attached drawing, comprising the following three steps:
The first step, the pre- calibration of " spectrum-depth " corresponding relationship.
Before measuring, the pre- calibration of " spectrum-depth " corresponding relationship need to be carried out to system and device: axial color dispersion-type is done
The reference path related in microcobjective 4 is blocked, it is made only to work in axial dispersion mode；The polychromatic light that broad spectrum light source 1 issues
The collimated standard flat for expanding smoothing mirror head 2, beam splitter 3 and axial color dispersion-type interference microcobjective 4 and exposing on objective table
Reflecting mirror；For standard flat reflecting mirror under the drive of micro positioner, the optical axis direction along microcobjective 4 does axial scan, by axis
The optical signal of crossed disperstion is reflected into microcobjective 4 and beam splitter 3, then obtains each monochromatic optical signal by spectrometer reception, measurement
Wavelength value, the axial movement position of each monochrome optical signal micro positioner when reaching peak value, obtains one group during writing scan
" spectrum-depth " data；" spectrum-depth " corresponding relationship curve is obtained using multinomial or spline-fit method, completes system
The pre- calibration of system.
Since secondary color directional light is by axial color dispersion-type interference microcobjective 4 can successively dispersion be different wave length along axial direction
Monochromatic light, and focus on different axial depth positions correspondingly, i.e., have between " spectrum-depth " such as following formula (1)
Corresponding relationship:
(1)
Wherein,For monotropic function,Indicate axial depth.Attached drawing 3 is " spectrum-provided by the embodiment of the utility model
Depth " relation curve, horizontal axis represents wavelength domain(being from left to right shortwave to long wave direction), ordinate are deep
Degree.Due to the influence of the factors such as the alignment error of optical element, non-linear axial dispersion, often it is between " spectrum-depth "
Existing nonlinear corresponding relationship, more precisely characterizes in the pre- calibration process of system using multinomial or spline-fit technology
Obtain the monotropic function。
Second step, the acquisition of fast illuminated dispersion spectrum coding white light interference image.
When measurement, blocking for reference path in axial color dispersion-type interference microcobjective 4 is removed, works at the same time it in axial direction
Dispersion and interference pattern；Detected element 5 is placed on objective table 6, the position of objective table 6 is adjusted both axially and radially, makes to be tested
Element 5 and 1 respective positions of broad spectrum light source are measuring spectral region (ultraviolet band, visible light wave range or infrared band) used
Central wavelength under meet Nonimage Conjugate Relations；The polychromatic light that broad spectrum light source 1 issues is collimated to expand smoothing mirror head 2, beam splitting
Device 3 and axial color dispersion-type interference microcobjective 4 formed a curb axial direction dispersion and focus to different depth position measurement light and
The secondary color reference light of shaftless crossed disperstion all the way；The measurement light of axial dispersion by detected element 5 reflect return, and with secondary color reference light
Warp beam crossed disperstion type interference microcobjective 4 is mixed to form the white light interference signal data cube on spectral domain；Fast illuminated spectrum
Imaging detector 8 acquires multiframe corresponding with the white light interference signal data cube on spectral domain or single-frame snapshots formula dispersion
Optical spectrum encoded white light interference image, and it is transmitted to the storage and processing of computer 10；
In the present embodiment, measurement method is on the basis of white light interference micrometering method and fast illuminated light spectrum image-forming detection art
On, it successively dispersion and is focused correspondingly after axial color dispersion-type interferes microcobjective 4 along axial direction using secondary color directional light
In the white light interference signal strength on different axial depth positions and spectral domain with wavelength change and in certain of axial dispersion
One monochromatic light position of focal plane nearby reaches maximum, " white light interference signal-spectrum-depth " three needed for establishing measurement
Between uniqueness coding, it is only necessary to multiframe or single-frame snapshots formula dispersion spectrum encode white light interference image, can be realized to tested
The machinery-free type of element three-dimensional appearance distribution scans, the whole audience is non-contact, quick (dynamic even transient state) high-acruracy survey.
According to whether the variation of 5 surface microscopic topographic of measured object continuous and detection accuracy/rate request difference, measurement
Process can get multiframe or single-frame snapshots formula dispersion spectrum encodes white light interference image data.In the present embodiment, with single-frame snapshots
For formula dispersion spectrum encodes the acquisition of white light interference image data, specifically: the polychromatic light that broad spectrum light source 1 issues is collimated
Smoothing mirror head 2, beam splitter 3 and axial color dispersion-type interference microcobjective 4 is expanded to form a curb axial direction dispersion and focus to difference
The measurement light of depth location and all the way the secondary color reference light of shaftless crossed disperstion.The measurement light of axial dispersion is reflected by detected element 5
It returns, and mixes and interfere with secondary color reference light warp beam crossed disperstion type interference microcobjective 4, form spectral domain white light interference letter
Number cube, intensity distribution expression formula is by shown in following formula (2):
(2)
Wherein,For the 2-d spatial coordinate on 5 surface of detected element,It is the three-dimensional with detected element 5
Face shape is distributed relevant white-light fringe phase,Indicate themThe monochromatic central wavelength of a axial direction dispersion,,MFor measure the monochromatic actual use number of spectral region inner shaft crossed disperstion used (it should be noted that
Although polychromatic light warp beam crossed disperstion type interferes microcobjective 4 along axial direction, successively dispersion is each continuous monochromatic light, reality in measurement
The monochromatic light number usedMIt is limited to the detectable spectrum number of fast illuminated light spectrum image-forming detector 8, in the present embodiment),WithThe background component and modulation degree distribution of white-light fringe are respectively indicated,For with system in relation to and with the unrelated phase bias of tested surface shape.Because having between " spectrum-depth " such as formula
(1) one-to-one relationship shown in, therefore the intensity distribution of above-mentioned spectral domain white light interference signal data cube can be rewritten as formula
(3):
(3)
Wherein,For monotropic functionInverse function,It ismA axial direction dispersion monochrome center wavelength of lightIt is right
The axial depth answered.Therefore, the single-frame snapshots formula dispersion spectrum that fast illuminated light spectrum image-forming detector 8 obtains encodes white light interference figure
As data are formula (4):
(4)
Wherein,Indicate that fast illuminated light spectrum image-forming detector 8 is vertical to the white light interference signal data on primary light spectral domain
Three-dimensional data cube compressed transform is two dimensional encoded images data by the compressed transform of cube.
Third step, the demodulation of fast illuminated dispersion spectrum coding white light interference image:
According to the specific constructive form of used fast illuminated light spectrum image-forming detector 8, calculated using corresponding data processing
Method, the multiframe obtained by 10 Duis of computer or single-frame snapshots formula dispersion spectrum coding white light interference image demodulate, inverting
Spectral domain white light interference signal data cube out；Using spectral domain white light interference signal processing algorithm, to light
Spectral domain white light interference signal data cubeIt is handled, is based on spectral domain white light interference signal strengthWith wavelengthVariation and reach maximum near a certain monochromatic light position of focal plane of axial dispersion, obtain by
Survey the depth coding spectral information of each point on object；Demarcate " spectrum-depth " relationship obtained in advance according to the first step
Curve, the depth information of each point on corresponding tested surface is demodulated, the distribution of 5 three-dimensional appearance of detected element is finally completed
Machinery-free type scanning, the whole audience is non-contact, quick (dynamic even transient state) high-acruracy survey.
It is step 2 and three corresponding snapshot formulas in measurement method provided by the embodiment of the utility model referring to attached drawing 4
Dispersion spectrum encodes the flow diagram of white light interference image data acquisition and demodulation process.The three-dimensional appearance information of measured object 5
Measuring device through the utility model is modulated into multiframe or single-frame snapshots formula dispersion spectrum coding white light interference image (two dimension) number
According to；The data are demodulated using corresponding fast illuminated light spectrum image-forming detection data Processing Algorithm, are finally inversed by corresponding spectrum
Domain white light interference data cube (single frames)；Again by spectral domain white light interference signal processing algorithm to spectral domain white light interference number
It is handled according to cube, based on spectral domain white light interference signal strength with wavelength change and in a certain monochromatic light of axial dispersion
Position of focal plane nearby reaches maximum, obtains depth coding spectral information relevant to 53 d shape of measured object, and combines preparatory
" spectrum-depth " relation curve obtained is demarcated, the three-dimensional appearance distribution of detected element 5 is reconstructed.
The content that the utility model does not elaborate is the common knowledge of those skilled in the art.
Claims (4)
1. a kind of fast illuminated whole audience white light interference micro-measurement apparatus, it is characterised in that: it includes broad spectrum light source (1), collimation
Expand smoothing mirror head (2), beam splitter (3), axial color dispersion-type interference microcobjective (4), objective table (6), imaging coupling camera lens
(7), fast illuminated light spectrum image-forming detector (8), Data Transmission Controlling line (9), computer (10)；
Detected element (5) is placed on objective table (6), and detected element (5) and broad spectrum light source (1) respective positions are used in the measurement
Meet Nonimage Conjugate Relations under the central wavelength of spectral region；Collimator and extender smoothing mirror head (2), beam splitter (3), axial color dispersion-type
Microcobjective (4), imaging are interfered to couple between camera lens (7) and fast illuminated light spectrum image-forming detector (8) in light channel structure altogether；
Broad spectrum light source (1) is located at the front focal plane position of collimator and extender smoothing mirror head (2), the secondary color that broad spectrum light source (1) issues
Light is collimated to be expanded smoothing mirror head (2) and is uniformly incident to beam splitter (3) surface as directional light；The beam splitter (3) will it is parallel,
Uniform polychromatic light is reflected into axial color dispersion-type interference microcobjective (4), exports a curb axial direction dispersion respectively and focuses to
The measurement light of different depth position and all the way the secondary color reference light of shaftless crossed disperstion；The measurement light of axial dispersion is by detected element
(5) reflection returns, and is mixed to form interference signal with secondary color reference light warp beam crossed disperstion type interference microcobjective (4), then successively lead to
It crosses beam splitter (3) and imaging coupling camera lens (7) is transmitted to fast illuminated light spectrum image-forming detector (8), fast illuminated light spectrum image-forming detection
Acquired image data are transmitted to computer (10) through Data Transmission Controlling line (9) by device (8).
2. a kind of fast illuminated whole audience white light interference micro-measurement apparatus according to claim 1, it is characterised in that: described
Fast illuminated light spectrum image-forming detector is multiple aperture spectral filtering camera, tunable echelon imager, spectrally resolved detector
Array, computed tomography imaging spectrometer, fast illuminated code aperture optical spectrum imagers, Stack Filtering spectral resolution instrument, recombination optical fiber
Imaging spectrometer, lens array field of integration imaging spectrometer, image fold imaging spectrometer, image maps spectrometer, multispectral
One of Sagnac spectrometer, fast illuminated EO-1 hyperion Fourier transformation imager.
3. a kind of fast illuminated whole audience white light interference micro-measurement apparatus according to claim 1, it is characterised in that: described
Axial color dispersion-type interference microcobjective is Michelson type, Mirau type, the interference of Linik type based on axial diffraction optical element
One of microcobjective.
4. a kind of fast illuminated whole audience white light interference micro-measurement apparatus according to claim 1, it is characterised in that: described
Broad spectrum light source is one of halogen lamp, white light LEDs, super continuous spectrums laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821516832.9U CN208704671U (en) | 2018-09-17 | 2018-09-17 | A kind of fast illuminated whole audience white light interference micro-measurement apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821516832.9U CN208704671U (en) | 2018-09-17 | 2018-09-17 | A kind of fast illuminated whole audience white light interference micro-measurement apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208704671U true CN208704671U (en) | 2019-04-05 |
Family
ID=65946884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821516832.9U Active CN208704671U (en) | 2018-09-17 | 2018-09-17 | A kind of fast illuminated whole audience white light interference micro-measurement apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208704671U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108981606A (en) * | 2018-09-17 | 2018-12-11 | 苏州大学 | A kind of fast illuminated whole audience white light interference microscopic measuring method and its device |
| WO2020056566A1 (en) * | 2018-09-17 | 2020-03-26 | 苏州大学张家港工业技术研究院 | Snapshot full-field white light interference microscopic measurement method and device thereof |
| CN112344865A (en) * | 2020-11-06 | 2021-02-09 | 中国船舶重工集团公司第七0七研究所 | Hemisphere harmonic oscillator wall thickness and wall thickness uniformity in-situ measurement system and method |
| CN112525070A (en) * | 2020-11-18 | 2021-03-19 | 南京理工大学 | Vibration-resistant white light interference measurement method based on non-uniform sampling correction |
-
2018
- 2018-09-17 CN CN201821516832.9U patent/CN208704671U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108981606A (en) * | 2018-09-17 | 2018-12-11 | 苏州大学 | A kind of fast illuminated whole audience white light interference microscopic measuring method and its device |
| WO2020056566A1 (en) * | 2018-09-17 | 2020-03-26 | 苏州大学张家港工业技术研究院 | Snapshot full-field white light interference microscopic measurement method and device thereof |
| CN108981606B (en) * | 2018-09-17 | 2020-10-09 | 苏州大学 | Snapshot type full-field white light interference microscopic measurement method and device thereof |
| CN112344865A (en) * | 2020-11-06 | 2021-02-09 | 中国船舶重工集团公司第七0七研究所 | Hemisphere harmonic oscillator wall thickness and wall thickness uniformity in-situ measurement system and method |
| CN112525070A (en) * | 2020-11-18 | 2021-03-19 | 南京理工大学 | Vibration-resistant white light interference measurement method based on non-uniform sampling correction |
| CN112525070B (en) * | 2020-11-18 | 2022-04-01 | 南京理工大学 | Vibration-resistant white light interference measurement method based on non-uniform sampling correction |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108981606A (en) | A kind of fast illuminated whole audience white light interference microscopic measuring method and its device | |
| CN208704671U (en) | A kind of fast illuminated whole audience white light interference micro-measurement apparatus | |
| CN105865370B (en) | A kind of white light scanning interferometric method and system | |
| CN108775875A (en) | A kind of microstructure appearance measurement method and its device based on dispersion spectrum coding | |
| CN108844492A (en) | A kind of microstructure appearance measurement method and its device based on Spectral modulation depth depth coding | |
| CN109596065A (en) | A kind of high-precision micro-nano method for three-dimensional measurement based on time domain phase shift algorithm | |
| US9243888B2 (en) | Image mapped optical coherence tomography | |
| CN109269438A (en) | A kind of Structured Illumination microscopic measuring method for the detection of multilayer complexity micro-nano structure | |
| CN103292740B (en) | A kind of 3-D scanning instrument measurement method and device thereof | |
| CN108917651B (en) | Super-resolution three-dimensional shape measurement method based on optical tweezers medium microspheres | |
| CN106500589A (en) | A kind of measuring method of multi-wavelength tunable micro-interference and its device | |
| US10746537B2 (en) | Radius-of-curvature measurement by spectrally-controlled interferometry | |
| CN103968779A (en) | Super-resolution three-dimensional measurement microscope | |
| CN101469972B (en) | Long-focus depth super-resolution secondary confocal measuring apparatus | |
| CN208635741U (en) | A kind of microstructure appearance measuring device based on Spectral modulation depth depth coding | |
| CN206311061U (en) | A kind of measurement apparatus of multi-wavelength tunable micro-interference | |
| CN103727891A (en) | Synchronous three-dimensional speckle interferometric measurement system and method | |
| Schulz et al. | Measurement of distance changes using a fibre-coupled common-path interferometer with mechanical path length modulation | |
| CN105758799A (en) | Super-resolution array virtual structure light lighting imaging device and method | |
| CN103344176A (en) | Octave type short coherence transient phase-shifting interferometer and measurement method used for detecting spherical topographic characteristics | |
| CN210242710U (en) | Microstructure morphology measuring device based on dispersion spectrum coding | |
| CN105209852A (en) | Surface-geometry measurement method and device used therein | |
| CN106595529B (en) | Larger radius of curvature nonzero digit interferometric method and device based on virtual Newton's ring | |
| WO2016115321A2 (en) | Diffraction-grating-based common-path interferometer for imaging fourier-transform spectroscopy | |
| CN106123805B (en) | Plated film device three-dimensional topography measurement method based on white light scanning interference |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |