CN208635741U - A kind of microstructure appearance measuring device based on Spectral modulation depth depth coding - Google Patents
A kind of microstructure appearance measuring device based on Spectral modulation depth depth coding Download PDFInfo
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Abstract
The utility model discloses a kind of microstructure appearance measuring devices based on Spectral modulation depth depth coding.Detected element and spatial light modulator are in object-image conjugate under the central wavelength for measuring used spectral region；Light beam is turned back between coupler, spatial light modulator, collimator and extender camera lens, beam splitter, axial non-achromatic micro objective, imaging lens and color camera in light channel structure altogether.Measuring device provided by the utility model is not necessarily to axial mechanical scanning component, by spectral modulation gating module, spatial light modulator and axial non-achromatic micro objective, the uniqueness coding between " spectrum-modulation degree-depth " three is realized from system hardware, to complete to (class) mirror surface micro-structure, the especially whole audience of complicated, discrete (class) the mirror surface micro-structured component of face deformationization, non-contact, quick, precise measurement, it can be effectively suppressed because mechanical part scans the mobile measurement error introduced, the controllability and anti-interference ability of lifting system.
Description
Technical field
The utility model relates to a kind of measuring techniques of microstructure appearance, in particular to a kind of to be based on Spectral modulation depth depth
The measuring device of the microstructure appearance of coding belongs to advanced manufacture and detection technique field.
Background technique
In the key areas of the national economy such as semiconductors manufacture, artificial intelligence, aerospace, such as silicon-based wafer, microcomputer
Electric system (Microelectromechanical systems, MEMS) calculates hologram (Computer-generated processed
Holography, CGH) etc. ray machines electric device have a wide range of applications.The surface of these elements often there is by machining,
Complexity (class) mirror surface micro-structure that the techniques such as laser/plasma etching, sputtered coatings are formed.Its topographic profile not only embodies member
The external feature of part, while characteristic also inherent with hardness, residual stress, service life, damage threshold etc. is closely related.
It detects as the important ring in component manufacture production process, side can be provided for Pre-Evaluation and control component correlated performance
It helps, the height of detection accuracy often directly determines the superiority and inferiority of component machine-shaping effect.Since nearly more than ten years, for this
The ultraprecise detection of class component surface micromorphology is even more to cause the attention and research of related fields scientific worker.
The micro- measuring technology of the interference of light is micro- in ray machine electric device because it has the characteristics that non-contact, measurement of full field, high-precision
More application has been obtained in terms of the Precision measurement for seeing pattern.Traditional scheme is mostly using the preferable laser of monochromaticjty as light source, knot
Shift-phase interferometry is closed, measurement accuracy is up to sub-nanometer magnitude.However, adjacent measured point optical path difference is less than quarter-wave want
It asks, limiting the micro- measuring technology of Single wavelength laser interference to a certain extent on surface has complex micro structure (such as ladder-like)
(class) mirror surface component D surface contouring in terms of application.Although white light interference micrometering art has unique zero light path
Poor position can carry out absolute measure, be usually used in the high-precision detection of said elements face shape, but it is needed by high-precision micro-
Shifter (such as piezoelectric ceramic stack, piezoelectric transducer, PZT) makees fine scanning along axial direction.So as to cause whole
A time of measuring is longer, is only applicable to the detection of static object plane, and in scanning process to extraneous flow perturbation, vibration etc. extremely
Sensitivity, the structure of system is also complex, higher cost.
In contrast, the 3 D measuring method based on modulation of fringes coding detects skill as a kind of noncoherence optics
Art, although have many advantages, such as measurement process more it is flexible it is controllable, system structure is relatively easy, its axis in order to obtain measured object
It is distributed to face shape, it is still desirable to make axial scan using PZT, equally exist that external interference resistance is weak, is suitable only for static measurement
The disadvantages of.Therefore, how on the basis of not dramatically increasing system structure complexity and cost, realizing has complexity to surface
The machinery-free type scanning of the ray machine electric device three-dimensional appearance distribution of (class) mirror surface micro-structure, the non-contacting quick high accuracy of the whole audience are surveyed
Amount is the research hotspot and trend of this field.
Summary of the invention
The utility model can be realized pair in view of the deficienciess of the prior art, provide a kind of without mechanical scanning component
(class) mirror surface micro-structure, especially face deformationization are complicated, discrete (class) mirror surface micro-structured component is quick, precise measurement dress
It sets.
Realize that the technical solution of the utility model aim is to provide a kind of micro-structure based on Spectral modulation depth depth coding
Topography measurement device, it includes that broad spectrum light source, beam coupler, spectral modulation gate, even photo-coupler, light beam are turned back coupling
Clutch, spatial light modulator, collimator and extender camera lens, beam splitter, axial non-achromatic micro objective, objective table, imaging lens, coloured silk
Form and aspect machine, computer and controller；Computer is connected with controller and color camera respectively；Detected element is placed on objective table,
Detected element and spatial light modulator are in object-image conjugate under the central wavelength for measuring used spectral region；Light beam is turned back coupling
Device, spatial light modulator, collimator and extender camera lens, beam splitter, axial non-achromatic micro objective, imaging lens and color camera it
Between in altogether light channel structure；The polychromatic light that broad spectrum light source issues uniformly is incident to spectral modulation gate through beam coupler, controls
Device processed spectrum regulation output end connect with spectral modulation gate, spectral modulation gate in measurement spectral region successively
The monochromatic light of Sequential output specific wavelength is turned back coupler through even photo-coupler and light beam, obtains the incidence of space uniform distribution
Monochromatic light ray field signal, is incident to spatial light modulator；The spatial light modulator is located at the front focal plane position of collimator and extender camera lens
It sets, the coded image output end of controller is connect with spatial light modulator, and spatial light modulator is exporting the monochrome of space encoding just
String fringe light field signal, then be coupled to collimator and extender camera lens by light beam coupler of turning back and be incident to beam splitter table as directional light
Face；After parallel monochromatic sine streak light is reflected into axial non-achromatic micro objective by the beam splitter, tested member is exposed to
Part surface passes sequentially through axial non-achromatic micro objective and beam splitter by the monochromatic sine streak light that tested surface is reflected back again,
Imaged camera lens is coupled to the target surface of color camera, and acquired image data are transmitted to computer by color camera.
Spectral modulation gate described in the utility model is acousto-optic modulator, is based on dispersion element and spatial light modulator
Spectral modulation gating system；The spatial light modulator is Digital Micromirror Device, liquid crystal on silicon；The broad spectrum light source
For halogen lamp, white light LEDs, super continuous spectrums laser；The color camera is colored three chip CCD or CMOS cameras.
The principle of technical solutions of the utility model foundation is: surveying in traditional three-dimensional appearance based on modulation of fringes coding
On the basis of amount method, focused correspondingly using the monochromatic collimated beam of different wave length by axial non-achromatic optical system
Modulation degree in different axial depth position and each monochromatic striations change with axial depth and its position of focal plane (i.e.
The depth location of tested point) reach maximum, realize the uniqueness coding between " modulation degree-spectrum-depth " three.
Compared with prior art, the remarkable advantage of the utility model is: measuring device provided by the utility model without
Axial mechanical scanning component is needed, by spectral modulation gating module, spatial light modulator and axial non-achromatic micro objective, from
The uniqueness coding between " spectrum-modulation degree-depth " three is realized on system hardware, to complete to the micro- knot of (class) mirror surface
The whole audience of complicated, discrete (class) the mirror surface micro-structured component of structure, especially face deformationization, non-contact, quick, precise measurement,
It can be effectively suppressed because mechanical part scans the mobile measurement error introduced, the controllability and anti-interference ability of lifting system.
Detailed description of the invention
Fig. 1 is a kind of microstructure appearance measurement based on Spectral modulation depth depth coding provided by the embodiment of the utility model
The structural schematic diagram of device；
Fig. 2 is " spectrum-depth " relation curve provided by the embodiment of the utility model；
Fig. 3 is " spectrum-modulation degree " relation curve provided by the embodiment of the utility model.
Wherein: 1, broad spectrum light source；2, beam coupler；3, spectral modulation gate；4, even photo-coupler；5, light beam is rolled over
Turn coupler；6, spatial light modulator；7, collimator and extender camera lens；8, beam splitter；9, axial non-achromatic micro objective；10, quilt
Survey element；11, objective table；12, imaging lens；13, color camera；14, Data Transmission Controlling line；15, computer；16, it controls
Device.
Specific embodiment
Technical solutions of the utility model are described in further detail with reference to the accompanying drawings and embodiments.
Embodiment 1
Referring to attached drawing 1, it measures dress for the microstructure appearance provided in this embodiment based on Spectral modulation depth depth coding
The structural schematic diagram set.The measuring device is by broad spectrum light source 1, beam coupler 2, spectral modulation gate 3, even photo-coupler
4, light beam turn back coupler 5, spatial light modulator 6, collimator and extender camera lens 7, beam splitter 8, axial non-achromatic micro objective 9,
Objective table 11, imaging lens 12, color camera 13, Data Transmission Controlling line 14, computer 15, controller 16 are constituted.
The polychromatic light that broad spectrum light source 1 issues uniformly is incident to spectral modulation gate 3, spectrum tune through beam coupler 2
Gate 3 processed successively monochromatic light of Sequential output specific wavelength in measurement spectral region, rolls over through even photo-coupler 4 and light beam
Turn coupler 5, obtains the incident monochromatic light ray field signal of space uniform distribution, be incident to spatial light modulator 6；Space light modulation
Device 6 is located at the front focal plane position of collimator and extender camera lens 7, and the coded image output end of controller 16 is connect with spatial light modulator 6,
Spatial light modulator 6 exports the monochromatic sine streak light field signal of space encoding, then is coupled to collimation by light beam coupler 5 of turning back
Expander lens 7 become directional light and are incident to 8 surface of beam splitter；Parallel monochromatic sine streak light is reflected into axial direction by beam splitter 8
After non-achromatic micro objective 9,10 surface of detected element on objective table 11 is exposed to, the sinusoidal item of monochrome being reflected back by tested surface
Line light passes sequentially through axial non-achromatic micro objective 9 again and beam splitter 8, imaged camera lens 12 are coupled to the target of color camera 13
Acquired image data are transmitted to computer by face, color camera 13.The position of objective table 11 can change both axially and radially,
So that detected element 10 disposed thereon and spatial light modulator 6 are in image in the case where measuring the central wavelength in spectral region used
Conjugation；Light beam is turned back coupler 5, spatial light modulator 6, collimator and extender camera lens 7, beam splitter 8, axial non-achromatic micro objective
9, in light channel structure altogether between imaging lens 12 and color camera 13；Computer 15 is through Data Transmission Controlling line 14 and controller
16, color camera 13 is connected, and programs using based on 2010 compiler of Visual C++, realizes to spectral modulation gate 3, sky
Between 6 output light field signal of optical modulator regulation and to camera 13 acquire transmission image data synchronously control.
In the present embodiment, spectral modulation gate 3 is acousto-optic modulator (AOTF), it can be achieved that regulation to polychromatic light,
Sequence is sequentially output the monochromatic light of specific wavelength；Spatial light modulator 6 is Digital Micromirror Device (DMD), it can be achieved that incident light
The modulation of field spatial distribution；Axial non-achromatic micro objective 9 can by the monochromatic collimated beam of different wave length along axial focusing in not
Same depth location；Broad spectrum light source 1 is halogen lamp, white light LEDs or super continuous spectrums laser；Beam coupler 2 is lens, reflection
The constructional device of mirror or optical fiber composition；Even photo-coupler 4 is integrating sphere or integrating rod；Light beam turns back coupler 5 as total internal reflection
(total internal reflection, TIR) prism；Beam splitter 8 is the semi-transparent semi-reflecting Amici prism of 1:1；Color camera 13 is
Colored three chip CCD cameras；Measuring spectral region used is ultraviolet band, visible light wave range or infrared band.
Using 1 shown device of attached drawing, measurement method comprising the following three steps:
The first step, system are demarcated in advance.Before measuring, the pre- mark of " spectrum-depth " corresponding relationship need to be carried out to system and device
It is fixed:
1) spatially selecting filtering is carried out to the polychromatic light that broad spectrum light source 1 issues using spectral modulation gate 3, exports certain wave
Long monochromatic light, and 5 uniform irradiation of coupler is turned back to spatial light modulator 6 through even photo-coupler 4 and light beam；
2) synchronization modulation spatial light modulator 6 is programmed using based on 2010 compiler of Visual C++, exports space uniform
The monochromatic optical signal of distribution, and it is micro- through turn back coupler 5, collimator and extender camera lens 7, beam splitter 8 and axial non-achromatism of light beam
Object lens 9 expose to the standard flat reflecting mirror on objective table；
3) for standard flat reflecting mirror under the drive of piezo-ceramic micro displacement unit, the optical axis direction along microcobjective 9 does axis
To scanning, monochromatic light signal reflex is entered into axial non-achromatic micro objective 9 and beam splitter 8, then received by spectrometer, measurement
The wavelength value of optical signals, and record in scanning process the axis of piezo-ceramic micro displacement unit when monochromatic optical signal reaches peak value
To shift position；
4) it is measuring in spectral region used, is being repeated the above process along shortwave to long wave direction (or reversed), obtain one group
" spectrum-depth " data determine that " spectrum-depth " relationship of system and device is bent using multinomial or spline-fit technology
Line, completion system are demarcated in advance.
Since the monochromatic collimated beam of different wave length will focus on correspondingly not by axial non-achromatic micro objective 9
Same axial depth position has the corresponding relationship as shown in following formula (1) that is, between " spectrum-depth ":
z = f (λ) (1)
Wherein,f() is monotropic function,zIndicate axial depth.It is " light provided in an embodiment of the present invention referring to attached drawing 2
Spectrum --- depth " relation curve, horizontal axis represent wavelength domain λ (being from left to right shortwave to long wave direction), and ordinate is depthz.Due to the influence of the factors such as the alignment error of optical element, non-linear axial dispersion, often it is between " spectrum --- depth "
Existing nonlinear corresponding relationship, it is more accurate using multinomial or spline-fit technology during measuring system device normalization
Earth's surface obtains the monotropic functionf (•)。
Second step, coded image obtain.When measurement, the position of objective table 11 is adjusted both axially and radially, so that being located at it
On detected element 10 and spatial light modulator 6 measuring used spectral region (ultraviolet band, visible light wave range or infrared waves
Section) in central wavelength under be in object-image conjugate；The polychromatic light issued using spectral modulation gate 3 to broad spectrum light source 1 is along short
Wave to long wave direction (or reversed) filters, successively the monochromatic light of Sequential output specific wavelength, and rolls over through even photo-coupler 4 and light beam
Turn coupler 5 and is uniformly incident to spatial light modulator 6；Utilize the software synchronization based on 2010 compiler development of Visual C++
Regulate and control spatial light modulator 6, be sequentially output corresponding monochromatic phase shift sine streak figure light field signal, then through light beam turn back coupler 5,
Collimator and extender camera lens 7, beam splitter 8 and axial non-achromatic micro objective 9 expose to 10 surface of detected element；Color camera 13 with
16 coordinated of controller acquires each frame monochrome phase shift bar graph reflected through detected element 10, and is transmitted to computer 15 and deposits
Storage and processing；
In the present embodiment, used method is in traditional 3 D measuring method based on modulation of fringes coding
On the basis of, it is focused on correspondingly not using the monochromatic collimated beam of different wave length by axial non-achromatic micro objective 9
The modulation degree of same axial depth position and each monochromatic striations is with axial depth variation and (i.e. to be measured in its position of focal plane
The depth location of point) reach maximum, realize the uniqueness coding between " modulation degree-spectrum-depth " three.
Specifically: it is based on time domain unique step phase shift technology, the distribution of light intensity by changing spatial light modulator 6 is distributed, and
It turns back coupler 5, is being measured in spectral region used by broad spectrum light source 1, beam coupler 2, even photo-coupler 4 and light beam
The output of monochromatic phase shift sine streak figure light field signal is successively realized from shortwave toward long wave direction (or reversed).Color camera 13 is adopted
Integrate the light distribution of each frame monochrome phase shift bar graph reflected through detected element 10 as shown in formula (2):
(2)
Wherein,For the image coordinate on 13 target surface of color camera,It is three with detected element 10
Dimension face shape is distributed relevant fringe phase,Indicate themA monochromatic central wavelength,,MFor measurement institute
(in the present embodiment with (ultraviolet band, visible light wave range or infrared band) monochromatic number in spectral region),WithRespectively indicatemThe background component and modulation degree of a monochromatic light bar graph are distributed,For
ThenThe amount of phase shift of step,,,N(in the present embodiment for phase shift step number).Cause
Between " spectrum-depth " have the corresponding relationship as shown in formula (1), therefore color camera 13 obtain each frame monochrome phase shift striped
Figure light distribution is represented by such as following formula (3):
(3)
Wherein,For monotropic functionInverse function,It ismA monochrome center wavelength of lightCorresponding axis
To depth.Since the modulation degree of each monochromatic striations can change with axial depth, and reach very big near its position of focal plane
Value.Therefore the maximum position of modulation of fringes is the depth of the point on wavelength domain corresponding to any point in detected element 10
Spectral information is encoded, to realize " spectrum --- modulation degree --- depth " triangular uniqueness coding.
Third step, coded image demodulation.It is handled using each monochromatic phase shift bar graph of the random Phase-shifting algorithm to acquisition,
Obtain the modulation degree distribution of each monochromatic light bar graph relevant to 10 face shape of measured piece；Based on Gauss, class Gauss
Or Spline Model is fitted " spectrum-modulation degree " relation curve for determining each point on tested surface, utilizes each monochromatic light modulation of fringes
Reach this very big characteristic in its position of focal plane (i.e. the depth location of tested point), demodulates the depth coding spectral information of each point；Demarcate " spectrum-depth " relation curve obtained in advance in conjunction with the first step, demodulate corresponding
The depth information of each point on tested surface, is finally completed that the machinery-free type scanning of 10 three-dimensional appearance of detected element distribution, the whole audience is non-connects
The quick high accuracy of touching measures.
It is " spectrum-modulation degree " of certain point in detected element 10 provided by the embodiment of the utility model referring to attached drawing 3
Relation curveB(λ), horizontal axis represent wavelength domain λ (being from left to right shortwave to long wave direction), and ordinate is normalization striped tune
System is fitted based on Gauss, class Gauss or Spline Model in demodulating process and is determinedB(λ), so as to acquire the curve maximum
Corresponding spectral position λ1, in conjunction with " spectrum-depth " relation curve, the depth (height of the point can be obtained
Degree) informationz 1。
Claims (5)
1. a kind of microstructure appearance measuring device based on Spectral modulation depth depth coding, it is characterised in that: it includes wide spectrum
Light source (1), beam coupler (2), spectral modulation gate (3), even photo-coupler (4), light beam are turned back coupler (5), space
Optical modulator (6), collimator and extender camera lens (7), beam splitter (8), axial non-achromatic micro objective (9), objective table (11), imaging
Camera lens (12), color camera (13), Data Transmission Controlling line (14), computer (15) and controller (16)；Computer (15) warp
Data Transmission Controlling line (14) is connected with controller (16) and color camera (13) respectively；Detected element (10) is placed in objective table
(11) on, detected element (10) and spatial light modulator (6) are total in image under the central wavelength for measuring used spectral region
Yoke；Turn back coupler (5), spatial light modulator (6), collimator and extender camera lens (7), beam splitter (8), axial non-achromatism of light beam is aobvious
In light channel structure altogether between speck mirror (9), imaging lens (12) and color camera (13)；The secondary color that broad spectrum light source (1) issues
Light is uniformly incident to spectral modulation gate (3) through beam coupler (2), the spectrum regulation output end and spectrum of controller (16)
Modulate gate (3) connection, spectral modulation gate (3) successively list of Sequential output specific wavelength in measurement spectral region
Coloured light is turned back coupler (5) through even photo-coupler (4) and light beam, obtains the incident monochromatic light ray field signal of space uniform distribution,
It is incident to spatial light modulator (6)；The spatial light modulator (6) is located at the front focal plane position of collimator and extender camera lens (7), control
The coded image output end of device (16) is connect with spatial light modulator (6), and spatial light modulator (6) exports the monochrome of space encoding
Sine streak light field signal, then be coupled to collimator and extender camera lens (7) by light beam coupler (5) of turning back and be incident to point as directional light
Beam device (8) surface；Parallel monochromatic sine streak light is reflected into axial non-achromatic micro objective (9) by the beam splitter (8)
Afterwards, detected element (10) surface is exposed to, axial non-colour killing is passed sequentially through by the monochromatic sine streak light that tested surface is reflected back again
Poor microcobjective (9) and beam splitter (8), imaged camera lens (12) are coupled to the target surface of color camera (13), color camera (13)
Acquired image data are transmitted to computer.
2. a kind of microstructure appearance measuring device based on Spectral modulation depth depth coding according to claim 1, special
Sign is: the spectral modulation gate is acousto-optic modulator, the spectral modulation based on dispersion element and spatial light modulator
Gating system.
3. a kind of microstructure appearance measuring device based on Spectral modulation depth depth coding according to claim 1, special
Sign is: the spatial light modulator is Digital Micromirror Device, liquid crystal on silicon.
4. a kind of microstructure appearance measuring device based on Spectral modulation depth depth coding according to claim 1, special
Sign is: the broad spectrum light source is halogen lamp, white light LEDs, super continuous spectrums laser.
5. a kind of microstructure appearance measuring device based on Spectral modulation depth depth coding according to claim 1, special
Sign is: the color camera is colored three chip CCD or CMOS cameras.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108844492A (en) * | 2018-08-31 | 2018-11-20 | 苏州大学 | A kind of microstructure appearance measurement method and its device based on Spectral modulation depth depth coding |
| CN111504177A (en) * | 2020-04-27 | 2020-08-07 | 东北大学 | High-contrast coding microscopic imaging system and method |
| CN111982014A (en) * | 2020-08-06 | 2020-11-24 | 南京理工大学 | Micro-interference-based microsphere surface morphology large-field-of-view measurement method |
| CN113899320A (en) * | 2021-09-30 | 2022-01-07 | 中国科学院光电技术研究所 | High-precision micro-nano three-dimensional morphology measurement method based on spatial structure light field |
| CN114441035A (en) * | 2021-12-31 | 2022-05-06 | 复旦大学 | Multispectral imaging method and device based on high-speed adjustable multicolor LED light source |
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2018
- 2018-08-31 CN CN201821424821.8U patent/CN208635741U/en not_active Withdrawn - After Issue
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108844492A (en) * | 2018-08-31 | 2018-11-20 | 苏州大学 | A kind of microstructure appearance measurement method and its device based on Spectral modulation depth depth coding |
| CN111504177A (en) * | 2020-04-27 | 2020-08-07 | 东北大学 | High-contrast coding microscopic imaging system and method |
| CN111504177B (en) * | 2020-04-27 | 2021-05-28 | 东北大学 | High-contrast coding microscopic imaging system and method |
| CN111982014A (en) * | 2020-08-06 | 2020-11-24 | 南京理工大学 | Micro-interference-based microsphere surface morphology large-field-of-view measurement method |
| CN113899320A (en) * | 2021-09-30 | 2022-01-07 | 中国科学院光电技术研究所 | High-precision micro-nano three-dimensional morphology measurement method based on spatial structure light field |
| CN113899320B (en) * | 2021-09-30 | 2023-10-03 | 中国科学院光电技术研究所 | High-precision micro-nano three-dimensional morphology measurement method based on spatial structure light field |
| CN114441035A (en) * | 2021-12-31 | 2022-05-06 | 复旦大学 | Multispectral imaging method and device based on high-speed adjustable multicolor LED light source |
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