CN1942769A - 探针 - Google Patents

探针 Download PDF

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Publication number
CN1942769A
CN1942769A CNA2005800119289A CN200580011928A CN1942769A CN 1942769 A CN1942769 A CN 1942769A CN A2005800119289 A CNA2005800119289 A CN A2005800119289A CN 200580011928 A CN200580011928 A CN 200580011928A CN 1942769 A CN1942769 A CN 1942769A
Authority
CN
China
Prior art keywords
probe
beam portion
probe substrate
protrusion
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005800119289A
Other languages
English (en)
Chinese (zh)
Inventor
八壁正巳
星野智久
池内直树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of CN1942769A publication Critical patent/CN1942769A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CNA2005800119289A 2004-11-02 2005-10-31 探针 Pending CN1942769A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004319661A JP2006132982A (ja) 2004-11-02 2004-11-02 プローブ
JP319661/2004 2004-11-02

Publications (1)

Publication Number Publication Date
CN1942769A true CN1942769A (zh) 2007-04-04

Family

ID=36319140

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800119289A Pending CN1942769A (zh) 2004-11-02 2005-10-31 探针

Country Status (5)

Country Link
US (1) US20070257692A1 (https=)
JP (1) JP2006132982A (https=)
KR (1) KR20070029140A (https=)
CN (1) CN1942769A (https=)
WO (1) WO2006049133A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102384992A (zh) * 2011-07-12 2012-03-21 日月光半导体制造股份有限公司 探针卡及其制作方法
CN102608364A (zh) * 2011-01-20 2012-07-25 励威电子股份有限公司 高频垂直式弹片探针卡结构
CN110196385A (zh) * 2018-02-27 2019-09-03 杰冯科技有限公司 用于测试装置的电触点组件
CN112424614A (zh) * 2018-07-18 2021-02-26 日本电产理德股份有限公司 探针、检查治具、检查装置以及探针的制造方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008268145A (ja) * 2007-04-25 2008-11-06 Micronics Japan Co Ltd プローブ組立体
JP2010539476A (ja) * 2007-09-13 2010-12-16 タッチダウン・テクノロジーズ・インコーポレーテッド 半導体装置テスト用分岐型プローブ
KR100984876B1 (ko) 2008-05-08 2010-10-04 한국기계연구원 가변강성 기능을 가진 수직형 미세 접촉 프로브
KR101044118B1 (ko) * 2010-11-25 2011-06-28 김재길 다층 캔틸레버를 갖는 프로브 카드
JP5745926B2 (ja) * 2011-03-29 2015-07-08 株式会社日本マイクロニクス プローブ装置
JP5968158B2 (ja) * 2012-08-10 2016-08-10 株式会社日本マイクロニクス コンタクトプローブ及びプローブカード
US9086433B2 (en) 2012-12-19 2015-07-21 International Business Machines Corporation Rigid probe with compliant characteristics
JP2015010980A (ja) * 2013-07-01 2015-01-19 三菱電機株式会社 プローブ装置
JP6337633B2 (ja) * 2014-06-16 2018-06-06 オムロン株式会社 プローブピン
DE102016004520A1 (de) * 2016-04-13 2017-10-19 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Kontaktstift und Testsockel mit Kontaktstiften
WO2018003507A1 (ja) * 2016-06-28 2018-01-04 株式会社日本マイクロニクス 電気的接続装置及び接触子
JP7393873B2 (ja) * 2019-03-29 2023-12-07 株式会社日本マイクロニクス 電気的接触子及びプローブカード

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0763548A (ja) * 1993-08-24 1995-03-10 Canon Inc カンチレバー型プローブ、及びそれを有する走査型トンネル顕微鏡並びに情報処理装置
JP2000055936A (ja) * 1998-08-12 2000-02-25 Tokyo Electron Ltd コンタクタ
JP3773396B2 (ja) * 2000-06-01 2006-05-10 住友電気工業株式会社 コンタクトプローブおよびその製造方法
JP2002340932A (ja) * 2001-05-14 2002-11-27 Micronics Japan Co Ltd 電気的接続装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102608364A (zh) * 2011-01-20 2012-07-25 励威电子股份有限公司 高频垂直式弹片探针卡结构
CN102384992A (zh) * 2011-07-12 2012-03-21 日月光半导体制造股份有限公司 探针卡及其制作方法
CN110196385A (zh) * 2018-02-27 2019-09-03 杰冯科技有限公司 用于测试装置的电触点组件
CN110196385B (zh) * 2018-02-27 2024-03-12 杰冯科技有限公司 用于测试装置的电触点组件
CN112424614A (zh) * 2018-07-18 2021-02-26 日本电产理德股份有限公司 探针、检查治具、检查装置以及探针的制造方法

Also Published As

Publication number Publication date
KR20070029140A (ko) 2007-03-13
JP2006132982A (ja) 2006-05-25
WO2006049133A1 (ja) 2006-05-11
US20070257692A1 (en) 2007-11-08

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication