CN1916575A - Beam-splitting method of transverse shearing in large shearing quantity, and transverse shearing beam-spliter for implementign the method - Google Patents
Beam-splitting method of transverse shearing in large shearing quantity, and transverse shearing beam-spliter for implementign the method Download PDFInfo
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- CN1916575A CN1916575A CN 200510043118 CN200510043118A CN1916575A CN 1916575 A CN1916575 A CN 1916575A CN 200510043118 CN200510043118 CN 200510043118 CN 200510043118 A CN200510043118 A CN 200510043118A CN 1916575 A CN1916575 A CN 1916575A
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Abstract
A horizontal shearing and beam spitting method of large shearing load includes making an incoming light be shot on semi transmission- semi reflection surface to form reflection beam and transmission beam, forming reflection beam to be an outgoing beam by reflection surface of said surface and transmission surface and forming transmission beam to be an outgoing beam by semi transmission-semi reflection surface and transmission surface for making two outgoing beams be parallel and optical path difference free mode and making two outgoing beams be two parallel coherent beams.
Description
Technical field
The present invention relates to a kind of lateral shear beam-splitting method and realize the lateral shearing beam-splitter of this method, be mainly used in lateral shearing interferometer, be applicable to the no index glass inteference imaging spectrometer of the static two-beam interference of high spectral resolution especially.
Background technology
Many no index glass inteference imaging spectrometers based on static double beam interferometer have appearred since the eighties.Typical static double beam interferometer has: based on the static Michelson interferometer of division of amplitude, see " static Fourier transform spectrometer; applied optics " [M.L.Junttila, Stationary Fourier Transform Spectrometer, AppliedOptics1992,21:4106～4112]; Distortion Mach-Zehnder interferometer, see " performance shortcomings of static Fourier transform spectrometer " [M.L.Junttila, J.Kauppinen, E.Ikone, Performance Limits of StationaryFourier Spectrometers, J.O.S.A (A), 1991,9:1457～1462]; The Sagnac interferometer is seen " fixing triangle Fourier transform spectrometer, applied optics " [J.G Hirschberg, etc., Pentaferometer:A solidSagnac Interferometer, Applied Optics, 1999,1:136～138]; Fresnel bimirror interferometer based on wavefront division, see " the wide scope edge array with Fresnel biprism and Mach-Zehnder interferometer; applied optics " [S.C.Leon, Broad Source Fringe Formation with a Fresnei Biprism and aMach-Zehnder Interferometer, Applied Optics, 1987,24:5259～5265].The interferogram that these static interferometers produce is the strength signal of space distribution, therefore do not have the index glass inteference imaging spectrometer might realize to the time become or the real-time monitoring of impulse radiation.Do not have moving component and scanning mechanism, make the structure of instrument become simple, compact, and stable, also reduced volume and weight simultaneously, reduced cost.
Lateral shearing beam-splitter is the core component of lateral shearing interferometer.The lateral shearing beam-splitter of Sagnac interferometer claims the Sagnac beam splitter again triangle circulation light path lateral shearing beam-splitter, and its structure can be made entity, so compact conformation, stable.But in this lateral shearing beam-splitter, two bundle coherent lights will pass through beam-splitting surface twice, have half luminous energy can return light source, and the utilization factor of luminous energy is lower.Distortion Mach-Zehnder interferometer, the principle of its lateral shearing beam-splitter be two bundle coherent lights all only once through beam-splitting surface, the utilization factor of luminous energy has been improved in no luminous energy back light source.But its lateral shearing beam-splitter can not be made entity, causes structure not compact, and less stable is unsuitable for the field or disturbs bigger environment to use.
The spectral resolution of above-mentioned several no index glass inteference imaging spectrometers is all lower.For improving shearing displacement, to produce high spectral resolution, it is very big that the volume of lateral shearing beam-splitter just need be done.
The researchist of U.S. jet propulsion laboratory JPL has proposed to receive the technical scheme through the interference signal of spatial modulation with big specification, broadband quantum trap infrared detector array, its face battle array specification is 488 * 640, interference system adopts the structure of similar Sagnac interferometer, see " the infrared monthly magazine 2002 (9) of Fourier transform spectrometer technical progress overview, 38-41 ".In the prototype of the Mars aqueous vapor detection system that it has been realized, lateral shearing beam-splitter has used the shearing Amici prism, this instrument volume be under the same parameter Michelson interferometer, Sagnac interferometer or Wollaston prism-type interferometer 1/40th, heavily about 10kg, at shearing displacement is under the situation of 25mm, and spectral resolution can reach 1cm
-1, capacity usage ratio also increases substantially.But its lateral shearing beam-splitter is assembled by 3 blocks of glass, and the requirement of process technologies such as its assembling, plated film is very strict, and difficulty of processing is also bigger.
Summary of the invention
The object of the present invention is to provide a kind of big shearing displacement lateral shear beam-splitting method and realize the lateral shearing beam-splitter of this method, it has solved compact conformation in the background technology but the efficiency of light energy utilization and spectral resolution are low; Or the capacity usage ratio height, compact conformation, the spectral resolution height, but process technology is required too high technical matters.
Technical solution of the present invention is:
A kind of big shearing displacement lateral shear beam-splitting method, its special character is: the performing step of this method is as follows
1) incident light I
RIncide on semi-transparent semi-reflecting (DG) that becomes miter angle with horizontal optical axis;
2) semi-transparent semi-reflecting (DG) is with incident light I
RBe divided into folded light beam I
F0With transmitted light beam I
T0
(1) folded light beam I
F0
1. folded light beam I
F0Be reflected onto and be positioned at folded light beam I
F0On the light path, on the reflecting surface (AB) parallel with semi-transparent semi-reflecting (DG);
2. the folded light beam I that the face (AB) that is reflected reflects
F1, be reflected onto and be positioned at folded light beam I
F1Become on the reflecting surface (BC) of an angle of 90 degrees on the light path, with reflecting surface (AB);
3. the folded light beam I that the face (BC) that is reflected reflects
F2,, form emergent light I by transmission plane (DF) outgoing
FC
(2) transmitted light beam I
T0
1. transmitted light beam I
T0See through semi-transparent semi-reflecting (DG), arrival is positioned at transmitted light beam I
T0On the light path, the reflecting surface (EF) parallel with reflecting surface (BC);
2. the folded light beam I that the face (EF) that is reflected reflects
T1,, form emergent light I by transmission plane (DF) outgoing
TC
3) folded light beam I
F0, folded light beam I
F1, folded light beam I
F2Light path and with transmitted light beam I
T0, folded light beam I
T1Light path and no optical path difference; Folded light beam I
F2With folded light beam I
T1Parallel;
4) emergent light I
FCWith emergent light I
TCBe the parallel coherent lights of two bundles.
A kind of lateral shearing beam-splitter of realizing above-mentioned big shearing displacement lateral shear beam-splitting method, the optical glass assembly unit that is equated by thickness constitutes, and its special character is: described optical glass comprises a trapezoidal glass 1 and a triangle glass 2; Described trapezoidal glass 1 is right-angled trapezium, and its oblique waist ADA ' D ' is 45 degree with the angle of the CDC ' D ' that goes to the bottom; Described triangle glass 2 is isosceles right triangle;
A waist DED ' E ' of go to the bottom CDC ' D ' and the triangle glass 2 of described trapezoidal glass 1 glues together and is one, and the oblique waist ADA ' D ' of trapezoidal glass 1 is vertical with the end DFD ' F ' of triangle glass 2;
The oblique waist ADA ' D ' of described trapezoidal glass 1 is incident surface A DA ' D ', which is provided with incident light I
RIncident area MNM ' N '; The bonding position of go to the bottom CDC ' D ' and the waist DED ' E ' of triangle glass 2 of described trapezoidal glass 1 is the antireflection surfaces CGC ' G ' that is coated with semi-transparent semi-reflecting DGD ' G ' of semi-transparent semi-reflecting film and is coated with anti-reflection film, and the position of described semi-transparent semi-reflecting DGD ' G ' is corresponding with incident area MNM ' N '; Upper base ABA ' the B ' of described trapezoidal glass 1 is the reflecting surface ABA ' B ' that is coated with reflectance coating, and its right angle waist BCB ' C ' is the reflecting surface BCB ' C ' that is coated with reflectance coating; Another waist EFE ' F ' of described triangle glass 2 is the reflecting surface EFE ' F ' that are coated with reflectance coating, and its end DFD ' F ' is transmission plane DFD ' F '.
Above-mentioned trapezoidal glass 1 be that upper base ABA ' B ' is long with its right angle waist BCB ' C ' appearance etc. than the reasonable size ratio, the CDC ' D ' that goes to the bottom length is the twice of upper base ABA ＇ B ' length.
The thickness of above-mentioned trapezoidal glass 1 and triangle glass 2 glass and qualification incident light I
RThe length of slit corresponding, promptly by incident light I
RThe length of slit determine.
Above-mentioned optical axis OO ' to be being positioned at the center of described incident area MNM ' N ', and is advisable perpendicular to described incident surface A DA ' D '.
The big I of above-mentioned semi-transparent semi-reflecting DGD ' G ' and incident light I
RThe maximum field of view angle corresponding, promptly by incident light I
RThe maximum field of view angle determine.
The centre-height of above-mentioned incident area MNM ' N ' should make the reflection ray of edge field angle light can not reflex to incident surface A DA ' D ' or reflecting surface BCB ' C '.
The width of above-mentioned incident area MNM ' N ' can be by limiting incident light I
RSlit and spacing and the incident light I of incident surface A DA ' D '
RField angle determine.
The present invention has the following advantages:
1. adopt method of the present invention, the structure of lateral shearing beam-splitter can be made entity, and structure is simpler, compact, and weight is lighter, and cost is also relatively low.
2. under identical shearing displacement required, it was used for lateral shearing interferometer, and volume is 1/40th of Michelson interferometer, Sagnac interferometer or a Wollaston prism-type interferometer.
3. two bundle coherent lights only pass through beam-splitting surface once, no luminous energy back light source, and the efficiency of light energy utilization can double than the lateral shearing beam-splitter of Sagnac interferometer.
4. very big horizontal shear capacity can be produced, thereby high spectral resolution can be produced.
5. lateral shearing beam-splitter of the present invention is assembled by two blocks of glass, to process technology, process equipment require relatively low.
6. by the structure of two glass assemblings, difficulty of processing is lower, and technical parameter is easier to be guaranteed to realize, thereby has better stability.
7. antijamming capability is strong, is applicable to the field or disturbs bigger environment.
Description of drawings
Fig. 1 is a principle schematic of the present invention;
Fig. 2 is the structural representation of lateral shearing beam-splitter of the present invention;
Fig. 3 is for adopting the embodiment synoptic diagram of lateral shearing interferometer of the present invention.
Drawing reference numeral explanation: the trapezoidal glass of 1-, 2-triangle glass, 3-lateral shearing beam-splitter, 4-fourier transform lens, 5-cylindrical mirror, 6-CCD detector, 7-target, the preposition auxiliary optics of 8-, 9-supplementary lens, 10-slit, 11-computer processing system.
Embodiment
The present invention can be divided into incident light the parallel coherent light of two bundles.
Referring to Fig. 1, lateral shear beam-splitting method performing step of the present invention is as follows
1. incident light I
RIncide on semi-transparent semi-reflecting the DG that becomes miter angle with horizontal optical axis.
2. a semi-transparent semi-reflecting DG is with incident light I
RBe divided into folded light beam I
F0With transmitted light beam I
T0
1) folded light beam I
F0
(1) folded light beam I
F0Be reflected onto and be positioned at folded light beam I
F0Light path on, on the reflecting surface AB parallel with semi-transparent semi-reflecting DG.That is, reflection face AB also becomes miter angle with horizontal optical axis.
(2) the folded light beam I that face AB reflects that is reflected
F1, be reflected onto and be positioned at folded light beam I
F1Light path on, become on the reflecting surface BC of an angle of 90 degrees with reflecting surface AB.That is, reflection face BC is vertical with semi-transparent semi-reflecting face DG.
(3) the folded light beam I that face BC reflects that is reflected
F2,, form emergent light I by transmission plane DF outgoing
FC
2) transmitted light beam I
T0
(1) transmitted light beam I
T0See through semi-transparent semi-reflecting DG, arrival is positioned at transmitted light beam I
T0Light path on, the reflecting surface EF parallel with reflecting surface BC.That is, reflection face EF is vertical with semi-transparent semi-reflecting face DG.
(2) the folded light beam I that face EF reflects that is reflected
T1,, form emergent light I by transmission plane DF outgoing
TC
3. folded light beam I
F0, folded light beam I
F1, folded light beam I
F2Light path and with transmitted light beam I
T0, folded light beam I
T1Light path and no optical path difference; Folded light beam I
F2With folded light beam I
T1Parallel.
4. emergent light I
FCWith emergent light I
TCBe the parallel coherent lights of two bundles.
Referring to Fig. 2, realize the lateral shearing beam-splitter of the inventive method, mainly the optical glass assembly unit that is equated by two thickness constitutes, i.e. a trapezoidal glass 1 and a triangle glass 2.The thickness of glass is by lateral shearing beam-splitter incident light I
RThe length of slit determine.Trapezoidal glass 1 is right-angled trapezium, is upper base ABA ' B ' length and right angle waist BCB ' C ' appearance etc. than rational structure, and the CDC ' D ' that goes to the bottom length is the long twice of upper base ABA ' B '.Triangle glass 2 is isosceles right triangle.
A waist DED ' E ' of go to the bottom CDC ' D ' and the triangle glass 2 of trapezoidal glass 1 is bonded as one, and the oblique waist ADA ' D ' of trapezoidal glass 1 is vertical with the end DFD ' F ' of triangle glass 2.
The oblique waist ADA ' D ' of trapezoidal glass 1 is incident surface A DA ' D ', which is provided with the incident area MNM ' N ' that allows light incident.The width of incident area MNM ' N ' is by spacing and the incident light I of slit 2 with incident surface A DA ' D '
RField angle decision, the centre-height of incident area MNM ' N ' should make the reflection ray of edge field angle light can not reflex to incident surface A DA ' D ' or reflecting surface BCB ' C ', and the transmitted ray of edge field angle light can directly not arrive transmission plane DFD ' F ' transmission and goes out.
On go to the bottom CDC ' D ' and the bonding position of the waist DED ' E ' of triangle glass 2 of trapezoidal glass 1, be the antireflection surfaces CGC ' G ' that is coated with semi-transparent semi-reflecting DGD ' G ' of semi-transparent semi-reflecting film and is coated with anti-reflection film.The position of semi-transparent semi-reflecting DGD ' G ' is corresponding with incident area MNM ' N ', and the size of semi-transparent semi-reflecting DGD ' G ' is by incident light I
RThe decision of maximum field of view angle.Upper base ABA ' the B ' of trapezoidal glass 1 is for being coated with the reflecting surface ABA ' B ' of reflectance coating, and right angle waist BCB ' C ' is for being coated with the reflecting surface BCB ' C ' of reflectance coating.
Another waist EFE ' F ' of triangle glass 2 is for being coated with the reflecting surface EFE ' F ' of reflectance coating, and its end DFD ' F ' is transmission plane DFD ' F '.
Optical axis OO ' is positioned at the center of incident area MNM ' N ' of incident surface A DA ' D ', and perpendicular to incident surface A DA ' D '.
The size of trapezoidal glass 1 and triangle glass 2 should guarantee the folded light beam I that is told by semi-transparent semi-reflecting DGD ' G '
F0With transmitted light beam I
T0, by transmission plane DFD ' F ' outgoing the time, do not produce optical path difference.
Referring to Fig. 1,2, the course of work of the present invention is as follows:
1. incident light I
RShine on permission incident area MNM ' N ' of incident surface A DA ' D '.
2. incident light I
RArrive semi-transparent semi-reflecting DGD ' G ' by incident area MNM ' N ', be divided into folded light beam I
F0With transmitted light beam I
T0
1) folded light beam I
F0: be reflected to reflecting surface ABA ' B '; Be reflected to reflecting surface BCB ' C ' again, be reflected onto antireflection surfaces CGC ' G ' again, arrive transmission plane DFD ' F ' by antireflection surfaces CGC ' G ', last, DFD ' F ' transmits beam splitter by transmission plane, forms emergent light I
FC
2) transmitted light beam I
T0: see through semi-transparent semi-reflecting DGD ' G ', arrive reflecting surface EFE ' F ', be reflected to transmission plane DFD ' F ', DFD ' F ' transmits beam splitter by transmission plane, forms emergent light I
TC
3. emergent light I
FCWith emergent light I
TCBe the parallel coherent light of two bundles.
Referring to Fig. 3, adopt the principle of work of lateral shearing interferometer of the present invention as follows:
1. the parallel beam from target 7 passes through supplementary lens 9, converges to slit 10 places.If the light of target 7 is non-parallel light, need to be translated into directional light through preposition auxiliary optics 8.Slit 10 is positioned at the focal position of supplementary lens 9.
2. pass through the light beam irradiates of slit 10 to lateral shearing beam-splitter 3.
3. lateral shearing beam-splitter 3 is divided into the parallel coherent light of two bundles with incident light.
4. the parallel coherent light of two bundles is assembled through cylindrical mirror 5 through fourier transform lens 4 Fourier transforms, is received by ccd detector 6, forms the interference light spectrogram of target 7, and 11 conversion of machine disposal system are reduced into the image of target 7 as calculated.
Claims (8)
1. one kind big shearing displacement lateral shear beam-splitting method, it is characterized in that: the performing step of this method is as follows
1) incident light I
RIncide on semi-transparent semi-reflecting (DG) that becomes miter angle with horizontal optical axis;
2) semi-transparent semi-reflecting (DG) is with incident light I
RBe divided into folded light beam I
F0With transmitted light beam I
T0
(1) folded light beam I
F0
1. folded light beam I
F0Be reflected onto and be positioned at folded light beam I
F0On the light path, on the reflecting surface (AB) parallel with semi-transparent semi-reflecting (DG);
2. the folded light beam I that the face (AB) that is reflected reflects
F1, be reflected onto and be positioned at folded light beam I
F1Become on the reflecting surface (BC) of an angle of 90 degrees on the light path, with reflecting surface (AB);
3. the folded light beam I that the face (BC) that is reflected reflects
F2,, form emergent light I by transmission plane (DF) outgoing
FC
(2) transmitted light beam I
T0
1. transmitted light beam I
T0See through semi-transparent semi-reflecting (DG), arrival is positioned at transmitted light beam I
T0On the light path, the reflecting surface (EF) parallel with reflecting surface (BC);
2. the folded light beam I that the face (EF) that is reflected reflects
T1,, form emergent light I by transmission plane (DF) outgoing
TC
3) folded light beam I
F0, folded light beam I
F1, folded light beam I
F2Light path and with transmitted light beam I
T0, folded light beam I
T1Light path and no optical path difference; Folded light beam I
F2With folded light beam I
T1Parallel;
4) emergent light I
FCWith emergent light I
TCBe the parallel coherent lights of two bundles.
2. lateral shearing beam-splitter of realizing the described big shearing displacement lateral shear beam-splitting method of claim 1, the optical glass assembly unit that is equated by thickness constitutes, and it is characterized in that: described optical glass comprises trapezoidal glass (1) and a triangle glass (2); Described trapezoidal glass (1) is right-angled trapezium, and its oblique waist (ADA ' D ') is 45 degree with the angle of going to the bottom (CDC ' D '); Described triangle glass (2) is isosceles right triangle;
Described trapezoidal glass (1) go to the bottom (CDC ' D ') and a waist (DED ' E ') of triangle glass (2) gummed is one, and the oblique waist (ADA ' D ') of trapezoidal glass (1) is vertical with the end (DFD ' F ') of triangle glass (2);
The oblique waist (ADA ' D ') of described trapezoidal glass (1) is the plane of incidence (ADA ' D '), which is provided with the incident area (MNM ' N ') of incident light IR; Described trapezoidal glass (1) go to the bottom (CDC ' D ') and the bonding position of the waist of triangle glass (2) (DED ' E ') is the antireflection surfaces (CGC ' G ') that is coated with semi-transparent semi-reflecting (DGD ' G ') of semi-transparent semi-reflecting film and is coated with anti-reflection film, (MNM ' N ') is corresponding for the position of described semi-transparent semi-reflecting (DGD ' G ') and incident area; The upper base (ABA ' B ') of described trapezoidal glass (1) is the reflecting surface (ABA ' B ') that is coated with reflectance coating, and the right angle waist (BCB ' C ') of this trapezoidal glass (1) is the reflecting surface (BCB ' C ') that is coated with reflectance coating; Another waist (EFE ' F ') of described triangle glass (2) is the reflecting surface (EFE ' F ') that is coated with reflectance coating, and the end (DFD ' F ') of this triangle glass (2) is transmission plane (DFD ' F ').
3. lateral shearing beam-splitter according to claim 2, it is characterized in that: the upper base (ABA ' B ') of described trapezoidal glass (1) is long with its right angle waist (BCB ' C ') appearance etc., and trapezoidal glass (1) is gone to the bottom (CDC ' D ') that length is the twice that upper base (ABA ' B ') is grown for this.
4. according to claim 2 or 3 described lateral shearing beam-splitters, it is characterized in that: the thickness of described trapezoidal glass (1) and triangle glass (2) glass and qualification incident light I
RThe length of slit corresponding.
5. lateral shearing beam-splitter according to claim 4 is characterized in that: described optical axis OO ' is positioned at the center of described incident area (MNM ' N '), and perpendicular to the described plane of incidence (ADA ' D ').
6. lateral shearing beam-splitter according to claim 5 is characterized in that: the size of described semi-transparent semi-reflecting (DGD ' G '), and with incident light I
RThe maximum field of view angle corresponding.
7. lateral shearing beam-splitter according to claim 6 is characterized in that: being centered close to the reflection ray that makes edge field angle light and can not reflexing to the plane of incidence (ADA ' D ') or reflecting surface (BCB ' C ') position of described incident area (MNM ' N ').
8. lateral shearing beam-splitter according to claim 7 is characterized in that: the width of described incident area (MNM ' N ') is by limiting incident light I
RSlit and the spacing and the incident light I of the plane of incidence (ADA ' D ')
RField angle determine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100431183A CN100470217C (en) | 2005-08-18 | 2005-08-18 | Beam-splitting method of transverse shearing in large shearing quantity, and transverse shearing beam-spliter for implementign the method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100431183A CN100470217C (en) | 2005-08-18 | 2005-08-18 | Beam-splitting method of transverse shearing in large shearing quantity, and transverse shearing beam-spliter for implementign the method |
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| CN1916575A true CN1916575A (en) | 2007-02-21 |
| CN100470217C CN100470217C (en) | 2009-03-18 |
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|---|---|---|---|
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100456080C (en) * | 2006-12-01 | 2009-01-28 | 上海微电子装备有限公司 | Constant-offset collimated output beam splitter |
| CN103063307A (en) * | 2012-12-28 | 2013-04-24 | 南京理工大学 | Image plane interference microimaging device and method |
| CN105629485A (en) * | 2016-01-08 | 2016-06-01 | 西安交通大学 | Width field, achromatism transverse shearing birefringence beam splitter |
| CN107941329A (en) * | 2017-10-13 | 2018-04-20 | 华东师范大学 | A kind of high-order interferometer |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2710785A1 (en) * | 1977-03-11 | 1978-09-14 | Max Planck Gesellschaft | Laser light pulse splitter - uses prismatic reflectors set according to time delay required between two components |
| JP4077672B2 (en) * | 2002-07-12 | 2008-04-16 | 日本電産コパル株式会社 | Imaging device |
-
2005
- 2005-08-18 CN CNB2005100431183A patent/CN100470217C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100456080C (en) * | 2006-12-01 | 2009-01-28 | 上海微电子装备有限公司 | Constant-offset collimated output beam splitter |
| CN103063307A (en) * | 2012-12-28 | 2013-04-24 | 南京理工大学 | Image plane interference microimaging device and method |
| CN105629485A (en) * | 2016-01-08 | 2016-06-01 | 西安交通大学 | Width field, achromatism transverse shearing birefringence beam splitter |
| CN105629485B (en) * | 2016-01-08 | 2018-07-17 | 西安交通大学 | A kind of wide field, achromatism lateral shear birefringent beam-splitter |
| CN107941329A (en) * | 2017-10-13 | 2018-04-20 | 华东师范大学 | A kind of high-order interferometer |
| CN107941329B (en) * | 2017-10-13 | 2019-12-27 | 华东师范大学 | High-order interferometer |
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| Publication number | Publication date |
|---|---|
| CN100470217C (en) | 2009-03-18 |
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