CN1715870A - Phase object scan imaging method and its treating device - Google Patents
Phase object scan imaging method and its treating device Download PDFInfo
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- CN1715870A CN1715870A CN 200510034208 CN200510034208A CN1715870A CN 1715870 A CN1715870 A CN 1715870A CN 200510034208 CN200510034208 CN 200510034208 CN 200510034208 A CN200510034208 A CN 200510034208A CN 1715870 A CN1715870 A CN 1715870A
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Abstract
The present invention discloses a kind of phase object scanning and imaging method and treating device. Based on double point source light beam interference principle, translating scan table and phase sample are set near two maximal light spots, and through measurement of the period and dislocation of the interference fringe and the point-by-point scanning of the phase object, the phase distribution of the phase object is obtained. The method has high phase resolution and high precision, and is easy to form the pseudo color of the phase object. By means of computer image treatment of re-construction of phase object or optical path, the present invention can realize automatic measurement and display. The present invention is suitable for measurement of phase object with great phase variation range, partial absorption or weak scattering, and may be also used in the quantitative measurement of film thickness and refractive index.
Description
Technical field
The invention belongs to the phase object scan imaging field, relate in particular to phase object scan imaging method and treating apparatus thereof.
Background technology
The observation of biology and medical sample, demonstration and record are the problems that people inquire into and study always, particularly to the imaging of transparent or weak absorption transparent substance or biological living sample, still among constantly exploring.Common microscopy and scanning imaging technology are primarily aimed at the sample that absorbs or reflect, or observing again after the transparent object dyeing or showing that application is restricted.Though prior art has developed phase-contrast method, dark field method and the knife-edge method etc. that are applicable to phase object video picture and observation, the phase change that these methods only are confined to phase object is less than 1 situation, and is undesirable to the application of the bigger object of phase change.
Summary of the invention
Problem and deficiency at the prior art existence, the invention provides a kind of phase object scan imaging method and treating apparatus thereof, this method is by carrying out point by point scanning to phase object, adopt the principle of two-beam interference to obtain object each point position phase, relend the position that helps computer image processing technology the to realize phase object reconstruct that distributes mutually, distribution and brightness or gray scale or color distribution have corresponding relation mutually to make the position.
Measurement and image reconstruction or demonstration that the automatic completion bit phase object position of this method energy distributes mutually, the big or small mutually image intensity with demonstration in position has linear relationship, and the phase change scope reaches 2 π, and the phase discrimination rate is
Or
, can realize transparent substance or weak absorption transparent substance so that partially absorb or the imaging and the observation of weak scattering object.
This method may further comprise the steps:
(1), handles a branch of desirable directional light of formation through beam treatment mechanism by light emitted one monochromic beam;
(2) directional light is after the Double sided mirror reflection, forming two bundles has the directional light of less angle theta, forms two very big luminous points by convex lens on its frequency plane, and occurs the two-beam interference striate region a long way off, place striped at interference region and receive and measurement mechanism, obtain the position phase of phase object point;
(3) on the frequency plane of convex lens, place bidimensional fine motion translation scan sample stage by step motor control, phase object is placed on the sample stage, regulate the phase object position, make one of them very big luminous point by phase object, successively measure luminous point not by and the magnitude of misalignment and cycle of interference fringe during by phase object;
(4) point by point scanning phase object is a basis with the magnitude of misalignment of interference fringe, utilizes image processing techniques, realizes reconstruct and demonstration that the phase object position distributes mutually.
In the said method, beam treatment mechanism comprises beam expanding lens, pinhole filter and collimation lens in the step (1), and they are arranged along light beam working direction coaxial successively (optical axis).Monochromatic light is handled through beam treatment mechanism, and the process that forms directional light is as follows: monochromatic light at first expands bundle through beam expanding lens, realizes low-pass filtering through a pinhole filter, forms directional light through collimation lens again.
Directional light forms the directional light that two bundles have less angle theta in the step (2) after the Double sided mirror reflection, angle theta can change by the angle of regulating double mirror, twin-beam forms two very big luminous points on the convex lens frequency plane, the scope in its interference fringe district is bigger, also can reduce the distance between interference fringe observation district and the phase object by the method for placing imaging len, make the device compactness, be convenient to lay striped and receive and measurement mechanism.
In step (3), bidimensional fine motion translation scan sample stage has following function: manually reach autoscan and take into account.Manual adjustments is used for the adjusting and the location of large-scale phase object position (comprising along optical axis direction), autoscan is realized by the stepper motor of computer control segmentation, the phase object selection area is carried out point by point scanning, and step pitch can be regulated in 1 μ m～100 μ m, and sweep limit is greater than 10mm.The phase object strictness is positioned on the frequency plane of convex lens, occurs the interference fringe by sinusoidal rule variation like this in the two-beam interference striate region, and its interval or cycle can be measured by striped reception and measurement mechanism.In order to reduce error, the unevenness and the refractive index of the wave carrier piece of landing bit phase object also there is requirement.Light path that causes by wave carrier piece or position rise and fall mutually require less than
Or
Because phase object and wave carrier piece all are transparent, allow two very big luminous points simultaneously by wave carrier piece earlier, with the cycle that striped receives and measurement mechanism is measured interference fringe; Along moving phase object perpendicular to optical axis direction, make one of them big luminous point see through phase object, and another big luminous point still sees through wave carrier piece then, at this moment, interference fringe can be subjected to displacement, and receives with striped and the magnitude of misalignment of measurement mechanism measurement striped again.When the scope interscan of big luminous point at phase object, the striped magnitude of misalignment of each point is different, and its variation has reflected that the position phase and the light path of object distribute.
In step (4), the position phase φ of certain point on the phase object (x, y) with the magnitude of misalignment α of interference fringe (x, y) and the pass of fringe period t be:
(x y) has reflected object position phase distribution situation to α in (1) formula.According to interference of light theory and simple calculating, the light path of twice measurement phase object introducing is changed into
As seen α (x, y) also reflected object light path distribution Δ (x, y), d in (2) formula (x, y) and n (x, y) be respectively the expression object thickness distribution and index distribution,
If n (x, y)=n
0, then
α (x, y) reflected phase object thickness distribution d (x, y).
If d (x, y)=d
0, then
(x, y) (x's α y) is directly proportional, and has reflected the index distribution of phase object with the index distribution n of object.Therefore, in general, (x y) has reflected the symphyogenetic position of interior of articles refractive index and thickness phase distribution situation to α.If make α (x, y) with brightness I (x, y) linear, promptly
(5) K is a proportionality constant in the formula.Like this, (x, (x, (x's Luminance Distribution I y) distributes, and has realized position and the conversion of brightness and the image reconstruction and the demonstration of phase object for distribution y) or light path Δ y) to have reflected the position phase Φ of phase object linearly.
(x, precision y) also will be utilized various Image Acquisition and treatment technology, as contrast enhancing, edge sharpening, curve fitting, stripe displacement interpretation, synthesizing of image to interferogram reaching reconstruct in order to improve measurement α.
The phase object reconstructed image minimum lateral resolution of the inventive method is mainly determined by the aperture of convex lens.
According to Rayleigh criterion
(6) in the formula, δ is minimum resolution distance, and λ is the illumination monochromatic wavelength, and f and D are respectively the focal length and the diameter of convex lens.
The image resolution ratio distance of actual displayed is bigger than δ, also relevant with the actual step resolution of bidimensional fine motion translation scan sample stage.
For realizing the inventive method, must adopt custom-designed phase object scan imaging treating apparatus.Phase object scan imaging treating apparatus of the present invention comprises that light source, convex lens, striped receive and measurement mechanism, also comprise beam expanding lens, pinhole filter, collimation lens, Double sided mirror, bidimensional fine motion translation scan sample stage, stepper motor and computing machine; Along the light beam working direction, coaxial successively (optical axis) arranged light source, beam expanding lens, pinhole filter, collimation lens, Double sided mirror, convex lens, bidimensional fine motion translation scan sample stage and striped and received and measurement mechanism, each parts is fixed by optical bench or optical table, and distance between the adjacent component and position can be regulated; Striped reception and measurement mechanism connect with computing machine, and computing machine, stepper motor, bidimensional fine motion translation scan sample stage connect successively.
Because the scope in interference fringe district is bigger, so also can reduce the distance between interference fringe observation district and the phase object by the method for between bidimensional fine motion translation scan sample stage and striped reception and measurement mechanism, placing imaging len, make the device compactness, be convenient to lay striped and receive and measurement mechanism.
In said apparatus, the mutual edge distance mutually of beam expanding lens and collimation lens equals their focal length sum, and by the two beam angle θ of Double sided mirror reflection and the focal distance f of convex lens following relation is arranged: x=θ f, x is the distance of two very big luminous points on the frequency plane in the formula.
Principle of the present invention is: the twin-beam scioptics that produced by Double sided mirror form two very big luminous points, on frequency plane, place bidimensional fine motion translation scan platform and phase object, make one of them maximal point pass through phase object, measure the magnitude of misalignment and the cycle of interference fringe at the interference region of twin-beam, the position that obtains phase object distributes mutually, by the image processing techniques realization phase object position phase of computing machine or the reconstruct of light path, obtain two dimensional imagings of phase object.
The present invention has the following advantages and beneficial effect:
(1) because autoscan realizes that by the stepper motor of computer control segmentation step pitch can be regulated in 1 μ m～100 μ m, sweep limit is greater than 10mm, so the phase discrimination rate height of this method, precision reaches
Or
(2) this method is applicable to the bigger phase object of phase change scope and partially absorbs or the phase object of weak scattering, and the position distributes mutually and image brightness distribution can keep good linear relationship;
(3) this method can obtain the thickness distribution or the index distribution of phase object, and can be used for the quantitative measurment of film thickness or refractive index;
(4) the present invention is easy to realize the virtual-colorizing technique of phase object, and the image processing techniques by computing machine realizes the phase object position mutually or the reconstruct of light path, can realize measuring and the robotization of procedure for displaying;
(5) treating apparatus of the present invention is compact to design, and is easy to adjust, is easy to observe, and cost is lower.
Description of drawings
Fig. 1 is the process block scheme of phase object scan imaging method of the present invention;
Fig. 2 is the structural representation (except that optical bench or optical table) of first kind of embodiment of phase object scan imaging treating apparatus of the present invention;
Fig. 3 is the structural representation (except that optical bench or optical table) of second kind of embodiment of phase object scan imaging treating apparatus of the present invention;
Fig. 4 is the structural representation (except that optical bench or optical table) of the third embodiment of phase object scan imaging treating apparatus of the present invention.
Among the figure: 1-light source 2-beam expanding lens 3-pinhole filter 4-collimation lens 5-Double sided mirror 6-convex lens 7-bidimensional fine motion translation scan sample stage 8-striped receives and measurement mechanism 9-stepper motor 10-computing machine 11-phase object
Among Fig. 3: 12 is among imaging len Fig. 4: 13 are convex lens
Embodiment
In order to understand the present invention better, the present invention is done to describe further below in conjunction with accompanying drawing.
As shown in Figure 1, the inventive method comprises the steps:
(1), handles a branch of desirable directional light of formation through beam treatment mechanism by light emitted one monochromic beam; (2) directional light is after the Double sided mirror reflection, forming two bundles has the directional light of less angle theta, forms two very big luminous points by convex lens on its frequency plane, and occurs the two-beam interference striate region a long way off, place striped at interference region and receive and measurement mechanism, obtain the position phase of phase object point; (3) on the frequency plane of convex lens, place bidimensional fine motion translation scan sample stage by step motor control, phase object is placed on the sample stage, regulate the phase object position, make one of them very big luminous point by phase object, successively measure luminous point not by and the magnitude of misalignment and cycle of interference fringe during by phase object; (4) point by point scanning phase object is a basis with the magnitude of misalignment of interference fringe, utilizes image processing techniques, realizes reconstruct and demonstration that the phase object position distributes mutually.
Fig. 2 is a kind of exemplary embodiment of phase object scan imaging treating apparatus of the present invention, and this device comprises that light source 1, beam expanding lens 2, pinhole filter 3, collimation lens 4, Double sided mirror 5, convex lens 6, bidimensional fine motion translation scan sample stage 7, striped receive and measurement mechanism 8, stepper motor 9 and computing machine 10; Along the light beam working direction, coaxial successively (optical axis) arranging light source 1, beam expanding lens 2, pinhole filter 3, collimation lens 4, Double sided mirror 5, convex lens 6, bidimensional fine motion translation scan sample stage 7, striped receives and measurement mechanism 8, the monochromic beam that its mutual alignment guarantees to be launched by light source 1 is through beam expanding lens 2, pinhole filter 3 and collimation lens 4 are handled, form a branch of directional light, after Double sided mirror 5 reflections, form the directional light incident convex lens 6 that two bundles have less angle theta, two very big luminous points appear on the frequency plane of convex lens 6, and by being positioned over the phase object 11 on the bidimensional fine motion translation scan sample stage 7, built-in striped receives and measurement mechanism 8 in the speckle pattern interferometry district, each parts is fixed by optical bench or optical table, and distance between the adjacent component and position can be regulated; Striped receives and measurement mechanism 7 connects with computing machine 10, and computing machine 10, stepper motor 9, bidimensional fine motion translation scan sample stage 7 connect successively.
The mutual edge distance mutually of beam expanding lens 2 and collimation lens 4 equals their focal length sum, and by the two beam angle θ of Double sided mirror 5 reflections and the focal distance f of convex lens 6 following relation is arranged: x=θ f, x is the distance of two very big luminous points on the frequency plane in the formula.
Light source 1 is a monochromatic source, can adopt all kinds of low-power lasers, as He-Ne laser instrument and semiconductor laser, also can adopt traditional light source to obtain through color filter or monochromator splitting, as incandescent lamp, xenon lamp and mercury lamp etc.; Collimation lens 4 and beam expanding lens 2 constitute telescopic system, obtain a branch of directional light; It is that several micron is made to the aperture of tens microns that pinhole filter 3 can be stamped diameter by the sheet metal of black, make directional light do not have in disturb and hot spot more even; Double sided mirror 5 is made by coated glass or sheet metal, and their angle can be finely tuned, and obtains the directional light that two bundles have little angle; Convex lens 6 can be made by glass, fiber or other transparent materials; Bidimensional fine motion translation scan sample stage 7 is driven by computing machine 10 and stepper motor 9, can be along x and y scanning direction or fine motion, and its scanning accuracy and mode are by computer control; Striped receives and measurement mechanism 8 is made up of one dimensional linear array or bidimensional face battle array photodetector or camera (as CCD or SSPD etc.) and adjusting and fixed mechanism; Whole phase object scan imaging system can be designed to small-sized special intelligent instrument, so that install, adjust and use.
This device light path can be adjusted by following step: it is parallel with optical bench or optical table at first to regulate light beam, makes beam expanding lens 2, collimation lens 4 and convex lens 6 coaxial; Regulate the mutual alignment of beam expanding lens 2 and collimation lens 4, insert pinhole filter 3, obtain a branch of uniform directional light, regulate the angle of Double sided mirror 5, the distance of two very big luminous points on convex lens 6 frequency planes is fit to, places striped at interference region and receive and measurement mechanism 8; On bidimensional fine motion translation scan sample stage 7, place phase object 11 at last, finish the scanning process line data of going forward side by side automatically by computing machine and handle.
Fig. 3 is second kind of embodiment of device of the present invention, has Duoed an imaging len 12 than Fig. 2.Promptly bidimensional fine motion translation scan sample stage 7 and striped receive and measurement mechanism 8 between place imaging len 12, the size of conveniently adjusted interference fringe is also carried out pre-service to striped, makes the device compactness, is convenient to lay striped and receives and measurement mechanism.
Fig. 4 is the third embodiment of device of the present invention, has lacked convex lens 6 than Fig. 2, and collimation lens 4 is changed into convex lens 13, and convex lens 13 existing change actions have the effect of optically focused again, is equivalent to the effect of collimation lens 4 and convex lens 6 among Fig. 1.Present embodiment is simple more, compactness and miniaturization.
Said method and three kinds of embodiment are according to double point source beam interference principle, near two very big luminous points, place translation scan platform and position phase sample, utilize to measure the cycle and the magnitude of misalignment of interference fringe, by to phase object point by point scanning, and the position that obtains phase object distributes mutually or light path distributes.
In a word; enforcement of the present invention is not limited to such scheme; as long as according to double point source beam interference principle; near two very big luminous points, place translation scan platform and position phase sample; utilize cycle and the magnitude of misalignment of measuring interference fringe; by to phase object point by point scanning, and obtain the position distributes mutually or light path distributes method, device and the system of phase object, all belong to protection scope of the present invention.
Claims (9)
1. phase object scan imaging method is characterized in that may further comprise the steps:
The first step by light emitted one monochromic beam, is handled a branch of desirable directional light of formation through beam treatment mechanism;
Second step, directional light is after the Double sided mirror reflection, forming two bundles has the directional light of less angle theta, on its frequency plane, form two very big luminous points by convex lens, and the two-beam interference striate region appears a long way off, place striped at interference region and receive and measurement mechanism, obtain the position phase of phase object point;
The 3rd step, on the frequency plane of convex lens, place bidimensional fine motion translation scan sample stage by step motor control, phase object is placed on the sample stage, regulate the phase object position, make one of them very big luminous point by phase object, successively measure luminous point not by and the magnitude of misalignment and cycle of interference fringe during by phase object;
In the 4th step, the point by point scanning phase object is a basis with the magnitude of misalignment of interference fringe, utilizes image processing techniques, realizes reconstruct and demonstration that the phase object position distributes mutually.
2. phase object scan imaging method according to claim 1 is characterized in that described beam treatment mechanism comprises beam expanding lens, pinhole filter and collimation lens, and they are along light beam working direction co-axial alignment successively.
3. phase object scan imaging treating apparatus, comprise that light source, convex lens, striped receive and measurement mechanism, is characterized in that also comprising beam expanding lens, pinhole filter, collimation lens, Double sided mirror, bidimensional fine motion translation scan sample stage, stepper motor and computing machine; Along the light beam working direction, co-axial alignment light source, beam treatment mechanism, Double sided mirror, convex lens, bidimensional fine motion translation scan sample stage and striped reception and measurement mechanism successively, each parts is fixed by optical bench or optical table, and distance between the adjacent component and position can be regulated; Described striped reception and measurement mechanism connect with computing machine, and computing machine, stepper motor, bidimensional fine motion translation scan sample stage connect successively.
4. phase object scan imaging treating apparatus according to claim 3 is characterized in that the mutual edge distance mutually of beam expanding lens and collimation lens equals their focal length sum.
5. phase object scan imaging treating apparatus according to claim 3, it is characterized in that the two beam angle θ of Double sided mirror reflection and the focal distance f of convex lens have such relation: x=θ f, x is the distance of two very big luminous points on the convex lens frequency plane in the formula.
6. phase object scan imaging treating apparatus according to claim 3 is characterized in that placing imaging len between bidimensional fine motion translation scan sample stage and striped reception and measurement mechanism.
7. phase object scan imaging treating apparatus according to claim 6 is characterized in that the mutual edge distance mutually of beam expanding lens and collimation lens equals their focal length sum.
8. phase object scan imaging treating apparatus according to claim 6, it is characterized in that the two beam angle θ of Double sided mirror reflection and the focal distance f of convex lens have such relation: x=θ f, x is the distance of two very big luminous points on the convex lens frequency plane in the formula.
9. a phase object scan imaging treating apparatus comprises that light source, convex lens, striped receive and measurement mechanism, is characterized in that also comprising beam expanding lens, pinhole filter, Double sided mirror, bidimensional fine motion translation scan sample stage, stepper motor and computing machine; Along the light beam working direction, co-axial alignment light source, beam expanding lens, pinhole filter, convex lens, Double sided mirror, bidimensional fine motion translation scan sample stage and striped reception and measurement mechanism successively, each parts is fixed by optical bench or optical table, and distance between the adjacent component and position can be regulated; Described striped reception and measurement mechanism connect with computing machine, and computing machine, stepper motor, bidimensional fine motion translation scan sample stage connect successively.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100541177C (en) * | 2007-11-21 | 2009-09-16 | 中国科学院上海技术物理研究所 | Semiconductor film material ultraviolet permeability uniformity test system |
| CN101963492A (en) * | 2010-09-17 | 2011-02-02 | 华中科技大学 | Displacement detecting device based on inner reflector of elliptic cylinder |
| CN102878930A (en) * | 2012-10-19 | 2013-01-16 | 华南师范大学 | Phase object phase distribution quantitative measurement method and device as well as application of method and device |
| CN103389311A (en) * | 2013-08-01 | 2013-11-13 | 哈尔滨工业大学 | Line scanning phase differential imaging device for optical element phase defect detection |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5604591A (en) * | 1994-04-11 | 1997-02-18 | Olympus Optical Co., Ltd. | Method of measuring phase difference and apparatus for carrying out the same |
| US5760902A (en) * | 1995-08-14 | 1998-06-02 | The United States Of America As Represented By The Secretary Of The Army | Method and apparatus for producing an intensity contrast image from phase detail in transparent phase objects |
| JP3478685B2 (en) * | 1996-10-14 | 2003-12-15 | キヤノン株式会社 | Phase distribution measuring method and phase distribution measuring device using the same |
| JP3773081B2 (en) * | 1997-12-09 | 2006-05-10 | 独立行政法人産業技術総合研究所 | Differential interference contrast method using multiple beam shearing interference |
| CN1182384C (en) * | 2003-01-23 | 2004-12-29 | 华南师范大学 | Method for measuring refractive index of thin film and its device |
-
2005
- 2005-04-21 CN CNB2005100342086A patent/CN100451607C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100541177C (en) * | 2007-11-21 | 2009-09-16 | 中国科学院上海技术物理研究所 | Semiconductor film material ultraviolet permeability uniformity test system |
| CN101963492A (en) * | 2010-09-17 | 2011-02-02 | 华中科技大学 | Displacement detecting device based on inner reflector of elliptic cylinder |
| CN101963492B (en) * | 2010-09-17 | 2011-09-14 | 华中科技大学 | Displacement detecting device based on inner reflector of elliptic cylinder |
| CN102878930A (en) * | 2012-10-19 | 2013-01-16 | 华南师范大学 | Phase object phase distribution quantitative measurement method and device as well as application of method and device |
| CN102878930B (en) * | 2012-10-19 | 2015-08-19 | 华南师范大学 | A kind of method for quantitative measuring of phase object phase mehtod and device and application thereof |
| CN103389311A (en) * | 2013-08-01 | 2013-11-13 | 哈尔滨工业大学 | Line scanning phase differential imaging device for optical element phase defect detection |
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