CN104316506B - Raman probe and Raman signal detection system and method capable of focusing automatically - Google Patents
Raman probe and Raman signal detection system and method capable of focusing automatically Download PDFInfo
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Abstract
The invention provides a Raman probe and a Raman signal detection system and a Raman signal detection method capable of focusing automatically. The system comprises the Raman probe, a numerical control displacement sample table and a controller, wherein the Raman probe is mounted on the numerical control displacement sample table; the Raman probe and the numerical control displacement sample table can move relatively; a light intensity detection unit is arranged on the signal output side of the Raman probe; the output end of the light intensity detection unit is connected to the controller; whether the sample is on the focus point or not is judged according to the comparison of the output signal of the light intensity detection unit, if not, a command is issued to control the numerical control displacement sample table to displace correspondingly, repeating for many times until the sample is adjusted at the focal length of the Raman probe or within the preset precision range. By virtue of the system and the method, accurate focusing is realized, the Raman signal is maximized and stabilized; in comparison with the existing commercialized probe of the sleeve with increased fixed distance, samples with rough surfaces can be directly detected without pre-treatment of samples.
Description
Technical field
The present invention relates to optical-mechanical, instrument field, in particular it relates to a kind of Raman probe, and in LR laser raman
Used in spectral measurement or Raman spectrometer can auto-focusing Raman signal detection system and method.
Background technology
Portable Raman spectrometer has the advantages that small volume, speed is fast, scene, in medicine, food security, safety check etc.
Field has broad application prospects.Portable Raman spectrometer is typically by small semiconductor laser, Raman fiber optic probe, light
Spectrometer and computer system are constituted.Wherein, the function of Raman probe mainly has two aspects, on the one hand efficiently conducts laser and gathers
On the other hand Jiao efficiently collect and filter Raman scattering signal and conducted to spectrometer in detected sample.
The launching efficiency of Raman spectrum is relevant with laser linewidth and energy density etc..In order to obtain stronger Raman letter
Number, need to be accurately aligned with laser to focus on sample to obtain higher laser energy density.Therefore, in large-scale Raman
Micro- focusing system is all configured with measuring system, operating personnel are manually focused by micro-image.At present, commercialization is just
Formula Raman spectroscopy system is taken because volumetric constraint is typically without micro- focusing system, and Raman fiber optic probe is only capable of manually adjusting
The mode of section is focused, troublesome poeration, it is impossible to exact focus, causes raman scattering intensity to weaken, jitter etc..
Commercialization a kind of set a distance probe by install regular length sleeve additional before probe come fixation measuring distance so as to
Guarantee the new detector for focusing on.This probe simplifies to a certain extent focus operation process, but is carried out using this probe
During measurement, sleeve must be contacted with sample, if sample surfaces out-of-flatness, it is impossible to vernier focusing.
The content of the invention
For defect of the prior art, it is an object of the invention to provide a kind of accurately can make what is collected by auto-focusing
The maximized Raman probe of Raman signal, can auto-focusing Raman signal detection system and method.
According to an aspect of the present invention, there is provided a kind of Raman probe, the Raman probe includes the first lens, the first filter
Mating plate, speculum, the 4th lens, the second optical filter, the 3rd optical filter, the 4th optical filter, the second lens, light intensity detection unit；
Wherein：Laser is entered after Raman probe from fiber optic conduction, is become directional light by the first lens, then through the first optical filter
Purification process is carried out to spectrum, then sequentially passes through with speculum reflection of the directional light in 45 ° of settings, the reflection of the second optical filter to change
Become beam path, finally by the 4th lens by Laser Focusing in sample；There is Raman after laser excitation and dissipated in sample
Penetrate, scattered light and reflected light opposite direction are collected into Raman probe by the 4th lens, and Raman scattering light transmission therein is by second
The lens set that optical filter and the 4th optical filter are constituted, then assemble via the second lens and be coupled into optical fiber, non-Raman signal light by
The lens set that second optical filter and the 4th optical filter are constituted stops suppression (reflection absorbs), therefore it is saturating to reach second
Mirror, wherein the laser reflected by sample is reflected by the 3rd optical filter, into light intensity detection unit；
The light intensity detection unit includes：3rd lens, aperture and electrooptical device, the aperture is saturating in the 3rd
The focal point of mirror；The lens focus of laser Jing the 3rd of the 3rd optical filter reflection, are radiated at again through aperture after convergence by aperture
On electrooptical device, received by photoelectric detector and detected.
Preferably, the 3rd optical filter is set after second optical filter and before the 4th optical filter, now,
The laser part reflected by sample is reflected by the second optical filter, and another part is reflected by the 3rd optical filter, and the 3rd filters
The laser of piece reflection enters light intensity detection unit；The Raman light of the second filter transmission again via the 4th optical filter, second
Lens are assembled and are coupled into optical fiber.
Preferably, second optical filter and the 3rd optical filter are dichroic mirror, are arranged with light path angle at 45 °, and described
Second optical filter and the 3rd optical filter are not parallel, and both are to laser reflection to Raman scattering light transmission.
Preferably, the speculum, the second optical filter, the 3rd optical filter, with light path angle at 45 °；Described first filters
Piece, the 4th optical filter are then in 90 ° with light path.
Above-mentioned Raman probe, when sample not in the focal point of the Raman probe when, laser will be assembled by light path
At the front or behind of aperture, by aperture, sample focal point is more remote, can be got over by the reflected light of aperture for only fraction luminous energy
It is few；Only when laser facula is just focused on object, the hot spot of the laser of reflection will converge at aperture, Ji Huquan by light path
The reflection luminous energy in portion will be by aperture, and the light intensity signal that electrooptical device is received is maximum.Due to the spatial selectivity of aperture,
Under focusing state, most of energy can pass through aperture, and now electrooptical device obtains light intensity maximum.Thus by one
The range finding problem of focusing is converted into a luminous intensity measurement problem for optically quantifying.
According to the second aspect of the invention, there is provided a kind of above-mentioned Raman probe composition can the Raman signal of auto-focusing visit
Examining system, including Raman probe, numerical control displacement sample stage, controller；The Raman probe is installed on numerical control displacement sample stage,
Raman probe and numerical control displacement sample stage can relative movement, the signal output side of the Raman probe is provided with light intensity detection unit；
The output end of the light intensity detection unit is connected to controller, and controller is relatively sentenced according to the light intensity detection element output signal
Whether disconnected sample is in focal point, if not in focal point, sending instruction control numerical control displacement sample stage and making corresponding displacement, so
It is repeated multiple times, until sample is adjusted at Raman probe focal length or in the accuracy rating of setting.
According to the third aspect of the invention we, there is provided it is a kind of can auto-focusing Raman signal detection method, methods described step
It is rapid as follows：
A) testing sample is placed on numerical control displacement sample stage；
B) Raman probe is placed in into numerical control displacement sample stage top more than at Raman probe focal length；
C) open laser instrument and export a laser, Jing optical fiber enters Raman probe, become directional light by the first lens, so
Carry out purification process to spectrum through the first optical filter afterwards, then sequentially pass through speculum reflection, the reflection of the second optical filter changing
Beam path, finally by the 4th lens by Laser Focusing in sample；
D) there is Raman scattering after laser excitation in sample, scattered light and reflected light opposite direction enter Raman probe by
4th lens are collected, the lens set that Raman scattering light transmission therein is made up of the second optical filter and the 4th optical filter, then via
Second lens are assembled and are coupled into optical fiber；Non- Raman signal light is hindered by the lens set that the second optical filter and the 4th optical filter are constituted
Gear suppresses, therefore can not reach the second lens, wherein entering light after the laser reflected by sample is reflected by the 3rd optical filter
Strong probe unit；
E) light intensity detection unit outputs a signal to controller, and via controller control numerical control displacement sample stage is moved, until
The signal collected is maximum, completes focusing.
Compared with prior art, the present invention has following beneficial effect：
Technological innovation in the present invention avoids manually operated, can exact focus, make Raman signal maximize and
It is stable；In contrast to the probe of existing commercial increase fixed range sleeve, the technology of the present invention can be to the uneven sample of rough surface
Product carry out direct detection, without sample pre-treatments.
Description of the drawings
The detailed description by reading non-limiting example made with reference to the following drawings, the further feature of the present invention,
Objects and advantages will become more apparent upon：
Fig. 1 has the structural representation of the Raman detection device of automatic focusing function for one embodiment of the invention；
Fig. 2 is the structural representation of light intensity detection unit in one embodiment of the invention；
Fig. 3 is displacement adjustment device regulation flow process figure in one embodiment of the invention；
Fig. 4 takes for aperture and pop one's head under 100 micron thickness the distance between focal plane and sample and the Relationship of Light intensity curve；
In figure：100 is Raman probe, and 200 is numerical control displacement sample stage, and 300 is controller；1 is optical fiber, and 2 is first saturating
Mirror, 3 is the first optical filter, and 4 is speculum, and 5 is the 4th lens, and 6 is the second optical filter, and 7 is the 3rd optical filter, and 8 are the 4th filter
Mating plate, 9 is the second lens, and 10 is light intensity detection unit, and 11 is sample, and 12 is sample stage, and 13 is controller, and 14 is the 3rd saturating
Mirror, 15 is aperture, and 16 is photoelectric detector.
Specific embodiment
With reference to specific embodiment, the present invention is described in detail.Following examples will be helpful to the technology of this area
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill to this area
For personnel, without departing from the inventive concept of the premise, some deformations and improvement can also be made.These belong to the present invention
Protection domain.
As shown in figure 1, there is the structural representation of the embodiment of Raman detection device one of automatic focusing function for the present invention,
Including Raman probe 100, numerical control displacement sample stage 200, controller 300；The Raman probe 100 is installed on numerical control displacement sample
On platform 200, Raman probe 100 can relative movement with numerical control displacement sample stage 200.
In the present embodiment, the Raman probe 100 includes the first lens 2, the first optical filter 3, speculum 4, the 4th lens
5th, the second optical filter 6, the 3rd optical filter 7, the 4th optical filter 8, the second lens 9, light intensity detection unit 10；The light intensity detection list
Unit 10 includes：3rd lens 14, aperture 15 and electrooptical device 16.
In figure：By the first lens 2, the first optical filter 3, speculum 4, the second optical filter 6, as the 4th of Laser Focusing the
The conduction laser module one that lens 5 are constituted, by the 4th lens 5 as Raman light collection, the second optical filter 6, the 3rd optical filtering
Conduction Raman light and suppress spuious optical assembly two that piece 7, the 4th optical filter 8, the second lens 9 are constituted, by using as laser alignment
The 4th lens 5, the second optical filter 6, the 3rd optical filter 7, light intensity detection unit 10 constitute laser automatic measuring away from focusing component
Three.Component one, component two and component three constitute Raman probe 100, and the Raman probe 100 is installed on numerical control displacement sample stage
On 200.
Direction along the output light of optical fiber 1 sets gradually the first lens 2, the first optical filter 3 and speculum 4, the first lens
2nd, the first optical filter 3 is vertical with light path, speculum 4 and light path into 45 degree, along 45 degree of the direction setting the of the reflected light of speculum 4
Two optical filters 6, the second optical filter 6 be arranged in parallel with speculum 4, and on the reflected light path of the second optical filter 6 the 4th is vertically arranged
Lens 5, reversely the optical path direction along the 4th lens 5 and the second optical filter 6 set gradually the 3rd optical filter 7, the 4th optical filter 8
With the second lens 9, the opposite side setting optical fiber of the second lens 9.3rd optical filter 7 is with light path into 45 degree of settings, the 4th optical filter 8
Vertical with light path with the second lens 9, the reflected light path side along the 3rd optical filter 7 sets gradually the 3rd lens 14, aperture 15
And electrooptical device 16, the 3rd lens 14, aperture 15 and electrooptical device 16 constitute light intensity detection unit 10.
Laser is entered after Raman probe 100 from the conduction of optical fiber 1, and by the first lens 2 directional light is become, then through the
One optical filter 3 carries out purification process to spectrum, then it is in that 45 ° of speculums 4 for arranging reflect, second filters to sequentially pass through with directional light
The reflection of piece 6 changing beam path, finally by the 4th lens 5 by Laser Focusing in sample, herein the 4th lens 5 play sharp
The effect that light is focused on；There is Raman scattering after laser excitation in sample 11, scattered light and reflected light opposite direction enter Raman
Probe 100 is collected by the 4th lens 5, and Raman scattering light transmission therein is by the second optical filter 6, the 3rd optical filter 7 and the 4th filter
The lens set that mating plate 8 is constituted, then it is coupled into optical fiber via second lens 9 convergence vertical with light path；Non- Raman signal light by
Second and the 3rd the lens set that constitutes of optical filter 6 and 7 and the 4th optical filter 8 stop suppressions (reflecting or absorption), therefore can not
The second lens 9 are reached, wherein the laser part reflected by sample is reflected by the second optical filter 6, another part is by the 3rd
Optical filter 7 reflects, and the laser of the reflection of the 3rd optical filter 7 enters light intensity detection unit 10.
The signal of light intensity detection unit 10 premenstrual putting deliver to after process, amplification, AD conversion controller 300, controller 300
It is believed that whether number multilevel iudge sample is in focal point, if not in focal point, sending instruction control numerical control displacement sample stage 200 and making
Corresponding displacement, it is so repeated multiple times, until sample is adjusted at probe focal length or in the accuracy rating of setting.Meanwhile, numerical control
Displacement sample stage 200 can also carry out the regulation of other bidimensional, so that probe is operated on a fixed pan.
As shown in Fig. 2 the light intensity detection unit 10 includes the 3rd lens 14, aperture with the identical focal length of the 4th lens 5
15 and electrooptical device 16.The light intensity detection unit 10 collects the light intensity of light path to detect, and inputs a signal into control
Device 300, by controller 300 numerical control displacement sample stage 200 is adjusted, until light intensity is maximum.Specifically, conduct Raman light and suppress miscellaneous
The laser of astigmatism component is first passed through after the 3rd lens 14 as the focal length of the 4th lens 5 are assembled again through aperture 15, most
Afterwards detection is received by photoelectric detector 16.The electrooptical device 16 can adopt photocell, photodiode, CCD,
PSD or other light intensity detection devices.As shown in Figure 4, the 4th lens 5, the second optical filter 6 and the 3rd optical filter 7, the 3rd lens
14 image in the focal plane image of the 4th lens 5 in its conjugate planes and on aperture 14；Due to the spatial selectivity of aperture, to coke-like
Under state, most of energy can pass through aperture 14, and now photoelectric detector 16 obtains light intensity maximum.Thus by a focusing
Range finding problem be converted into a luminous intensity measurement problem for optically quantifying.
In a preferred embodiment, the second optical filter 6 and the 3rd optical filter 7 are 45 ° of dichroic mirrors, setting requirements be with
Light path angle at 45 °, act as to laser reflection, and to Raman scattering light transmission.4th optical filter 8 is suppression Rayleigh scattering light
The logical part of long wave, setting requirements are into vertical relation with light path.I.e. speculum 4, the second optical filter 6 and the 3rd optical filter 7, need
Will be with light path angle at 45 °；And for the first optical filter 3, the 4th optical filter 8 then need it is in 90 ° with light path.Second optical filter 6 is anti-
The laser penetrated is veiling glare, is not utilized.
In the present invention, in order that structure is compacter, reduce part, reduces cost, the second lens 5 are simultaneously as component one
In laser focusing lens, the Raman light collecting lens in component two, component three in laser collimator lens, i.e., it is same
Mirror, due to the invertibity of light path, the lens pass through its different types of smooth role simultaneously for positive direction and opposite direction
Differ, functionally divide into focusing laser, collect Raman light and collimation laser.Concrete part 5 as shown in Figure 1.4th is saturating
Mirror 5 can be vertically arranged with light path, it is also possible to other set-up modes.
It is of the present invention to be not limited to above-mentioned form with automatic focusing function Raman detection device, also including other structures shape
Formula.
By taking embodiment illustrated in fig. 1 as an example, the specific works of light intensity detection unit 10 are：
A) laser action that Jing beam path alignments are focused on is on sample；
B) laser Jing after object reflection, the lens 5 of Jing the 4th carry out Raman collection, through the second optical filter of 45 degree of placements
6, and partly reflect on the 3rd optical filter 7, the lens 14 of reflected light Jing the 3rd are focused on, and by aperture 15 optical-electrical converter is radiated at
On part 16；3rd lens 14 are consistent with the focal length of the 4th lens 5；Focal point of the aperture 15 in the 3rd lens 14；
C) when sample not at probe focus when, the laser of reflection by converged at by light path aperture 15 front or
At rear, only fraction luminous energy is by aperture 15, and sample focal point is more remote, and the reflected light that can pass through aperture is fewer；Only work as laser
When hot spot is just focused on object (now hot spot is minimum, i.e., in focusing state), the hot spot of the laser of reflection will be by light
Road converges at aperture 15, and most reflection luminous energy will be by aperture 15, and the light intensity signal that detector is received is maximum.
In another preferred embodiment of the invention, be provided with the numerical control displacement sample stage 200 displacement adjustment device and
Sample stage 12, the displacement adjustment device is a kind of precise adjusting device that can be moved in three-dimensional, and referring in particular to can be three-dimensional mobile
Step motor control or piezoelectric ceramics control three-dimensional moving device.Because probe and sample have relative motion, will can visit
Head is fixed, and sample is made three-dimensional mobile, it is also possible in turn fix in sample, and probe makees three-dimensional motion, or can also take spy
Head makees mode of the motion in one dimension in combination with sample makees two dimensional motion, and sample makees two dimension in the plane vertical with probe output beam
The situation of relative movement is particularly suitable for the situation for needing to be scanned multiple positions detection, such as when Raman and thin-layer chromatography
When being combined etc. technology, needs carry out raman spectroscopy measurement to being deployed in multiple position samples on lamellae.
In the above embodiment of the present invention can auto-focusing Raman signal detection system, the displacement adjustment device can be with
Raman probe 100 and sample stage 12 are fixedly connected, and Raman probe 100 can be with the relative movement of sample stage 12.
Based on shown in Fig. 1 probe and above-mentioned detection device, its adopt can auto-focusing Raman signal detection side
Method, step is as follows：
A) testing sample 11 is placed on numerical control displacement sample stage；
B) probe is placed in into numerical control displacement sample stage top to be more than at probe focal length about 3-5mm；
C) open laser instrument and export a laser, Jing optical fiber enters Raman probe, by the first lens 2 directional light is become,
Then carry out purification process to spectrum through the first optical filter 3, then sequentially pass through that speculum 4 reflects, the reflection of the second optical filter 6 comes
Change beam path, finally by the 4th lens 5 by Laser Focusing in sample；
D) there is Raman scattering after laser excitation in sample 11, and scattered light and reflected light opposite direction enter Raman probe
Collected by the 4th lens 5, Raman scattering light transmission therein is by the second optical filter 6 and the 3rd optical filter 7 and the structure of the 4th optical filter 8
Into lens set, then via the second lens 9 assemble be coupled into optical fiber；Non- Raman signal light is by second and the 3rd optical filter 6 and 7
And the lens set that the 4th optical filter 8 is constituted stops suppression (reflection absorbs), therefore the second lens 9 can not be reached, wherein by
The laser part that sample is reflected is reflected by the second optical filter 6, and another part is reflected by the 3rd optical filter 7, and the 3rd filters
The laser of the reflection of piece 7 enters light intensity detection unit 10；
E) light intensity detection unit 10 outputs a signal to controller, and via controller control numerical control displacement sample stage is moved, directly
It is maximum to the signal collected, complete focusing.
In above-described embodiment, controller is realized using computer, and the amplified circuit of signal of electrooptical device 16, AD turn
Swap-in enters computer, and (such as machine command displacement adjusting means is vertical by the movement of operation control displacement adjustment device for computer
Direction propulsion etc.), until the signal collected is maximum, now complete focusing.
In a preferred embodiment of the invention, the displacement adjustment device being related in above-mentioned detection device carries out adjustment of displacement
When according to following steps, as shown in Figure 3：
A) Raman probe is located at the outer 3-5mm of the outer focal length of sample stage, and initial beam intensity signal is x0；
B) command displacement adjusting means often moves down a step pitch, and now light intensity signal is x for measurementi；
C) when adjacent light intensity signal difference x twicei-xi-1During more than 0, continue the movement of command displacement adjusting means, until xi-
xi-1Less than 0, displacement controller control reverse movement；
D) according to actual focusing precision, can control x during step c)i-xi-1Step value is reduced during less than 0, and it is repeatedly many
It is secondary, until minimum of a value esp of the light intensity difference less than setting.
Fig. 4 takes the distance between the focal plane of Raman probe 100 and sample 11 and light intensity under 100 micron thickness for aperture 15
Relation.Accurate control from light intensity and the distance relation of Raman probe 100, within achievable 10 microns of the near focal point of the present invention
System, the less then accuracy of aperture 15 is higher.
The specific embodiment of the present invention is described above.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, those skilled in the art can within the scope of the claims make various modifications or modification, this not shadow
Ring the flesh and blood of the present invention.
Claims (6)
1. a kind of Raman probe, it is characterised in that the Raman probe include the first lens, the first optical filter, speculum, the 4th
Lens, the second optical filter, the 3rd optical filter, the 4th optical filter, the second lens, light intensity detection unit；Wherein：Laser is passed from optical fiber
Lead into after Raman probe, by the first lens directional light is become, then spectrum is carried out at purifying through the first optical filter
Reason, then sequentially pass through speculum reflection, the reflection of the second optical filter changing beam path, finally by the 4th lens by Laser Focusing
In sample；There is Raman scattering after laser excitation in sample, scattered light and reflected light opposite direction enter Raman probe
Collected by the 4th lens, the lens set that Raman scattering light transmission therein is made up of the second optical filter and the 4th optical filter, then Jing
Assembled by the second lens and be coupled into optical fiber, the lens set institute that non-Raman signal light is made up of the second optical filter and the 4th optical filter
Stop and suppress, therefore the second lens can not be reached, wherein the laser reflected by sample is reflected by the 3rd optical filter, into light
Strong probe unit；
The light intensity detection unit includes：3rd lens, aperture and electrooptical device, the aperture is in the 3rd lens
Focal point；The lens focus of laser Jing the 3rd of the 3rd optical filter reflection, photoelectricity is radiated at after convergence through aperture by aperture again
On switching device, the device that is photoelectrically converted receives detection；
3rd optical filter is set after second optical filter and before the 4th optical filter, now, is reflected by sample
The laser part returned is reflected by the second optical filter, and another part is reflected by the 3rd optical filter, and what the 3rd optical filter reflected swashs
Light enters light intensity detection unit；The Raman light of the second filter transmission assembles coupling via the 4th optical filter, the second lens again
Conjunction enters optical fiber；
Second optical filter and the 3rd optical filter are 45 ° of dichroic mirrors, are arranged with light path angle at 45 °, and described second filters
Piece and the 3rd optical filter are not parallel, and both are highly transmissive to Raman diffused light to laser high reflection；
The speculum, the second optical filter, the 3rd optical filter, with light path angle at 45 °；First optical filter, the 4th filter
Piece is then in 90 ° with light path, and the 4th optical filter is the logical part of long wave for suppressing Rayleigh scattering light.
2. Raman probe according to claim 1, it is characterised in that when sample is not in the focus of the Raman probe
During place, laser will be converged at the front or behind of aperture by light path, and only fraction luminous energy by aperture, get over by sample focal point
Far, the reflected light that can pass through aperture is fewer；Only when laser facula is just focused on object, the hot spot of the laser of reflection will be logical
Cross light path and converge at aperture, most reflection luminous energy will be by aperture, and the light intensity signal that electrooptical device is received is most
Greatly.
3. it is a kind of comprising Raman probe described in any one of claim 1-2 can auto-focusing Raman signal detection system, its
It is characterised by, the system includes Raman probe, numerical control displacement sample stage, controller；The Raman probe is installed on numerical control position
Move on sample stage, Raman probe and numerical control displacement sample stage can relative movement, the signal output side of the Raman probe is provided with light
Strong probe unit；The output end of the light intensity detection unit is connected to controller, and controller is defeated according to the light intensity detection unit
Whether go out signal multilevel iudge sample in focal point, if not in focal point, sending instruction control numerical control displacement sample stage and making phase
The displacement answered, it is so repeated multiple times, until sample is adjusted at Raman probe focal length or in the accuracy rating of setting.
4. it is according to claim 3 can auto-focusing Raman signal detection system, it is characterised in that the numerical control displacement
Displacement adjustment device and sample stage are provided with sample stage, the displacement adjustment device is a kind of accurate adjustment dress that can be moved in three-dimensional
Put, the displacement adjustment device is fixedly connected with Raman probe and sample stage, Raman probe can be with sample stage relative movement.
5. Raman probe described in a kind of any one of employing claim 1-2 can auto-focusing Raman signal detection method, its
It is characterised by that methods described step is as follows：
A) testing sample is placed on numerical control displacement sample stage；
B) Raman probe is placed in into numerical control displacement sample stage top more than at Raman probe focal length；
C) open laser instrument and export a laser, Jing optical fiber enters Raman probe, by the first lens directional light, Ran Houjing are become
Crossing the first optical filter carries out purification process to spectrum, then sequentially passes through speculum reflection, the reflection of the second optical filter changing light beam
Path, finally by the 4th lens by Laser Focusing in sample；
D) there is Raman scattering after laser excitation in sample, and scattered light and reflected light opposite direction enter Raman probe by the 4th
Lens are collected, the lens set that Raman scattering light transmission therein is made up of the second optical filter and the 4th optical filter, then via second
Lens are assembled and are coupled into optical fiber；Non- Raman signal light stops suppression by the lens set that the second optical filter and the 4th optical filter are constituted
System, therefore the second lens can not be reached, wherein visiting into light intensity after the laser reflected by sample is reflected by the 3rd optical filter
Survey unit；
E) light intensity detection unit outputs a signal to controller, via controller control numerical control displacement sample stage movement, until collecting
The signal for arriving is maximum, completes focusing.
6. it is according to claim 5 can auto-focusing Raman signal detection method, it is characterised in that the controller control
Numerical control displacement sample stage movement processed, the numerical control displacement sample stage is provided with displacement adjustment device and sample stage, and the displacement is adjusted
According to following steps when device carries out adjustment of displacement：
A) Raman probe is located at the outer 3-5mm of the outer focal length of sample stage, and initial beam intensity signal is x0；
B) command displacement adjusting means moves down a step pitch, and now light intensity signal is x for measurementi；
C) when adjacent light intensity signal difference x twicei-xi-1During more than 0, continue the movement of command displacement adjusting means, until xi-xi-1
Less than 0, displacement controller control reverse movement；
D) according to actual focusing precision, can control x during step c)i-xi-1Step value is reduced during less than 0, and it is repeated multiple times, directly
To light intensity difference less than minimum of a value esp for setting.
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| CN105890753B (en) * | 2016-04-21 | 2017-12-01 | 厦门大学 | Raman spectrometer autofocus system |
| CN106383105B (en) * | 2016-08-29 | 2021-02-12 | 上海交通大学 | Raman spectrum measuring device and method capable of automatically adjusting sample measuring distance |
| CN106645082B (en) * | 2016-11-03 | 2020-12-11 | 北京信息科技大学 | Gated fiber Raman spectrometer based on automatic focusing of laser ranging |
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| WO2019084817A1 (en) * | 2017-10-31 | 2019-05-09 | 深圳达闼科技控股有限公司 | Method and device for determining focus deviation, storage medium and electronic apparatus |
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