CN106645082B - Gated Fiber Raman Spectrometer Based on Laser Ranging and Autofocus - Google Patents

Gated Fiber Raman Spectrometer Based on Laser Ranging and Autofocus Download PDF

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CN106645082B
CN106645082B CN201610972219.7A CN201610972219A CN106645082B CN 106645082 B CN106645082 B CN 106645082B CN 201610972219 A CN201610972219 A CN 201610972219A CN 106645082 B CN106645082 B CN 106645082B
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姚齐峰
祝连庆
张雯
娄小平
董明利
李红
辛璟焘
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Beijing Information Science and Technology University
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Abstract

本发明公开了一种基于激光测距自动调焦的门控光纤拉曼光谱仪,包括激光探测系统、拉曼散射光收集系统和信号触发延时及数据处理控制系统;该光纤拉曼光谱仪由脉冲激光器、环形器、第一准直器、反射棱镜、二向分色棱镜、光电探测器望远透镜系统,第二准直器,滤光片和门控光谱仪组成。本发明在一定距离内能实现直接快速检测;通过光电探测器能自动判断激光光斑是否照射到物体上实现自动延时控制;通过望远透镜系统的电控调焦装置快速实现自动调焦;同时采用了光纤传输,极大提高了设备的机械稳定性和可靠性。

Figure 201610972219

The invention discloses a gated optical fiber Raman spectrometer based on laser ranging and automatic focusing, comprising a laser detection system, a Raman scattered light collection system, a signal trigger delay and a data processing control system; the optical fiber Raman spectrometer consists of a pulse A laser, a circulator, a first collimator, a reflecting prism, a dichroic prism, a photodetector telephoto lens system, a second collimator, an optical filter and a gated spectrometer are composed. The invention can realize direct and fast detection within a certain distance; the photoelectric detector can automatically determine whether the laser spot is irradiated on the object to realize automatic delay control; the electric control focusing device of the telephoto lens system can quickly realize automatic focusing; Optical fiber transmission is adopted, which greatly improves the mechanical stability and reliability of the equipment.

Figure 201610972219

Description

基于激光测距自动调焦的门控光纤拉曼光谱仪Gated Fiber Raman Spectrometer Based on Laser Ranging and Autofocus

技术领域technical field

本发明涉及光谱测量技术领域,具体涉及一种基于激光测距自动调焦的门控光纤拉曼光谱仪。The invention relates to the technical field of spectrum measurement, in particular to a gated optical fiber Raman spectrometer based on laser ranging and automatic focusing.

背景技术Background technique

拉曼谱线是印度物理学家拉曼1928年在研究液体苯散射时首次发现的,它是一种散射光谱。当光照射到物体上时,有部分光会发生非弹性散射,散射光中除了与入射光相同的弹性成分外(瑞利散射),还有比入射光频率增大和减小的成分,其中频率减小的成分称为斯托克斯线,频率增大的成分称为反斯托克斯线,两成分频率对称分布在激发光频率的两侧。Raman line was first discovered by Indian physicist Raman in 1928 while studying the scattering of liquid benzene, and it is a kind of scattering spectrum. When light is irradiated on an object, some light will undergo inelastic scattering. In addition to the same elastic component (Rayleigh scattering) as the incident light, the scattered light also has components whose frequency increases and decreases compared to the incident light. The decreasing component is called the Stokes line, and the component with increasing frequency is called the anti-Stokes line, and the two components are symmetrically distributed on both sides of the excitation light frequency.

拉曼效应这主要是由分子振动,晶格中的光学声子与激发光源相互作用的结果。当一个光子与一个分子发生相互作用时,分子吸收一个光子后进入一个不稳定的虚能态,接着会很快放射出一个光子,这时如果分子的振动或转动能级比初始的能级高,那么发射光子的频率就会比原始光子低,称为斯托克斯光,反之,分子的振动或转动能级比初始低,光子的能量会增加,频率会提高,被称为反斯托克斯光,通过拉曼光谱仪记录光子频率发生的规律的变化称为拉曼光谱。Raman effect This is mainly the result of molecular vibrations, optical phonons in the lattice interacting with the excitation light source. When a photon interacts with a molecule, the molecule absorbs a photon and enters an unstable virtual energy state, and then quickly emits a photon. At this time, if the vibration or rotation energy level of the molecule is higher than the initial energy level , then the frequency of the emitted photon will be lower than the original photon, which is called Stokes light. On the contrary, the vibration or rotation energy level of the molecule is lower than the initial one, the energy of the photon will increase, and the frequency will increase, which is called anti-Stokes light. The regular changes in photon frequency recorded by Raman spectrometer are called Raman spectroscopy.

目前这些光谱仪都需要把样品放在设置好的样品室里,或者探头需要紧挨着样品以便收集足够强的拉曼散射光。这种紧贴测量方式极大限制了设备的使用。比如拉曼光谱仪不能像红外成像光谱仪那样迅速得到某一区域矿物成分的情况,另外在外星着陆器或者漫游车上如果使用拉曼光谱仪分析星球表面的物质成分时,需要额外配置机械手将样品放在样品室里,增加了操作难度。Currently, these spectrometers require the sample to be placed in a set-up sample chamber, or the probe needs to be placed next to the sample in order to collect sufficiently strong Raman scattered light. This close-fitting measurement greatly limits the use of the device. For example, the Raman spectrometer cannot obtain the mineral composition of a certain area as quickly as the infrared imaging spectrometer. In addition, if the Raman spectrometer is used on the alien lander or rover to analyze the material composition of the planet's surface, an additional manipulator is required to place the sample on the In the sample room, the difficulty of operation is increased.

发明内容SUMMARY OF THE INVENTION

本发明提供一种基于激光测距自动调焦的门控光纤拉曼光谱仪,目的是通过使用长距离拉曼光谱仪,提高拉曼光谱仪的使用率和提高信噪比,能够实现长距离非采样检测。The present invention provides a gated optical fiber Raman spectrometer based on laser ranging and automatic focusing. The purpose is to improve the utilization rate of the Raman spectrometer and the signal-to-noise ratio by using the long-distance Raman spectrometer, so as to realize long-distance non-sampling detection. .

本发明的技术方案是:一种基于激光测距自动调焦的门控光纤拉曼光谱仪,包括包括激光探测系统、拉曼散射光收集系统和信号触发延时及数据处理控制系统。The technical scheme of the present invention is: a gated optical fiber Raman spectrometer based on laser ranging and automatic focusing, comprising a laser detection system, a Raman scattered light collection system and a signal trigger delay and data processing control system.

所述的激光探测系统包括激光发射探测系统和激光反射探测系统。The laser detection system includes a laser emission detection system and a laser reflection detection system.

所述的激光发射探测系统包括脉冲激光器、环形器、第一准直器、反射棱镜和二向分色棱镜。The laser emission detection system includes a pulsed laser, a circulator, a first collimator, a reflection prism and a dichroic prism.

所述的激光反射系统是激光发射系统的逆向系统,激光反射系统包括所述的脉冲激光器、环形器、第一准直器、反射棱镜和二向分色棱镜还包括光电探测器。The laser reflection system is an inverse system of the laser emission system, and the laser reflection system includes the pulse laser, a circulator, a first collimator, a reflection prism, a dichroic prism, and a photodetector.

所述的拉曼散射光收集系统包括所述二向分色棱镜,望远透镜系统,第二准直器,滤光片和门控光谱仪。The Raman scattered light collection system includes the dichroic prism, a telescopic lens system, a second collimator, an optical filter and a gated spectrometer.

优选的,所述的环形器为三端口环形器,所述的光纤为对可见光损耗小的经过优化设计的特种单模光纤。Preferably, the circulator is a three-port circulator, and the optical fiber is a special single-mode optical fiber with optimized design with little loss to visible light.

所述的脉冲激光器和第一准直器分别与环形器通过光纤连接,所述的反射棱镜和第一准直器沿光路置于二向分色棱镜的反射方向,所述反射棱镜和第一准直器相对平行放置。The pulsed laser and the first collimator are respectively connected with the circulator through an optical fiber. The reflecting prism and the first collimator are placed along the optical path in the reflection direction of the dichroic prism. The collimators are placed relatively parallel.

所述样品、望远透镜系统、滤光片和第二准直器沿光路依次置于二向色分色棱镜的透射方向;所述门控光谱仪与第二准直器通过光纤连接。The sample, the telescopic lens system, the optical filter and the second collimator are placed in the transmission direction of the dichroic dichroic prism in sequence along the optical path; the gated spectrometer is connected with the second collimator through an optical fiber.

所述的脉冲激光器设有激光脉冲触发器,所述的光电探测器与环形器通过光纤连接,所述望远透镜系统设有电控调焦装置,所述的激光脉冲触发器、光电探测器、电控调焦装置和门控光谱仪分别与数据处理控制系统通过串行总线连接。The pulsed laser is provided with a laser pulse trigger, the photodetector is connected to the circulator through an optical fiber, the telephoto lens system is provided with an electronically controlled focusing device, the laser pulse trigger and the photodetector are , the electronically controlled focusing device and the gated spectrometer are respectively connected with the data processing control system through a serial bus.

优选的,所述门控光谱仪可以是基于光纤F-P可调滤波器扫面的光纤门控光谱仪,也可以是基于光栅色散的门控光谱仪,还可以是基于空间傅里叶变换的门控光谱仪。Preferably, the gated spectrometer may be a fiber-gated spectrometer based on a fiber F-P tunable filter sweep, a gated spectrometer based on grating dispersion, or a gated spectrometer based on spatial Fourier transform.

优选的,所述反射棱镜和二向分色棱镜可以分立安装还可以组合安装,实现对激光束的反射或透射。Preferably, the reflecting prism and the dichroic prism can be installed separately or in combination to realize reflection or transmission of the laser beam.

优选的,所述的二向分色棱镜可以是一个特制的镀膜棱镜,也可以是组装的分光系统;所述的反射棱镜是表面镀膜99%的高反射镜,所述的反射棱镜是一次等腰直角棱镜。Preferably, the dichroic prism can be a specially-made coated prism, or an assembled beam splitting system; the reflective prism is a high-reflection mirror with a surface coating of 99%, and the reflective prism is a primary, etc. Waist right angle prism.

一种基于激光测距自动调焦的门控光纤拉曼光谱仪的测距方法,所述方法包括如下步骤:A ranging method for a gated optical fiber Raman spectrometer based on laser ranging and automatic focusing, the method comprises the following steps:

1)脉冲激光器发出ns量级脉冲激光,通过环形器顺次经过第一准直器和反射棱镜,同时脉冲激光器发出一个触发电信号;1) The pulsed laser emits ns-level pulsed laser, which passes through the first collimator and the reflecting prism in sequence through the circulator, and at the same time the pulsed laser emits a triggering electrical signal;

2)激光束经过反射棱镜反射进入二向分色棱镜,然后经过二向分色棱镜再次反射,激光束传播方向与第一准直器发出的激光束平行同向;2) The laser beam enters the dichroic prism after being reflected by the reflective prism, and then is reflected again through the dichroic prism, and the propagation direction of the laser beam is parallel to the laser beam emitted by the first collimator;

3)激光束到达样品表面发生反射和散射,部分瑞利散射光和反射光会沿着原光路进入环形器,通过环形器被光电探测器检测,如果探测器检测不到反射光,说明脉冲激光器光斑并未对准在待测物体表面,需要对设备方向进行调整;如果检测到反射光,数据处理系统记录到达光电探测器的时间,经过与触发信号的时间作比较得到用来开启门控光谱仪的延时参考信号,在下一次激光脉冲产生时启动门控光谱仪;3) When the laser beam reaches the surface of the sample, reflection and scattering occur. Part of the Rayleigh scattered light and reflected light will enter the circulator along the original optical path, and will be detected by the photodetector through the circulator. If the reflected light cannot be detected by the detector, it means that the pulsed laser The light spot is not aligned with the surface of the object to be measured, and the direction of the device needs to be adjusted; if reflected light is detected, the data processing system records the time it reaches the photodetector, and then compares it with the time of the trigger signal to turn on the gated spectrometer. The delayed reference signal of , starts the gated spectrometer when the next laser pulse is generated;

4)部分拉曼散射光经过二向分色棱镜透射进入望远透镜系统,经过前段物镜收集和后端物镜汇聚到滤光片,滤光片去除部分瑞丽散射光和反射光,剩下拉曼散射光汇聚到第二准直器,通过光纤传输到门控光谱仪上;4) Part of the Raman scattered light is transmitted through the dichroic prism into the telescopic lens system, collected by the front-end objective lens and collected by the rear-end objective lens to the filter, and the filter removes part of the Rayleigh scattered light and reflected light, leaving the Raman scattered light The light is concentrated to the second collimator and transmitted to the gated spectrometer through the optical fiber;

5)利用延时时间计算待测物体与门控光谱仪的距离,从而调节望远透镜系统中透镜的位置,实现自动调焦功能;5) Calculate the distance between the object to be measured and the gated spectrometer by using the delay time, so as to adjust the position of the lens in the telephoto lens system and realize the automatic focusing function;

6)门控光谱仪开启由步骤3)中的延时时间确定,开通时间由脉冲激光器脉冲宽度决定;6) The opening of the gated spectrometer is determined by the delay time in step 3), and the opening time is determined by the pulse width of the pulsed laser;

7)光谱仪的读出信号被数据处理控制系统处理整理后,判断是否需要更多次数的脉冲信号。7) After the readout signal of the spectrometer is processed and sorted by the data processing control system, it is judged whether more pulse signals are needed.

激光发射探测系统的光路是激光束进入第一准直器,将激光变成平行光进入一次等腰直角反射棱镜,经过反射棱镜反射进入二向分色棱镜,经过二向分色棱镜反射,激光束逆时针转动90°与第一准直器发出的激光束平行同向,二向分色棱镜发出的激光束到达样品。The optical path of the laser emission detection system is that the laser beam enters the first collimator, converts the laser light into parallel light and enters a primary isosceles right-angle reflecting prism, which is reflected by the reflecting prism and enters the dichroic prism. The beam is rotated 90° counterclockwise in parallel with the laser beam emitted by the first collimator, and the laser beam emitted by the dichroic prism reaches the sample.

本发明的有益效果是:基于激光测距自动调焦的门控光钎拉曼光谱仪无需采样情况下,在一定距离内能实现直接快速检测;通过光电探测器能自动判断激光光斑是否照射到物体上实现自动延时控制;通过望远透镜系统的电控调焦装置快速实现自动调焦;采用了共轴系统,保证了进入望远透镜系统成像的光是从激光照射的样品上发出的,避免了激光光路与收集光路不一致造成散射光无法正确收集的情形;同时采用了光纤传输,这极大提高了设备的机械稳定性和可靠性。The beneficial effects of the invention are as follows: the gated optical fiber Raman spectrometer based on laser ranging and automatic focusing does not need sampling, and can realize direct and rapid detection within a certain distance; whether the laser spot irradiates the object can be automatically judged by the photodetector Automatic time delay control is realized on the telephoto lens system; automatic focusing is quickly realized through the electronically controlled focusing device of the telephoto lens system; the coaxial system is adopted to ensure that the light entering the telephoto lens system for imaging is emitted from the sample irradiated by the laser, It avoids the situation that the scattered light cannot be collected correctly due to the inconsistent laser light path and the collection light path; at the same time, optical fiber transmission is adopted, which greatly improves the mechanical stability and reliability of the equipment.

附图说明Description of drawings

参考随附的附图,本发明更多的目的、功能和优点将通过本发明实施方式的如下描述得以阐明,其中:Further objects, functions and advantages of the present invention will be elucidated by the following description of embodiments of the present invention with reference to the accompanying drawings, wherein:

图1示出本发明基于激光测距自动调焦的门控光纤拉曼光谱仪的结构示意图;1 shows a schematic structural diagram of a gated optical fiber Raman spectrometer based on laser ranging and auto-focusing of the present invention;

图2示出本发明基于激光测距自动调焦的门控光纤拉曼光谱仪实施例2的结构示意图。FIG. 2 shows a schematic structural diagram of Embodiment 2 of the gated optical fiber Raman spectrometer based on laser ranging and automatic focusing according to the present invention.

具体实施方式Detailed ways

通过参考示范性实施例,本发明的目的和功能以及用于实现这些目的和功能的方法将得以阐明。然而,本发明并不受限于以下所公开的示范性实施例;可以通过不同形式来对其加以实现。说明书的实质仅仅是帮助相关领域技术人员综合理解本发明的具体细节。Objects and functions of the present invention and methods for achieving these objects and functions will be elucidated by referring to the exemplary embodiments. However, the present invention is not limited to the exemplary embodiments disclosed below; it may be implemented in various forms. The essence of the description is merely to assist those skilled in the relevant art to comprehensively understand the specific details of the present invention.

在下文中,将参考附图描述本发明的实施例。在附图中,相同的附图标记代表相同或类似的部件,或者相同或类似的步骤。Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings, the same reference numbers represent the same or similar parts, or the same or similar steps.

图1为本发明基于激光测距自动调焦的门控光纤拉曼光谱仪的结构示意图。如图1所示,基于激光测距自动调焦的门控光纤拉曼光谱仪包括脉冲激光器101、激光脉冲触发器102、环形器103、第一准直器104、反射棱镜105、二向分色棱镜106、样品107、望远透镜系统108、滤波片109、第二准直器115、门控光谱仪110、数据处理系统111、光电探测器112、光纤113和电控调焦装置114。FIG. 1 is a schematic structural diagram of a gated optical fiber Raman spectrometer based on laser ranging and automatic focusing according to the present invention. As shown in FIG. 1, the gated fiber Raman spectrometer based on laser ranging and automatic focusing includes a pulsed laser 101, a laser pulse trigger 102, a circulator 103, a first collimator 104, a reflecting prism 105, a dichroic separation Prism 106 , sample 107 , telescopic lens system 108 , filter 109 , second collimator 115 , gated spectrometer 110 , data processing system 111 , photodetector 112 , optical fiber 113 and electronically controlled focusing device 114 .

所述环形器103为三端口环形器,脉冲激光器101、第一准直器104和光电探测仪112分别与环形器103的端口1、端口2和端口3通过光纤连接。The circulator 103 is a three-port circulator, and the pulsed laser 101 , the first collimator 104 and the photodetector 112 are respectively connected to port 1 , port 2 and port 3 of the circulator 103 through optical fibers.

所述望远透镜系统108前端用于收集散射光,后端用于汇聚散射光,所述望远透镜系统108可以通过在望远镜后端接一个与光速匹配的透镜实现。The front end of the telescopic lens system 108 is used for collecting scattered light, and the rear end is used for collecting scattered light. The telescopic lens system 108 can be realized by connecting a lens matching the speed of light at the rear end of the telescope.

所述脉冲激光器101设有激光脉冲触发器102,望远透镜系统108后端设有电控调焦装置114,所述的激光脉冲触发器102、电控调焦装置114、光电探测器112和门控光谱仪110通过串行总线与数据处理系统连接。The pulse laser 101 is provided with a laser pulse trigger 102, and the rear end of the telephoto lens system 108 is provided with an electronically controlled focusing device 114. The laser pulse trigger 102, the electronically controlled focusing device 114, the photodetector 112 and the The gated spectrometer 110 is connected to the data processing system via a serial bus.

光纤为对可见光损耗小的经过优化设计的特种单模光纤。The optical fiber is a special single-mode optical fiber with optimized design with low visible light loss.

所述样品、望远透镜系统、滤光片和第二准直器沿光路依次置于二向色分色棱镜的透射方向;所述反射棱镜、第一准直器沿光路依次置于二向分色棱镜的反射方向。The sample, the telescopic lens system, the filter and the second collimator are placed in the transmission direction of the dichroic dichroic prism along the optical path in sequence; the reflecting prism and the first collimator are placed in the dichroic direction along the optical path in sequence The direction of reflection of the dichroic prism.

所述门控光谱仪可以是基于光纤F-P可调滤波器扫面的光纤门控光谱仪,也可以是基于光栅色散的门控光谱仪,还可以是基于空间傅里叶变换的门控光谱仪。The gated spectrometer may be a fiber-gated spectrometer based on a fiber F-P tunable filter sweep, a gated spectrometer based on grating dispersion, or a gated spectrometer based on spatial Fourier transform.

所述的二向分色棱镜可以是一个特制的镀膜棱镜,也可以是组装的分光系统;所述的反射棱镜是表面镀膜99%的高反射镜,所述的反射棱镜是一次等腰直角棱镜。The dichroic prism can be a special coating prism or an assembled beam splitting system; the reflecting prism is a high reflectance mirror with a surface coating of 99%, and the reflecting prism is a primary isosceles right angle prism .

实施例1Example 1

一种基于激光测距自动调焦的门控光纤拉曼光谱仪包括激光探测系统、拉曼散射光收集系统和信号触发延时及数据处理控制系统。A gated optical fiber Raman spectrometer based on laser ranging and automatic focusing includes a laser detection system, a Raman scattered light collection system, a signal trigger delay and a data processing control system.

激光探测系统分为激光发射探测系统和激光发射探测系统。Laser detection systems are divided into laser emission detection systems and laser emission detection systems.

激光发射探测系统由脉冲激光器101、环形器103、第一准直器104、反射棱镜105、二向分色棱镜106和样品107组成;脉冲激光器101发出ns量级激光束,进入环形器103端口1,环形器103端口2处激光束进入第一准直器104将激光束变成平行光进入反射棱镜105,经过反射棱镜105激光束的传播方向顺时针转动90°进入二向分色棱镜106,经过二向分色棱镜106激光束的传播方向逆时针转动90°,与第一准直器104发出的激光束平行同向,二向分色棱镜106发出的激光束到达样品107。The laser emission detection system consists of a pulsed laser 101, a circulator 103, a first collimator 104, a reflection prism 105, a dichroic prism 106 and a sample 107; the pulsed laser 101 emits a ns-level laser beam, which enters the circulator 103 port 1. The laser beam at port 2 of the circulator 103 enters the first collimator 104 to turn the laser beam into parallel light and enters the reflective prism 105. After passing through the reflective prism 105, the propagation direction of the laser beam rotates 90° clockwise and enters the dichroic dichroic prism 106 , the propagation direction of the laser beam through the dichroic prism 106 is rotated 90° counterclockwise, parallel to the same direction as the laser beam emitted by the first collimator 104 , and the laser beam emitted by the dichroic prism 106 reaches the sample 107 .

激光反射探测系统由样品107、二向分色棱镜106、反射棱镜105、第一准直器104、环形器103和光电探测器112组成;激光束到达样品107表面后发生反射和散射,其中部分瑞利散射光和反射光会沿着原光路返回。部分瑞利散射光和反射光沿着二向分色棱镜106、反射棱镜105、第一准直器104到达环形器103端口2,环形器103端口3处的激光被与环形器103端口3连接的光电探测器112检测。The laser reflection detection system is composed of a sample 107, a dichroic dichroic prism 106, a reflecting prism 105, a first collimator 104, a circulator 103 and a photodetector 112; Rayleigh scattered and reflected light will return along the original light path. Part of the Rayleigh scattered light and reflected light reaches the port 2 of the circulator 103 along the dichroic dichroic prism 106, the reflecting prism 105 and the first collimator 104, and the laser light at the port 3 of the circulator 103 is connected to the port 3 of the circulator 103 The photodetector 112 detects.

拉曼散射光收集系统由样品107、二向分色棱镜106、望远透镜系统108、滤光片109、第二准直器115和门控光谱仪110组成;样品107发出的拉曼散射光经过二向分色棱镜106透射到达望远透镜系统108,经过望远透镜系统108前端物镜收集和后端物镜汇聚,激光束汇聚到第二准直器115,置于第二准直器115和望远透射系统108之间的滤光片109去除瑞利散射光和反射激光,剩下的拉曼散射光通过光纤113传输到门控光谱仪110上。The Raman scattered light collection system is composed of a sample 107, a dichroic prism 106, a telephoto lens system 108, a filter 109, a second collimator 115 and a gated spectrometer 110; the Raman scattered light emitted by the sample 107 passes through The dichroic prism 106 transmits and reaches the telescopic lens system 108, and is collected by the front-end objective lens and the rear-end objective lens of the telescopic lens system 108, and the laser beam is converged to the second collimator 115, and is placed in the second collimator 115 and the telescope. The filter 109 between the far transmission systems 108 removes the Rayleigh scattered light and reflected laser light, and the remaining Raman scattered light is transmitted to the gated spectrometer 110 through the optical fiber 113 .

本实施例采用的脉冲激光器101是调Q脉冲Nd:YAG激光器,经过倍频后得到532nm波长的激光,脉冲宽度是8-10ns,单次脉冲能量为20-100mJ,重复频率为10-100Hz;反射棱镜105采用一次等腰直角棱镜。The pulsed laser 101 used in this embodiment is a Q-switched pulsed Nd:YAG laser, and after frequency doubling, a laser with a wavelength of 532 nm is obtained, the pulse width is 8-10 ns, the single pulse energy is 20-100 mJ, and the repetition frequency is 10-100 Hz; The reflection prism 105 is a primary isosceles right angle prism.

本实施例中一种基于激光测距自动调焦的门控光纤拉曼光谱仪方法,其中具体的测试方法包括以下步骤:In this embodiment, a method for a gated optical fiber Raman spectrometer based on laser ranging and automatic focusing, wherein the specific testing method includes the following steps:

1)固体Nd:YAG激光器101在主动的电光调制调Q下发出8-10ns脉宽的脉冲激光,激光波长为532nm,频率为10Hz,在发出脉冲同时,激光脉冲触发器102会输出一个触发电信号;1) The solid Nd:YAG laser 101 emits a pulsed laser with a pulse width of 8-10ns under the active electro-optical modulation Q-switching, the laser wavelength is 532nm, and the frequency is 10Hz. Signal;

2)激光脉冲经过光纤耦合到环形器103上的端口1,通过环形器103端口2输出后经过光纤到达第一准直器104;2) The laser pulse is coupled to the port 1 on the circulator 103 through the optical fiber, and is output through the port 2 of the circulator 103 to reach the first collimator 104 through the optical fiber;

3)激光脉冲从第一准直器104发出平行光后形成空间光路,到达一次等腰直角棱镜105,光路顺时针旋转90°;3) After the laser pulse emits parallel light from the first collimator 104, a space optical path is formed, reaching the primary isosceles right angle prism 105, and the optical path is rotated 90° clockwise;

4)激光脉冲到达二向分色棱镜106,该二向分色棱镜将波长小于535nm的光反射,波长大于535nm的光透射,因此激光脉冲到达二向分色棱镜106后反射,此时光路逆时针旋转90°,此时光路方向与原方向平行而且同向。4) The laser pulse reaches the dichroic prism 106, and the dichroic prism reflects light with a wavelength less than 535 nm, and transmits light with a wavelength greater than 535 nm, so the laser pulse reaches the dichroic prism 106 and then reflects, and the optical path is reversed at this time. When the hour hand rotates 90°, the direction of the optical path is parallel to and in the same direction as the original direction.

5)当激光脉冲照射到样品107时,激光会在表面发生散射和反射,一部分散射光和反射光会经过原路返回到二向分色棱镜106,其中瑞利散射光和反射光由于其波长小于535nm会被二向分色棱镜106反射进入一次等腰直角棱镜105;而拉曼散射光由于其波长大于535nm,进过二向分色棱镜106后进入望远透镜系统108。5) When the laser pulse irradiates the sample 107, the laser light will be scattered and reflected on the surface, and a part of the scattered light and reflected light will return to the dichroic prism 106 through the original path, where the Rayleigh scattered light and reflected light are due to their wavelengths. The wavelength less than 535nm will be reflected by the dichroic prism 106 and enter the primary isosceles right angle prism 105 ; and the Raman scattered light will enter the telephoto lens system 108 after passing through the dichroic prism 106 because its wavelength is greater than 535nm.

6)瑞利散射光和反射光被一次等腰直角棱镜105反射后被第一准直器104收集,耦合进入光纤然后到达环形器103的端口2,光线经过端口3后被光电探测器112探测。该信号强度超过一定值时就可以用来启动门控光谱仪110,另外反射光到达时间与激光脉冲触发器102发出的脉冲电信号的时间差可以作为参考延时时间,表示当激光脉冲发出后经过一段延时后门控光谱仪110才开始响应,这样能充分的接收信号光,避免背景光的积累吸收。6) Rayleigh scattered light and reflected light are collected by the first collimator 104 after being reflected by the primary isosceles right angle prism 105, coupled into the optical fiber and then reach the port 2 of the circulator 103, and the light is detected by the photodetector 112 after passing through the port 3 . When the signal strength exceeds a certain value, it can be used to start the gated spectrometer 110. In addition, the time difference between the arrival time of the reflected light and the pulse electrical signal sent by the laser pulse trigger 102 can be used as a reference delay time, indicating that a period of time has elapsed after the laser pulse is sent. The gated spectrometer 110 starts to respond after a delay, so that the signal light can be fully received and the accumulation and absorption of the background light can be avoided.

7)利用延时时间实现测距,并由数据控制系统111和电控调焦装置114对望远透镜系统108中的透镜进行自动调焦。7) Using the delay time to realize ranging, and the data control system 111 and the electronically controlled focusing device 114 automatically adjust the focus of the lens in the telephoto lens system 108 .

8)拉曼散射光到达二向分色棱镜106后会透射进入望远透镜系统108,通过前端高倍物镜收集然后经过后端物镜会聚成平行光,通过滤波片109过滤掉反射光和瑞利散射光后,进入第二准直器115,通过光纤113进入门控光谱仪110。8) After the Raman scattered light reaches the dichroic prism 106, it will be transmitted into the telephoto lens system 108, collected by the front-end high-power objective lens, and then converged into parallel light by the rear-end objective lens, and the reflected light and Rayleigh scattering are filtered out by the filter 109. After the light, it enters the second collimator 115 and enters the gated spectrometer 110 through the optical fiber 113 .

9)门控光谱仪110在没有启动信号时,一直处于关闭状态,只有通过步骤6)反射光产生的探测信号可以用来启动光谱仪,并在拉曼散射光到达时光谱仪中的CCD开始接受信号,光谱仪的开通时间受激光脉冲宽度决定,设定为10ns。9) The gated spectrometer 110 is always in a closed state when there is no start-up signal, only the detection signal generated by the reflected light in step 6) can be used to start the spectrometer, and the CCD in the spectrometer starts to receive the signal when the Raman scattered light arrives, The turn-on time of the spectrometer is determined by the laser pulse width, which is set to 10 ns.

10)从光谱仪中读出光谱会反馈到数据数据处理控制系统111中,经过计算得到其信噪比,如果信噪比过低,会发出进一步需要探测的指令,脉冲激光器101会继续发出脉冲,经过同样的延时时间再启动CCD来接受信号,再经过数据处理控制系统将这次数据与以前得到的数据融合,求出新的信噪比,如此循环,直到信噪比超过预定值为止,最后数据处理控制系统发出关闭激光器和光谱仪的指令。10) The spectrum read from the spectrometer will be fed back to the data processing control system 111, and its signal-to-noise ratio will be obtained through calculation. If the signal-to-noise ratio is too low, further instructions for detection will be issued, and the pulsed laser 101 will continue to emit pulses. After the same delay time, start the CCD to receive the signal, and then the data processing control system fuses this data with the previously obtained data to obtain a new signal-to-noise ratio, and so on until the signal-to-noise ratio exceeds the predetermined value. Finally, the data processing control system issues an instruction to turn off the laser and the spectrometer.

实施例2Example 2

图2为本发明基于激光测距自动调焦的门控光纤拉曼光谱仪实施例2的结构示意图。本实施例与实施例1相比较区别之处在于:反射棱镜105和二向分色棱镜106发生了改变。如图2所示,本实施例中反射棱镜与第一准直器的夹角为45°,二向分色棱镜在纵向方向与反射棱镜相对平行放置。FIG. 2 is a schematic structural diagram of Embodiment 2 of a gated optical fiber Raman spectrometer based on laser ranging and automatic focusing according to the present invention. The difference between this embodiment and Embodiment 1 is that the reflective prism 105 and the dichroic prism 106 are changed. As shown in FIG. 2 , in this embodiment, the included angle between the reflection prism and the first collimator is 45°, and the dichroic dichroic prism is placed in parallel with the reflection prism in the longitudinal direction.

棱镜组201的位置关系还可以是反射棱镜与第一准直器的夹角为45°,二向分色棱镜在纵向方向与反射棱镜相对垂直放置;反射棱镜与二向分色棱镜可以分立放置还可以两组棱镜组合安装实现激光束的反射或透射。The positional relationship of the prism group 201 can also be that the angle between the reflection prism and the first collimator is 45°, and the dichroic prism is placed vertically relative to the reflection prism in the longitudinal direction; the reflection prism and the dichroic prism can be placed separately It can also be installed in combination with two sets of prisms to realize the reflection or transmission of the laser beam.

结合这里披露的本发明的说明和实践,本发明的其他实施例对于本领域技术人员都是易于想到和理解的。说明和实施例仅被认为是示例性的,本发明的真正范围和主旨均由权利要求所限定。Other embodiments of the present invention will be readily apparent to and understood by those skilled in the art in conjunction with the specification and practice of the present invention disclosed herein. The description and examples are to be regarded as exemplary only, with the true scope and spirit of the invention being defined by the claims.

Claims (6)

1.一种基于激光测距自动调焦的门控光纤拉曼光谱仪的测距方法,其特征在于,基于激光测距自动调焦的门控光纤拉曼光谱仪包括激光探测系统、拉曼散射光收集系统和信号触发延时及数据处理控制系统;1. a ranging method based on the gated optical fiber Raman spectrometer of laser ranging auto-focusing, it is characterized in that, the gated optical fiber Raman spectrometer based on laser ranging auto-focusing comprises laser detection system, Raman scattered light Collection system and signal trigger delay and data processing control system; 所述的激光探测系统包括激光发射探测系统和激光反射探测系统;The laser detection system includes a laser emission detection system and a laser reflection detection system; 所述的激光发射探测系统包括脉冲激光器、环形器、第一准直器、反射棱镜和二向分色棱镜;The laser emission detection system includes a pulsed laser, a circulator, a first collimator, a reflection prism and a dichroic prism; 所述的激光反射系统为所述激光发射系统的逆向系统,所述激光反射系统包括所述的脉冲激光器、环形器、第一准直器、反射棱镜和光电探测器;The laser reflection system is an inverse system of the laser emission system, and the laser reflection system includes the pulsed laser, a circulator, a first collimator, a reflection prism and a photodetector; 所述的拉曼散射光收集系统包括所述二向分色棱镜,望远透镜系统,第二准直器,滤光片和门控光谱仪;The Raman scattered light collection system includes the dichroic prism, a telephoto lens system, a second collimator, an optical filter and a gated spectrometer; 所述的脉冲激光器和第一准直器分别与环形器通过光纤连接,所述的反射棱镜和第一准直器沿光路置于二向分色棱镜的反射方向;The pulsed laser and the first collimator are respectively connected with the circulator through an optical fiber, and the reflection prism and the first collimator are placed along the optical path in the reflection direction of the dichroic prism; 所述望远透镜系统、滤光片和第二准直器沿光路依次置于二向色分色棱镜的透射方向;所述门控光谱仪与第二准直器通过光纤连接;The telescopic lens system, the optical filter and the second collimator are sequentially placed in the transmission direction of the dichroic dichroic prism along the optical path; the gated spectrometer is connected with the second collimator through an optical fiber; 所述脉冲激光器设有激光脉冲触发器,光电探测器与环形器通过光纤连接,望远透镜系统设有电控调焦装置;The pulsed laser is provided with a laser pulse trigger, the photodetector is connected with the circulator through an optical fiber, and the telescopic lens system is provided with an electronically controlled focusing device; 所述的激光脉冲触发器、光电探测器、电控调焦装置和门控光谱仪分别与数据处理控制系统通过串行总线连接;The laser pulse trigger, photodetector, electronically controlled focusing device and gated spectrometer are respectively connected with the data processing control system through a serial bus; 所述方法包括如下步骤:The method includes the following steps: 1)脉冲激光器发出ns量级脉冲激光,通过环形器顺次经过第一准直器和反射棱镜,同时脉冲激光器发出一个触发电信号;1) The pulsed laser emits ns-level pulsed laser, which passes through the first collimator and the reflecting prism in sequence through the circulator, and at the same time the pulsed laser emits a triggering electrical signal; 2)激光束经过反射棱镜反射进入二向分色棱镜,然后经过二向分色棱镜再次反射,激光束传播方向与经过第一准直器发出的激光束平行同向;2) The laser beam is reflected by the reflective prism into the dichroic prism, and then reflected again by the dichroic prism, and the propagation direction of the laser beam is parallel and in the same direction as the laser beam emitted by the first collimator; 3)激光束到达样品表面发生反射和散射,部分瑞利散射光和反射光会沿着原光路进入环形器,通过环形器被光电探测器检测,如果探测器检测不到反射光,对设备方向进行调整;如果检测到反射光,数据处理系统记录到达光电探测器的时间,经过与触发信号的时间作比较得到用来开启门控光谱仪的延时参考信号,在下一次激光脉冲产生时启动门控光谱仪;3) When the laser beam reaches the sample surface, it is reflected and scattered. Part of the Rayleigh scattered light and reflected light will enter the circulator along the original optical path, and will be detected by the photodetector through the circulator. If the detector cannot detect the reflected light, the direction of the device will be affected. Adjustment; if the reflected light is detected, the data processing system records the time of reaching the photodetector, and then compares it with the time of the trigger signal to obtain a delay reference signal for opening the gated spectrometer, and starts the gated control when the next laser pulse is generated. spectrometer; 4)部分拉曼散射光经过二向分色棱镜透射进入望远透镜系统,经过前段物镜收集和后端物镜汇聚到滤光片,滤光片去除部分瑞丽散射光和反射光,剩下拉曼散射光汇聚到第二准直器,通过光纤传输到门控光谱仪;4) Part of the Raman scattered light is transmitted through the dichroic prism into the telescopic lens system, collected by the front-end objective lens and collected by the rear-end objective lens to the filter, and the filter removes part of the Rayleigh scattered light and reflected light, leaving the Raman scattered light The light is concentrated to the second collimator and transmitted to the gated spectrometer through the optical fiber; 5)利用延时时间计算待测物体与门控光谱仪的距离,由数据控制系统和电控调焦装置调节望远透镜系统中透镜的位置,实现自动调焦;5) Calculate the distance between the object to be measured and the gated spectrometer by using the delay time, and adjust the position of the lens in the telephoto lens system by the data control system and the electronically controlled focusing device to realize automatic focusing; 6)门控光谱仪开启由步骤3)中的延时时间确定,开通时间由脉冲激光器脉冲宽度决定;6) The opening of the gated spectrometer is determined by the delay time in step 3), and the opening time is determined by the pulse width of the pulsed laser; 7)门控光谱仪的读出信号被数据处理控制系统处理整理后,判断是否需要更多次数的脉冲信号。7) After the readout signal of the gated spectrometer is processed and sorted by the data processing control system, it is judged whether more pulse signals are needed. 2.根据权利要求1所述的一种基于激光测距自动调焦的门控光纤拉曼光谱仪的测距方法,其特征在于,所述的环形器为三端口环形器,所述的光纤为单模光纤。2. a kind of ranging method based on the gated optical fiber Raman spectrometer of laser ranging automatic focusing according to claim 1, is characterized in that, described circulator is a three-port circulator, and described optical fiber is single-mode fiber. 3.根据权利要求1所述的一种基于激光测距自动调焦的门控光纤拉曼光谱仪的测距方法,其特征在于,所述反射棱镜和第一准直器相对平行放置。3 . The ranging method for a gated fiber Raman spectrometer based on laser ranging and auto-focusing according to claim 1 , wherein the reflecting prism and the first collimator are relatively parallel to each other. 4 . 4.根据权利要求1所述的一种基于激光测距自动调焦的门控光纤拉曼光谱仪的测距方法,其特征在于,所述门控光谱仪可以是基于光纤F-P可调滤波器扫面的光纤门控光谱仪,或基于光栅色散的门控光谱仪,或基于空间傅里叶变换的门控光谱仪。4. a kind of ranging method based on the gated optical fiber Raman spectrometer of laser ranging automatic focusing according to claim 1, is characterized in that, described gated spectrometer can be based on optical fiber F-P tunable filter sweep surface fiber-gated spectrometers, or gated spectrometers based on grating dispersion, or gated spectrometers based on spatial Fourier transform. 5.根据权利要求1所述的一种基于激光测距自动调焦的门控光纤拉曼光谱仪的测距方法,其特征在于,所述的二向分色棱镜可以是一个特制的镀膜棱镜,也可以是组装的分光系统;所述的反射棱镜是表面镀膜99%的一次等腰直角棱镜。5. a kind of ranging method based on the gated optical fiber Raman spectrometer of laser ranging automatic focusing according to claim 1, is characterized in that, described dichroic prism can be a special coating prism, It can also be an assembled light-splitting system; the reflecting prism is a primary isosceles right-angle prism with a surface coating of 99%. 6.根据权利要求1所述的一种基于激光测距自动调焦的门控光纤拉曼光谱仪的测距方法,其特征在于,所述的反射棱镜和二向分色棱镜可以分立安装还可以两者组合安装。6. a kind of ranging method based on the gated optical fiber Raman spectrometer of laser ranging auto-focusing according to claim 1, is characterized in that, described reflecting prism and dichroic prism can be installed separately also can A combination of the two is installed.
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