CN1860301B - 真空泵 - Google Patents

真空泵 Download PDF

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Publication number
CN1860301B
CN1860301B CN2004800284031A CN200480028403A CN1860301B CN 1860301 B CN1860301 B CN 1860301B CN 2004800284031 A CN2004800284031 A CN 2004800284031A CN 200480028403 A CN200480028403 A CN 200480028403A CN 1860301 B CN1860301 B CN 1860301B
Authority
CN
China
Prior art keywords
pumping mechanism
rotor
vacuum pump
molecular drag
regenerative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2004800284031A
Other languages
English (en)
Chinese (zh)
Other versions
CN1860301A (zh
Inventor
I·D·斯通斯
N·P·肖菲尔德
M·N·斯图尔特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
BOC Group Ltd
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34424883&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN1860301(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from GB0322888A external-priority patent/GB0322888D0/en
Application filed by BOC Group Ltd, Edwards Ltd filed Critical BOC Group Ltd
Publication of CN1860301A publication Critical patent/CN1860301A/zh
Application granted granted Critical
Publication of CN1860301B publication Critical patent/CN1860301B/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
CN2004800284031A 2003-09-30 2004-09-23 真空泵 Expired - Lifetime CN1860301B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB0322888A GB0322888D0 (en) 2003-09-30 2003-09-30 Vacuum pump
GB0322888.9 2003-09-30
GBGB0409139.3A GB0409139D0 (en) 2003-09-30 2004-04-23 Vacuum pump
GB0409139.3 2004-04-23
PCT/GB2004/004110 WO2005033520A1 (en) 2003-09-30 2004-09-23 Vacuum pump

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN2011100487470A Division CN102062109B (zh) 2003-09-30 2004-09-23 真空泵

Publications (2)

Publication Number Publication Date
CN1860301A CN1860301A (zh) 2006-11-08
CN1860301B true CN1860301B (zh) 2012-10-10

Family

ID=34424883

Family Applications (3)

Application Number Title Priority Date Filing Date
CN2004800268965A Expired - Lifetime CN101124409B (zh) 2003-09-30 2004-09-23 差动泵吸的真空系统及差动抽真空的方法
CN2011100487470A Expired - Lifetime CN102062109B (zh) 2003-09-30 2004-09-23 真空泵
CN2004800284031A Expired - Lifetime CN1860301B (zh) 2003-09-30 2004-09-23 真空泵

Family Applications Before (2)

Application Number Title Priority Date Filing Date
CN2004800268965A Expired - Lifetime CN101124409B (zh) 2003-09-30 2004-09-23 差动泵吸的真空系统及差动抽真空的方法
CN2011100487470A Expired - Lifetime CN102062109B (zh) 2003-09-30 2004-09-23 真空泵

Country Status (8)

Country Link
US (4) US7866940B2 (enExample)
EP (4) EP2378129B1 (enExample)
JP (5) JP4843493B2 (enExample)
CN (3) CN101124409B (enExample)
AT (1) ATE535715T1 (enExample)
CA (4) CA2563234C (enExample)
GB (1) GB0409139D0 (enExample)
WO (2) WO2005033520A1 (enExample)

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GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
US20120027583A1 (en) * 2006-05-04 2012-02-02 Bernd Hofmann Vacuum pump
US8288719B1 (en) * 2006-12-29 2012-10-16 Griffin Analytical Technologies, Llc Analytical instruments, assemblies, and methods
DE102007010068B4 (de) * 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung
GB2466156B8 (en) * 2007-09-07 2015-10-14 Ionics Mass Spectrometry Group Multi-pressure stage mass spectrometer and methods
CN101398406B (zh) * 2007-09-30 2012-03-07 孔令昌 便携式质谱计
DE102008009715A1 (de) * 2008-02-19 2009-08-20 Oerlikon Leybold Vacuum Gmbh Vakuumpump-System und Verwendung einer Mehrstufen-Vakuumpumpe
US8673394B2 (en) * 2008-05-20 2014-03-18 Sundew Technologies Llc Deposition method and apparatus
US8573956B2 (en) 2008-10-10 2013-11-05 Ulvac, Inc. Multiple stage dry pump
GB0901872D0 (en) * 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
GB2472638B (en) * 2009-08-14 2014-03-19 Edwards Ltd Vacuum system
GB2474507B (en) 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
DE102010019940B4 (de) * 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
DE102012003680A1 (de) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
US20150377239A1 (en) * 2013-02-15 2015-12-31 Edwards Limited Vacuum pump
DE202013005458U1 (de) 2013-06-15 2014-09-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB201314841D0 (en) 2013-08-20 2013-10-02 Thermo Fisher Scient Bremen Multiple port vacuum pump system
DE102013109637A1 (de) * 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
DE102014101257A1 (de) 2014-02-03 2015-08-06 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3032106B1 (de) * 2014-12-08 2020-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2533153B (en) * 2014-12-12 2017-09-20 Thermo Fisher Scient (Bremen) Gmbh Vacuum system
DE102014226038A1 (de) * 2014-12-16 2016-06-16 Carl Zeiss Microscopy Gmbh Druckreduzierungseinrichtung, Vorrichtung zur massenspektrometrischen Analyse eines Gases und Reinigungsverfahren
US9368335B1 (en) * 2015-02-02 2016-06-14 Thermo Finnigan Llc Mass spectrometer
JP6488898B2 (ja) 2015-06-09 2019-03-27 株式会社島津製作所 真空ポンプおよび質量分析装置
EP3112688B2 (de) * 2015-07-01 2022-05-11 Pfeiffer Vacuum GmbH Splitflow-vakuumpumpe sowie vakuum-system mit einer splitflow-vakuumpumpe
JP6578838B2 (ja) * 2015-09-15 2019-09-25 株式会社島津製作所 真空ポンプおよび質量分析装置
EP3327293B1 (de) * 2016-11-23 2019-11-06 Pfeiffer Vacuum Gmbh Vakuumpumpe mit mehreren einlässen
JP7108377B2 (ja) * 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
KR101838660B1 (ko) * 2017-12-04 2018-03-14 (주)대명엔지니어링 진공 펌프
GB2569633A (en) * 2017-12-21 2019-06-26 Edwards Ltd A vacuum pumping arrangement and method of cleaning the vacuum pumping arrangement
DE202018000285U1 (de) * 2018-01-18 2019-04-23 Leybold Gmbh Vakuumpumpen-System
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer
GB2584603B (en) * 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
EP3623634B1 (de) * 2019-08-13 2022-04-06 Pfeiffer Vacuum Gmbh Vakuumpumpe umfassend eine holweckpumpstufe und zwei seitenkanalpumpstufen
US11710950B2 (en) 2021-01-20 2023-07-25 Te Connectivity Solutions Gmbh Cutting blade and cutting depth control device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
CN1110376A (zh) * 1994-04-16 1995-10-18 储继国 拖动分子泵
EP0959253A2 (en) * 1998-05-20 1999-11-24 The BOC Group plc Vacuum pump
CN1399076A (zh) * 2001-07-27 2003-02-26 大晃机械工业株式会社 真空泵
EP1302667A1 (en) * 2001-10-15 2003-04-16 The BOC Group plc Vacuum pumps
CN1432738A (zh) * 2001-12-04 2003-07-30 英国博克爱德华兹技术有限公司 真空泵

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Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
CN1110376A (zh) * 1994-04-16 1995-10-18 储继国 拖动分子泵
EP0959253A2 (en) * 1998-05-20 1999-11-24 The BOC Group plc Vacuum pump
CN1399076A (zh) * 2001-07-27 2003-02-26 大晃机械工业株式会社 真空泵
EP1302667A1 (en) * 2001-10-15 2003-04-16 The BOC Group plc Vacuum pumps
CN1432738A (zh) * 2001-12-04 2003-07-30 英国博克爱德华兹技术有限公司 真空泵

Also Published As

Publication number Publication date
CA2563234C (en) 2011-11-15
CA2747137A1 (en) 2005-05-06
CN102062109A (zh) 2011-05-18
GB0409139D0 (en) 2004-05-26
CA2563234A1 (en) 2005-04-14
CA2563306A1 (en) 2005-05-06
ATE535715T1 (de) 2011-12-15
CN102062109B (zh) 2012-11-28
EP1668255B2 (en) 2016-01-13
CA2747136C (en) 2012-04-10
JP4843493B2 (ja) 2011-12-21
EP2375080A3 (en) 2017-05-24
JP5809218B2 (ja) 2015-11-10
CN1860301A (zh) 2006-11-08
US20080138219A1 (en) 2008-06-12
US20140369807A1 (en) 2014-12-18
EP1668255B1 (en) 2011-11-30
JP2007507656A (ja) 2007-03-29
CN101124409A (zh) 2008-02-13
EP1668254A2 (en) 2006-06-14
CA2747136A1 (en) 2005-05-06
JP2014001743A (ja) 2014-01-09
JP2014001744A (ja) 2014-01-09
US7866940B2 (en) 2011-01-11
JP2007507657A (ja) 2007-03-29
EP2375080A2 (en) 2011-10-12
EP2378129B1 (en) 2020-02-05
JP5546094B2 (ja) 2014-07-09
EP1668254B1 (en) 2019-09-04
CA2563306C (en) 2011-11-15
EP2378129A3 (en) 2017-05-31
US20110200423A1 (en) 2011-08-18
EP1668255A1 (en) 2006-06-14
EP2375080B1 (en) 2020-06-03
WO2005040615A2 (en) 2005-05-06
CA2747137C (en) 2014-05-13
JP5637919B2 (ja) 2014-12-10
JP2011137475A (ja) 2011-07-14
US9249805B2 (en) 2016-02-02
WO2005033520A1 (en) 2005-04-14
CN101124409B (zh) 2012-11-07
US8851865B2 (en) 2014-10-07
EP2378129A2 (en) 2011-10-19
WO2005040615A3 (en) 2005-06-16
US8672607B2 (en) 2014-03-18
US20070116555A1 (en) 2007-05-24

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
ASS Succession or assignment of patent right

Owner name: EDWARDS CO., LTD.

Free format text: FORMER OWNER: THE BOC GROUP PLC

Effective date: 20071214

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20071214

Address after: West Sussex

Applicant after: EDWARDS Ltd.

Address before: England, British Surrey

Applicant before: The Boc Group PlC

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Granted publication date: 20121010