CN1833273B - 具有偏压极性束轮廓控制的微型制造的超声波传感器 - Google Patents

具有偏压极性束轮廓控制的微型制造的超声波传感器 Download PDF

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Publication number
CN1833273B
CN1833273B CN2004800072945A CN200480007294A CN1833273B CN 1833273 B CN1833273 B CN 1833273B CN 2004800072945 A CN2004800072945 A CN 2004800072945A CN 200480007294 A CN200480007294 A CN 200480007294A CN 1833273 B CN1833273 B CN 1833273B
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CN
China
Prior art keywords
ultrasonic sensor
bias
ultrasonic
electrodes
bias voltage
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Expired - Fee Related
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CN2004800072945A
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English (en)
Chinese (zh)
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CN1833273A (zh
Inventor
克里斯多夫·M·W·达夫特
保罗·A·瓦格那
伊加尔·拉达保姆
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Siemens Corp
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Siemens Corp
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Publication date
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
    • G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
    • G01S15/8925—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/34—Sound-focusing or directing, e.g. scanning using electrical steering of transducer arrays, e.g. beam steering
    • G10K11/341—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52046—Techniques for image enhancement involving transmitter or receiver

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Remote Sensing (AREA)
  • Acoustics & Sound (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Multimedia (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
CN2004800072945A 2003-02-14 2004-01-29 具有偏压极性束轮廓控制的微型制造的超声波传感器 Expired - Fee Related CN1833273B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/367,106 2003-02-14
US10/367,106 US7087023B2 (en) 2003-02-14 2003-02-14 Microfabricated ultrasonic transducers with bias polarity beam profile control and method of operating the same
PCT/US2004/002740 WO2004075165A1 (en) 2003-02-14 2004-01-29 Microfabricated ultrasonic transducers with bias polarity beam profile control

Publications (2)

Publication Number Publication Date
CN1833273A CN1833273A (zh) 2006-09-13
CN1833273B true CN1833273B (zh) 2010-12-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2004800072945A Expired - Fee Related CN1833273B (zh) 2003-02-14 2004-01-29 具有偏压极性束轮廓控制的微型制造的超声波传感器

Country Status (6)

Country Link
US (1) US7087023B2 (https=)
EP (1) EP1593115B1 (https=)
JP (1) JP4422718B2 (https=)
CN (1) CN1833273B (https=)
DE (1) DE602004006232T2 (https=)
WO (1) WO2004075165A1 (https=)

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Also Published As

Publication number Publication date
EP1593115A1 (en) 2005-11-09
EP1593115B1 (en) 2007-05-02
JP2006519556A (ja) 2006-08-24
WO2004075165A1 (en) 2004-09-02
US20040160144A1 (en) 2004-08-19
DE602004006232T2 (de) 2008-02-07
WO2004075165B1 (en) 2006-04-27
US7087023B2 (en) 2006-08-08
DE602004006232D1 (de) 2007-06-14
CN1833273A (zh) 2006-09-13
JP4422718B2 (ja) 2010-02-24

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