CN1828245A - 带有运动板的薄膜体声波谐振器 - Google Patents
带有运动板的薄膜体声波谐振器 Download PDFInfo
- Publication number
- CN1828245A CN1828245A CNA2005101301420A CN200510130142A CN1828245A CN 1828245 A CN1828245 A CN 1828245A CN A2005101301420 A CNA2005101301420 A CN A2005101301420A CN 200510130142 A CN200510130142 A CN 200510130142A CN 1828245 A CN1828245 A CN 1828245A
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- China
- Prior art keywords
- bulk acoustic
- film bulk
- maneuvering board
- thin film
- resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
- G01L1/165—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Pressure Sensors (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/073,345 US7427819B2 (en) | 2005-03-04 | 2005-03-04 | Film-bulk acoustic wave resonator with motion plate and method |
US11/073,345 | 2005-03-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1828245A true CN1828245A (zh) | 2006-09-06 |
CN100554903C CN100554903C (zh) | 2009-10-28 |
Family
ID=36218866
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101301420A Expired - Fee Related CN100554903C (zh) | 2005-03-04 | 2005-12-12 | 带有运动板的薄膜体声波谐振器 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7427819B2 (zh) |
CN (1) | CN100554903C (zh) |
GB (1) | GB2424485B (zh) |
Cited By (7)
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CN101188875A (zh) * | 2006-10-27 | 2008-05-28 | 安华高科技无线Ip(新加坡)私人有限公司 | 压电麦克风 |
CN101895269A (zh) * | 2010-07-30 | 2010-11-24 | 中国科学院声学研究所 | 一种压电薄膜体声波谐振器的制备方法 |
CN103827673A (zh) * | 2011-08-31 | 2014-05-28 | 意法半导体股份有限公司 | 用于z轴谐振加速度计的改进检测结构 |
CN104614099A (zh) * | 2015-02-03 | 2015-05-13 | 中国工程物理研究院电子工程研究所 | 膜片上fbar结构的微压力传感器 |
CN105784222A (zh) * | 2016-05-06 | 2016-07-20 | 中国工程物理研究院电子工程研究所 | 体声波壁面剪切应力传感器 |
CN107192481A (zh) * | 2017-05-12 | 2017-09-22 | 中北大学 | 一种基于侧向场激励剪切波模式的fbar微压力传感器 |
CN108282157A (zh) * | 2017-01-05 | 2018-07-13 | 三星电机株式会社 | 声波谐振器及制造声波谐振器的方法 |
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US7275292B2 (en) | 2003-03-07 | 2007-10-02 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Method for fabricating an acoustical resonator on a substrate |
US7388454B2 (en) | 2004-10-01 | 2008-06-17 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using alternating frame structure |
US8981876B2 (en) | 2004-11-15 | 2015-03-17 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Piezoelectric resonator structures and electrical filters having frame elements |
US7202560B2 (en) | 2004-12-15 | 2007-04-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Wafer bonding of micro-electro mechanical systems to active circuitry |
US7791434B2 (en) | 2004-12-22 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric |
TWI283739B (en) * | 2004-12-28 | 2007-07-11 | Delta Electronics Inc | FBAR-based sensing apparatus |
US7369013B2 (en) | 2005-04-06 | 2008-05-06 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using filled recessed region |
US7358651B2 (en) * | 2005-04-18 | 2008-04-15 | Avago Technologies Wireless (Singapore) Pte. Ltd. | Apparatus and method for detecting a target environmental variable that employs film-bulk acoustic wave resonator oscillators |
US7868522B2 (en) * | 2005-09-09 | 2011-01-11 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Adjusted frequency temperature coefficient resonator |
US20070089513A1 (en) * | 2005-09-30 | 2007-04-26 | Rosenau Steven A | Resonator based transmitters for capacitive sensors |
US7737807B2 (en) | 2005-10-18 | 2010-06-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators |
US7675390B2 (en) | 2005-10-18 | 2010-03-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator |
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US7746677B2 (en) | 2006-03-09 | 2010-06-29 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | AC-DC converter circuit and power supply |
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US8528404B2 (en) * | 2007-10-11 | 2013-09-10 | Georgia Tech Research Corporation | Bulk acoustic wave accelerometers |
KR101378510B1 (ko) * | 2007-11-01 | 2014-03-28 | 삼성전자주식회사 | Fbar를 이용한 튜너블 공진기 |
US7732977B2 (en) | 2008-04-30 | 2010-06-08 | Avago Technologies Wireless Ip (Singapore) | Transceiver circuit for film bulk acoustic resonator (FBAR) transducers |
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2006
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Also Published As
Publication number | Publication date |
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GB2424485B (en) | 2010-03-10 |
US20060197411A1 (en) | 2006-09-07 |
GB2424485A (en) | 2006-09-27 |
GB0604031D0 (en) | 2006-04-12 |
US7427819B2 (en) | 2008-09-23 |
CN100554903C (zh) | 2009-10-28 |
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