CN1790722A - 6f2存取晶体管配置和半导体存储器件 - Google Patents
6f2存取晶体管配置和半导体存储器件 Download PDFInfo
- Publication number
- CN1790722A CN1790722A CN200510131639.4A CN200510131639A CN1790722A CN 1790722 A CN1790722 A CN 1790722A CN 200510131639 A CN200510131639 A CN 200510131639A CN 1790722 A CN1790722 A CN 1790722A
- Authority
- CN
- China
- Prior art keywords
- contact portion
- access transistor
- isolated
- transistor
- bit line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/48—Data lines or contacts therefor
- H10B12/485—Bit line contacts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/50—Peripheral circuit region structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/05—Making the transistor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Engineering & Computer Science (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
Claims (16)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/011040 | 2004-12-15 | ||
US11/011,040 US7476920B2 (en) | 2004-12-15 | 2004-12-15 | 6F2 access transistor arrangement and semiconductor memory device |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1790722A true CN1790722A (zh) | 2006-06-21 |
CN100405601C CN100405601C (zh) | 2008-07-23 |
Family
ID=36590707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101316394A Expired - Fee Related CN100405601C (zh) | 2004-12-15 | 2005-12-15 | 6f2存取晶体管配置和半导体存储器件 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7476920B2 (zh) |
CN (1) | CN100405601C (zh) |
DE (1) | DE102005057070A1 (zh) |
TW (1) | TWI292941B (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103872056A (zh) * | 2012-12-14 | 2014-06-18 | 旺宏电子股份有限公司 | 具有水平延伸的三维栅极结构及其制造方法 |
CN108269763A (zh) * | 2016-12-30 | 2018-07-10 | 联华电子股份有限公司 | 半导体元件的制作方法 |
CN108695325A (zh) * | 2017-04-07 | 2018-10-23 | 联华电子股份有限公司 | 动态随机存取存储器元件 |
CN110299324A (zh) * | 2018-03-22 | 2019-10-01 | 长鑫存储技术有限公司 | 半导体储存器的晶体管结构及其制造方法 |
CN111584487A (zh) * | 2020-05-28 | 2020-08-25 | 福建省晋华集成电路有限公司 | 半导体结构 |
CN111916452A (zh) * | 2019-05-07 | 2020-11-10 | 力晶积成电子制造股份有限公司 | 存储器结构及其制造方法 |
CN113689893A (zh) * | 2021-08-26 | 2021-11-23 | 北京磐芯微电子科技有限公司 | 闪存阵列 |
WO2022077919A1 (zh) * | 2020-10-16 | 2022-04-21 | 长鑫存储技术有限公司 | 半导体器件及其制造方法 |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100843244B1 (ko) | 2007-04-19 | 2008-07-02 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
DE102004031385B4 (de) * | 2004-06-29 | 2010-12-09 | Qimonda Ag | Verfahren zur Herstellung von Stegfeldeffekttransistoren in einer DRAM-Speicherzellenanordnung, Feldeffekttransistoren mit gekrümmtem Kanal und DRAM-Speicherzellenanordnung |
US7902598B2 (en) * | 2005-06-24 | 2011-03-08 | Micron Technology, Inc. | Two-sided surround access transistor for a 4.5F2 DRAM cell |
US7888721B2 (en) | 2005-07-06 | 2011-02-15 | Micron Technology, Inc. | Surround gate access transistors with grown ultra-thin bodies |
US7768051B2 (en) | 2005-07-25 | 2010-08-03 | Micron Technology, Inc. | DRAM including a vertical surround gate transistor |
US7557032B2 (en) | 2005-09-01 | 2009-07-07 | Micron Technology, Inc. | Silicided recessed silicon |
US7416943B2 (en) | 2005-09-01 | 2008-08-26 | Micron Technology, Inc. | Peripheral gate stacks and recessed array gates |
US7687342B2 (en) * | 2005-09-01 | 2010-03-30 | Micron Technology, Inc. | Method of manufacturing a memory device |
KR100724074B1 (ko) * | 2006-05-22 | 2007-06-04 | 삼성전자주식회사 | 핀 전계 효과 트랜지스터 및 이의 형성 방법 |
US7956387B2 (en) * | 2006-09-08 | 2011-06-07 | Qimonda Ag | Transistor and memory cell array |
US7605037B2 (en) * | 2007-02-09 | 2009-10-20 | Qimonda Ag | Manufacturing method for an integrated semiconductor memory device and corresponding semiconductor memory device |
US7642572B2 (en) * | 2007-04-13 | 2010-01-05 | Qimonda Ag | Integrated circuit having a memory cell array and method of forming an integrated circuit |
US7923373B2 (en) | 2007-06-04 | 2011-04-12 | Micron Technology, Inc. | Pitch multiplication using self-assembling materials |
US7742324B2 (en) * | 2008-02-19 | 2010-06-22 | Micron Technology, Inc. | Systems and devices including local data lines and methods of using, making, and operating the same |
US8866254B2 (en) | 2008-02-19 | 2014-10-21 | Micron Technology, Inc. | Devices including fin transistors robust to gate shorts and methods of making the same |
US9190494B2 (en) * | 2008-02-19 | 2015-11-17 | Micron Technology, Inc. | Systems and devices including fin field-effect transistors each having U-shaped semiconductor fin |
US7915659B2 (en) | 2008-03-06 | 2011-03-29 | Micron Technology, Inc. | Devices with cavity-defined gates and methods of making the same |
US7898857B2 (en) | 2008-03-20 | 2011-03-01 | Micron Technology, Inc. | Memory structure having volatile and non-volatile memory portions |
US8546876B2 (en) | 2008-03-20 | 2013-10-01 | Micron Technology, Inc. | Systems and devices including multi-transistor cells and methods of using, making, and operating the same |
US7808042B2 (en) | 2008-03-20 | 2010-10-05 | Micron Technology, Inc. | Systems and devices including multi-gate transistors and methods of using, making, and operating the same |
US7969776B2 (en) | 2008-04-03 | 2011-06-28 | Micron Technology, Inc. | Data cells with drivers and methods of making and operating the same |
KR101535222B1 (ko) * | 2008-04-17 | 2015-07-08 | 삼성전자주식회사 | 반도체 소자 및 그의 제조 방법 |
US8076229B2 (en) * | 2008-05-30 | 2011-12-13 | Micron Technology, Inc. | Methods of forming data cells and connections to data cells |
US8148776B2 (en) | 2008-09-15 | 2012-04-03 | Micron Technology, Inc. | Transistor with a passive gate |
US8294511B2 (en) | 2010-11-19 | 2012-10-23 | Micron Technology, Inc. | Vertically stacked fin transistors and methods of fabricating and operating the same |
US9401363B2 (en) | 2011-08-23 | 2016-07-26 | Micron Technology, Inc. | Vertical transistor devices, memory arrays, and methods of forming vertical transistor devices |
US9941290B2 (en) * | 2016-06-01 | 2018-04-10 | Taiwan Semiconductor Manufacaturing Co., Ltd. | Read-only memory (ROM) device structure and method for forming the same |
US10692808B2 (en) | 2017-09-18 | 2020-06-23 | Qualcomm Incorporated | High performance cell design in a technology with high density metal routing |
CN114121778A (zh) | 2020-08-26 | 2022-03-01 | 长鑫存储技术有限公司 | 存储器及其制造方法 |
US11903186B2 (en) | 2022-04-21 | 2024-02-13 | Nanya Technology Corporation | Method for manufacturing semiconductor device with bit line contacts of different pitches |
TWI825786B (zh) * | 2022-04-21 | 2023-12-11 | 南亞科技股份有限公司 | 具有不同間距之位元線接觸點的半導體元件 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0677480A (ja) * | 1992-08-24 | 1994-03-18 | Hitachi Ltd | 半導体装置 |
JP3311070B2 (ja) * | 1993-03-15 | 2002-08-05 | 株式会社東芝 | 半導体装置 |
JP2570100B2 (ja) * | 1993-05-16 | 1997-01-08 | 日本電気株式会社 | 半導体記憶装置 |
JP2658870B2 (ja) * | 1994-04-22 | 1997-09-30 | 日本電気株式会社 | 半導体記憶装置およびその製造方法 |
DE19928781C1 (de) | 1999-06-23 | 2000-07-06 | Siemens Ag | DRAM-Zellenanordnung und Verfahren zu deren Herstellung |
US6396158B1 (en) | 1999-06-29 | 2002-05-28 | Motorola Inc. | Semiconductor device and a process for designing a mask |
US6294436B1 (en) * | 1999-08-16 | 2001-09-25 | Infineon Technologies Ag | Method for fabrication of enlarged stacked capacitors using isotropic etching |
US6570208B2 (en) * | 2001-01-18 | 2003-05-27 | International Business Machines Corporation | 6F2 Trench EDRAM cell with double-gated vertical MOSFET and self-aligned STI |
US6545904B2 (en) * | 2001-03-16 | 2003-04-08 | Micron Technology, Inc. | 6f2 dram array, a dram array formed on a semiconductive substrate, a method of forming memory cells in a 6f2 dram array and a method of isolating a single row of memory cells in a 6f2 dram array |
US6590817B2 (en) * | 2001-07-23 | 2003-07-08 | Micron Technology, Inc. | 6F2 DRAM array with apparatus for stress testing an isolation gate and method |
US6734482B1 (en) * | 2002-11-15 | 2004-05-11 | Micron Technology, Inc. | Trench buried bit line memory devices |
KR100505712B1 (ko) * | 2003-10-22 | 2005-08-02 | 삼성전자주식회사 | 리세스 채널 어레이 트랜지스터의 제조 방법 |
US7139184B2 (en) * | 2004-12-07 | 2006-11-21 | Infineon Technologies Ag | Memory cell array |
TWM311285U (en) | 2006-07-28 | 2007-05-11 | Yan Yang Industry Co Ltd | Anti-slip structure of pinned top-piece |
-
2004
- 2004-12-15 US US11/011,040 patent/US7476920B2/en not_active Expired - Fee Related
-
2005
- 2005-11-09 TW TW094139318A patent/TWI292941B/zh not_active IP Right Cessation
- 2005-11-30 DE DE102005057070A patent/DE102005057070A1/de not_active Withdrawn
- 2005-12-15 CN CNB2005101316394A patent/CN100405601C/zh not_active Expired - Fee Related
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103872056A (zh) * | 2012-12-14 | 2014-06-18 | 旺宏电子股份有限公司 | 具有水平延伸的三维栅极结构及其制造方法 |
CN103872056B (zh) * | 2012-12-14 | 2016-08-17 | 旺宏电子股份有限公司 | 具有水平延伸的三维栅极结构及其制造方法 |
CN108269763A (zh) * | 2016-12-30 | 2018-07-10 | 联华电子股份有限公司 | 半导体元件的制作方法 |
CN108695325A (zh) * | 2017-04-07 | 2018-10-23 | 联华电子股份有限公司 | 动态随机存取存储器元件 |
CN108695325B (zh) * | 2017-04-07 | 2019-08-23 | 联华电子股份有限公司 | 动态随机存取存储器元件 |
CN110299324A (zh) * | 2018-03-22 | 2019-10-01 | 长鑫存储技术有限公司 | 半导体储存器的晶体管结构及其制造方法 |
CN110299324B (zh) * | 2018-03-22 | 2024-03-26 | 长鑫存储技术有限公司 | 半导体储存器的晶体管结构及其制造方法 |
CN111916452A (zh) * | 2019-05-07 | 2020-11-10 | 力晶积成电子制造股份有限公司 | 存储器结构及其制造方法 |
CN111584487A (zh) * | 2020-05-28 | 2020-08-25 | 福建省晋华集成电路有限公司 | 半导体结构 |
WO2022077919A1 (zh) * | 2020-10-16 | 2022-04-21 | 长鑫存储技术有限公司 | 半导体器件及其制造方法 |
CN113689893A (zh) * | 2021-08-26 | 2021-11-23 | 北京磐芯微电子科技有限公司 | 闪存阵列 |
Also Published As
Publication number | Publication date |
---|---|
TWI292941B (en) | 2008-01-21 |
CN100405601C (zh) | 2008-07-23 |
US7476920B2 (en) | 2009-01-13 |
DE102005057070A1 (de) | 2006-07-06 |
TW200620566A (en) | 2006-06-16 |
US20060281250A1 (en) | 2006-12-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1790722A (zh) | 6f2存取晶体管配置和半导体存储器件 | |
CN1045349C (zh) | 具有覆埋位线元件的半导体器件及其制备方法 | |
CN1150610C (zh) | 具有不对称通道掺杂剂轮廓的器件及其制造方法 | |
KR20090005149A (ko) | 에칭된 나노핀 트랜지스터 | |
CN1628386A (zh) | 无电容单一晶体管动态随机存取存储器单元及制造方法 | |
US11764234B2 (en) | Array of capacitors, an array of memory cells, method used in forming an array of memory cells, methods used in forming an array of capacitors, and methods used in forming a plurality of horizontally-spaced conductive lines | |
US11444093B2 (en) | Memory arrays and methods of forming memory arrays | |
TWI710111B (zh) | 積體電路架構 | |
CN1702875A (zh) | 晶体管及其制造方法 | |
US11791202B2 (en) | Memory arrays and methods used in forming a memory array comprising strings of memory cells | |
WO2023216402A1 (zh) | 半导体结构及制备方法 | |
US11937428B2 (en) | Memory arrays and methods used in forming a memory array comprising strings of memory cells | |
US10128183B1 (en) | Structure of integrated circuitry and a method of forming a conductive via | |
CN115411040A (zh) | 半导体结构 | |
US11765902B2 (en) | Memory arrays and methods used in forming a memory array comprising strings of memory cells | |
CN1507034A (zh) | 用于制造具有在位线方向延伸的接触体的半导体器件的方法 | |
US11672114B2 (en) | Memory arrays and methods used in forming a memory array comprising strings of memory cells | |
US6822281B2 (en) | Trench cell for a DRAM cell array | |
CN1828900A (zh) | 含具有垂直栅电极的晶体管的半导体器件及其制造方法 | |
JP2006086522A (ja) | 電荷捕獲半導体メモリデバイス | |
KR100848730B1 (ko) | 집적 회로 메모리 셀 및 그 제조 방법 | |
KR100221061B1 (ko) | 반도체장치 및 그 제조방법 | |
JP2008199027A (ja) | 3次元チャネル電界効果トランジスタを備えた集積回路およびその製造方法 | |
US11751393B2 (en) | Memory arrays and methods used in forming a memory array comprising strings of memory cells | |
US20230363140A1 (en) | Semiconductor structure and manufacturing method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: Munich, Germany Patentee after: Infineon Technologies AG Address before: Munich, Germany Patentee before: INFINEON TECHNOLOGIES AG |
|
TR01 | Transfer of patent right |
Effective date of registration: 20120920 Address after: Munich, Germany Patentee after: QIMONDA AG Address before: Munich, Germany Patentee before: Infineon Technologies AG |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20151230 Address after: German Berg, Laura Ibiza Patentee after: Infineon Technologies AG Address before: Munich, Germany Patentee before: QIMONDA AG |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080723 Termination date: 20151215 |
|
EXPY | Termination of patent right or utility model |