CN1790617A - Replacing method of valv device, processing system and sealing components - Google Patents

Replacing method of valv device, processing system and sealing components Download PDF

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Publication number
CN1790617A
CN1790617A CNA2005101340020A CN200510134002A CN1790617A CN 1790617 A CN1790617 A CN 1790617A CN A2005101340020 A CNA2005101340020 A CN A2005101340020A CN 200510134002 A CN200510134002 A CN 200510134002A CN 1790617 A CN1790617 A CN 1790617A
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CN
China
Prior art keywords
valve body
opening
maintenance
seal member
influence
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Granted
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CNA2005101340020A
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Chinese (zh)
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CN100383918C (en
Inventor
广木勤
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication of CN1790617A publication Critical patent/CN1790617A/en
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Publication of CN100383918C publication Critical patent/CN100383918C/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/24—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/28—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with resilient valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Lift Valve (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention provides a door valve device which can still replace a sealing component without providing a handling room to atmosphere. A door valve device (12) which is installed between a handling opening of a treatment chamber (4), and a handling room (6) in open-close and vacuum states comprises a valve body (44) which can be assembled through opening-closing the handling opening; a sealing component (66) which can be installed on the surface of the valve body in a assembly and disassembly way and is hermetically contacted with the assembly surfaces around the handling opening; a sealing component (68) used for maintenance and encircled on the periphery of the sealing component through the regulated interval to the sealing component; an opening (72) used for maintenance; an opening-closing cover (74) used for detachably and hermetically blocking the outer side of the opening used for maintenance and used for maintenance; a valve body driving mechanism (46) which is installed in order to ensure the valve body to be moved between the handling opening and the opening used for maintenance, wherein when the valve body is assembled, and in the state that the sealing component is exposed, the opening (72) used for maintenance becomes the size that the sealing component used for maintenance can be hermetically sealed.

Description

The replacing method of family of power and influence's device, treatment system and seal member
Technical field
The present invention relates in the treatment chamber of handled objects such as semiconductor wafer being carried out predetermined processing employed family of power and influence's device and have the treatment system of a plurality of these treatment chamber and the replacing method of the seal member of family of power and influence's device.
Background technology
Usually, in the manufacturing process of semiconductor equipment, repeatedly semiconductor wafer is carried out various processing, for example dry-etching, sputter, CVD operations such as (chemical vapour deposition (CVD)s).Above-mentioned various processing is carried out under vacuum atmosphere mostly, carries out wafer for the treatment chamber of carrying out this processing and takes out of the opening of moving into of moving into, and carries out the sealing of high-air-tightness by the family of power and influence when handling.
This family of power and influence's device for example discloses in patent documentation 1 grade to some extent.For example, on the sidewall of the treatment chamber that can vacuumize, form the size that wafer can pass through width move into opening, move into opening part at this family of power and influence's device be installed.And, when carrying out operation, the above-mentioned opening of moving into is hermetic closed by the valve bodies such as O shape ring that this family of power and influence's device is installed, under this state, carry out operation and handle.
Yet, in above-mentioned various operations, the processing of using corrosive gas is arranged, and, even in operation, do not use corrosive gas, in order to remove the various unwanted film that in treatment chamber, adheres to and pollutant etc., also carry out regular or irregular clean by corrosivity (etching) gas.In this case, seal member for above-mentioned family of power and influence's device, though be gradually, but can be subjected to the influence of above-mentioned corrosive gas and mis-behave, moreover, but also can be because of causing mis-behave, so must carry out regular or irregular replacing to the sealing parts with the physical abrasion that produces that contacts or push of fitting surface.
Yet above-mentioned treatment chamber generally is around a common carrying room, is connected with a plurality of the setting by family of power and influence's device respectively, i.e. instrument centralization.The replacing operation of the seal member of above-mentioned family of power and influence's device generally is to make the treatment chamber of coupled setting to atmosphere opening, carries out when carrying out attended operation.But, as mentioned above, because treatment chamber is interior to atmosphere opening, and makes family of power and influence's device also to atmosphere opening for the replacing of carrying out seal member, so common carrying room is also just to atmosphere opening.Wherein, this moment, other treatment chamber was then closed by other family of power and influence's device, in this case, after attended operation finishes back or seal member replacing, though can get back to the reduced atmosphere of regulation to vacuumizing respectively in the carrying room and in the treatment chamber, but in case behind atmosphere opening, then because airborne moisture and impure gas etc. can adhere to internal face, so, for moisture and the removal of impure gas with these adhesions just need to prolong the time that vacuumizes, thereby can cause that utilization ratio of device descends and the decline of production capacity.
Therefore, in order to address the above problem, for example patent documentation 2 is described, has proposed to have the scheme of family of power and influence's device of two valve bodies.Specifically, in family of power and influence's device, be provided with and have the valve body of two driving mechanisms of self contained function separately, when changing when in treatment chamber, safeguarding or to the seal member of valve body one side that is exposed to corrosive gas, hermetic seal by the peristome of another valve body common carrying room one side, even to atmosphere opening, also can keep vacuum state in the carrying room in the treatment chamber.
Patent documentation 1:(Japan Patent) spy opens flat 8-60374 communique
Patent documentation 2:(Japan Patent) special table 2003-503844 communique
Summary of the invention
But, in family of power and influence's device of the above-mentioned prior art that driving mechanism is set respectively with respect to two valve bodies, be not only valve body even driving mechanism also must be arranged to two groups respectively.So, have all structure complicated, and device institute such as yet maximize itself does not wish the problem that occurs.
In addition, when changing seal member, must decompose the division wall of division family of power and influence device etc., thereby make the workload of changing operation itself increase, and change the time lengthening of operating.
And, when the replacing of seal member, must at this moment, also produce and pollute, change the problems such as time lengthening that vacuumize after the operation in the opposite house valve gear to atmosphere opening in family of power and influence's device.That is,, then can not carry out the replacing of seal member if do not make treatment chamber to atmosphere opening.
The present invention in view of the above problems, propose for addressing the above problem effectively.
First purpose of the present invention is, even an a kind of valve body can not carry out the replacing of seal member in carrying room and treatment chamber yet under the situation of atmosphere opening replacing method of family of power and influence's device, treatment system and seal member that is provided with is provided.
Second purpose of the present invention is, a kind of replacing method of family of power and influence's device, treatment system and seal member of the replacing that can carry out seal member by two valve bodies are set under the isolated state of carrying room and treatment chamber is provided.
Family of power and influence's device in first aspect present invention, it is characterized in that: be mounted in be used for to handled object implement predetermined processing treatment chamber move into opening, make described handled object from the carrying room of vacuum state by and open and close described family of power and influence's device of moving into opening, wherein, comprising: can open and close the described valve body of moving into opening and installing; Releasably be arranged at the surface of described valve body, the seal member that when moving into opening, contacts with the fitting surface of assembling airtightly by described valve body switching is described; In the periphery of sealing parts, to surround the maintenance seal member of setting apart from the interval of described seal member regulation; Safeguard and use opening, form when assembling described valve body, under the state that described seal member exposes, the size that can seal airtightly with seal member by described maintenance; The described maintenance of the releasably airtight obstruction maintenance open-close lid of opening; And can make described valve body at described opening and the described maintenance valve body driving mechanism that moves between the opening and install moved into.
Like this, because the seal member of valve body when being provided with technology and maintenance seal member in its periphery, the replacing of seal member can carried out under safeguarding with the state of opening by safeguarding with seal member valve body to be assemblied in, so can be in family of power and influence's device and carrying room be not exposed to the replacing of carrying out seal member under the state of atmosphere, make that changing operation can promptly carry out.
In this case, for example in second aspect present invention, open and close described when moving into opening and on the fitting surface that assembles on the surface of described valve body or by described valve body, be formed with contact and avoid stage portion, when described valve body being assemblied in the described fitting surface of moving into opening, be used to avoid the contact of described maintenance with seal member.
And, for example in third aspect present invention, use on the division wall of opening with open-close lid or described maintenance in the described maintenance of division, be provided with the space gas supply system, will be in described maintenance with open-close lid and be assemblied in described maintenance and revert to atmospheric pressure in the formed space between with the described valve body on the fitting surface of opening.
And, in fourth aspect present invention, use on the division wall of opening with open-close lid or described maintenance in the described maintenance of division, be provided with the space vacuum pumping system, will be in described maintenance with open-close lid and be assemblied in the described maintenance state that is evacuated in the formed space between with the described valve body on the fitting surface of opening.
And, for example in fifth aspect present invention, described valve body driving mechanism is made of valve body support component and valve body mobile device, wherein, described valve body support component is rotatable to be moved, and makes it possible between the position of the motion track of the described handled object of blocking and the position of not interdicting motion track mobile; Described valve body mobile device is arranged at described valve body support component, and at its front end described valve body is installed and it is advanced and retreats.
And, for example in sixth aspect present invention, described valve body driving mechanism is made of valve body support component and valve body mobile device, wherein, but described valve body support component straight line moves, make it possible to the position of the motion track of the described handled object of blocking with do not interdict between the position of motion track mobile; Described valve body mobile device is arranged at described valve body support component, and at its front end described valve body is installed and it is advanced and retreats.
Family of power and influence's device in seventh aspect present invention, it is characterized in that: be mounted in be used for to handled object implement predetermined processing treatment chamber move into opening, make described handled object from the carrying room of vacuum state by and open and close described family of power and influence's device of moving into opening, wherein, comprising: can open and close described first and second valve body of moving into opening and installing; Releasably be arranged at the surface of described first and second valve body, the seal member that when moving into opening, can contact with the fitting surface of assembling airtightly by the switching of described first and second valve body is described; The periphery of the seal member of at least one valve body in described first and second valve body, surround the maintenance seal member of setting with the interval of distance sealing parts regulations; Opening is used at least one maintenance, forms when assembling is provided with described maintenance with the valve body of seal member, under the state that described seal member exposes the size that can seal airtightly with seal member by described maintenance; The described maintenance of the releasably airtight obstruction maintenance open-close lid in the outside of opening; And can make described first and second valve body at described opening and the described maintenance valve body driving mechanism that optionally moves between the opening and install moved into.
Like this, be provided with first and the second two valve bodies, except seal member, also be provided with at least one valve body and safeguard and use seal member.Because the replacing of seal member can be by safeguarding that will have the valve body of safeguarding with seal member is assemblied in and is sealed with seal member by maintenance under safeguarding with the state of opening with seal member, move under the state that implication thickly seals simultaneously and carry out by taking out of of will being connected with treatment chamber of another valve body, so, can be in family of power and influence's device and carrying room be not exposed to the replacing of carrying out seal member under the state of atmosphere, change operation and can promptly carry out.
In this case, for example in eighth aspect present invention, safeguard with the surface of the valve body of seal member or on the described fitting surface on every side of moving into opening being provided with, be formed with contact and avoid stage portion, in the time will being provided with the described valve body of described maintenance and being assemblied on the described fitting surface of moving into opening, be used to avoid the contact of described maintenance with seal member with seal member.
And, for example in ninth aspect present invention, use on the division wall of opening with open-close lid or described maintenance in the described maintenance of division, be provided with the space gas supply system, will be in described maintenance with open-close lid and be assemblied in described maintenance and revert to atmospheric pressure in the formed space with being provided with between the valve body of described maintenance with seal member on the fitting surface of opening.
And, for example in tenth aspect present invention, use on the division wall of opening with open-close lid or described maintenance in the described maintenance of division, be provided with the space vacuum pumping system, will be in described maintenance with open-close lid and be assemblied in described maintenance with the state that is evacuated in the formed space between the valve body of described maintenance with seal member that is provided with on the fitting surface of opening.
And, for example in the present invention the tenth on the one hand, described valve body driving mechanism is made of the valve body support component and the first and second valve body mobile device, wherein, described valve body support component can and not interdict that straight line moves between the position of motion track in the position of the motion track of the described handled object of blocking; The described first and second valve body mobile device is arranged at described valve body support component, can make first and second valve body that is installed on its front end advance and retreat at different directions mutually.
And, for example aspect the present invention the 12 in, the locking mechanism of the action that is used to restrain described valve body is installed on described valve body driving mechanism.
And, for example aspect the present invention the 13 in, described maintenance is made of transparent panel with open-close lid.
Thus, owing to safeguard with open-close lid it is transparent panel, can observe and the deterioration degree of confirming seal member.
And, for example aspect the present invention the 14 in, described maintenance has with open-close lid and is used for its inner observation window of Visual Confirmation.
And, for example aspect the present invention the 15 in, described valve body driving mechanism has by manually being assemblied in the assembling device of described maintenance with the fitting surface of opening with the described valve body of opening towards described maintenance.
And, for example aspect the present invention the 16 in, described family of power and influence's device all around surrounded by framework.
The treatment system of the handled object in the present invention the 17 aspect is characterized in that, comprising: can evacuated carrying room; Be used for handled object is implemented treatment chamber on every side predetermined process, that be arranged on described carrying room; Be arranged between described carrying room and the described treatment chamber, as any the described family of power and influence's device in the first to the 16 aspect; Be arranged in the described carrying room, be used for described handled object is taken out of the transport mechanism of moving into and can stretching and rotate to described each treatment chamber.
The replacing method of the seal member in the present invention's the tenth eight aspect, it is characterized in that: be the replacing method of changing the seal member of the family of power and influence's device described in any aspect of the present invention, wherein, comprising: sealing process is assemblied in valve body fitting surface and the sealing airtightly of moving into opening; Maintenance procedures makes in the described treatment chamber to atmosphere opening, to safeguarding in the described chamber; Vacuumize operation, after described maintenance procedures,, reach vacuum atmosphere vacuumizing in the described treatment chamber; Change operation with seal member, vacuumize between operation carries out described, pressure differential in the carrying room of described treatment chamber and vacuum state reaches setting when following, described valve body be assemblied in maintenance with open-close lid and the sealing state under described maintenance is taken off with open-close lid, change described seal member.
The replacing method of the seal member in the present invention the 19 aspect, it is characterized in that: in the replacing method of the seal member of above-mentioned family of power and influence's device, comprise: sealing process, being provided with in first and second valve body safeguarded that the valve body with seal member is assemblied in the also sealing of safeguarding with opening airtightly of fitting surface, is assemblied in another valve body fitting surface and the sealing airtightly of moving into opening simultaneously; Seal member is changed operation, and described maintenance is taken off with open-close lid, changes described seal member.
According to the replacing method of family of power and influence's device of the present invention, treatment system and seal member, can bring into play following excellence effect and effect.
According to invention first～the 6th, the 12～the 15 aspect, because seal member that valve body uses when being provided with technology and maintenance seal member in its periphery, the replacing of seal member can carried out under safeguarding with the state of opening by safeguarding with seal member valve body to be assemblied in, so can be in family of power and influence's device and carrying room be not exposed to the replacing of carrying out seal member under the state of atmosphere, change operation and can promptly carry out.
According to invention the 7th～the 11, the 16 aspect,, except seal member, also be provided with the maintenance parts at least one valve body owing to be provided with first and second two valve bodies.Because the replacing of seal member can be by safeguarding that will have the valve body of safeguarding with seal member is assemblied in maintenance and carries out under with the state of opening with seal member.So, can be in family of power and influence's device and carrying room be not exposed to the replacing of carrying out seal member under the state of atmosphere, change operation and can promptly carry out.
According to invention the 12 aspect, owing to locking mechanism is arranged at the valve body driving mechanism, so can improve fail safe.
According to invention the 13 aspect,, can observe and the deterioration degree of confirming seal member owing to safeguard with open-close lid it is transparent panel.
Description of drawings
Fig. 1 is the plane graph of an example of the expression treatment system of using family of power and influence's device of the present invention.
Fig. 2 is the amplification sectional view of installment state of first embodiment of expression family of power and influence's device of the present invention.
Fig. 3 is the vertical view of family of power and influence's device.
Fig. 4 is a stereogram of representing the installment state of valve body and valve body driving mechanism from the place ahead.
Fig. 5 is a stereogram of representing the installment state of valve body and valve body driving mechanism from the rear.
Fig. 6 is the action specification figure that is used to illustrate first embodiment action of family of power and influence's device.
Fig. 7 is the process chart of the replacing method of expression seal member.
Fig. 8 is the action specification figure that is used to illustrate second embodiment action of family of power and influence's device of the present invention.
Fig. 9 is the sectional view of the 3rd embodiment of expression family of power and influence's device of the present invention.
Figure 10 is the sectional view of the 4th embodiment of expression family of power and influence's device of the present invention.
Figure 11 is the sectional view of the 5th embodiment of expression family of power and influence's device of the present invention.
Figure 12 is the sectional view of the 6th embodiment of expression family of power and influence's device of the present invention.
Figure 13 is the sectional view of the 7th embodiment of expression family of power and influence's device of the present invention.
Figure 14 is the fragmentary cross sectional view of expression with family of power and influence's device of the present invention state during the one combine and assemble in carrying room.
Symbol description
2 treatment systems
4,4A～4D treatment chamber
6 carrying rooms
12,12A～12D family of power and influence device
14 transport mechanisms
36 frameworks
37 take out of and move into mouth
44,44A, 44B valve body
46 valve body driving mechanisms
48 valve body support components
66 seal members
68 maintenance seal members
Stage portion is avoided in 70 contacts
72,72A, 72B safeguard and use opening
74,74A, 74B safeguard and use open-close lid
80 space air supply systems
88 space vacuum pumping systems
94 motion tracks
W semiconductor wafer (handled object)
Embodiment
Below, based on accompanying drawing, the replacing method of family of power and influence's device of the present invention, treatment system and seal member is described in detail.
First embodiment
Fig. 1 is the plane graph of an example of the expression treatment system of using family of power and influence's device of the present invention; Fig. 2 is the amplification sectional view of installment state of first embodiment of expression family of power and influence's device of the present invention; Fig. 3 is the top figure (vertical view) of family of power and influence's device; Fig. 4 is a stereogram of representing the installment state of valve body and valve body driving mechanism from the place ahead; Fig. 5 is a stereogram of representing the installment state of valve body and valve body driving mechanism from the rear; Fig. 6 is the action specification figure that is used to illustrate first embodiment action of family of power and influence's device; Fig. 7 is the process chart of the replacing flow process of expression seal member.
As shown in Figure 1, this treatment system 2 mainly comprises: a plurality of (for example 4) treatment chamber 4A, 4B, 4C, 4D, become common hexagonal carrying room 6 with respect to above-mentioned treatment chamber 4A～4D, and two load locking room 8A, 8B.Specifically, above-mentioned each treatment chamber 4A～4D can be pumped into vacuum respectively, simultaneously, in treatment chamber 4A～4D, be respectively arranged with loading stage 10A, 10B, 10C, the 10D of loading as the wafer W of handled object, here, carry out various processing (operation) under the state of wafer W being mounted with.Wherein, these various processing are generally carried out under vacuum atmosphere, but according to the pattern of handling the situation of carrying out under the cardinal principle normal pressure are arranged also.Above-mentioned each treatment chamber 4A～4D joins with each limit of above-mentioned carrying room 6 via family of power and influence's device 12A of the present invention, 12B, 12C, 12D and respectively.
In addition, also can vacuumize in above-mentioned each carrying room 6 and atmospheric pressure recovers.And, in this carrying room 6, be provided with and be used for the conveyance wafer W and can be tortuous and the transport mechanism 14 of rotation, can move into, take out of wafer W to each treatment chamber 4A～4D via each open family of power and influence's device 12A～12D.
And above-mentioned two load locking room 8A, 8B are connected with carrying room 6 via family of power and influence's device 16A, 16B.Also can be evacuated in this load locking room 8A, the 8B and return to atmospheric pressure.And these load locking rooms 8A, 8B join with load blocks 20 via family of power and influence's device 18A, 18B.On this load blocks 20, dispose the port 22 that is provided with the box body of accommodating a plurality of wafer W.And, in above-mentioned load blocks 20, but along guide rail 26 walking freelies be provided with the carrying arm mechanism 24 of scalable rotation, from being loaded in the box body on the above-mentioned port 22 inside that wafer W packed into, by it being moved in load locking room 8A, the 8B like this.And the wafer W in load locking room 8A, the 8B is put into by the transport mechanism 14 in the carrying room 6, can as above above-mentionedly move into each treatment chamber 4A～4D.And, when taking out of wafer, can be by taking out of with the above-mentioned opposite path, path of moving into.
Then, with reference to Fig. 2 the family of power and influence's device 12A～12D of the present invention that is arranged between carrying room 6 and each the treatment chamber 4A～4D is illustrated.Because these family of power and influence's devices 12A～12D is same structure, represents as family of power and influence's device 12 with Fig. 2 as representative, and represents as treatment chamber 4 as representative with treatment chamber 4A～4D.
As shown in Figure 2, dividing on the sidewall 28 of treatment chamber 4, be formed with and make wafer W, in addition, on the sidewall 32 of dividing carrying room 6, also forming opening 34 by taking out of the elongated opening of moving into 30 of moving into.And, above-mentioned family of power and influence's device 12, for example have form this shell, by the framework that is rectangular shape substantially 36 that A1 constituted, its cross section is roughly square.A side of this framework 36 be formed with treatment chamber 4 in elongated the taking out of that be connected move into mouthfuls 37, be formed with the elongated opening 38 that is connected with carrying room 6 in an opposite side.On the composition surface of this framework 36 and above-mentioned treatment chamber 4 and carrying room 6, keep air-tightness by O shape ring 40,42 respectively.And, install on the family of power and influence's driving mechanism 46 in above-mentioned framework 36 and be provided with valve body 44 with feature of the present invention, can be assemblied in above-mentioned taking out of as required and move into mouth 37, thereby make it obtain bubble-tight sealing.Here and since above-mentioned take out of move into mouthfuls 37 with move into opening 30 one and be connected, so take out of the switching of moving into mouth 37 and also can make and move into opening 30 switchings by above-mentioned.
Particularly, as Fig. 4 and shown in Figure 5, valve body driving mechanism 46 has the valve body support component 48 of formation " " font, and back shaft 50 extends respectively laterally from the two ends of this valve body support component 48.And this back shaft 50 supports movably with rotatable with the mode of the airtight perforation of sidewall of the length direction of framework 36.Wherein, in the breakthrough part of this back shaft 50, have not shown magnet fluid sealing etc., make and keeping under the state of sealing, allow the rotation of back shaft 50.
And, on this valve body support component 48, be arranged side by side can stretch, for example by two valve body mobile devices 52 that cylinder constituted, at the front end of this valve body mobile device 52 tabular above-mentioned valve body 44 is installed.So flexible by this valve body mobile device 52 can make above-mentioned valve body 44 advance and retreat.The telescopic drive of above-mentioned valve body mobile device 52, here undertaken by compressed air, therefore, form the gas flow path 56 that is connected with above-mentioned valve body mobile device 52 on above-mentioned valve body support component 48, this gas flow path 56 is drawn to the outside by a side back shaft 50.And, on the back shaft 50 that forms gas flow path 56, tumbler 58 by compressed air acts is installed, this tumbler 58 be provided with make valve body mobile device 52 flexible flexible with gas for row's port 60 and make valve body support component 48 with the angle of regulation towards the rotation of both forward and reverse directions rotation with gas for row's port 62, can carry out the rotation of the flexible and valve body support component 48 of valve body mobile device 52 as required.
In this case, as described later, valve body support component 48 at the moving track of blocking wafer with not interdict between the position of this moving track rotation mobile.And, be provided with around the above-mentioned valve body mobile device 52 and surround it and telescopic metal bellows 64 is allowed the flexible of above-mentioned valve body mobile device 52 and made compressed air not to external leakage.
And, in the front of above-mentioned valve body 44, be provided with the seal member 66 that for example encircles the elongated ring-type that is constituted that is used in the encapsulation process chamber 4 by O shape.Sealing parts 66 are the seal members that also use in prior-art devices, as shown in Figure 2, can contact airtightly with taking out of the fitting surface on every side of moving into mouth 37, will take out of reliably and move into mouthful 37 sealings.And, on this valve body 44, for example being provided with by the maintenance that constituted, that have feature of the present invention of O shape ring with seal member 68 in the periphery of above-mentioned seal member 66, it separates the interval L1 of regulation and surrounds sealing parts 66 from above-mentioned seal member 66.That is, seal member 66,68 is provided with concentric dual structure.Here, the interval L1 of afore mentioned rules for example is 5～20mm.In this case, as shown in Figure 2, move on mouth 37 fitting surface on every side above-mentioned taking out of, along take out of move into mouthfuls 37 circumferencial direction and be formed with elongate, the cross section is that stage portion 70 is avoided in the contact of concavity portion, move into mouthfuls 36 o'clock, avoid contacting valve body 44 being assembled to take out of being used for above-mentioned seal member 68, thereby, prevent the unnecessary deterioration (abrasion and elastic force weaken) of this maintenance with seal member 68.
As shown in Figures 2 and 3, at the top of above-mentioned framework 36, the elongated maintenance that is provided with the inner seal parts 66 that are used to change above-mentioned valve body 44 is with opening 72.Specifically, this maintenance is set to such size with opening 72, make that when assembling above-mentioned valve body 44 on the fitting surface around it under the state that has only above-mentioned seal member 66 to expose, the above-mentioned maintenance in the outside contacts with fitting surface with seal member 68 and obtains airtight sealing.That is, above-mentioned maintenance only forms than above-mentioned taking out of with opening 72 and moves into mouthfuls 37 the big slightly size of size, make should safeguard with 68 pairs of seal members and hermetic seal with opening 72 by safeguarding, and seal member 66 from maintenance with exposing in the opening 72.And, safeguard with on the opening 72 at this, the maintenance open-close lid 74 that is formed by acrylic resin board etc. for example hermetic is installed from its outside via O shape ring 76.In this case, this maintenance releasably is mounted by a plurality of bolts 78 with open-close lid 74.And, if for example use transparent panel such as acrylic resin to constitute this maintenance with open-close lid 74, then also can be under the situation of it not being taken off from the deterioration degree of outside Visual Confirmation seal member 66.In this case, also can be safeguard be provided with on the part of open-close lid 74 can its inside of Visual Confirmation transparent watch window.
And, when above-mentioned valve body 44 being assemblied in above-mentioned maintenance, being provided with in the very little space 82 (with reference to Fig. 6 (E)) that will form between the valve body 44 of above-mentioned maintenance with open-close lid 74 and assembling and reverting to atmospheric space air supply system 80 with opening 72.Specifically, here as shown in Figure 2, this space air supply system 80 is to divide above-mentioned maintenance with on the division wall of opening 72, setting makes the stream 84 of above-mentioned space 82 (with safeguarding that the part with opening 72 is corresponding) and external communications, on this stream 84, be provided with open and close valve 86 midway, can supply with N as required 2The air of gas or cleaning etc.Wherein, as above-mentioned space air supply system 80, can also be the safety valve of or automatic work for example manual with perforation setting on the open-close lid 74, to replace the structure of above-mentioned stream 84 and open and close valve 86 in above-mentioned maintenance.
And, also be provided with and be used for evacuated space vacuum pumping systems 88 in the above-mentioned space 82.Specifically, this space vacuum pumping system 88 is to divide above-mentioned maintenance with on the division wall of opening 72, setting makes above-mentioned space 82 and the outside stream 90 that is connected, and is provided with open and close valve 92 midway on this stream 90, can as required the atmosphere in the space 82 be carried out vacuum exhaust.Wherein, as above-mentioned space vacuum pumping system 88, can also be for example on the division wall of the above-mentioned maintenance of division, to imbed the operated pneumatic valve that opens and closes automatically, make in the above-mentioned space 82 to be connected, replace the structure of above-mentioned stream 90 and open and close valve 92 with the inside of framework 36 with opening 72.
In addition, can also be one that only is provided with in two streams 84,90, not shown triple valve etc. is set thereon, can optionally supply with N by the switching of this triple valve 2Or pure air, perhaps carry out vacuum exhaust.
Then, with reference to Fig. 6 and Fig. 7 the replacing method of the seal member 66 of family of power and influence's device 12 of above structure is illustrated.Wherein, Fig. 6 is a critical piece of only having represented family of power and influence's device 12 of illustrating previously simplifiedly.
At first, as mentioned above,, the rotation of valve body driving mechanism 46 shown in Figure 5 is supplied with compressed air or exhausts with gas for row's port 62, make the desirable angle of valve body support component 48 forward or reverse thus for the direction of the valve body 44 that changes this family of power and influence's device 12.As shown in Figure 6, make valve body 44 upward or to laterally.And, can for example make valve body mobile device 52 flexible by supplying with compressed air or exhaust with the row's of confession port 60 to flexible by cylinder for valve body 44 being advanced or retreating.
Wherein, this valve body driving mechanism 46 is provided with not shown locking mechanism, is locked in stop position separately, particularly can guarantee the fail safe that seal member described later is changed.And, here, also can be near safeguarding with opening 72 setting connect airtightly the division wall of framework 36, for example can be by the claw-like parts (not shown) that manually move to the framework internal direction, by these claw-like parts above-mentioned valve body is pressed to above-mentioned maintenance with on the fitting surface of opening 72 and hermetic assemble.Thus, make this assembling device have the function of locking mechanism, and, can also be when closing maintenance, by manually coming to move this assembling device with opening 72.
At first, in common action, wafer W from carrying room 6 under the situation that treatment chamber 4 moves, perhaps on the contrary from treatment chamber 4 under the situation that carrying room 6 moves, shown in Fig. 6 (D), when valve body 44 is retreated, valve body support component 48 is moved upward.Thus, can become to take out of and move into mouthfuls 37 openly and do not interdict the state of the motion track 94 of wafer W, wafer W is along this motion track 94 and conveyance.Here, keep vacuum state in the carrying room 6 all the time, in the carrying room 6 with treatment chamber 4 in when being communicated with, be setting connection when following in both pressure differential.
For this, when operations such as carrying out film forming was handled, shown in Fig. 6 (A), valve body support component 48 made valve body 44 advance to transverse direction, this valve body 44 is assemblied in to take out of moves into mouth 37.Thus, the seal member 66 that is arranged at the inboard of valve body 44 contacts with fitting surface, makes conveyance gateway 37 become hermetic sealing.Thus, become sealing state in the treatment chamber 4, in this state, in treatment chamber 4, carry out predetermined process and clean etc.At this moment, be arranged at seal member 66 the outside maintenance with seal member 68 become with fitting surface on the recess shape that is provided with contact avoid stage portion 70 near and non-contacting states, consequently, because this maintenance do not have useless distortion with seal member 68, so can prevent the deterioration that causes because of this distortion.Wherein, also can be contact not to be set avoid stage portion 70, become the smooth fitting surface of all no stage portion.
Then, be illustrated with reference to flow chart shown in Figure 7 replacing method above-mentioned seal member 66.
Here, the replacing of sealing parts 66 is to carry out in the maintenance in carrying out treatment chamber 4.In this case, be pumped into vacuum in the carrying room 6, be maintained the reduced atmosphere (vacuum state) of regulation, and with its valving that is communicated with all the time 12 in also be maintained reduced atmosphere.
At first, shown in Fig. 6 (A), carry out the maintenance of treatment chamber 4 earlier, valve body 44 is assemblied in to take out of moves into mouth 37 and make it hermetic seal (S1).Thus, be cut off with carrying room 6 interior being communicated with in the treatment chamber 4, become sealing state.And, under this state, to atmosphere opening, for example carry out necessary attended operation (S2) such as the replacing of electrode and the replacing of internal part in the treatment chamber 4.
Then, finish above-mentioned attended operation, treatment chamber is made up once more, begin to become the vacuum pumping in the atmospheric treatment chamber 4 simultaneously, (S3) lentamente reduces pressure.Here, in the vacuumizing in treatment chamber 4, by not shown pressure gauge detect in the treatment chamber 4 with carrying room 6 in pressure differential, relatively whether this pressure differential below setting (S4).
And when above-mentioned pressure differential (YES of S4 (being)) when setting is following, because the elevator (dispersing) of particle can take place hardly, shown in Fig. 6 (B), valve body 44 retreats.Thus, take out of and move into mouthfuls 37 openly, under the state of common reduced atmosphere, return to connected state in the treatment chamber 4 with in the carrying room 6.And shown in Fig. 6 (C) and Fig. 6 (D), valve body support component 48 for example rotates lentamente and moves 90 degree, makes valve body 44 towards safeguarding with opening 72 (S5).Wherein, at this moment, also be to vacuumize for a long time in the treatment chamber 4, to remove moisture and the unwanted gas that wall etc. is adhered to.
Then, shown in Fig. 6 (E), advance, safeguard with opening 72, carry out bubble-tight closing (S6) with opening 72 safeguarding and it is assemblied in by making valve body 44.In this case, owing to safeguard only to form than taking out of of front and move into the big slightly size of mouth 34 with opening 72, become sealing so the maintenance in the outside contacts with fitting surface with seal member 68, in contrast to this, inboard 66 of seal members that worsen become for safeguarding with opening 72 interior and expose state.
And, at this moment, between the valve body 44 of this assembling and above-mentioned maintenance are with open-close lid 74, form the airtight space 82 of division wall thickness very little, that be equivalent to this part, here, safeguard with open-close lid 74 if take off suddenly, then because the vacuum in this space 82 destroyed rapidly and become the reason that particle disperses, so do not wish like this.Therefore, at first, taking off maintenance, making space air supply system shown in Figure 2 80 actions, in above-mentioned space 82, supplying with for example N with before the open-close lid 74 2Deng gas, make space 82 become atmospheric pressure state.Wherein, not being provided with under the situation of safety valve, also can become atmospheric pressure state by it being moved lentamente making in the space 82 as space air supply system 80.
Like this, if become atmospheric pressure state in the space 82,, and shown in Fig. 6 (F), will safeguard with open-close lid 74 and take off (S7) then by loosening Fig. 2 and bolt 78 shown in Figure 3.Thus, make maintenance become opened state laterally with opening 72.
Then, maintenance operator will be exposed the seal member of safeguarding with the deterioration of opening 72 66 and be replaced by new seal member (S8).At this moment, maintenance operator is powerful pushing valve body 44 when new seal member is installed, but owing to valve body driving mechanism 46 is to be in the lock state by the locking mechanism action, so can guarantee processing safety.
Like this, after the replacing of seal member 66 finishes, can will safeguard with open-close lid 74 by bolt 78 once more to install and fix (S9).The state of this moment is the state shown in Fig. 6 (E).Here, with above-mentioned opposite, become atmospheric pressure state in the space 82, and if valve body 44 retreats like this, then a spot of atmosphere that contains moisture etc. spreads to treatment chamber 4 in and in the carrying room 6, this is undesirable.Therefore, make before valve body 44 retreats, the air vacuum gas extraction system 88 shown in pioneer's cardon 2 is evacuated the atmospheric pressure states in this space 82.And, after having carried out the vacuumizing of certain hour, this valve body 44 is retreated and leave (S10) with opening 72 from safeguarding.The state of this moment is the state shown in Fig. 6 (D), thus, and the replacing of the seal member 66 that is through with operation.
Like this, the replacing of above-mentioned seal member 66 operation can reach under the state that keep vacuum in the treatment chamber 4 in carrying room 6, promptly carry out under the situation of broken also vacuum.So,, can keep the vacuum state in the jumbo carrying room 6, so the efficient of this treatment system is increased substantially owing to compare with treatment chamber 4.
And, the replacing operation of sealing parts 66, can about tens of minutes, finish, relative with it, because vacuumize operation, promptly find time to move the time that needs a few hours to tens hour to what moisture in the treatment chamber 4 of atmosphere opening etc. was once removed, so by carry out the replacing operation of seal member 66 in the time at above-mentioned dry running, all dwell times of above-mentioned treatment system are shortened, on this point, the operating efficiency of treatment system is improved.
And, when the replacing of seal member 66,, but only will safeguard just to take off and to carry out the replacing of seal member 66 with open-close lid 74 because the opposite house valve gear does not decompose significantly, also can improve operability from this point, and carry out this replacing operation rapidly.
And, because a valve body and drive system only are set respectively, thus can make all designs simplifications of device, and its size is also little, can make all miniaturizations of device.
Second embodiment
Below, second embodiment of family of power and influence's device of the present invention is illustrated.
Fig. 8 is the action specification figure that is used to illustrate second embodiment action of family of power and influence's device of the present invention.Wherein, to the component part mark identical symbol identical, and omit its explanation with component part shown in Figure 6.In addition, the major part of in Fig. 8, only representing family of power and influence's device.
Under the situation of above-mentioned first embodiment, it is the contact avoidance stage portion 70 that forms the recess shape on the fitting surface of moving into mouth 37 taking out of, to avoid when valve body 44 assembling and maintenance contacting with seal member 68, but, in this second embodiment, be that the surface periphery portion that stage portion 70 is arranged at valve body 44 is avoided in contact.Wherein, other structure is all identical with first embodiment.Specifically, valve body 44 forms thickly slightly, and it is step-like that its circumference is formed, and forms contact thus and avoids stage portion 70.And, safeguard that being arranged at this contact with seal member 68 avoids stage portion 70.In this case, the periphery outstanding at the central side of valve body 44 is provided with seal member 66, and shown in Fig. 8 (E) and Fig. 8 (F), this protuberance forms can be received and kept in safeguarding with the size in the opening 72.
So, shown in Fig. 8 (A), be assemblied in to take out of at valve body 44 and move into mouthfuls 37 o'clock, seal member 66 contact seals, at this moment, avoiding the maintenance that is provided with on the stage portion 70 in contact becomes contactless state with seal member 68.Relative therewith, when valve body 44 is assemblied in when safeguarding with opening 72, safeguard, and another seal member 66 becomes from safeguarding and is replaced with the state that exposes in the opening 72 with seal member 68 and fitting surface contact seal.
The 3rd embodiment
Then, the 3rd embodiment to family of power and influence's device of the present invention is illustrated.
Fig. 9 is the sectional view of the 3rd embodiment of expression family of power and influence's device of the present invention.Wherein, to the component part mark identical symbol identical, and omit its explanation with component part described above.In addition, the major part of in Fig. 9, only representing family of power and influence's device.
In above-mentioned first and second embodiment, the valve body support component 48 of valve body driving mechanism 46 can rotate, and in the 3rd embodiment, it is bar-shaped that this valve body support component 98 forms, and is the structure that its above-below direction is moved.And the leading section of this valve body support component 98 is provided with the valve body 44 that can advance and retreat.In addition, framework 36 prolongs upward and forms the cross section rectangle, makes above-mentioned bar-shaped valve body support component 98 connect the top of these frameworks 36 and draws to the outside.In addition,, be provided with metal telescopic bellows 100 at the breakthrough part of this valve body support component 98, can be in keeping family of power and influence's device bubble-tightly make bar-shaped valve body support component 98 knee-actions simultaneously.
And, on the sidewall on the top of above-mentioned framework 63, be provided with and safeguard with opening 72 and safeguard with open-close lid 74.In this case, safeguard with opening 72 and move into mouth 37 and form in the linearly configuration of above-below direction with respect to taking out of.
Under the situation of the 3rd embodiment, be that valve body support component 48 is rotatablely moved in first and second embodiment, and be that valve body support component 98 is moved up and down here, make selectively contiguous the taking out of of valve body 44 move into mouth 37 and maintenance opening 72.And when the conveyance wafer W, valve body 44 is positioned at the top and is in holding state.
Under the situation of the 3rd embodiment, owing to be not need rotating mechanism and only constituted by straight-line motion mechanism, so structure is more simplified.
Also wherein, make above-mentioned maintenance be,, be easy to carry out the replacing operation of seal member because the space of the upper side of general treatment chamber 4 is bigger with the reason that opening 72 is positioned at the upper side of treatment chamber 4.The downside that framework 36 is extended downwards and be positioned at treatment chamber 4 is provided with to be safeguarded with opening 72.
The 4th embodiment
Then, the 4th embodiment to family of power and influence's device of the present invention is illustrated.
Figure 10 is the sectional view of the 4th embodiment of expression family of power and influence's device of the present invention.The critical piece of in Figure 10, only having represented device.Wherein, have with Fig. 9 in the part mark prosign of the part same structure that has illustrated that comprises, omit its explanation.In the 4th embodiment, the framework 36 among the 3rd embodiment shown in Figure 9 is extended the above length of valve body 44 diameters at least downwards, and bar-shaped valve body support component 98 connects the bottom of frameworks 36 and is provided with.
In this case, when conveyance wafer W between treatment chamber 4 and carrying room 6, valve body 44 is positioned at the foot of framework 36, makes not interdict the motion track 94 of wafer W.
The 5th embodiment
Then, the 5th embodiment to family of power and influence's device of the present invention is illustrated.
Figure 11 is the sectional view of the 5th embodiment of expression family of power and influence's device of the present invention.The critical piece of in Figure 11, only having represented family of power and influence's device.Wherein, to the component part mark identical symbol identical, and omit its explanation with embodiment described above.In the 5th embodiment, be the variation of first and second embodiment of above-mentioned explanation.At first, the shape of framework 36 becomes regular hexagon substantially from the cardinal principle square.And the cross sectional shape of rotatable valve body support component 48 is an isosceles triangle substantially, is separately installed with two valve bodies that can advance and retreat, the i.e. first and second valve body 44A, 44B at its two waist.Here, will be set at roughly 60 degree with respect to the installation open-angle θ of the pivot of the first and second valve body 44A, 44B.In this case, valve body mobile device 52 also can be provided with corresponding to the first and second valve body 44A, 44B in independent control.
In addition, this first and second valve body 44A, 44B use the valve body that illustrates among second embodiment shown in Figure 8 jointly, promptly form the valve body that stage portion 70 is avoided in contact in the valve body side.And, be on hexagonal framework 36 in the cross section, form elongated again opening on the adjacent limit, mouthfuls 37 both sides respectively and first and the second two maintenances are set with opening 72A, 72B by taking out of at this to move into.And this maintenance releasably is equipped with first and second and safeguards with open-close lid 74A, 74B with opening 72A, 72B are last by not shown bolt.Wherein, first and second safeguard certain space vacuum pumping system 88 as Fig. 2 is illustrated and space air supply system 80 etc. of also can being provided with respectively with a mouthful 72A, 72B place at these.
Under the situation of the 5th embodiment, when wafer W is passed through, shown in Figure 11 (A) or Figure 11 (D), under the state that the first and second valve body 44A, 44B retreat jointly, first and the second valve body 44A, 44B are set towards upside or downside, make and do not interdict the motion track 94 of wafer W.Wherein, when 48 rotations of valve body support component, shown in Figure 11 (B), the first and second valve body 44A, 44B retreat jointly, and inwall is not produced interference.
In addition, when operation was handled, shown in Figure 11 (E) or Figure 11 (C), the first valve body 44A or the second valve body 44B were assemblied in to take out of and move into mouth 37, and with its sealing, making in the treatment chamber 4 becomes sealing state.That is, here, the first and second valve body 44A, 44B have identical function of equal value jointly.Wherein, in Figure 11 (C), the first valve body 44A is assemblied in first maintenance and uses opening 72A, and in Figure 11 (E), the second valve body 44B is assemblied in maintenance and uses opening 72B, but when operation was handled, two valve body 44A, 44B there is no need common assembling, can retreat.
Then, the situation to the inner seal parts 66 of changing the first and second valve body 44A, 44B is illustrated.
At first, under the situation of the seal member 66 of the inboard of changing the first valve body 44A, shown in Figure 11 (C), the second valve body 44B is assemblied in to take out of and moves into mouthfuls 37 and with its sealing, and the first valve body 44A is assemblied in first of top and safeguards with opening 72A and with its sealing.And, under this state, can take off first maintenance and use open-close lid 74A, the seal member 66 of the first valve body 44A is replaced by new seal member.
In addition, under the situation of the seal member 66 of the inboard of changing the second valve body 44B, shown in Figure 11 (E), the first valve body 44A is assemblied in to take out of and moves into mouthfuls 37 and with its sealing, and the second valve body 44B is assemblied in second of below and safeguards with opening 72B and with its sealing.And, under this state, can take off second maintenance and use open-close lid 74B, the seal member 66 of the second valve body 44B is replaced by new seal member.
In this case, when in treatment chamber 4, carrying out the operation processing, perhaps when atmosphere opening is safeguarded, also can have nothing to do, carry out the replacing of seal member 66 with the pressure state in the treatment chamber 4.
Particularly, for fear of the cross pollution between treatment chamber 4A～4D, requirement avoids taking place a plurality of treatment chamber with respect to 6 while of carrying room opened state, in this case, because carrying room 6 is not communicated with treatment chamber 4, and comprise this family of power and influence's device and all be maintained vacuum state, so use the 5th embodiment of two valve bodies can be corresponding with above-mentioned requirements especially effectively.
The 6th embodiment
Then, the 6th embodiment to family of power and influence's device of the present invention is illustrated.
Figure 12 is the sectional view of the 6th embodiment of expression family of power and influence's device of the present invention.The major part of in Figure 12, only having represented device.Wherein, for the component part mark identical symbol identical, and omit its explanation with the 5th embodiment of Figure 11 explanation.
The 6th embodiment is the variation of the 5th embodiment shown in Figure 11.Among first and second two valve body 44A, the 44B one, the first valve body 44A that uses in illustrated example is provided with contact to avoid stage portion 70 and the valve body of safeguarding with seal member 68, and another valve body is that the flat valve body shown in Figure 2 that stage portion 70 is avoided in contact is not set as the second valve body 44B in illustrated example, use be not to be provided with to safeguard the valve body that a seal member 66 only is set with seal member 68.And, shown in Figure 12 (B), when PROCESS FOR TREATMENT or during clean, take out of by first valve body 44A sealing specially and move into mouthfuls 37.
In addition, shown in Figure 12 (C), for the seal member 66 of changing the first valve body 44A, it is assemblied in safeguard with open-close lid 74A on the time, the second valve body 44B is assemblied in to take out of moves into mouthfuls 37 and its sealing.So, under the situation of present embodiment, because the almost not deterioration of the seal member 66 of the second valve body 44B, so there is not necessity of replacing.Therefore, in framework 36, just there is no need to be arranged on the second maintenance opening 72B that is provided with among the 5th embodiment of Figure 11, therefore this is provided with omission.Wherein, when making 48 rotations of valve body support component, shown in Figure 12 (A), the first and second valve body 44A, 44B retreat jointly.Under the situation of the 6th embodiment, also can access and the same action effect of the 5th embodiment that illustrates previously.
The 7th embodiment
Then, the 7th embodiment to family of power and influence's device of the present invention is illustrated.
Figure 13 is the sectional view of the 7th embodiment of expression family of power and influence's device of the present invention.The major part of in Figure 13, only having represented device.Wherein, the critical piece of in Figure 11 and structure division shown in Figure 12, only having represented family of power and influence's device.In addition, for the component part mark identical symbol identical, and omit its explanation with Figure 11 and component part shown in Figure 12.
In the 7th embodiment, mainly be the combination of the 5th embodiment shown in Figure 11 and the 6th embodiment shown in Figure 12, in addition, the left-half of framework 36 is not a dihedral, but intactly is connected in carrying room 6 one sides with open state.Here, the first and second valve body 44A, 44B can use with the 5th embodiment in two the valve body 44A, the valve body of 44B same structure that use.In addition, same with the 6th embodiment shown in Figure 12 in framework 36 here, a side first is set safeguards the second maintenance opening that the opposing party is not set with opening 74A.Under the situation of the 7th embodiment, also can access the action effect same with the 6th embodiment shown in Figure 12.
Wherein, in each above embodiment, be to be the explanation that example is carried out, but also the function one of this family of power and influence's device can be assembled in the carrying room with situation that family of power and influence's device is set between carrying room 6 and treatment chamber 4.For example, as shown in figure 14, the part of the division wall of carrying room 6 has the function same with the framework that illustrates previously 36, does not have framework here.And, in the end of this carrying room 6, containing above-mentioned valve body 44 and valve body support component 48 etc., the front end of this end is directly connected in the sidewall 28 of treatment chamber 4.So the lateral surface of dividing the sidewall 28 move into opening 30 becomes fitting surface, above-mentioned valve body 44 directly is assemblied on the fitting surface as this lateral surface.In this case, the lateral surface that stage portion 70 for example is formed at sidewall 28 is avoided in contact.
In addition, though be to be the explanation that example is carried out with the semiconductor wafer as handled object here, be not limited thereto, the present invention can certainly be applicable to glass substrate, LCD substrate etc.

Claims (19)

1. family of power and influence's device is characterized in that:
Be mounted in be used for to handled object implement predetermined processing treatment chamber move into opening, make described handled object from the carrying room side of vacuum state by and open and close described family of power and influence's device of moving into opening, wherein, comprising:
Can open and close the described valve body of moving into opening and installing;
Releasably be arranged at the surface of described valve body, the seal member that when moving into opening, contacts with the fitting surface of assembling airtightly by described valve body switching is described;
In the periphery of sealing parts, to surround the maintenance seal member of setting apart from the interval of described seal member regulation;
Safeguard and use opening, form when assembling described valve body, under the state that described seal member exposes, the size that can seal airtightly with seal member by described maintenance;
The described maintenance of the releasably airtight obstruction maintenance open-close lid of opening; With
Can make described valve body at described opening and the described maintenance valve body driving mechanism that moves between the opening and install moved into.
2. family of power and influence's device according to claim 1 is characterized in that:
Open and close described when moving into opening and on the fitting surface that assembles on the surface of described valve body or by described valve body, be formed with contact and avoid stage portion, when described valve body being assemblied in the described fitting surface of moving into opening, be used to avoid the contact of described maintenance with seal member.
3. family of power and influence's device according to claim 1 and 2 is characterized in that:
Use on the division wall of opening with open-close lid or described maintenance in the described maintenance of division, be provided with the space gas supply system, will be in described maintenance with open-close lid and be assemblied in described maintenance and revert to atmospheric pressure in the formed space between with the described valve body on the fitting surface of opening.
4. according to each described family of power and influence's device in the claim 1～3, it is characterized in that:
Use on the division wall of opening with open-close lid or described maintenance in the described maintenance of division, be provided with the space vacuum pumping system, will be in described maintenance with open-close lid and be assemblied in the described maintenance state that is evacuated in the formed space between with the described valve body on the fitting surface of opening.
5. according to each described family of power and influence's device in the claim 1～4, it is characterized in that:
Described valve body driving mechanism is made of valve body support component and valve body mobile device, wherein,
Described valve body support component is rotatable to be moved, and makes it possible between the position of the motion track of the described handled object of blocking and the position of not interdicting motion track mobile;
Described valve body mobile device is arranged at described valve body support component, and at its front end described valve body is installed and it is advanced and retreats.
6. according to each described family of power and influence's device in the claim 1～4, it is characterized in that:
Described valve body driving mechanism is made of valve body support component and valve body mobile device, wherein,
But described valve body support component straight line moves, make it possible to the position of the motion track of the described handled object of blocking with do not interdict between the position of motion track mobile;
Described valve body mobile device is arranged at described valve body support component, and at its front end described valve body is installed and it is advanced and retreats.
7. family of power and influence's device is characterized in that:
Be mounted in be used for to handled object implement predetermined processing treatment chamber move into opening, make described handled object from the carrying room side of vacuum state by and open and close described family of power and influence's device of moving into opening, wherein, comprising:
Can open and close described first and second valve body of moving into opening and installing;
Releasably be arranged at the surface of described first and second valve body respectively, the seal member that when moving into opening, can contact with the fitting surface of assembling airtightly by described valve body switching is described;
The periphery of the seal member of at least one valve body in described first and second valve body, surround the maintenance seal member of setting with the interval of distance sealing parts regulations;
Opening is used at least one maintenance, forms when assembling is provided with described maintenance with the valve body of seal member, under the state that described seal member exposes the size that can seal airtightly with seal member by described maintenance;
The described maintenance of the releasably airtight obstruction maintenance open-close lid in the outside of opening; With
Can make described first and second valve body at described opening and the described maintenance valve body driving mechanism that optionally moves between the opening and install moved into.
8. family of power and influence's device according to claim 7 is characterized in that:
Safeguard with the surface of the valve body of seal member or on the described fitting surface on every side of moving into opening being provided with, be formed with contact and avoid stage portion, in the time will being provided with the valve body of described maintenance and being assemblied on the described fitting surface of moving into opening, be used to avoid the contact of described maintenance with seal member with seal member.
9. according to claim 7 or 8 described family of power and influence's devices, it is characterized in that:
Use on the division wall of opening with open-close lid or described maintenance in the described maintenance of division, be provided with the space gas supply system, will be in described maintenance with open-close lid and be assemblied in described maintenance and revert to atmospheric pressure in the formed space with being provided with between the valve body of described maintenance with seal member on the fitting surface of opening.
10. according to claim 7 or 9 described family of power and influence's devices, it is characterized in that:
Use on the division wall of opening with open-close lid or described maintenance in the described maintenance of division, be provided with the space vacuum pumping system, will be in described maintenance with open-close lid and be assemblied in described maintenance with the state that is evacuated in the formed space between the valve body of described maintenance with seal member that is provided with on the fitting surface of opening.
11., it is characterized in that according to each described family of power and influence's device in the claim 7～10:
Described valve body driving mechanism is made of the valve body support component and the first and second valve body mobile device, wherein,
Described valve body support component can and not interdict that straight line moves between the position of motion track in the position of the motion track of the described handled object of blocking;
The described first and second valve body mobile device is arranged at described valve body support component, can make first and second valve body that is installed on its front end respectively advance and retreat at different directions mutually.
12., it is characterized in that according to each described family of power and influence's device in the claim 1～11:
The locking mechanism of the action that is used to restrain described valve body is installed on described valve body driving mechanism.
13., it is characterized in that according to each described family of power and influence's device in the claim 1～12:
Described maintenance is made of transparent panel with open-close lid.
14., it is characterized in that according to each described family of power and influence's device in the claim 1～12:
Described maintenance has with open-close lid and is used for its inner observation window of Visual Confirmation.
15., it is characterized in that according to each described family of power and influence's device in the claim 1～14:
Described valve body driving mechanism has by manually being assemblied in the assembling device of the fitting surface of described maintenance usefulness opening towards described maintenance with the described valve body of opening.
16., it is characterized in that according to each described family of power and influence's device in the claim 1～15:
What described family of power and influence's device was all is surrounded by framework on every side.
17. the treatment system of a handled object is characterized in that, comprising:
Can evacuated carrying room;
Be used for handled object is implemented treatment chamber on every side predetermined process, that be arranged on described carrying room;
Be folded between described carrying room and the described treatment chamber, as each described family of power and influence's device in the claim 1 to 13;
Be arranged in the described carrying room, be used for described handled object is taken out of the transport mechanism of moving into and can stretching and rotate to described each treatment chamber.
18. the replacing method of a seal member is characterized in that:
Be the replacing method of changing the seal member of each described family of power and influence's device in the claim 1～6, wherein, comprise:
Sealing process is assemblied in valve body fitting surface and the sealing airtightly of moving into opening;
Maintenance procedures makes in the described treatment chamber to atmosphere opening, to safeguarding in the described chamber;
Vacuumize operation, after described maintenance procedures,, reach vacuum atmosphere vacuumizing in the described treatment chamber; With
Seal member is changed operation, vacuumize between operation carries out described, pressure differential in the carrying room of described treatment chamber and vacuum state reaches setting when following, be assemblied in maintenance at described valve body and also under the state of sealing described maintenance taken off with open-close lid airtightly, change described seal member with open-close lid.
19. the replacing method of a seal member is characterized in that:
In claim 7～16, in the replacing method of the seal member of each described family of power and influence's device, comprising:
Sealing process safeguards that with being provided with in first and second valve body valve body with seal member is assemblied in the also sealing of safeguarding with opening airtightly of fitting surface, is assemblied in another valve body fitting surface and the sealing airtightly of moving into opening simultaneously;
Seal member is changed operation, and described maintenance is taken off with open-close lid, changes described seal member.
CNB2005101340020A 2004-12-17 2005-12-19 Replacing method of valv device, processing system and sealing components Active CN100383918C (en)

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JP2004366470A JP4010314B2 (en) 2004-12-17 2004-12-17 Gate valve device, processing system, and seal member replacement method

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KR100756110B1 (en) 2007-09-05
TW200629358A (en) 2006-08-16
JP4010314B2 (en) 2007-11-21
JP2006170373A (en) 2006-06-29
CH698528B1 (en) 2009-08-31
TWI362056B (en) 2012-04-11
CN100383918C (en) 2008-04-23
KR20060069287A (en) 2006-06-21

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