CN1035566C

CN1035566C - Double-way vacuum valve

Info

Publication number: CN1035566C
Application number: CN94114080A
Authority: CN
Inventors: 王德苗; 任高潮; 高汉牧
Original assignee: Zhejiang University ZJU
Current assignee: Zhejiang University ZJU
Priority date: 1994-12-28
Filing date: 1994-12-28
Publication date: 1997-08-06
Anticipated expiration: 2014-12-28
Also published as: CN1110772A

Abstract

The present invention relates to a double-way vacuum valve. The present invention is characterized in that a lifting rod 3 drives a slide block 41; the left end and the right end of the slide block 41 are respectively provided with a set of rolling bearing 44A and 44B. When the lifting rod 3 ascends, the rolling bearing 44A pushes a closure plate 2 to seal a vacuum passage A, and the rolling bearing 44B is extruded on the inner wall of the B side of a valve seat 1. When the lifting rod 3 descends, the vacuum passage A is clear. The present invention has the advantages that the closure plate 2 can backwards seal and face with the atmospheric pressure, or forwards seal and face against the atmospheric pressure, and simultaneously the present invention can also be used for sealing when both sides of the closure plate 2 are all vacuum. The present invention can be used for various vacuum devices, particularly continuous vacuum devices.

Description

Bidirectional vacuum valve

The present invention relates to a kind of special valve that is suitable for high-vacuum apparatus, particularly a kind of bidirectional vacuum valve.

Vacuum valve is exclusively used in the high-vacuum apparatus, especially be applied on cladding glass, the ITO transparent conducting glass coating film production line, and semiconductor devices, solar device, optical device plated film is with in the vacuum equipment.The vacuum valve that is usually used on the long and narrow vacuum passage is the Rotary blade type valve, it is made up of valve seat, closure plate, rotating shaft, crank, connecting rod, driver, closure plate is fixedlyed connected with rotating shaft, be arranged in the vacuum passage top, the closure plate sealing surface is provided with seal ring, and driver drives rotating shaft, closure plate rotation by crank, connecting rod, makes the vacuum passage sealing, if the driver backward rotation, then sealing channel is unimpeded.

There is following defective in the Rotary blade type vacuum valve:

1. this valve can only one-way sealing, and it need just can make sealing effectively by the atmospheric pressure of atmospheric side, and when it was reversed barometric pressure, then sealing can't realize.

2. when the both sides of closure plate all are in vacuum state, are easy to generate High Voltage side direction low pressure side and collaborate, cause poor sealing.

3. very high for material, machining accuracy, the heat treatment process requirement of closure plate, otherwise easy deformation in the closure plate using process causes the sealability variation, even lost efficacy.

The object of the present invention is to provide the reliable bidirectional vacuum valve of a kind of sealability, reliable, the flexible operation, easily manufactured of its sealing.

Below in conjunction with description of drawings, be described in detail particular content of the present invention.

A kind of bidirectional vacuum valve, comprise valve seat 1, closure plate 2, lifting bar 3, closing device 4, dynamic sealing assembly 5, double link 6, cover plate 7, closure plate 2 underparts are provided with rotating shaft 21, are provided with seal ring 22 around its sealing surface, and rotating shaft 21 is arranged in the bearing shell 23, bearing shell 23 by screw on vacuum passage lower seat 1 inwall, lifting bar 3 upper end portions are provided with outside thread, and its underpart is installed in valve seat 1 bottom by dynamic sealing assembly 5, and closing device 4 adopts nut 31 to be arranged in lifting bar 3 tops, the two ends of double link 6 are installed in respectively on the end face of closure plate 2 and closing device 4, when lifting bar 3 rose, closing device 4 promoted closure plate 2 sealed vacuum passage A, when lifting bar 3 descends, vacuum passage A is unimpeded, it is characterized in that:

---it is the wedge shaped plate of right-angled trapezium that closure plate 2 adopts the cross section, and wedged gap is 15 °～25 °;

---closing device 4 is by slide block 41, screw 42, axle 43, rolling bearing 44A, 44B, pad 45, pressing plate 46, flexible cushion block 47 is formed, wherein slide block 41 is a cuboid, the center has a through hole that is used to arrange lifting bar 3, this through hole top is provided with a counterbore that is used to arrange nut 31, slide block 41 left ends and right-hand member have 2～6 vertical slot and square grooves that are orthogonal with vertical slot of being used to arrange rolling bearing 44A and 44B, axle 43 is arranged in this square groove, rolling bearing 44A and 44B are installed on the axle 43, pressing plate 46 by screw on slide block 41 left and right side end faces, the optimum position of axle 43 is adjusted by pad 45, and flexible cushion block 47 is arranged on the slide block 41;

---the two ends of double link 6 are installed in respectively on the end face of closure plate 2 and slide block 41.

Another feature of the present invention is: have an oblique slot 23A who is used to arrange rotating shaft 21 on the bearing shell 23.

With prior art relatively, this bidirectional vacuum valve has following advantage:

1. sealing is reliable, applied range.Any side at sealing surface is an atmosphere, and opposite side is suitable for during for vacuum, also be suitable for when being vacuum in both sides simultaneously, and prior art can only one-way sealing.

2. be rolling friction between the parts, resistance is little, flexible operation.

3. lower to the processing technology requirement of closure plate, be beneficial to manufacturing.

4. lifting bar 3 is applied less Driving force, can realize reliable sealing.

Fig. 1 is the structural representation of bidirectional vacuum valve.

Fig. 2 is the left view of closing device.

Fig. 3 is provided with the structural representation of the bidirectional vacuum valve of guiding groove for bearing shell.

Embodiment:

A kind of bidirectional vacuum valve, its structure as shown in Figure 1, port size is long * wide be 500 * 40mm, the closure plate area is 530 * 60mm, the length and width height of slide block 41 is 510 * 45 * 53mm, its left part is installed 201 profile shafts and is held 4,2 on 201 bearings are installed in the right part, and the closure plate gradient is 1: 100, and valve seat is rectangular shape casing, its five faces are welded into by corrosion resistant plate, and cover plate is fixed on the valve seat by set screw.

The sealing measured result is as follows:

(1) be used for the forward sealing: the sealing surface left side is vacuum state, and the right side is big gaseous state, and sealability is good, can not detect leak rate.

(2) be used for reverse sealing: the both sides of sealing surface all are pumped to 3 * 10 ^-5The Pa vacuum behind the closure plate sealing vacuum passage, charges into gas gradually in the left chamber of sealing surface, and when pressure reached a barometric pressure, right ventricle's degree of vacuum still maintained 3 * 10 ^-5Pa proves to seal and does not leak.

Claims

1. bidirectional vacuum valve, comprise valve seat [1], closure plate [2], lifting bar [3], closing device [4], dynamic sealing assembly [5], double link [6], cover plate [7], closure plate [2] underpart is provided with rotating shaft [21], is provided with seal ring [22] around its sealing surface, and rotating shaft [21] is arranged in the bearing shell [23], bearing shell [23] by screw on vacuum passage lower seat [1] inwall, lifting bar [3] upper end portion is provided with outside thread, and its underpart is installed in valve seat [1] bottom by dynamic sealing assembly [5], and closing device [4] adopts nut [31] to be installed in lifting bar [3] top, the two ends of double link [6] are installed in respectively on the end face of closure plate [2] and closing device [4], when lifting bar [3] rose, closing device [4] promoted closure plate [2] sealed vacuum passage A, when lifting bar [3] descends, vacuum passage A is unimpeded, it is characterized in that:

---it is the wedge shaped plate of right-angled trapezium that closure plate [2] adopts the cross section, and wedged gap is 15 °～25 °;

---closing device [4] is by slide block [41], screw [42], axle [43], rolling bearing [44A], [44B], pad [45], pressing plate [46], flexible cushion block [47] is formed, wherein slide block [41] is a cuboid, the center has a through hole that is used to arrange lifting bar [3], this through hole top is provided with a counterbore that is used to arrange nut [31], slide block [41] left end and right-hand member have 2～6 vertical slot and square grooves that are orthogonal with vertical slot of being used to arrange rolling bearing [44A] and [44B], axle [43] is arranged in this square groove, rolling bearing [44A] and [44B] are installed on the axle [43], pressing plate [46] by screw on slide block [41] left and right side end face, the optimum position of axle [43] is adjusted by pad [45], and flexible cushion block [47] is arranged on the slide block [41];

---the two ends of double link [6] are installed in respectively on the end face of closure plate [2] and slide block [41].

2. according to the bidirectional vacuum valve of claim 1, it is characterized in that: have an oblique slot [23A] that is used to arrange rotating shaft [21] on the described bearing shell [23].