CN1324649C - Vacuum container - Google Patents
Vacuum container Download PDFInfo
- Publication number
- CN1324649C CN1324649C CNB2004100700594A CN200410070059A CN1324649C CN 1324649 C CN1324649 C CN 1324649C CN B2004100700594 A CNB2004100700594 A CN B2004100700594A CN 200410070059 A CN200410070059 A CN 200410070059A CN 1324649 C CN1324649 C CN 1324649C
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- Prior art keywords
- framework
- cover
- vacuum tank
- lid
- contact site
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 238000007789 sealing Methods 0.000 claims abstract description 62
- 230000007246 mechanism Effects 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 31
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 4
- 229920005668 polycarbonate resin Polymers 0.000 claims description 4
- 239000004431 polycarbonate resin Substances 0.000 claims description 4
- 239000012780 transparent material Substances 0.000 claims description 4
- 239000004925 Acrylic resin Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 12
- 230000000694 effects Effects 0.000 description 7
- 238000003825 pressing Methods 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 6
- 230000007723 transport mechanism Effects 0.000 description 6
- 230000009191 jumping Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 241000283080 Proboscidea <mammal> Species 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Abstract
A vacuum container is provided to reduce largely the manufacturing cost by reducing a size and a weight of a cover body. A vacuum container includes a housing(11) and a cover body(12) for opening or closing an upper opening part of the housing. The cover body is divided into a plurality of cover members(12A,12B). An auxiliary sealing member(18) is inserted between the cover member and an upper end of the housing. A sealing member(13) is inserted into a first contact part between the housing and the auxiliary sealing member. In addition, the sealing member is inserted between each cover member and the auxiliary sealing member. A length of one side of the housing having a shape of rectangle is more than 1500mm.
Description
Technical field
The present invention relates to vacuum tank, in more detail, relate to be applicable to configuration example such as FPD vacuum tank with loadlock may of the processing unit of treatment substrates such as substrate etc.
Background technology
Vacuum tank is used widely at various industrial fields at present.For example, in the semiconductor production operation, vacuum tank is widely used in the etch processes device or becomes membrane treatment appts.This processing unit for example constitutes has wafer or FPD carrying mechanism, loadlock may, carrying room and the process chamber with the processed substrate of substrate etc.And loadlock may, carrying room and process chamber form as vacuum tank respectively.
For example, Fig. 7 constitutes the diagram of the FPD of this case applicant motion with the loadlock may of the processing unit of substrate in the patent documentation 1.Be provided with the carrying device 2 of multi-joint type in this loadlock may 1, between carrying mechanism (not shown) and process chamber (not shown), carry out the reception transmission of FPD with substrate S by carrying device 2.This loadlock may 1 has travel mechanism (not shown), between carrying mechanism and process chamber, move back and forth, when and process chamber between carry out FPD when transmitting with the reception of substrate S, the peristome in the place ahead is crimped on the gate valve side side of process chamber, thereby can vacuumize.In addition,, be provided with gate valve 3, so that between loadlock may 1 and carrying mechanism, carry out the reception transmission of FPD with substrate S at the rear of loadlock may 1.And, though Fig. 7 do not indicate, but the seal member that loadlock may 1 has framework, lid to be opened/closed and installs between lid and framework so that assembling during transport mechanism 2 or when maintenance can open lid.In addition, 1A is that FPD moves into mouth with taking out of of substrate S.
But, follow the maximization of FPD usefulness substrate S in recent years, loadlock may 1 also maximizes.And owing to loadlock may 1 is for example made by metals such as aluminium or stainless steels, correspondingly, lid itself requires that the rigidity that can bear vacuum is arranged, so the weight of lid own strengthens, opens and closes lid by staff and just becomes comparatively difficult.
Therefore, shown in Fig. 8 (a), will be arranged at loadlock may 1 by the switching mechanism 6 that cylinder mechanism etc. constitutes, shown in figure (b), be under the help of this switching mechanism 6, the switching lid 1B that has increased the weight of just can open and close.
Patent documentation 1: the spy opens flat 11-345859 communique
Summary of the invention
Inventing problem to be solved is: FPD will also have the trend that maximizes gradually from now on substrate S, thereupon, processing unit also can maximize, the lid 1B of its loadlock may 1 will for example surpass 1500mm, because the compression area of lid 1B also can increase significantly, lid 1B is for bearing the vacuum in the framework 1, just need be made into the bigger special requirement of wall thickness, can cause its cost of manufacture to be ascended to heaven like this, and, height (height of jumping) when lid 1B is open increases, need be for causing total cost such problem of ascending to heaven significantly because of safeguarding that the safety when waiting cause open has completely safe plan, existing.In addition, also can produce maximization because of lid 1B and cause the opening and closing operations such problem of difficulty that becomes itself.Moreover, in order to be present in mechanism in the loadlock may or FPD taking-up operation, need and can will open easily above the framework with substrate etc.
The present invention proposes for solving above-mentioned problem, purpose is the vacuum tank that provides following, promptly, with lid miniaturization, lightweight and when can reduce cost of manufacture, can also reduce height of jumping, and, can be with the part above the framework or whole as an opening, and then can cut down and comprise the total cost of safeguarding etc.
Take following method for solving above-mentioned problem:
The described vacuum tank of claim 1 of the present invention comprises framework and from the lid to be opened/closed of the upper end open portion sealed inside of this framework, it is characterized in that, when above-mentioned lid is divided into a plurality of cover, between the upper end of these covers and above-mentioned framework, is situated between and inserts the sealing accessory.
In addition, the described vacuum tank of claim 2 of the present invention is characterised in that: in the described invention of claim 1, above-mentioned sealing accessory has: first contact site that contacts above-mentioned framework upper surface; With second contact site integrated with first contact site and that contact with above-mentioned each cover in the upper end open portion of above-mentioned framework.
In addition, the described vacuum tank of claim 3 of the present invention is characterised in that: in claim 1 or the described invention of claim 2, the supporting member that will support above-mentioned each cover in the upper end open portion of above-mentioned framework is set up between the upper end of above-mentioned framework.
In addition, the described vacuum tank of claim 4 of the present invention is characterised in that: in each described invention of claim 1～3, between first contact site of above-mentioned framework and above-mentioned sealing accessory and between above-mentioned each cover and above-mentioned sealing accessory, get involved respectively seal member is installed.
In addition, the described vacuum tank of claim 5 of the present invention is characterised in that: claim 1～4 each described in, above-mentioned sealing accessory and above-mentioned supporting member is integrated.
In addition, the described vacuum tank of claim 6 of the present invention is characterised in that: in each described invention of claim 1～5, above-mentioned framework is made rectangle, Yi Bian be at least 1500mm.
In addition, the described vacuum tank of claim 7 of the present invention is characterised in that: claim 1～6 each described in, make above-mentioned sealing accessory and/or above-mentioned lid by transparent material.
In addition, the described vacuum tank of claim 8 of the present invention is characterised in that: during claim 7 was described, above-mentioned transparent material was become by acrylate or polycarbonate resin.
In addition, the described vacuum tank of claim 9 of the present invention is characterised in that: in each described invention of claim 1～8, and the mechanism of setting device substrate in above-mentioned framework.
In addition, the described vacuum tank of claim 10 of the present invention is characterised in that: in each described invention of claim 1～9, the mechanism of conveyance substrate is set in above-mentioned framework.
The invention effect is as follows:
According to the described invention of claim 1 of the present invention～claim 9, following vacuum tank can be provided, that is, and with lid miniaturization, lightweight and when can reduce cost of manufacture, can also reduce height of jumping, and then can cut down and comprise the total cost of safeguarding etc.
Description of drawings
Fig. 1 is the figure on the vacuum tank top of expression an embodiment of the present invention.(a) be the stereogram of the lid closed condition of expression vacuum tank; (b) for representing the stereogram of lid open mode.
Fig. 2 unloads the stereogram of supporting member Fig. 1 and sealing accessory state for expression from framework.
Fig. 3 is expression vacuum tank figure shown in Figure 1.(a) for representing the plane graph of a disrumpent feelings lid part; (b) be and the sectional view of representing the supporting member vertical direction of lid open mode in (a); (c) be the sectional view of the length direction of supporting member in the edge (a).
Fig. 4 opens the stereogram of the first cover state of vacuum tank among Fig. 1 for expression.
Fig. 5 is the figure of other execution mode key position of expression the present invention.(a) be its stereogram; (b) for representing the stereogram of sealing accessory.
Fig. 6 is the figure of another execution mode of expression the present invention.(a) be its stereogram; (b) be the sectional view of the hinge mechanism of edge expression lid closed condition; (c) for expression from the sectional view of the side opening lid state of the lateral vertical of (b); (d) expression will be closed the sectional view of the state of lid from the state of (c).
Fig. 7 constitutes the stereogram of the loadlock may of existing processing unit for the expression perspective.
Fig. 8 is the figure of the existing large-scale vacuum preparation room of expression.(a) be the stereogram of closed condition for its lid of expression; (b) for representing to open the stereogram of lid state.
Embodiment
Below, according to Fig. 1～execution mode shown in Figure 7, the present invention is illustrated.In the present embodiment, cut apart the vacuum tank that lid can obtain to conform with purpose by a plurality of.Though in the present embodiment, be being applicable to that constituting FPD is that example describes with the loadlock may of the processing unit of substrate, the present invention can be widely used in large-scale vacuum tank.
(embodiment 1)
Vacuum tank 10 in the present embodiment for example shown in Fig. 1 (a), comprises that the upper end has the framework 11 of peristome; With lid to be opened/closed 12 from the peristome sealed inside of this framework 11, to use with the loadlock may of the processing unit of substrate as constituting FPD, framework 11 is made by for example metal such as aluminium or stainless steel.
And in the present embodiment, lid 12 has following principal character.That is, the lid 12 that present embodiment adopted shown in Fig. 1 (a) and (b), constitutes by what first, second cover 12A, 12B formed and two cuts apart structure, can individually open and close each cover 12A, 12B.These covers 12A, 12B, compression area separately is little compared with the one thing, so need not special withstand voltage standard, can alleviate its weight.These covers 12A, 12B can be by making with framework 11 identical materials.In addition, these covers 12A, 12B, according to the occasion difference, also can be transparent by for example acrylate or polycarbonate resin etc. and synthetic resin that mechanical strength is big make, can confirm its inner case.These covers 12A, 12B as long as can guarantee mechanical strength, also can make hollow form.
In addition, on the upper surface 11A of the peristome of framework 11, whole periphery is provided with rill (not shown), as double dot dash line among Fig. 1 (b) and Fig. 2 shown in, is equipped with by O shape and encloses first seal member 13 that constitutes as seal member in this ditch.Sealing parts 13 and the acting in conjunction of aftermentioned sealing accessory make and remain on the specified vacuum degree in the framework 11.
In addition, on the 11A of the upper surface of framework 11, be provided with four switching mechanisms 14 that are used to open and close first, second cover 12A, 12B.These switching mechanisms 14 are made of the cylinder mechanism of for example spring cylinder (cylinder) etc., respectively have two on first, second cover 12A, the 12B.The base end part of cylinder 14A that belongs to two switching mechanisms 14 of the first cover 12A is installed in about framework 11 upper ends by hinge (hinge) mechanism 15 respectively, the front end of piston rod 14B separately is connected the free end of cover 12A, each switching mechanism 14 configured in parallel by link 14C.Other two switching mechanisms 14 belong to the second cover 12B respectively, with the switching mechanism 14 relative configurations that belong to the first cover 12A respectively.For example, when opening the first cover 12A by staff, with the free end of the first cover 12A by about be pulled up to after the dead-centre position above switching mechanism 14, switching mechanism 14 begins action, makes the first cover 12A Unscrew by hinge mechanism 15.The second cover 12B also can similarly open.In addition, hinge mechanism 15 is provided with the rotary drive mechanism that carries out first, second cover 12A, 12B opening and closing operations, also can make the on-off action automation of cover 12A, 12B or auxiliary to some extent by this rotary drive mechanism.In addition, switching mechanism 14 is not limited to two, also can be provided with more than two.
In addition, at the peripheral end of the inner face of first, second cover 12A, 12B, whole periphery is provided with rill (not shown), seal member is housed as Fig. 1 (b) shown in this ditch for example encloses second seal member of making 16 by O shape.The sealing parts 16 and first seal member 13 are same, with sealing accessory described later acting in conjunction, make and remain on the specified vacuum degree in the framework 11.
And shown in Fig. 1 (b) and Fig. 2, Fig. 3 (a) and (b), on the peristome of framework 11, setting up the supporting member 17 that supports first, second cover 12A, 12B, can freely load and unload.Shown in Fig. 2, Fig. 3 (c), form the section 17A of portion on the two ends of supporting member 17 length directions, in addition, the notch 11B[that formation combines with the 17A of section portion of supporting member 17 on the open end 11A of framework 11 is with reference to Fig. 3 (c)].This supporting member 17 is under the state that is set up in framework 11, and the upper surface 11A of the top and framework 11 of supporting member 17 is in same plane.
And, sealing accessory (sealing accessory) 18 is by aluminium or stainless steel, perhaps having rigidity and transparent or opaque synthetic resin (for example acrylate, polycarbonate resin etc.) etc. makes, shown in Fig. 2, Fig. 3 (a) and (b), can be installed in the surface of the upper surface 11A and the supporting member 17 of framework 11 with freely loading and unloading.Promptly, sealing accessory 18 as shown in Figure 2, the first contact site 18A, integrated with the first contact site 18A and cross the second contact site 18B that the peristome of framework 11 contacts with the free end inner face of first, second cover 12A, 12B, whole " day " the word shape that forms with the rectangular shape that contacts with the upper surface 11A of framework 11.It is identical or than narrow that the second contact site 18B forms the width of width and supporting member 17, and its whole is supported by supporting member 17.Therefore, sealing accessory 18 is when closing first, second cover 12A, the 12B inside with framework 11 and be evacuated, first seal member 13 with the upper surface 11A of the framework 11 shown in Fig. 2 double dot dash line below it is adjacent to, simultaneously, second seal member 16 at the position shown in Fig. 2 double dot dash line and first, second cover 12A, 12B above it is adjacent to respectively, lives framework 11 inside from outside seal.
The vacuum tank 10 of present embodiment is to use with the loadlock may of substrate as FPD, so FPD as shown in Figure 7 is the inside that is contained in framework 11 with the transport mechanism of substrate or FPD with the mounting table (not shown) of substrate.And, move into mouthful (not shown) at the FPD that is provided with of framework 11 with taking out of of substrate all around, these take out of move into mouthful by gate valve with in the framework 11 from outside blocking sealing.Under the situation of transport mechanism of in framework 11, packing into,, between carrying mechanism and process chamber, receive and transmit the FPD substrate by the transport mechanism in the framework 11.In addition, under the situation of the mounting table of in framework 11, packing into,, be that relay point receives transmission FPD substrate with vacuum tank 10 by the transport mechanism of carrying mechanism one side and process chamber one side.
Below, action is described.When as first, second cover 12A of lid 12, when 12B closes, vacuum tank 10 plays the effect with the loadlock may of the processing unit of substrate as FPD.In framework 11, receive FPD with substrate after, purify air in the framework 11 by non-active gas such as nitrogen, use then vacuum pump equal vacuum device will framework 11 in decompression, the vacuum state of formation process chamber standard framework 11 in.At this moment, first, second cover 12A, 12B are pressed in framework 11 sides firmly owing to atmospheric pressure.Because this pressing force, first, second seal member 13,16 presses for sealing accessory 18, between the upper surface 11A and sealing accessory 18 by first seal member, 13 sealing frameworks 11, simultaneously, between second seal member, 16 first, second cover of sealing 12A, 12B and sealing accessory 18, make and form vacuum state in the framework 11.
In case the inside of framework 11 reaches vacuum state, first, the second cover 12A, 12B will be subjected to atmospheric pressure, yet, if its compression area separately roughly reduces by half, pressing force will roughly reduce by half, correspondingly, peristome in framework 11, supporting cover 12A by supporting member 17, the free end of 12B, can seal first reliably by sealing accessory 18, the second cover 12A, between the upper surface of 12B and framework 11, and then, can be reliably the inside of framework 11 be remained on the specified vacuum degree, successfully between framework 11 and process chamber, carry out the reception transmission of FPD with substrate.In addition, at this moment, supporting member 17 can prevent the bending of first, second cover to framework 11 inside reliably, the performance excellent sealing performance.
And, if use vacuum tank 10 constantly, will safeguard the drive division of transport mechanism etc. so as required.In addition, as the particulate of the secondary product that produces with the processing of substrate by FPD etc., invade to wait in the framework 11 of vacuum tank 10 and can cause that particulate piles up, so need cleaning.Therefore, after the vacuum of framework 11 inside of having removed vacuum tank 10, after for example by staff the free end side of the first cover 12A being lifted to position above the dead point of switching mechanism 14 from framework about 11, switching mechanism 14 moves at the beginning, its piston rod 14B just shrinks, the first cover 12A just opens only half (with reference to Fig. 4) of the peristome of framework 11 by 15 rotations of hinge mechanism.In addition, the second cover 12B also opens with the first cover 12A the samely, just opens the peristome of framework 11 comprehensively.
Under this state, sealing accessory 18 and supporting member 17 become obstacle, can't safeguard the inside of lid 12, so by unloading lower seal accessory 18 and supporting member 17 in turn, can open the inside of framework 11, the carrying device in the framework of can packing into 11 or the maintenance work of mounting table comprehensively.In addition, can also carry out the cleaning of framework 11 inside.Maintenance in the framework 11 and cleaning are carried out the cleaning of first, second cover 12A, 12B after finishing.Vacuum tank 10 is if surpass the tun of 1500mm, for example as shown in Figure 4, under the state of closing the second cover 12B on to above it, on the second cover 12B, can carry out the cleaning of the first cover 12A inner face and framework 11 inside.The second cover 12B is also to clean with the same order of the first cover 12A.And then carry out the cleaning on first, second cover 12A, 12B surface.In addition, synchronous with these work, carry out the maintenance of first, second seal member 13,16, switching mechanism 14 and hinge mechanism 15 etc.
After the maintenance of vacuum tank 10 finishes, after restoring each parts, close first, second cover 12A, 12B,, can be used as loadlock may and use by inside from outside seal framework 11.
As described above, according to present embodiment, lid 12 is divided into first, the second cover 12A, in the time of 12B, at these covers 12A, sealing accessory 18 is set between the upper surface of 12B and framework 11, therefore, cut apart first of structure as two, the second cover 12A, 12B, with lid 12 miniaturizations, lightweight, when can reduce manufacturing cost, can also reduce each cover 12A, 12B height of jumping separately, and, even if lid 12 is two to cut apart structure, by sealing accessory 18, can seal first reliably, the second cover 12A, between the upper surface 11A of 12B and framework 11.In addition, because can reduce first, second cover 12A, 12B height of jumping separately,, can greatly reduce the overall cost of maintenance of comprising vacuum tank 10 etc. so do not want special Security Countermeasures.
In addition, according to present embodiment, sealing accessory 18 is because have the first contact site 18A that contacts with the upper surface 11A of framework 11; With the second contact site 18B integrated with the first contact site 18A and that contact with first, second cover 12A, 12B at the peristome of framework 11, so can seal the inside of framework 11 on each comfortable whole girth of first, second cover 12A, 12B reliably, reliably keep the vacuum degree in the framework 11.In addition, according to present embodiment, be for example to surpass 1500mm on one side, under the situation of the vacuum tank 10 that the compression area of lid 12 is bigger, can play significant effect.In addition, because support the supporting member 17 of first, second cover 12A, 12B is erected between the upper end of framework 11 at the peristome of framework 11, so even first, second cover 12A, 12B are subjected to atmospheric pressure, also can prevent these covers 12A, 12B bending reliably, can bring into play the function of first, second seal member 13,16 and sealing accessory 18 to greatest extent to framework 11 1 sides.In addition, because in the framework 11 of vacuum tank 10, be provided with FPD with the carrying device or the mounting table of substrate,, vacuum tank 10 plays a role so can be used as the loadlock may of the high processing unit of sealing mechanism and maintainability.
In addition, also can be with supporting member 17 and sealing accessory 18 being made of one (not shown).In this case, supporting member 17 and sealing accessory 18 can be installed on the upper surface 11A of framework 11 simultaneously, and can obtain the action effect same with the foregoing description.
(embodiment 2)
In the vacuum tank 20 of present embodiment, as shown in Figure 5, as two cut apart structure lid 22 first, second cover 22A, 22B and the sealing accessory 28 form, different with the foregoing description, simultaneously, omitted on the supporting member this point also inequality with the foregoing description.Except that these places, can form according to the foregoing description structure.Therefore, describe at this center that is characterized as with present embodiment.
First, second cover 22A, 22B that present embodiment adopts, shown in Fig. 5 (a), wall thickness separately increases to free end gradually from base end part.About its reason back explanation.Like this, under the situation that the weight of cover 22A, 22B increases, can realize lightweight by each cover 22A, 22B being made hollow form.
On the other hand, sealing accessory 28 has the first contact site 28A and the second contact site 28B shown in Fig. 5 (b).The second contact site 28B is made of two parts: the left and right sides vertical component effect 28C that stretches out setting from the pars intermedia (position that is equivalent to the free end of first, second cover 22A, 22B) of the first contact site 28A in vertical direction; With the horizontal part 28D that is connected these vertical component effects 28C.Be separately installed with second seal member 26 in the both sides of the second contact site 28B.Sealing parts 26 constitute ring-types, above the first contact site 28A, the one side configuration of vertical component effect 28C and horizontal part 28D.Therefore, if close first, second cover 22A, 22B, second seal member 26 of the free end face of the wall thickness of these covers 22A, 22B and the second contact site 28B is adjacent to, simultaneously, inner face outer peripheral edges portion beyond these covers 22A, the 22B free end and second seal member 26 of the second contact site 28B are adjacent to.
In addition, same with the foregoing description on the 21A of the upper surface of framework 21, first seal member (not shown) is installed, this first seal member is to contact first the following of contact site 28A with the following of sealing accessory 28.
Like this, because the free end face of the wall thickness of first, second cover 22A, 22B contacts with the second contact site 28B two sides of sealing accessory 28 respectively, become vacuum state in the framework 21, even if apply powerful pressing force to first, second cover 22A, 22B, these covers 22A, 22B free end face separately contact with the second contact site 28B of sealing accessory 28, pressing force also can act on the second contact site 28B and cancel out each other from free end face separately, can not make cover 22A, 22B crooked in framework 21.
That is to say,, guarantee enough to bear the mechanical strength of the pressing force that atmospheric pressure produces by the free end of first, second cover 22A, 22B is made relatively thick than other parts.From this viewpoint, first, second cover 22A, 22B also can not be the types that its wall thickness separately increases gradually to free end face.Key is to get final product if the wall thickness of free end face has the pressing force of withstanding the atmospheric pressure generation; If possible, also cover integral body can be made homogeneous thickness on the weight; In addition, if possible, also can thicken near the position of free end face part on the intensity, do other position thinner than it, but the thickness homogeneous.
As described above, according to present embodiment, first, the second cover 22A, 22B free end face separately contacts with the two sides, the left and right sides of the second contact site 28B of formation from the first contact site 28A lifting of sealing accessory 28, even so support first be not set, the second cover 22A, under the situation of the supporting member of 22B, for first, the second cover 22A, 22B, each cover 22A that the pressure that atmospheric pressure produces is contacting with each other by the second contact site 28B, 22B free end face is separately cancelled each other, can prevent bending separately, with the foregoing description similarly, the sealing property that can play stably.
In the present embodiment, though second seal member 26 is installed in sealing accessory 28,, also can be the same with embodiment 1,2, sealing parts 26 are installed in the corresponding place of first, second cover 22A, 22B.In addition, in the present embodiment,, also the sealing parts can be installed in below the first contact site 28A that seals accessory 28 though first seal member is installed in framework 21.
(embodiment 3)
Shown in Fig. 6 (a)～(d), the vacuum tank 30 of present embodiment comprises: first, second, third, fourth cover 32A, 32B, 32C, 32D that lid 22 4 is cut apart; Support the crosswise supporting member 37 of the part of the peristome that is positioned at framework 31 in the outer peripheral edges portion of these covers 32A, 32B, 32C, 32D inner face; Sealing accessory 38 with the sphere of movements for the elephants shape of the upper surface 31A of parcel surface of this supporting member 37 and framework 31.Pressing embodiment 1 except that these constitutes.
The first, second, third, fourth cover 32A that present embodiment adopts, 32B, 32C, 32D respectively carry a switching mechanism 34 shown in Fig. 6 (a).For example, the first cover 32A goes up the switching mechanism 34 of installation in the configuration of the side of 31A upper edge, the upper surface of the framework 31 first cover 32A.And the cylinder 34A of this switching mechanism 34 is connected by link (not shown) near the free end of side of the first cover 32A.In addition, the tip of the piston rod 34B of switching mechanism 34 is connected on the first cover 32A along the hinge mechanism 35 of the base end part of the first cover 32A upper surface by being configured in framework 31.
Supporting member 37 is done crosswise as mentioned above, shown in Fig. 6 (b), forms the section 37A of portion on criss-cross each end face.The 37A of each section portion of supporting member 37 combines with notch 31B at the correspondingly square one-tenth of the upper surface of framework 31 31A.And sealing accessory 38 has first contact site 38A that contacts with the upper surface 31A of framework 31 and the crosswise second contact site 38B that contacts with supporting member 37.Other is pressed embodiment 1 and constitutes.
As described above, according to present embodiment, can be with lid 32 and switching mechanism 34 than more miniaturization of the various embodiments described above, lightweight.
In addition, in the various embodiments described above, do two with regard to lid and cut apart and four cut apart and be illustrated, still, as required, also can be divided into more.Therefore, the form of supporting member and sealing accessory also changes in conjunction with the quantity of cutting apart of lid.And first seal member both can be situated between and be inserted between sealing accessory and the framework, also can be installed on the either party of sealing accessory, framework.Similarly, second seal member both can be situated between and be inserted between lid and the sealing accessory, also can be installed on the either party of lid, sealing accessory.In addition, the material of framework, lid and sealing accessory is not limited to the various embodiments described above, can use various materials by purpose.Also have, in the various embodiments described above, be illustrated with the vacuum tank of the loadlock may of the processing unit of substrate, still,, also be suitable for widely for other various vacuum tanks that are fit to the object of the invention about being applicable to formation FPD.
The possibility of utilizing on the industry
Vacuum tank of the present invention can be applicable to preferably and for example consist of the processing that FPD uses substrate The large size vacuum vessel of the loadlock may of device etc.
Claims (7)
1. vacuum tank comprises framework and from the lid to be opened/closed of the upper end open portion sealed inside of this framework, it is characterized in that,
When described lid is divided into a plurality of cover, the sealing accessory is installed with freely loading and unloading between the upper end of these covers and described framework,
Described sealing accessory has: first contact site that contacts described framework upper surface; With second contact site integrated with first contact site and that contact with described each cover in the upper end open portion of described framework,
Between first contact site of described framework and described sealing accessory and between second contact site of described each cover and described sealing accessory, be separately installed with seal member, described framework is made rectangle, Yi Bian be at least more than the 1500mm.
2. vacuum tank according to claim 1 is characterized in that,
The supporting member that will support described each cover in the upper end open portion of described framework is set up between the upper end of described framework.
3. vacuum tank according to claim 2 is characterized in that,
Described sealing accessory and described supporting member is integrated.
4. vacuum tank according to claim 1 is characterized in that,
Make described sealing accessory and/or described lid by transparent material.
5. vacuum tank according to claim 4 is characterized in that,
Described transparent material is become by acrylate or polycarbonate resin.
6. vacuum tank according to claim 1 is characterized in that,
The mechanism of setting device substrate in described framework.
7. vacuum tank according to claim 1 is characterized in that,
The mechanism of conveyance substrate is set in described framework.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003291989 | 2003-08-12 | ||
| JP2003291989A JP4285642B2 (en) | 2003-08-12 | 2003-08-12 | Vacuum vessel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1581433A CN1581433A (en) | 2005-02-16 |
| CN1324649C true CN1324649C (en) | 2007-07-04 |
Family
ID=34369481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100700594A Expired - Lifetime CN1324649C (en) | 2003-08-12 | 2004-08-10 | Vacuum container |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4285642B2 (en) |
| KR (1) | KR100634902B1 (en) |
| CN (1) | CN1324649C (en) |
| TW (1) | TW200518176A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7695232B2 (en) * | 2006-06-15 | 2010-04-13 | Applied Materials, Inc. | Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same |
| JP5601571B2 (en) * | 2010-05-25 | 2014-10-08 | 新東工業株式会社 | Sand tank opening and closing device for sand tank in mold making machine |
| JP5585238B2 (en) * | 2010-06-24 | 2014-09-10 | 東京エレクトロン株式会社 | Substrate processing equipment |
| JP5575558B2 (en) * | 2010-06-30 | 2014-08-20 | 東京エレクトロン株式会社 | Processing equipment |
| JP5577185B2 (en) * | 2010-08-06 | 2014-08-20 | 株式会社アルバック | Vacuum processing equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07146654A (en) * | 1993-11-25 | 1995-06-06 | Canon Inc | Image forming device |
-
2003
- 2003-08-12 JP JP2003291989A patent/JP4285642B2/en not_active Expired - Lifetime
-
2004
- 2004-07-14 TW TW093121036A patent/TW200518176A/en not_active IP Right Cessation
- 2004-08-10 CN CNB2004100700594A patent/CN1324649C/en not_active Expired - Lifetime
- 2004-08-11 KR KR1020040063228A patent/KR100634902B1/en active IP Right Grant
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07146654A (en) * | 1993-11-25 | 1995-06-06 | Canon Inc | Image forming device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4285642B2 (en) | 2009-06-24 |
| CN1581433A (en) | 2005-02-16 |
| TW200518176A (en) | 2005-06-01 |
| TWI374473B (en) | 2012-10-11 |
| KR100634902B1 (en) | 2006-10-17 |
| KR20050016229A (en) | 2005-02-21 |
| JP2005064213A (en) | 2005-03-10 |
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