JP4285642B2 - Vacuum vessel - Google Patents

Description

  The present invention relates to a vacuum vessel, and more particularly to a vacuum vessel suitably used for a vacuum preparatory chamber or the like constituting a processing apparatus for processing substrates such as FPD substrates.

  Vacuum containers have been widely used in various industrial fields. For example, in a semiconductor manufacturing process, a vacuum container is widely used for an etching processing apparatus and a film forming processing apparatus. This type of processing apparatus includes a mounting mechanism for a substrate to be processed such as a wafer or an FPD substrate, a vacuum preliminary chamber, a transfer chamber, and a processing chamber. The vacuum preliminary chamber, the transfer chamber, and the processing chamber are each formed as a vacuum container.

  For example, FIG. 7 shows a vacuum preparatory chamber constituting the FPD substrate processing apparatus proposed by the present applicant in Patent Document 1. An articulated transport mechanism 2 is provided in the vacuum preliminary chamber 1, and the FPD substrate S is transferred between the mounting mechanism (not shown) and the processing chamber (not shown) via the transport mechanism 2. Do. The vacuum preliminary chamber 1 includes a moving mechanism (not shown), and reciprocates between the mounting mechanism and the processing chamber. When the FPD substrate S is transferred to and from the processing chamber, a front opening is provided. Is in contact with the side surface of the processing chamber on the gate valve side so that a vacuum can be drawn. Further, a gate valve 3 is provided behind the vacuum preliminary chamber 1 so that the FPD substrate S is transferred between the vacuum preliminary chamber 1 and the mounting mechanism. Although not shown in FIG. 7, the vacuum preliminary chamber 1 includes a casing, a lid that can be opened and closed, and a seal member interposed between the lid and the casing, and a transport mechanism. The lid can be opened during assembly or maintenance. Reference numeral 1A denotes a carry-in / out port for the FPD substrate S.

  However, with the recent increase in size of the FPD substrate S, the vacuum preliminary chamber 1 is increased in size. In addition, since the vacuum preliminary chamber 1 is required to have rigidity that can withstand vacuum in combination with being formed of a metal such as aluminum or stainless steel, the lid itself is heavier, and the lid is manually covered. Opening and closing is becoming difficult.

  Therefore, an opening / closing mechanism 6 constituted by a cylinder mechanism or the like as shown in FIG. 8 (a) is provided in the vacuum preliminary chamber 1, and the weight is obtained with the assistance of the opening / closing mechanism 6 as shown in FIG. 8 (b). The lid 1B is now opened and closed.

Japanese Patent Laid-Open No. 11-345859

  However, the FPD substrate S tends to increase in size in the future, and accordingly, when the processing apparatus becomes larger and the cover 1B of the vacuum preliminary chamber 1 exceeds, for example, 1500 mm, the pressure received by the cover 1B. Since the area is also greatly increased, it is necessary to manufacture a special cover with a large thickness so that the cover 1B can withstand the vacuum in the housing 1, and the manufacturing cost increases, and the lid When the body 1B is opened, the height (bounce height) is increased, and it is necessary to take all possible safety measures at the time of opening and closing due to maintenance and the like, and there is a problem that the total cost increases dramatically. Moreover, the subject that opening / closing operation itself becomes difficult also arises by enlargement of the cover body 1B. Further, it has been necessary to easily open the upper surface of the housing so that a mechanism existing in the vacuum preparatory chamber, an FPD substrate, and the like can be taken out.

  The present invention has been made in order to solve the above-described problems, and can reduce the manufacturing cost by reducing the size and weight of the lid, and can also reduce the jumping height and reduce part of the upper surface of the housing. It is an object of the present invention to provide a vacuum vessel that can be made into one opening and that can reduce the total cost including maintenance.

Vacuum container according to claim 1 of the present invention comprises a housing, the housing and the openable lid for sealing the interior from the upper opening of the vacuum vessel equipped with a, a plurality of the lid A support member that divides the lid member and interposes a sealing auxiliary member between the lid member and the upper end of the casing, and supports the plurality of lid members at the upper end opening of the casing. The lid member is detachably installed between the upper ends of the casing, and the lid members are in contact with both the upper end surface of the casing and the support member via the auxiliary sealing member. .

Further, the vacuum container according to claim 2 of the present invention is the invention according to claim 1, said auxiliary sealing member includes a first abutment portion which abuts the upper end surface of the housing, said first in the supporting member bridges the integral and the upper end of the housing and the abutment 1 is characterized in that it has a second contact portion which abuts with the respective cover members.

According to a third aspect of the present invention, in the vacuum container according to the second aspect , between the casing and the first abutting portion of the sealing auxiliary member , and the lid members, A sealing member is interposed between the first and second contact portions of the auxiliary sealing member.

Further, the vacuum container according to claim 4 of the present invention is the invention according to claim 3, both ends of the support member, the inside of the upper end face facing each other of the housing to avoid over Kifutome member It is arrange | positioned at the edge part .

The vacuum container according to claim 5 of the present invention is a vacuum container comprising a housing and an openable / closable lid that seals the inside from the upper end opening of the housing. Yes and interposed auxiliary sealing member between the upper end of the lid member and the housing as well as divided into a plurality of lid members, it said auxiliary sealing member includes a first contact with the upper end surface of the housing 1 abutment portion, and a second abutment portion that is integrated with the first abutment portion and abuts against each of the lid members across the upper end opening of the housing . Are formed by a pair of vertical portions extending vertically upward from the first contact portions facing each other , and a horizontal portion connecting between the extended ends of these vertical portions , and The vertical portions and the horizontal portions forming the second contact portion are respectively free ends of the plurality of lid members facing each other. It is characterized in that in contact with both of them interposed between.

Further, the vacuum container according to claim 6 of the present invention is the invention according to claim 5, said plurality of cover members, that the wall thickness gradually increases toward the free end portion from the proximal end It is a feature.

A vacuum vessel according to claim 7 of the present invention is characterized in that, in the invention according to any one of claims 1 to 6 , the lid is formed of a transparent material. is there.

According to an eighth aspect of the present invention, the vacuum container according to the seventh aspect is characterized in that the transparent material is made of an acrylic resin or a polycarbonate resin .

According to the present invention, miniaturization of the lid, be one of the opening part or the entire surface of the case top on that can reduce the splashes raised height it is possible to reduce the manufacturing cost and weight it can, by extension may provide a vacuum container which can reduce the total cost, including the maintenance and the like.

  Hereinafter, the present invention will be described based on the embodiment shown in FIGS. In the present embodiment, a vacuum container suitable for the purpose can be obtained by dividing the lid into a plurality of parts. In the present embodiment, a case where the present invention is applied to a vacuum preparatory chamber constituting an FPD substrate processing apparatus will be described as an example. However, the present invention can be widely applied to a large vacuum container.

  As shown in FIG. 1A, for example, the vacuum container 10 of the present embodiment includes a housing 11 having an opening at the upper end, and an openable / closable lid that seals the inside from the opening of the housing 11. 12, and is used as a vacuum preparatory chamber constituting, for example, an FPD substrate processing apparatus. The housing 11 is made of a metal such as aluminum or stainless steel.

  Thus, in the present embodiment, the lid 12 has the main characteristics. That is, the lid body 12 used in the present embodiment is configured as a two-part structure composed of first and second lid members 12A and 12B, as shown in FIGS. The members 12A and 12B can be opened and closed individually. Since these cover members 12A and 12B have a smaller pressure receiving area than that of the integrated member, the lid members 12A and 12B can be reduced in weight without requiring special pressure resistance specifications. These lid members 12 </ b> A and 12 </ b> B can be formed of the same kind of material as the housing 11. Further, in some cases, these lid members 12A and 12B may be formed of a transparent synthetic resin having mechanical strength such as acrylic resin or polycarbonate resin so that the inside can be confirmed. These lid members 12A and 12B may be formed in a hollow shape as long as the mechanical strength can be secured.

  Further, a thin groove (not shown) is formed on the upper end surface 11A surrounding the opening of the housing 11 over the entire circumference, and this groove is shown by a two-dot chain line in FIG. 1 (b) and FIG. Thus, for example, the first seal member 13 made of an O-ring is mounted as a sealing member. The seal member 13 holds the inside of the casing 11 at a predetermined degree of vacuum in cooperation with a sealing auxiliary member described later.

  The upper end surface 11A of the housing 11 is provided with four opening / closing mechanisms 14 for opening and closing the first and second lid members 12A and 12B. These opening / closing mechanisms 14 are configured by a cylinder mechanism such as a spring cylinder, for example, and are attached to each of the first and second lid members 12A and 12B. The two opening / closing mechanisms 14 belonging to the first lid member 12A have respective cylinders 14A base ends attached to the left and right of the upper end of the casing 11 via hinge mechanisms 15, and the distal ends of the respective cylinder rods 14B are lid members. It is connected to the free end of 12A via a connecting member 14C, and the opening / closing mechanisms 14 are arranged in parallel to each other. The other two opening / closing mechanisms 14 belong to the second lid member 12B, and are arranged to face the opening / closing mechanisms 14 belonging to the first lid member 12A. For example, when the first lid member 12A is opened manually, the open / close mechanism 14 is operated after the free end of the first lid member 12A is lifted from the left and right to a position exceeding the dead point of the open / close mechanism 14, and the hinge mechanism 15 is operated. The first lid member 12 </ b> A is pivoted through and opened. The second lid member 12B can be opened in the same manner. The hinge mechanism 15 is provided with a rotation drive mechanism that opens and closes the first and second lid members 12A and 12B, and the rotation drive mechanism automates or assists the opening and closing operation of the lid members 12A and 12B. good. Further, the number of opening / closing mechanisms 14 is not limited to two, and two or more may be provided.

  In addition, a thin groove (not shown) is formed on the outer peripheral end portions of the inner surfaces of the first and second lid members 12A and 12B, and a sealing member such as an O-ring is formed in the groove. The second seal member 16 is mounted as shown in FIG. The seal member 16 keeps the inside of the housing 11 at a predetermined degree of vacuum in cooperation with a later-described sealing auxiliary member, like the first seal member 13.

  Thus, as shown in FIGS. 1B and 2, and FIGS. 3A and 3B, the first and second lid members 12A and 12B are supported in the opening of the housing 11. A supporting member 17 is detachably mounted. Steps 17A are formed at both ends in the longitudinal direction of the support member 17 as shown in FIGS. 2 and 3C, and the opening end surface 11A of the housing 11 is connected to the step 17A of the support member 17. A matching notch 11B (see FIG. 3C) is formed. When the support member 17 is installed on the housing 11, the upper surface of the support member 17 and the upper end surface 11 </ b> A of the housing 11 are flush with each other.

Thus, the sealing auxiliary member (seal auxiliary member) 18 is formed of aluminum, stainless steel, or a rigid and transparent or opaque synthetic resin (for example, acrylic resin, polycarbonate resin, etc.). 3, (a) and (b), it is detachably attached to the upper end surface 11A of the housing 11 and the surface of the support member 17. That is, as shown in FIG. 2, the seal auxiliary member 18 is integrated with the rectangular first contact portion 18 </ b> A that contacts the upper end surface 11 </ b> A of the housing 11 and the first contact portion 18 </ b> A, and the housing. 11 and a second abutting portion 18B that abuts against the inner surfaces of the free end portions of the first and second lid members 12A and 12B across the opening of the first and second lid members 12A and 12B. Yes. Here, the first abutting portion 18A refers to a rectangular portion that comes into contact with the upper end surface 11A of the housing 11, and does not refer to the surface on the side that the upper end surface 11A of the housing 11 contacts. . In addition, the second contact portion 18B has the same meaning, and refers to a portion that crosses the rectangular first contact portion 18A, and the back surface of the first and second lid members 12A and 12B contacts with each other. It does not indicate the aspect of The width of the second contact portion 18 </ b> B is the same as or narrower than the width of the support member 17, and the entire surface is supported by the support member 17. Therefore, when the first and second lid members 12A and 12B are closed and the inside of the housing 11 is evacuated, the seal auxiliary member 18 has the lower surface 11A of the housing 11 indicated by a two-dot chain line in FIG. The first seal member 13 and the upper surface are in close contact with the second seal member 16 of the first and second lid members 12A and 12B at the position indicated by the two-dot chain line in FIG. Seal the inside from the outside. Note that both ends of the support member 17 are disposed at the inner edge portions of the upper end surface 11A of the housing 11 facing each other, avoiding the first seal member 13 .

  By the way, since the vacuum container 10 of this embodiment is used as a vacuum preparatory chamber for the FPD substrate, an FPD substrate transport mechanism or an FPD substrate mounting table (not shown) as shown in FIG. Is housed inside. Further, carry-in / out ports (not shown) for the FPD substrate are formed on the front, rear, left and right sides of the housing 11, and these carry-in / out ports are sealed by sealing the inside of the housing 11 from the outside through gate valves. It has become. When the transport mechanism is stored in the housing 11, the FPD substrate is transferred between the mounting mechanism and the processing chamber via the transport mechanism in the housing 11. When the mounting table is stored in the housing 11, the FPD substrate is transferred using the vacuum vessel 10 as a relay point through the transport mechanism on the mounting mechanism side and the processing chamber side.

  Next, the operation will be described. When the first and second lid members 12A and 12B, which are the lid body 12, are closed, the vacuum container 10 functions as a vacuum preparatory chamber of the FPD substrate processing apparatus. After receiving the FPD substrate in the housing 11, the air in the housing 11 is purged with an inert gas such as nitrogen gas, and then the interior of the housing 11 is depressurized using a vacuum device such as a vacuum pump. A vacuum state corresponding to the processing chamber is formed in the body 11. At this time, the first and second lid members 12A and 12B are strongly pressed toward the housing 11 by the atmospheric pressure. With this pressing force, the first and second seal members 13 and 16 are crushed against the seal auxiliary member 18, and the first seal member 13 seals between the upper end surface 11 </ b> A of the housing 11 and the seal auxiliary member 18. At the same time, the space between the first and second lid members 12A and 12B and the seal auxiliary member 18 is sealed by the second seal member 16, and the inside of the housing 11 is evacuated.

  When the inside of the housing 11 is in a vacuum state, the first and second lid members 12A and 12B receive atmospheric pressure, which is combined with the fact that each pressure receiving area is approximately halved and the pressing force is approximately halved. Since the free end portions of the lid members 12A and 12B are supported by the support member 17 at the opening of the housing 11, the first and second lid members 12A and 12B and the housing 11 are interposed via the seal auxiliary member 18. The upper end surface of the substrate 11 can be reliably sealed, and the interior of the housing 11 can be reliably held at a predetermined degree of vacuum, so that the FPD substrate can be transferred between the housing 11 and the processing chamber. It can be done smoothly. At this time, the support member 17 can surely prevent the first and second lid members from bending into the housing 11 and can exhibit good sealing performance.

  Thus, if the vacuum container 10 is continuously used, it is necessary to maintain a driving unit such as a transport mechanism as necessary. Further, since by-products generated by processing the FPD substrate enter into the housing 11 of the vacuum vessel 10 as particles and the like, the particles are deposited, so that cleaning is necessary. Therefore, after releasing the vacuum inside the casing 11 of the vacuum vessel 10, for example, the position where the free end side of the first and second lid members 12 </ b> A exceeds the dead center of the opening / closing mechanism 14 by hand from the left and right of the casing 11. When the opening / closing mechanism 14 is operated after being lifted up, the cylinder rod 14B is contracted, the first lid member 12A is rotated through the hinge mechanism 15 and the opening of the housing 11 is opened by half (see FIG. 4). . In addition, the second lid member 12B is opened in the same manner as the first lid member 12A to open the entire opening of the housing 11.

  In this state, since the seal auxiliary member 18 and the support member 17 are in the way and the inside of the lid 12 cannot be maintained, the inside of the housing 11 is fully opened by sequentially removing the seal auxiliary member 18 and the support member 17. In addition, maintenance of the transport mechanism or the mounting table housed in the housing 11 can be performed. In addition, the inside of the housing 11 can be cleaned. After the maintenance and cleaning in the housing 11 are completed, the first and second lid members 12A and 12B are cleaned. If the vacuum vessel 10 has a large size exceeding 1500 mm, for example, as shown in FIG. 4, the second lid member 12 </ b> B goes up with the second lid member 12 </ b> B closed, and the first lid member 12 </ b> A on the second lid member 12 </ b> B. It is possible to perform cleaning of the inner surface and the inside of the housing 11. The second lid member 12B is also cleaned in the same procedure as the first lid member 12A. Further, the surfaces of the first and second lid members 12A and 12B are cleaned. In parallel with these operations, maintenance is performed on the first and second seal members 13 and 16, the opening and closing mechanism 14, the hinge mechanism 15, and the like.

  After the maintenance of the vacuum vessel 10 is completed, each part is restored, and then the first and second lid members 12A and 12B are closed and the inside of the housing 11 is sealed from the outside to be used as a vacuum preliminary chamber. be able to.

  As described above, according to the present embodiment, the lid 12 is divided into the first and second lid members 12A and 12B, and a seal is provided between the lid members 12A and 12B and the upper end surface of the housing 11. Since the auxiliary member 18 is provided, the lid 12 can be reduced in size and weight as the first and second lid members 12A and 12B having a two-part structure, and the manufacturing cost can be reduced, and each lid member 12A and 12B can be reduced. The flip-up height can be lowered, and the first and second lid members 12A and 12B and the upper end surface 11A of the housing 11 can be connected via the seal auxiliary member 18 even if the lid body 12 has a two-part structure. Can be reliably sealed. In addition, since the jumping height of each of the first and second lid members 12A and 12B can be reduced, no special safety measures are required, and the total cost including maintenance of the vacuum vessel 10 can be significantly reduced. it can.

  Further, according to the present embodiment, the seal auxiliary member 18 is integrated with the first contact portion 18 </ b> A that contacts the upper end surface 11 </ b> A of the housing 11 and the first contact portion 18 </ b> A and the opening of the housing 11. Since the first and second lid members 12A and 12B are in contact with the first and second lid members 12A and 12B, the casing is surely provided over the entire circumference of each of the first and second lid members 12A and 12B. The inside of the housing 11 can be sealed to reliably maintain the degree of vacuum in the housing 11. Moreover, according to the present Example, a remarkable effect can be show | played, for example in the case of the vacuum vessel 10 with a large pressure receiving area of the cover body 12 whose one side exceeds 1500 mm. Further, since the support member 17 that supports the first and second lid members 12A and 12B at the opening of the housing 11 is installed between the upper ends of the housing 11, the first and second lid members 12A and 12B are large. Even when the air pressure is received, the lid members 12A and 12B can be reliably prevented from being bent toward the housing 11, and the functions of the first and second seal members 13 and 16 and the seal auxiliary member 18 are maximized. You can make use of it. In addition, since the FPD substrate transport mechanism or mounting table is provided in the casing 11 of the vacuum container 10, the vacuum container 10 can function as a vacuum preparatory chamber of a processing apparatus having excellent sealing mechanism and maintainability. .

  In addition, although not shown in figure, you may produce what integrated the support member 17 and the seal | sticker auxiliary member 18. As shown in FIG. In this case, the support member 17 and the seal auxiliary member 18 can be mounted on the upper end surface 11A of the housing 11 at the same time, and the operational effects can be expected as in the above embodiment.

    As shown in FIG. 5, the vacuum container 20 of the present embodiment is different from the above-described embodiment in the form of the first and second lid members 22A and 22B and the seal auxiliary member 28, which are lid bodies 22 having a two-part structure. This embodiment differs from the above embodiment in that the support member is omitted. Except for these points, the configuration is the same as that of the above embodiment. Therefore, the feature of the present embodiment will be mainly described.

  As shown in FIG. 5A, the first and second lid members 22A and 22B used in the present embodiment gradually increase in thickness from the base end portion toward the free end portion. The reason for this will be described later. Thus, when the weight of the lid members 22A and 22B increases, the lid members 22A and 22B can be reduced in weight by forming the lid members 22A and 22B in a hollow shape.

On the other hand, as shown in FIG. 5B, the seal assisting member 28 has a first contact portion 28A and a second contact portion 28B. The second abutting portion 28B extends from the middle portion of the first abutting portion 28A (the portion corresponding to the free ends of the first and second lid members 22A, 22B) to the left and right. It is formed of a vertical portion 28C and a horizontal portion 28D that connects these vertical portions 28C. Second seal members 26 are mounted on both sides of the second contact portion 28B. The seal member 26 is formed in a ring shape, and is disposed along one surface of the first contact portion 28A, the vertical portion 28C, and the horizontal portion 28D. Accordingly, when the first and second lid members 22A and 22B are closed, the thick free end surfaces of these lid members 22A and 22B are in close contact with the second seal member 26 of the second contact portion 28B, The outer peripheral edge of the inner surface other than the free ends of the lid members 22A and 22B is in close contact with the second seal member 26 of the first contact portion 28A .

  In addition, a first seal member (not shown) is mounted on the upper end surface 21A of the casing 21 as in the above-described embodiment, and this first seal member is the lower surface of the seal auxiliary member 28, that is, the first contact member. It comes in contact with the lower surface of the contact portion 28A.

  In this way, the first and second lid members 22A and 22B have their respective thick free end surfaces in contact with both side surfaces of the second contact portion 28B of the auxiliary seal member 28, and therefore the inside of the housing 21 is evacuated. Even if a strong pressing force is applied to the first and second lid members 22A and 22B in the state, these lid members 22A and 22B have their respective free end surfaces on the second contact portion 28B of the seal auxiliary member 28. Because of the contact, the pressing force acts on the second contact portion 28B from each free end surface to be canceled, and the lid members 22A and 22B are not curved into the housing 21.

  That is, the free end portions of the first and second lid members 22A and 22B are made thicker than the other portions to ensure sufficient mechanical strength to receive a pressing force due to atmospheric pressure. From such a viewpoint, the first and second lid members 22A and 22B may not be of the type in which the thickness of each of the first and second lid members 22A and 22B gradually increases toward the free end surface. In short, it is sufficient that the thickness of the free end face has a thickness that can withstand the pressing force caused by atmospheric pressure, and if the weight is possible, the entire lid member may be made to have a uniform thickness. If possible, the vicinity of the free end surface portion may be thick, and other portions may be made thinner and uniform.

  As described above, according to the present embodiment, each of the first and second lid members 22A and 22B has the second free end surface formed from the first contact portion 28A of the seal auxiliary member 28. Even if a support member for supporting the first and second lid members 22A and 22B is not provided, the first and second lid members 22A and 22B are in contact with both the left and right surfaces of the contact portion 28B. The pressing force due to the atmospheric pressure can be canceled at the free end surfaces of the lid members 22A and 22B that are in contact with each other via the second abutting portion 28B, thereby preventing the respective bending. Can exhibit stable sealing performance.

In this embodiment, wearing the second sealing member 26 to seal the auxiliary member 28, as in the case the first seal member 26 Example 1, the second lid member 22A, 22B corresponding section of It may be attached to. In the present embodiment, the first seal member is mounted on the casing 21, but this seal member may be mounted on the lower surface of the first contact portion 28 </ b> A of the seal auxiliary member 28.

As shown in FIGS. 6A to 6D, the vacuum container 30 of the present embodiment includes first, second, third, and fourth lid members 32A, 32B obtained by dividing the lid 32 into four parts. 32C, 32D, a cross-shaped support member 37 that supports a portion of the outer peripheral edge portion of the inner surface of these lid members 32A, 32B, 32C, 32D located at the opening of the housing 31, and the support member 37 The seal auxiliary member 38 is formed in a “field shape” shape covering the surface and the upper end surface 31 </ b> A of the housing 31, and the rest is configured according to the first embodiment.

  Each of the first, second, third, and fourth lid members 32A, 32B, 32C, and 32D used in the present embodiment has a single opening / closing mechanism 34 as shown in FIG. is doing. For example, the opening / closing mechanism 34 attached to the first lid member 32A is disposed on the upper end surface 31A of the housing 31 along the side surface of the first lid member 32A. The cylinder 34A of the opening / closing mechanism 34 is connected to the vicinity of the free end on the side surface of the first lid member 32A via a connecting member (not shown). Further, the distal end of the cylinder rod 34B of the opening / closing mechanism 34 is coupled to the first lid member 32A via a hinge mechanism 35 disposed on the upper end surface of the housing 31 along the proximal end portion of the first lid member 32A. Has been.

  The support member 37 is formed in a cross shape as described above, and a step portion 37A is formed on each end surface of the cross shape as shown in FIG. Each step portion 37 </ b> A of the support member 37 is engaged with a notch portion 31 </ b> B formed at a corresponding portion of the upper end surface 31 </ b> A of the housing 31. The seal auxiliary member 38 includes a first contact portion 38A that contacts the upper end surface 31A of the housing 31 and a cross-shaped second contact portion 38B that contacts the support member 37. Others are configured according to the first embodiment.

  As described above, according to the present embodiment, the lid body 32 and the opening / closing mechanism 34 can be further reduced in size and weight compared to the above embodiments.

  In each of the above-described embodiments, the cover body is divided into two and four parts. However, it may be further divided as necessary. Therefore, the shape of the support member and the seal auxiliary member also changes according to the number of divisions of the lid. Moreover, the 1st sealing member should just be interposed between the sealing auxiliary member and the housing | casing, and may be mounted | worn with either a sealing auxiliary member or a housing | casing. Similarly, the second seal member may be interposed between the lid and the seal auxiliary member, and may be attached to either the lid or the seal auxiliary member. Further, the materials of the housing, the lid, and the seal auxiliary member are not limited to the above-described embodiments, and various materials can be used according to the purpose. Further, in each of the above-described embodiments, the vacuum container applied to the vacuum preparatory chamber constituting the FPD substrate processing apparatus has been described. However, it can be widely applied to various other vacuum containers suitable for the purpose of the present invention. .

  The vacuum container of the present invention can be suitably used for a large vacuum container such as a vacuum preparatory chamber constituting a processing apparatus for an FPD substrate.

It is a figure which shows the upper part of one Embodiment of the vacuum vessel of this invention, (a) is a perspective view which shows the state which the cover body of the vacuum vessel closed, (b) is a perspective view which shows the state which the cover body opened. . It is a perspective view which shows the state which removed the supporting member and sealing auxiliary member of FIG. 1 from the housing | casing. It is a figure which shows the vacuum vessel shown in FIG. 1, (a) is a top view which fractures | ruptures and shows a part of cover body, (b) is a direction orthogonal to the supporting member which shows the state which the cover body of (a) opened. (C) is sectional drawing which follows the longitudinal direction of the supporting member of (a). It is a perspective view which shows the state which opened the 1st cover member of the vacuum vessel of FIG. It is a figure which shows the principal part of other embodiment of this invention, (a) is the perspective view, (b) is a perspective view which shows the sealing auxiliary member. It is a figure which shows other embodiment of this invention, (a) is the top view, (b) is sectional drawing in alignment with the hinge mechanism which shows the state which closed the cover, (c) is the side surface of (b), Is a cross-sectional view showing a state in which the lid body is opened from the orthogonal side surfaces, and (d) is a cross-sectional view showing a state in which the lid body is to be closed from the state of (c). It is a perspective view seeing through and showing the vacuum preliminary chamber which comprises the conventional processing apparatus. It is a figure which shows the conventional large sized vacuum preliminary chamber, (a) is a perspective view which shows the state which the cover body closed, (b) is a perspective view which shows the state which opened the cover body.

Explanation of symbols

10, 20, 30 Vacuum vessel 11, 21, 31 Housing 11A, 21A, 31A Upper end surface of housing 12, 22, 32 Lid 12A, 22A, 32A First lid member 12B, 22B, 32B Second lid Members 13 and 23 First sealing member (sealing member)
16 Second sealing member (sealing member)
17, 27, 37 Support member 18, 28, 38 Seal auxiliary member (sealing auxiliary member)
18A, 28A, 38A 1st contact part 18B, 28B, 38B 2nd contact part 32C 3rd cover member 32D 4th cover member

Claims (8)

A housing, a closable lid for sealing the interior from the upper opening of the housing, in a vacuum vessel equipped with a, these cover member and the housing with dividing the lid into a plurality of lid members A sealing auxiliary member is interposed between the upper end of the body , and a support member for supporting the plurality of lid members at the upper end opening of the casing is detachably installed between the upper ends of the casing. Each of the lid members is in contact with both the upper end surface of the casing and the support member through the sealing auxiliary member . The auxiliary sealing member, said the first contact portion and said first of said support member extended between the upper end of the abutting portion and integral and the housing which abuts the upper end surface of the housing The vacuum container according to claim 1 , further comprising a second contact portion that contacts each lid member. Sealing members between the housing and the first contact portion of the sealing auxiliary member , and between the lid members and the first and second contact portions of the sealing auxiliary member, respectively. The vacuum vessel according to claim 2 , wherein the vacuum vessel is interposed. The ends of the support member, the vacuum container according to claim 3, characterized in that while avoiding the upper Kifutome member is arranged inside the edge of the upper end surface opposed to each other in the housing. In a vacuum container comprising a housing and an openable / closable lid that seals the inside from the upper end opening of the housing, the lid is divided into a plurality of lid members and the lid members and the housing Yes and interposed auxiliary sealing member between the upper end of the body,
The sealing auxiliary member includes a first abutting portion that abuts on an upper end surface of the housing, and each lid member that is integrated with the first abutting portion and crosses the upper end opening of the housing. A second abutting portion that abuts,
The second contact portion is formed by a pair of vertical portions extending vertically upward from the first contact portions facing each other and a horizontal portion connecting between the extended ends of the vertical portions. And the vertical portion and the horizontal portion forming the second abutting portion are interposed between the mutually facing free end surfaces of the plurality of lid members, and are in contact with both of them. . The plurality of lid members, the vacuum container according to claim 5, characterized in that the wall thickness gradually increases toward the free end portion from the proximal end. The vacuum container according to claim 1, wherein the lid is made of a transparent material. The vacuum container according to claim 7 , wherein the transparent material is made of acrylic resin or polycarbonate resin.

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