1374473 九、發明說明 【發明所屬的技術領域】 本發明是關於真空容器，更詳細來說，是適合使用於 :構成例如FPD用基板等的處理基板的處理裝置的真空 預備室等的真空容器。 【先前技術】 真空容器’在以往是廣泛地被使用在種種領域。例如 在半導體製程’在蝕刻處理裝置或沉積處理裝置是廣泛使 用著真空容器。在這種處理裝置，例如是具備有：晶圓或 FPD用基板等的被處理基板的載置機構、真空預備室、搬 運室、及處理室。而真空預備室、搬運室、及處理室室分 別形成爲真空容器。 例如，第7圖’在專利文獻1，是圖示了本申請人所 提出的構成FPD用基板的處理裝置。在該真空預備室1 內’是設置有多關節型的搬運機構2，經由搬運機構2, 在載置機構（沒有圖示）與處理室（沒有圖示）之間進行FPD 用基板S的傳送。該真空預備室1’是具備有移動機構（ 沒有圖示）’在載置機構與處理室之間往復移動，當在與 處理室之間進行FPD用基板S的傳送時，前方的開口部 會抵接於處理室的閥門側側面，進行真空吸引。在真空預 備室1的後方設置有閥門3，在真空預備室1與載置機構 之間進行FPD用基板s的傳送。而在第7圖，雖然沒有 圖示，而真空預備室1’具備有：殻體、可開閉的蓋體、 1374473 及中介安裝在蓋體與殼體之間的密封構件，當進行搬運機 構2的組裝或維修時可以開放蓋體。1 a則是FPD用基板 S的搬運出入口。 近年來，伴隨著FPD用基板S的大型化，真空預備 室1也大型化了。並且真空預備室1是例如由鋁或不鏽鋼 等的金屬所.形成，所以蓋體本身需要有耐得住真空狀態的 剛性’而蓋體本身的重量加重的話，就很難用人手將蓋體 進行開閉。 因此，如第8圖（a)所示，在真空預備室1設置有藉 由缸體機構等所構成的開閉機構6，如同圖（b)所示，得到 開閉機構6的輔助，就可以將加重的蓋體1B進行開閉》 【專利文獻1】 日本特開平1 1 — 3 4 5 8 5 9號公報 【發明內容】 【發明欲解決的課題】 可是’ FPD用基板S今後有逐漸大型化的傾向，伴隨 著會讓處理裝置大型化，該真空預備室1的蓋體1B例如 超過1 5 00mm的話，蓋體1B的受壓面積會變得很大，蓋 體1 B必須製作成厚度很厚的特殊規格，以能耐的住殻體 1內的真空狀態’其製造成本也會變得很高，並且蓋體1B 開放時的高度（彈起高度）會變高，而必須有萬全的在維修 時開閉的安全對策’其總成本會變得很高。而也由於蓋體 -6- 1374473 1B的大型化而產生了很難將其開閉操作的課題。而爲了 對真空預備室內所存在的機構或FPD用基板等進行取出 作業’需要能容易將殼體上面部進行開放。 本發明，爲了解決上述課題，其目的要提供一種真空 容器，將蓋體作成小型化、輕量化，以減低成本，能減低 彈起高度，並且可以將殻體上面部的一部分或全面部作成 一個開口，進而可減低維修等的總成本。 【用以解決課題的手段】 第1發明的真空容器，是具備有：殼體、以及從該殼 體的上端開口部將內部封閉的可開閉的蓋體的真空容器， 其特徵爲：將上述蓋體分割成複數的蓋子構件，並且在這 些蓋子構件與上述殼體的上端部之間中介安裝著密封輔助 構件，在上述殼體與上述密封輔助構件的第一抵接部之間 、以及在上述各蓋子構件與上述密封輔助構件之間，分別 中介安裝密封構件。 第2發明的真空容器，是針對第1發明’上述密封輔 助構件，是具有：抵接於上述殻體的上端面的第一抵接部 、以及與第一抵接部一體化，且在上述殼體的上端開口部 ，與上述各蓋子構件抵接的第二抵接部。 第3發明的真空容器’是針對第1或第2發明，在上 述殼體的上端開口部支承上述各蓋子構件的支承構件，是 架設在上述殼體的上端之間。 第4發明的真空容器，是針對第1發明’是將上述密 1374473 封輔助構件與上述支承構件一體化。 第5發明的真空容器，是針對第丨發明，上述密封輔 助構件及/或上述蓋體，是藉由透明的材料所形成。 第6發明的真空容器，是針對第1發明，上述透明的 材料是由丙烯酸樹脂或聚碳酸酯樹脂所構成。 第7發明的真空容器，是針對第1發明，在上述殻體 內設置有用來保持基板的機構。 第8發明的真空容器，是針對第1發明，在上述殻體 內設置有用來搬運基板的機構。 第9發明的真空容器，是針對第1發明，將上述殻體 形成爲：其中一邊至少爲1500mm以上的矩形構造。 【發明效果】 藉由第1發明〜第7發明，可提供一種真空容器，將 蓋體作成小型化、輕量化，以減低成本，能減低彈起高度 ’進而可減低維修等的總成本。 【實施方式】 以下根據第1圖〜第7圖所示的實施方式來說明本發 明。在本實施方式中 '，藉由將蓋體分割爲複數部分而可得 到所需要的真空容器。在本實施方式中，雖然是舉出適用 於構成FPD用基板的處理裝置的真空預備室的情況來加 以說明，而本發明也可適用於大型的真空容器。 1374473 【實施例1】 本實施例的真空容器1 〇，例如如第1圖（a)所示，是 具備有：在上端具有開口部的殼體11、及從該殼體Π的 開口部將內部封閉的可開閉的蓋體1 2 ;例如用作爲構成 FPD用基板的處理裝置的真空預備室。殼體n，例如是 藉由鋁或不鏽鋼等的金屬所形成。 在本實施例中，蓋體12爲主要的特徵。也就是說， 使用於本實施例的蓋體12，如第1圖（a)、（b)所示，是作 成由第一、第二的蓋子構件12A、12B所構成的分割爲二 的構造’各蓋子構件1 2A、1 2B可個別開閉。這些蓋子構 件12A、12B，個別的受壓面積，是小於一體成型構件， 所以不需要特殊耐壓的規格，而可以輕量化。這些蓋子構 件12A、12B，能夠藉由與殼體11同樣的材料來形成。而 這些蓋子構件12A、12B，因應情況可藉由丙烯酸樹脂或 聚碳酸酯樹脂等的透明且具有機械強度的合成樹脂所形成 ，而可以確認內部情況。這些蓋子構件1 2A、1 2B只要能 確保機械強度，也可以形成爲中空狀。 在圍繞殼體11的開口部的上端面11A，是涵蓋了整 個外周形成了細溝槽（沒有圖示），如第1圖（b)及第2圖的 雨點虛線所示，在該溝槽內是安裝著以〇型環所構成的 作爲密封構件的第一密封構件1 3 »該密封構件1 3，會與 後述的密封輔助構件一起作用，來將殼體11內保持爲預 定的真空度。 在殼體11的上端面11A，是設置有四處用來開閉第 -9- 1374473 —、第二蓋子構件12A、12B的開閉機構14。這些開閉機 構14，例如是藉由彈簧缸體等的缸體機構所構成，在第 —、第二蓋子構件12A、12B上各裝有兩個。屬於第一蓋 子構件1 2 A的兩個開閉機構1 4，其個別的缸體1 4 A基端 部是經由鉸鏈機構15而安裝在殼體11的上端的左右處， 各個缸桿14B前端是經由連結構件14C而被連結在蓋子 構件12A的自由端部，各開閉機構14是配置成互相平行 。其他兩個開閉機構14是分別屬於第二蓋子構件12B， 是配置成朝向屬於第一蓋子構件12A的開閉機構14接合 在一起。例如用人手將第一蓋子構件12A打開時，是將 第一蓋子構件12A的自由端從左右抬起至超過開閉機構 1 4的死點的位置之後，開閉機構1 4會作動，經由鉸鏈機 構15使第一葦子構件12A迴旋而開啓。第二蓋子構件 12B也可同樣地開啓。且在鉸鏈機構15設置有用來進行 第一、第二蓋子構件12A、12B的開閉操作的旋轉驅動機 構，也可以藉由該旋轉驅動機構來將蓋子構件UA、12B 的開閉動作自動化或加以輔助。開閉機構14不限於兩個 ，設置兩個以上也可以。 在第一、第二蓋子構件12A' 12B的內面的外周端部 ，是涵蓋整個外周形成有細溝槽（沒有圖示），如第1圖（b) 所示，在該溝槽內是安裝著以〇型環所構成的作爲密封 構件的第二密封構件16。該密封構件16，與第一密封構 件13同樣地，會與後述的密封輔助構件一起作用，來將 殼體1 1內保持爲預.定的真空度。 -10- 1374473 如第1圖（b)及第2圖、第3圖（a)、（b)所示，在殼體 11的開口部，是可自由裝卸地架設著：用來支承第—、 第二蓋子構件12A、12B的支承構件17。在支承構件17 的長軸方向的兩端’如第2圖、第3圖（c)所示，形成有 段部17A，在殼體11的開口端面ha，是形成有：與支 承構件17的段部17A卡合的缺口部11B(參照第3圖（c)) 。該支承構件17’在被架設於殼體n的狀態，是與支承 構件17的上面部與殼體11的上端面11A成爲同一面。 密封輔助構件18’是藉由鋁或不鏽鋼、或有剛性且 透明或不透明的合成樹脂（例如丙烯酸樹脂或聚碳酸酯樹 脂等）所形成，如第2圖、第3圖的（a)、（b)所示，是可自 由裝卸地被安裝在殼體11的上端面11A及支承構件17 的表面。也就是說，密封輔助構件18，如第2圖所示， 是具有：抵接於殻體11的上端面11A的矩形的第一抵接 部18A、以及與第一抵接部18A —體化，且橫越過殼體 11的開口部，與第一、第二蓋子構件·12Α、12B的自由端 部內面抵接的第二抵接部18Β，全體是形成爲「日」字狀 。第二抵接部18Β的寬度，是與支承構件17的寬度相同 或較窄，整個面是藉由支承構件17所支承。於是，密封 輔助構件18，當將第一、第二蓋子構件12Α、12Β關閉而 將殼體11的內部抽成真空時，如第2圖的兩點虛線所示 ，其下面部會與殼體11的上端面11Α的第一密封構件13 緊貼，並且在第2圖的兩點虛線所示的位置，其上面部分 別緊貼於第一、第二蓋子構件1 2A、1 2Β的第二密封構件 -11 - 1374473 16緊貼，從外部將殼體11的內部予以密封。 本實施例的真空容器10，是使用作爲FPD用基板的 真空預備室，如第7圖所示，是將FPD用基板的搬運機 構或FPD用基板的載置台（沒有圖示）收容於殻體11的內 部。在殼體Π的前後左右形成有FPD用基板的搬運出入 口（沒有圖示），這些搬運出入口，是經由閥門，從外部將 殼體11內阻斷而予以密封。當在殼體11內收容有搬運機 構時’是經由殼體11內的搬運機構，在載置機構與處理 室之間進行FPD用基板的交接。當在殻體n內收容有載 置台時，是經由載置機構側及處理室側的搬運機構，以真 空容器10作爲中繼點，來進行FPD用基板的交接。 接著，針對動作來加以說明，當將蓋體1 2也就是第 —、第二蓋子構件12A、12B關閉時，真空容器10其功 能是作爲FPD用基板的處理裝置的真空預備室。在殼體 11內接收了 FPD用基板之後，藉由氮氣等的惰性氣體將 殼體11內的空氣沖洗之後，使用真空泵浦等的真空裝置 將殼體11內減壓，在殻體11內在處理室形成準真空狀態 。此時’第一、第二蓋子構件12A、12B會被大氣壓力強 力地朝向殻體1 1側按壓。以該按壓力讓第一、第二密封 構件1 3、1 6壓陷於密封輔助構件1 8，藉由第一密封構件 13，將殼體11的上端面11A與密封輔助構件18之間密 封住，並且藉由第二密封構件16，將第一、第二蓋子構 件12A、UB與密封輔助構件18之間密封住，讓殼體11 內成爲真空狀態。 -12- 1374473 當殼體1丨的內部成爲真空狀態時，第一、第二蓋子 構件12A、12B會受到大氣壓力，個別的受壓面積會大略 減半’按壓力也會大致變成一半，而在殼體11的開口部 ，是藉由支承構件17來支承蓋子構件12A、12B的自由 端部，而可經由密封輔助構件18，將第一、第二蓋子構 件12A、12B與殼體1 1的上端面之間確實地密封，進而 將殼體11的內部保持爲預定的真空度，而可順暢地進行 殼體11與處理室之間的FPD用基板的交接。且可確實地 防止支承構件17朝向第一、第二蓋子構件的殼體η內部 的彎曲，可發揮良好的密封性能。 而當持續使用真空容器10時，必須因應搬運機構等 的驅動部來進行維修。而FPD用基板的處理所造成的副 生成物會粒子化’而會侵入到真空容器1〇的殼體11內， 粒子會產生堆積，而需要進行清潔。因此，在解除真空容 器10的殼體Π內部的真空狀態，例如從殼體η的左右 處，以人手將第一、第二蓋子構件12Α的自由端側抬起 至超過開閉機構1 4的死點的位置之後，當開閉機構1 4作 動時，其缸桿14Β會縮回，第一蓋子構件UA經由鉸鏈 機構1 5而迴旋’將殻體1 1的開口部打開一半（參照第4 圖）。而第二蓋子構件12Β也與第—蓋子構件12Α同樣地 開啓，而將殻體1 1的開口部完全開放。 在該狀態’密封輔助構件18及支承構件17會造成妨 礙而無法將蓋體12的內部進行維修，藉由將密封輔助構 件18及支承構件17依序卸下，將殼體11的內部全面性 -13- 1374473 地開放，則可對收容於殼體11內的搬運機構或載置台進 行維修。也可以對殻體11內部進行清潔。在完成了殼體 11內的維修及清潔之後，對第一、第二蓋子構件12A、 12B進行清潔。如果真空容器1〇是超過1500mm的大型 構造的話，例如如第4圖所示，在第二蓋子構件1 2 B關閉 的狀態上到其上部，在第二蓋子構件1 2B上，對第一蓋子 構件12A的內面及殼體11的內部進行清潔。以與第一蓋 子構件1 2 A同樣的順序來清潔第二蓋子構件〗2B。且對第 一、第二蓋子構件12A、12B的表面進行清潔。在進行該 作業的同時，對第一、第二密封構件13、1 6、開閉機構 14及鉸鏈機構15進行維修。 真空容器完成維修之後，使各零件復原之後，將 第一.、第二蓋子構件12A、12B關閉，從外部將殼體11 的內部加以密封，而可以作爲真空預備室使用。 藉由以上所說明的本實施例，將蓋體12分割成第一 、第二蓋子構件12A、12B，並且在這些蓋子構件12A' 12B與殼體11的上端面之間，設置密封輔助構件18，將 蓋體12作成分割爲二的構造的第一、第二蓋子構件12A 、1 2 B ’可將其小型化、輕量化’可減低製作成本，並且 可減低各蓋子構件12A、12B的彈起高度，並且即使將蓋 體12作成分割爲二的構造，經由密封輔助構件18可將第 一、第二蓋子構件12A、12B與殼體11的上端面11A之 間確實地密封。由於分別減低了第一、第二蓋子構件〗2 A 、1 2B的彈起高度，所以不需要特別的安全對策，可以減 -14- 1374473 低包含對真空容器1 〇進行維修的成本的總成本。 藉由本實施例，密封輔助構件18，是具有：抵接於 殼體11的上端面11Α的第一抵接部18Α、以及與第一抵 接部18Α —體化，且在殼體11的開口部與第―、第二蓋 子構件12Α ' 12Β抵接的第二抵接部18Β，所以分別涵蓋 第一' 第二蓋子構件12Α、12Β的整個外周，確實地將殼 體11的內部密封，可確實地保持殻體11內的真空度。而 藉由本實施例，對於例如一邊超過1 500mm的蓋體12的 受壓面積很大的真空容器10，可以得到很顯著的效果。 由於是將，以殼體11的開口部來支承第一、第二蓋子構 件12A、12B的支承構件17架設在殼體11的上端之間， 所以即使第一、第二蓋子構件1 2 A、1 2 B受到大氣壓力， 仍可確實防止該蓋子構件12A、12B朝向殼體1 1側的彎 曲’能將第一、第二密封構件1 3、1 6及密封輔助構件18 的機能活用到最大限度。由於在真空容器10的殼體11內 設置FPD用基板的搬運裝置或載置台，所以真空容器1〇 能夠具有作爲密封機構及維修性優異的處理裝置的真空預 備室的機能。 雖然沒有圖示，而也可以製作成將支承構件17與密 封輔助構件1 8 —體化。在這種情況，可以將支承構件1 7 及密封輔助構件18同時安裝在殼體11的上端面11A,並 且具有與上述實施例同樣的作用效果。 【實施例2】 -15- 1374473 本實施例的真空容器20，如第5圖所示，其分割爲 二的構造的蓋體22也就是第一、第二的蓋子構件22A、 22B及密封輔助構件28的方式，與上述實施例不同，並 且在省略支承構件的要點與上述實施例不同。在該要點以 外是以上述實施方式爲主所構成。因此，以本實施例的特 徵爲中心來說明。 本實施方式所使用的第一、第二蓋子構件22 A、22 B ，如第5圖（a)所示，個別的厚度是從基端部朝向自由端 部逐漸增加。其理由後面會敘述。在由於這樣而讓蓋子構 件22A、22B的重量增大的情況，藉由將各蓋子構件22A 、22B形成爲中空狀則可以將其輕量化。 另一方面，密封輔助構件28，如第5圖（b)所示，具 有：第一抵接部28A及第二抵接部28B。第二抵接部28B ，是由：從第一抵接部28 A的中間部（相當於第一、第二 蓋子構件22 A、22 B的自由端部的部分）朝垂直上方延伸 設置的左右的垂直部28C、以及連結這些垂直部28C的水 平部28D所形成。在第二抵接部28B的兩側，是分別安 裝著第二密封構件26。該密封構件26是形成爲環狀，且 是沿著：第一抵接部28A的上面部、垂直部28C及水平 部2 8D的單面來配置。於是，當將第一、第二蓋子構件 22A、22B關閉時，這些蓋子構件22A、22B的厚度較厚 的自由端面會與第二抵接部28B的第二密封構件26緊貼 ，並且這些蓋子構件22A、22B的自由端部以外的內面外 周緣部會與第二抵接部2 8B的第二密封構件26緊貼。 -16- 1374473 在殼體21的上端面21A，是與上述實施例同樣地安 裝著第一密封構件（沒有圖示），該第一密封構件，是與密 封輔助構件28的下面部，也就是與第一抵接部28A的下 面部接觸。 第一、第二蓋子構件22 A、22B，個別的厚度較厚的 自由端面，會抵接於密封輔助構件28的第二抵接部28B 的兩側面，殼體21內會成爲真空狀態，即使有很強的按 壓力作用於第一、第二蓋子構件22A、22B，這些蓋子構 件22A、22B個別的自由端面會接觸於密封輔助構件28 的第二抵接部28B，按壓力會從個別的自由端面作用於第 二抵接部28B而互相抵消，而不會使蓋子構件22A、22B 朝向殻體21內彎曲。 藉由將第一、第二蓋子構件22A、22B的自由端部作 成較其他部分的厚度更厚，則對於大氣壓力所造成的按壓 力，能確保有充分的機械強度。從這個觀點來看，第一、 第二蓋子構件22A、22B，即使不是作成使個別的厚度朝 向自由端面逐漸增加的型式也可以。主要是，讓自由端面 的厚度是具有能承受大氣壓力的按壓力的厚度即可，如果 可讓重量較重的話，將蓋子構件全體作成均勻的厚度也可 以，而如果強度上許可的話，也可將自由端面附近加厚， 將其他部分作得更薄且作成均勻的厚度。 藉由如以上所說明的本實施例，第一、第二蓋子構件 22A、22B，其個別的自由端面，會接觸於從密封輔助構 件28的第一抵接部28A所抬起形成的第二抵接部28B的 -17- 1374473 左右兩面，即使在沒有設置用來支承第一、第二蓋子構件 22A、22B的支承構件的情況，在經由第二抵接部28B而 互相接觸的各蓋子構件22A、22B的各自的自由端面，會 將在第一、第二蓋子構件22A、22B大氣壓力所造成的按 壓力予以抵消，而可防止各自的彎曲情形，與上述實施例 同樣地可以發揮穩定的密封性能。 在本實施例，雖然是將第二密封構件26安裝在密封 輔助構件28，而也可以與實施例1、2同樣地，將該密封 構件26安裝在第一、第二蓋子構件22A、22B的對應位 置。而在本實施例中，雖然是將第一密封構件安裝在殻體 21，而也可以將該密封構件安裝在密封輔助構件28的第 一抵接部28A的下面部。 【實施例3】 本實施例的真空容器30，如第6圖的（a)〜（d)所示， 是具備有：將蓋體22分割爲四份的第一、第二、第三' 第四蓋子構件32A、32B、32C、32D、用來支承在蓋子構 件32A、32B、32C、32D的內面的外周緣部中位於殻體 31的開口部的部分的十字狀的支持構件37、以及用來覆 蓋該支承構件37的表面及殼體31的上端面31A的形成 爲「田」字型的密封輔助構件3 8，其他則以實施例丨爲 主所構成。 在本實施方式所使用的第一、第二、第三、第四蓋子 構件32A、32B、32C、3 2D，如第6圖（a)所示，是附帶有 -18- 1374473 —個開閉機構3 4。例如附帶於第一蓋子構件3 2 A的 機構34’是沿著第一蓋子構件32A的側面配置在殻 的上端面31A上。該開閉機構34的缸體34A,是經 結構件（沒有圖不）而連結在第一蓋子構件32A的側面 由端部附近。而開閉機構34的缸桿34B的前端，是 第一蓋子構件3 2A的基端部，經由配置在殼體31的 面的鉸鏈機構35，而被連結在第一蓋子構件32A。 支承構件37，如上述是形成爲十字狀，如第6 所示，是在十字狀的各端面形成有段部37A。支承 37的各段部37A，會與形成在殻體31的上端面31A 位置的缺口部31B卡合。密封輔助構件38,是具有 殼體31的上端面31A抵接的第一抵接部38A、以及 承構件3 7抵接的十字狀的第二抵接部3 8 B。其他貝IJ 施例1爲主來構成。 藉由以上所說明的本實施例，可以將蓋體3 2及 機構3 4較上述各實施例更小型化、輕量化。 在上述實施例雖然是以將蓋體進行分割爲二或分 四的構造來加以說明’可是因應需要也可作更進一步 割。支承構件及密封輔助構件的型態也要因應蓋體的 數量改變。第一密封構件，只要是中介在密封輔助構 殻體之間即可，密封輔助構件，安裝在任一個殼體都 ，安裝在蓋體、密封輔助構件的其中一個也可以。殼 蓋體、及密封輔助構件的材料，並不限於上述各實施 可因應目的使用各種材料。在上述各實施例中，雖然 I開閉 體31 丨由連 ί的自 :沿著 上端 圖（b) 構件 的該 :與 與支 以實 開閉 割爲 的分 分割 件與 可以 體、 例， 是針 -19- 1374473 對適用於構成fpd用基板的處理裝置的真空預備室的真 空容器來說明，而也可廣泛地適用於適合本發明的目的的 其他各種真空容器。 【產業上的可利用性】 本發明的真空容器，是適用於構成FPD用基板的處 理裝置的真空預備室的大型的真空容器。 【圖式簡單說明】 第1圖是本發明的真空容器的一實施方式的上部的顯 示圖，（a)是顯示真空容器的蓋體關閉的狀態的立體圖， (b)是顯示蓋體開啓的狀態的立體圖。 第2圖是顯示從殻體卸下第1圖的支承構件及密封輔 助構件的狀態的立體圖。 第3圖是第1圖的真空容器的顯示圖，（a)是將蓋體 的一部分剖視的俯視圖，（b)是顯示（a)的蓋體開啓的狀態 的與支承構件垂直相交的方向的剖面圖，（Ο是沿著（a)的 支承構件的長軸方向的剖面圖。 第4圖是顯示第1圖的真空容器的第一蓋子構件開啓 的狀態的立體圖。 第5圖是本發明的其他實施方式的主要部分的顯示圖 ，（a)是其立體圖，（b)是顯示密封輔助構件的立體圖。 第6圖是本發明的其他實施方式的顯示圖，（a)是其 俯視圖，（b)是顯示關閉蓋體的狀態的沿著鉸鏈機構的剖 • 20- 1374473 面顯示開啓蓋體 要關閉蓋體的狀 !真空預備室所顯 圖，（a)是顯示關 啓蓋體的狀態的 面圖，（C)是從與（b)的側面垂直相交的側 的狀態的剖面圖，（d)是從（C)的狀態顯示 態的剖面圖。 第7圖是透視構成以往的處理裝置的 示的立體圖。 第8圖是以往的大型預備室的顯示 閉該蓋體的狀態的立體圖，（b)是顯示開 立體圖。 【主要元件符號說明】 10、20、30:真空容器 1 1、21、31 :殼體 11A、21A、31A :殻體的上端面 12、 22、32 :蓋體 12A、22A、32A:第一蓋子構件 12B、22B、32B :第二蓋子構件 13、 23 :第一密封構件 1 6 :第二密封構件 17、27、37 :支承構件 1 8、2 8、3 8 :密封輔助構件 18A、28A、38A:第一抵接部 1 8B、28B、38B :第二抵接部 32C :第三蓋子構件 32D :第四蓋子構件 -21 -[Technical Field] The present invention relates to a vacuum container, and more particularly to a vacuum container which is suitable for use in a vacuum preparation chamber or the like which constitutes a processing apparatus for processing a substrate such as an FPD substrate. [Prior Art] Vacuum containers have been widely used in various fields in the past. For example, in a semiconductor process, a vacuum vessel is widely used in an etching treatment apparatus or a deposition processing apparatus. In such a processing apparatus, for example, a mounting mechanism of a substrate to be processed such as a wafer or an FPD substrate, a vacuum preparation chamber, a transfer chamber, and a processing chamber are provided. The vacuum preparation chamber, the transfer chamber, and the processing chamber are each formed into a vacuum container. For example, Fig. 7 is a processing apparatus for constituting a substrate for FPD proposed by the applicant. In the vacuum preparation chamber 1, 'the multi-joint type transport mechanism 2 is provided, and the transport mechanism 2 transfers the FPD substrate S between the mounting mechanism (not shown) and the processing chamber (not shown). . The vacuum preparation chamber 1' is provided with a moving mechanism (not shown) to reciprocate between the mounting mechanism and the processing chamber. When the FPD substrate S is transferred between the processing chamber and the processing chamber, the front opening portion is Abutting on the side of the valve side of the processing chamber, vacuum suction is performed. A valve 3 is provided behind the vacuum preparation chamber 1, and the transfer of the FPD substrate s is performed between the vacuum preparation chamber 1 and the mounting mechanism. In addition, in FIG. 7, although not shown, the vacuum preparation chamber 1' is provided with a casing, an openable lid body, 1374473, and a sealing member interposed between the lid body and the casing, and the conveying mechanism 2 is carried out. The cover can be opened during assembly or repair. 1 a is the conveyance port of the substrate S for FPD. In recent years, with the increase in size of the substrate S for FPD, the vacuum preparation chamber 1 has also been enlarged. Further, the vacuum preparation chamber 1 is formed of, for example, metal such as aluminum or stainless steel, so that the cover itself needs to have a rigidity that can withstand a vacuum state, and if the weight of the cover itself is increased, it is difficult to manually carry out the cover body. Opening and closing. Therefore, as shown in Fig. 8(a), the vacuum preparation chamber 1 is provided with an opening and closing mechanism 6 constituted by a cylinder mechanism or the like, and as shown in Fig. (b), with the assistance of the opening and closing mechanism 6, it is possible to [Patent Document 1] Japanese Unexamined Patent Application Publication No. JP-A No. Hei No. 1 - 3 4 5 8 5 9 [Explanation] The problem of the invention is to increase the size of the substrate for FPD. In the case where the lid body 1B of the vacuum preparation chamber 1 is larger than 1 500 mm, the pressure receiving area of the lid body 1B becomes large, and the lid body 1 B must be made thick. The special specifications, in order to withstand the vacuum in the housing 1 'the manufacturing cost will also become very high, and the height (bounce height) when the cover 1B is opened will become high, and must be fully repaired. The safety measures for opening and closing are 'the total cost will become very high. However, due to the increase in size of the cover body -6- 1374473 1B, it is difficult to open and close the cover. In order to perform the removal operation of the mechanism or the FPD substrate or the like existing in the vacuum preparation chamber, it is necessary to easily open the upper surface of the casing. In order to solve the above problems, an object of the present invention is to provide a vacuum container which can reduce the size and weight of the cover body, reduce the height of the cover, reduce the height of the pop-up, and form a part or a whole portion of the upper surface of the casing. The opening, in turn, reduces the total cost of maintenance and the like. [Means for Solving the Problem] The vacuum container according to the first aspect of the invention includes a casing and a vacuum container that can open and close the lid from the upper end opening of the casing, and is characterized in that: The cover body is divided into a plurality of cover members, and a seal assisting member is interposed between the cover members and the upper end portion of the casing, between the first abutment portion of the casing and the seal assisting member, and A sealing member is interposed between each of the cover members and the seal assisting member. According to a second aspect of the invention, in the first aspect of the invention, the sealing auxiliary member includes: a first abutting portion that abuts against an upper end surface of the casing; and the first abutting portion is integrated with the An upper end opening of the casing and a second abutting portion that abuts against each of the cover members. In the vacuum container according to the third aspect of the invention, in the first or second aspect of the invention, the support member for supporting the respective cover members at the upper end opening of the casing is bridged between the upper ends of the casing. According to a fourth aspect of the invention, in the vacuum container of the first aspect of the invention, the sealing member is integrated with the support member. According to a fifth aspect of the invention, in the vacuum container according to the second aspect of the invention, the sealing auxiliary member and/or the lid body are formed of a transparent material. The vacuum container according to the sixth aspect of the invention is directed to the first invention, wherein the transparent material is made of an acrylic resin or a polycarbonate resin. According to a seventh aspect of the invention, in a vacuum container according to the first aspect of the invention, a mechanism for holding a substrate is provided in the casing. The vacuum container according to the eighth aspect of the invention is directed to the first aspect of the invention, wherein the housing is provided with a mechanism for transporting the substrate. According to a ninth aspect of the invention, in the vacuum container according to the first aspect of the invention, the casing is formed in a rectangular structure in which at least one side is 1500 mm or more. According to the first invention to the seventh aspect of the invention, it is possible to provide a vacuum container which can reduce the size of the cover body and reduce the cost, thereby reducing the height of the pop-up and further reducing the total cost of maintenance. [Embodiment] Hereinafter, the present invention will be described based on the embodiments shown in Figs. 1 to 7 . In the present embodiment, the required vacuum container can be obtained by dividing the lid into a plurality of portions. In the present embodiment, the vacuum preparation chamber which is applied to the processing apparatus constituting the FPD substrate will be described. However, the present invention is also applicable to a large-sized vacuum container. 1374473 [Example 1] The vacuum container 1 of the present embodiment, for example, as shown in Fig. 1(a), includes a casing 11 having an opening at the upper end, and an opening portion from the casing Π The openable and closable lid body 1 2 is closed inside, for example, as a vacuum preparation chamber as a processing device constituting the substrate for FPD. The casing n is formed, for example, of a metal such as aluminum or stainless steel. In the present embodiment, the cover 12 is the main feature. That is, the lid body 12 used in the present embodiment is formed into a structure divided into two by the first and second lid members 12A and 12B as shown in Figs. 1(a) and 1(b). The respective cover members 1 2A and 1 2B can be individually opened and closed. Since the cover members 12A and 12B have a smaller pressure-receiving area than the integrally formed member, they do not require a special pressure-resistant specification and can be made lighter. These cover members 12A, 12B can be formed of the same material as the casing 11. Further, these cover members 12A and 12B can be formed by a transparent and mechanically strong synthetic resin such as an acrylic resin or a polycarbonate resin, and the internal condition can be confirmed. These cover members 1 2A and 1 2B may be formed in a hollow shape as long as mechanical strength can be secured. The upper end surface 11A surrounding the opening portion of the casing 11 is formed with a fine groove (not shown) covering the entire outer circumference, as shown by the dotted line of the raindrops in FIGS. 1(b) and 2, in the groove The inside is a first sealing member 1 3 as a sealing member formed of a 〇-shaped ring. The sealing member 13 acts together with a sealing auxiliary member to be described later to maintain the inside of the casing 11 at a predetermined degree of vacuum. . The upper end surface 11A of the casing 11 is provided with four opening and closing mechanisms 14 for opening and closing the -9- 1374473-, second cover members 12A and 12B. These opening and closing mechanisms 14 are constituted by, for example, a cylinder mechanism such as a spring cylinder, and are provided with two on each of the first and second cover members 12A and 12B. The two opening and closing mechanisms 14 belonging to the first cover member 1 2 A have their respective base ends of the cylinder block 14A installed at the left and right ends of the upper end of the casing 11 via the hinge mechanism 15, and the front ends of the respective cylinder rods 14B are The connection member 14C is connected to the free end of the cover member 12A, and each of the opening and closing mechanisms 14 is disposed in parallel with each other. The other two opening and closing mechanisms 14 are respectively associated with the second cover member 12B, and are disposed to be joined toward the opening and closing mechanism 14 belonging to the first cover member 12A. For example, when the first cover member 12A is opened by a human hand, after the free end of the first cover member 12A is lifted from the left and right to a position beyond the dead point of the opening and closing mechanism 14 , the opening and closing mechanism 14 is actuated via the hinge mechanism 15 . The first forceps member 12A is rotated to open. The second cover member 12B can also be opened equally. Further, the hinge mechanism 15 is provided with a rotation driving mechanism for opening and closing the first and second cover members 12A and 12B. The opening and closing operation of the cover members UA and 12B can be automated or assisted by the rotation driving mechanism. The opening and closing mechanism 14 is not limited to two, and two or more may be provided. At the outer peripheral end portion of the inner surface of the first and second cover members 12A' to 12B, a thin groove (not shown) is formed over the entire outer circumference, as shown in Fig. 1(b), in the groove A second sealing member 16 as a sealing member constituted by a 〇-shaped ring is attached. Similarly to the first sealing member 13, the sealing member 16 acts together with a sealing auxiliary member to be described later to maintain the inside of the casing 1 1 at a predetermined degree of vacuum. -10- 1374473 As shown in Fig. 1 (b) and Fig. 2 and Fig. 3 (a) and (b), the opening of the casing 11 is detachably mounted: for supporting the first The support member 17 of the second cover members 12A, 12B. As shown in FIG. 2 and FIG. 3( c ), both ends of the support member 17 in the longitudinal direction are formed with a segment portion 17A, and the opening end surface ha of the casing 11 is formed with the support member 17 The notch portion 11B that the segment portion 17A is engaged with (see FIG. 3(c)). The support member 17' is placed on the casing n so that the upper surface of the support member 17 and the upper end surface 11A of the casing 11 are flush with each other. The seal assisting member 18' is formed of aluminum or stainless steel, or a synthetic resin (such as an acrylic resin or a polycarbonate resin) which is rigid and transparent or opaque, as shown in Fig. 2 and Fig. 3(a), ( b) is detachably attached to the upper end surface 11A of the casing 11 and the surface of the support member 17. In other words, as shown in Fig. 2, the seal assisting member 18 has a rectangular first abutting portion 18A that abuts against the upper end surface 11A of the casing 11, and is integrated with the first abutting portion 18A. The second abutting portion 18A that abuts against the opening of the casing 11 and abuts against the inner surfaces of the free end portions of the first and second cover members 1212 and 12B is formed in a "day" shape. The width of the second abutting portion 18 is the same as or narrower than the width of the support member 17, and the entire surface is supported by the support member 17. Then, when the first and second cover members 12A, 12A are closed and the inside of the casing 11 is evacuated, as shown by the two-dotted line in Fig. 2, the lower portion thereof and the casing are sealed. The first sealing member 13 of the upper end surface 11 of the 11 is in close contact with each other, and the upper surface portion is in close contact with the second and second cover members 1 2A, 1 2 Β at the positions indicated by the two dotted lines in Fig. 2, respectively. The sealing member -11 - 1374473 16 is in close contact with the inside of the casing 11 from the outside. In the vacuum container 10 of the present embodiment, a vacuum preparation chamber as a substrate for FPD is used. As shown in FIG. 7, the substrate for transporting the substrate for FPD or the mounting table for the FPD substrate (not shown) is housed in the housing. The interior of 11. A conveyance port (not shown) for the FPD substrate is formed on the front, rear, left and right sides of the casing, and these conveyance ports are sealed from the outside by the valve and sealed by the inside of the casing. When the transport mechanism is housed in the casing 11, the transfer of the FPD substrate is performed between the mounting mechanism and the processing chamber via the transport mechanism in the casing 11. When the mounting table is housed in the casing n, the FPD substrate is transferred by the vacuum container 10 as a relay point via the transport mechanism on the mounting mechanism side and the processing chamber side. Next, with respect to the operation, when the lid body 1 2, that is, the first and second lid members 12A, 12B are closed, the vacuum container 10 functions as a vacuum preparation chamber as a processing means for the FPD substrate. After receiving the FPD substrate in the casing 11, the air in the casing 11 is flushed by an inert gas such as nitrogen gas, and then the inside of the casing 11 is decompressed by a vacuum device such as a vacuum pump, and is processed in the casing 11. The chamber forms a quasi-vacuum state. At this time, the first and second cover members 12A and 12B are strongly pressed toward the casing 1 1 by the atmospheric pressure. The first and second sealing members 13 and 16 are pressed against the sealing auxiliary member 18 by the pressing force, and the upper end surface 11A of the casing 11 and the sealing auxiliary member 18 are sealed by the first sealing member 13. And the first sealing member 16 seals between the first and second cover members 12A, UB and the seal assisting member 18, and the inside of the casing 11 is brought into a vacuum state. -12- 1374473 When the inside of the casing 1 is in a vacuum state, the first and second cover members 12A, 12B are subjected to atmospheric pressure, and the individual pressure receiving areas are roughly halved, and the pressing force is also roughly half. In the opening portion of the casing 11, the free ends of the cover members 12A, 12B are supported by the support members 17, and the first and second cover members 12A, 12B and the casing 1 can be attached via the seal assisting members 18. The upper end faces are surely sealed, and the inside of the casing 11 is maintained at a predetermined degree of vacuum, and the transfer of the FPD substrates between the casing 11 and the processing chamber can be smoothly performed. Further, it is possible to surely prevent the support member 17 from being bent toward the inside of the casing n of the first and second cover members, and it is possible to exhibit good sealing performance. When the vacuum container 10 is continuously used, it is necessary to perform maintenance in accordance with the driving unit of the transport mechanism or the like. On the other hand, the by-products caused by the treatment of the substrate for FPD are particle-formed and intruded into the casing 11 of the vacuum vessel 1 , and the particles are deposited and cleaned. Therefore, in the vacuum state in which the inside of the casing 真空 of the vacuum vessel 10 is released, for example, from the left and right of the casing n, the free end sides of the first and second cover members 12 are lifted by human hands until the death of the opening and closing mechanism 14 is exceeded. After the position of the point, when the opening and closing mechanism 14 is actuated, the cylinder rod 14 is retracted, and the first cover member UA is rotated by the hinge mechanism 15 to open the opening of the housing 1 1 (see FIG. 4). . On the other hand, the second cover member 12A is also opened in the same manner as the first cover member 12A, and the opening of the casing 11 is completely opened. In this state, the seal assisting member 18 and the support member 17 are hindered, and the inside of the lid body 12 cannot be repaired. The seal assisting member 18 and the support member 17 are sequentially removed, and the internal integrity of the casing 11 is improved. -13- 1374473 When the floor is opened, the transport mechanism or the mounting table housed in the casing 11 can be repaired. It is also possible to clean the inside of the casing 11. After the maintenance and cleaning in the casing 11 is completed, the first and second cover members 12A, 12B are cleaned. If the vacuum container 1 is a large structure exceeding 1500 mm, for example, as shown in Fig. 4, in the state where the second cover member 1 2 B is closed to the upper portion thereof, on the second cover member 1 2B, the first cover The inner surface of the member 12A and the inside of the casing 11 are cleaned. The second cover member 〖2B is cleaned in the same order as the first cover member 1 2 A. And the surfaces of the first and second cover members 12A, 12B are cleaned. While the work is being performed, the first and second sealing members 13, 16 and the opening and closing mechanism 14 and the hinge mechanism 15 are repaired. After the vacuum container is repaired, after the parts are restored, the first and second cover members 12A and 12B are closed, and the inside of the casing 11 is sealed from the outside, and can be used as a vacuum preparation chamber. With the present embodiment described above, the cover body 12 is divided into the first and second cover members 12A, 12B, and between the cover members 12A' 12B and the upper end surface of the casing 11, a seal assisting member 18 is provided. The first and second cover members 12A and 1 2 B' having the structure in which the lid body 12 is divided into two can be reduced in size and weight, which can reduce the manufacturing cost, and can reduce the bombs of the respective cover members 12A and 12B. The height is increased, and even if the lid body 12 is divided into two, the first and second lid members 12A and 12B and the upper end surface 11A of the casing 11 can be reliably sealed via the seal assisting member 18. Since the bounce heights of the first and second cover members 〖2 A and 1 2B are respectively reduced, no special safety measures are required, and the total cost of repairing the vacuum container 1 包含 can be reduced by the lower limit of -14,374,473. . According to the present embodiment, the seal assisting member 18 has a first abutting portion 18A that abuts against the upper end surface 11 of the casing 11, and a first abutting portion 18, and is open at the opening of the casing 11. The second abutting portion 18A abutting the first and second cover members 12 Α ' 12 Β, so as to cover the entire outer circumference of the first 'second cover members 12 Α and 12 分别 respectively, and surely seal the inside of the casing 11 The degree of vacuum inside the casing 11 is surely maintained. On the other hand, with the present embodiment, it is possible to obtain a remarkable effect on the vacuum vessel 10 having a large pressure receiving area of the lid body 12 of, for example, more than 1 500 mm. Since the support member 17 that supports the first and second cover members 12A, 12B with the opening of the casing 11 is spanned between the upper ends of the casing 11, even the first and second cover members 1 2 A, When 1 2 B is subjected to atmospheric pressure, the bending of the cover members 12A, 12B toward the side of the casing 1 can be surely prevented. The functions of the first and second sealing members 13 and 16 and the sealing auxiliary member 18 can be utilized to the maximum. limit. Since the transfer device or the mounting table of the FPD substrate is provided in the casing 11 of the vacuum container 10, the vacuum container 1 can have a function as a vacuum preparation chamber of a sealing mechanism and a processing device excellent in maintainability. Although not shown, it is also possible to manufacture the support member 17 and the sealing auxiliary member 18. In this case, the support member 17 and the seal assisting member 18 can be simultaneously attached to the upper end surface 11A of the casing 11, and have the same operational effects as those of the above embodiment. [Embodiment 2] -15 - 1374473 The vacuum container 20 of the present embodiment, as shown in Fig. 5, the cover body 22 of the structure divided into two, that is, the first and second cover members 22A, 22B and the seal assisting The manner of the member 28 is different from that of the above embodiment, and the point of omitting the support member is different from the above embodiment. In addition to this point, the above embodiment is mainly composed. Therefore, the features of the present embodiment will be mainly described. As shown in Fig. 5(a), the first and second cover members 22A and 22B used in the present embodiment have an individual thickness which gradually increases from the base end portion toward the free end portion. The reason will be described later. In the case where the weights of the lid members 22A and 22B are increased as described above, the lid members 22A and 22B can be made lighter by being formed into a hollow shape. On the other hand, the seal assisting member 28 has a first abutting portion 28A and a second abutting portion 28B as shown in Fig. 5(b). The second abutting portion 28B is formed by extending from the intermediate portion of the first abutting portion 28 A (the portion corresponding to the free end portions of the first and second cover members 22 A and 22 B) vertically upward. The vertical portion 28C and the horizontal portion 28D that connects the vertical portions 28C are formed. On both sides of the second abutting portion 28B, second sealing members 26 are attached, respectively. The sealing member 26 is formed in a ring shape and is disposed along one surface of the upper surface portion of the first abutting portion 28A, the vertical portion 28C, and the horizontal portion 28D. Thus, when the first and second cover members 22A, 22B are closed, the thicker free end faces of the cover members 22A, 22B will be in close contact with the second sealing member 26 of the second abutment portion 28B, and these covers The outer peripheral edge portions of the inner faces other than the free ends of the members 22A and 22B are in close contact with the second seal members 26 of the second abutting portions 28B. -16- 1374473 A first sealing member (not shown) is attached to the upper end surface 21A of the casing 21 in the same manner as in the above embodiment, and the first sealing member is a lower portion of the sealing auxiliary member 28, that is, It is in contact with the lower surface of the first abutting portion 28A. The first and second cover members 22A, 22B, the individual thick end faces having a relatively thick thickness, abut against both side faces of the second abutting portion 28B of the seal assisting member 28, and the inside of the casing 21 becomes a vacuum state even if There is a strong pressing force acting on the first and second cover members 22A, 22B, and the individual free end faces of the cover members 22A, 22B will contact the second abutment portion 28B of the seal assisting member 28, and the pressing force will be from the individual The free end faces act against the second abutting portions 28B to cancel each other without bending the cover members 22A, 22B toward the inside of the casing 21. By making the free end portions of the first and second cover members 22A, 22B thicker than the other portions, it is possible to ensure sufficient mechanical strength against the pressing force caused by the atmospheric pressure. From this point of view, the first and second cover members 22A, 22B may be formed in a pattern in which the individual thickness is gradually increased toward the free end surface. Mainly, the thickness of the free end face is a thickness having a pressing force capable of withstanding atmospheric pressure. If the weight can be made heavier, the cover member can be made uniform in thickness, and if the strength is acceptable, Thicken the vicinity of the free end face, make the other parts thinner and make a uniform thickness. With the present embodiment as described above, the first and second cover members 22A, 22B, the individual free end faces thereof, come into contact with the second formed by lifting from the first abutting portion 28A of the seal assisting member 28. The left and right sides of the -17-1374473 of the abutting portion 28B, even in the case where the supporting members for supporting the first and second cover members 22A, 22B are not provided, the cover members that are in contact with each other via the second abutting portion 28B The respective free end faces of 22A, 22B cancel the pressing force caused by the atmospheric pressure of the first and second cover members 22A, 22B, and can prevent the respective bending situations, and can be stabilized as in the above embodiment. Sealing performance. In the present embodiment, the second sealing member 26 is attached to the sealing auxiliary member 28, and the sealing member 26 may be attached to the first and second cover members 22A and 22B in the same manner as in the first and second embodiments. Corresponding location. In the present embodiment, the first sealing member is attached to the casing 21, and the sealing member may be attached to the lower surface of the first abutting portion 28A of the sealing auxiliary member 28. [Embodiment 3] As shown in (a) to (d) of Fig. 6, the vacuum container 30 of the present embodiment includes first, second, and third portions that divide the lid body 22 into four portions. The fourth cover member 32A, 32B, 32C, 32D, a cross-shaped support member 37 for supporting a portion of the outer peripheral edge portion of the inner surface of the cover members 32A, 32B, 32C, 32D located at the opening of the casing 31, The sealing auxiliary member 3, which is formed to cover the surface of the support member 37 and the upper end surface 31A of the casing 31, is formed in a "field" shape, and is mainly constituted by an embodiment. The first, second, third, and fourth cover members 32A, 32B, 32C, and 32D used in the present embodiment are attached to the -18-1374473 as shown in Fig. 6(a). 3 4. For example, the mechanism 34' attached to the first cover member 3 2 A is disposed on the upper end surface 31A of the case along the side surface of the first cover member 32A. The cylinder 34A of the opening and closing mechanism 34 is coupled to the side surface of the first cover member 32A from the vicinity of the end portion via a structural member (not shown). The front end of the cylinder rod 34B of the opening and closing mechanism 34 is a base end portion of the first cover member 32A, and is coupled to the first cover member 32A via a hinge mechanism 35 disposed on the surface of the casing 31. The support member 37 is formed in a cross shape as described above, and as shown in Fig. 6, a segment portion 37A is formed on each end surface of the cross shape. Each of the segments 37A of the support 37 is engaged with a notch portion 31B formed at the upper end surface 31A of the casing 31. The seal assisting member 38 is a first abutting portion 38A having an upper end surface 31A of the casing 31 abutting, and a cross-shaped second abutting portion 3 8 B abutting on the receiving member 37. Other shell IJ examples 1 are mainly composed. According to the present embodiment described above, the lid member 3 2 and the mechanism 34 can be made smaller and lighter than the above-described respective embodiments. In the above embodiment, the description is made by dividing the cover into two or four. However, it may be further cut if necessary. The type of support member and seal auxiliary member also changes depending on the number of covers. The first sealing member may be interposed between the sealing auxiliary housings, and the sealing auxiliary member may be attached to either of the housings and may be attached to one of the lid body and the sealing auxiliary member. The material of the shell cover and the seal assisting member is not limited to the above-described respective embodiments, and various materials can be used depending on the purpose. In the above embodiments, the opening and closing body 31 of the first opening and closing body 31 is connected to the member of the upper end of the drawing (b): -19- 1374473 A vacuum container suitable for a vacuum preparation chamber constituting a processing apparatus for a substrate for fpd is described, and can be widely applied to various other vacuum containers suitable for the purpose of the present invention. [Industrial Applicability] The vacuum container of the present invention is a large-sized vacuum container which is applied to a vacuum preparation chamber constituting a processing apparatus for a substrate for FPD. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing an upper portion of an embodiment of a vacuum container according to the present invention, wherein (a) is a perspective view showing a state in which a lid of a vacuum container is closed, and (b) is a view showing a state in which the lid is opened. A perspective view of the state. Fig. 2 is a perspective view showing a state in which the support member and the seal auxiliary member of Fig. 1 are removed from the casing. Fig. 3 is a view showing a vacuum container of Fig. 1, (a) is a plan view showing a part of the lid body, and (b) is a direction perpendicularly intersecting the supporting member in a state in which the lid body of (a) is opened. Fig. 4 is a perspective view showing a state in which the first cover member of the vacuum container of Fig. 1 is opened. Fig. 5 is a perspective view showing a state in which the first cover member of the vacuum container of Fig. 1 is opened. (a) is a perspective view showing a sealing auxiliary member, and Fig. 6 is a perspective view showing another embodiment of the present invention, and (a) is a plan view thereof. (b) is a cross-sectional view along the hinge mechanism showing the state of closing the cover body. 20- 1374473 The surface of the cover is opened to close the cover body! The vacuum preparation room is displayed, and (a) is the display closure cover. (C) is a cross-sectional view showing a state perpendicular to the side intersecting the side surface of (b), and (d) is a cross-sectional view showing a state from (C). Fig. 7 is a perspective view showing a state A perspective view of the processing device. Figure 8 is a conventional large preparatory room. A perspective view showing a state in which the cover is closed, and (b) is a perspective view showing the opening. [Description of main components] 10, 20, 30: vacuum containers 1 1, 21, 31: housings 11A, 21A, 31A: housing Upper end faces 12, 22, 32: cover bodies 12A, 22A, 32A: first cover members 12B, 22B, 32B: second cover members 13, 23: first sealing member 16: second sealing members 17, 27, 37 : support member 18, 28, 38: seal auxiliary member 18A, 28A, 38A: first abutment portion 18B, 28B, 38B: second abutment portion 32C: third cover member 32D: fourth cover member -twenty one -