CN1825535A - Vacuum processor - Google Patents
Vacuum processor Download PDFInfo
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- CN1825535A CN1825535A CNA2006100010418A CN200610001041A CN1825535A CN 1825535 A CN1825535 A CN 1825535A CN A2006100010418 A CNA2006100010418 A CN A2006100010418A CN 200610001041 A CN200610001041 A CN 200610001041A CN 1825535 A CN1825535 A CN 1825535A
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- 238000012545 processing Methods 0.000 claims abstract description 19
- 238000009489 vacuum treatment Methods 0.000 claims description 99
- 238000009434 installation Methods 0.000 claims description 74
- 239000000758 substrate Substances 0.000 claims description 40
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- 239000000203 mixture Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 4
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 9
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 6
- 238000000926 separation method Methods 0.000 description 6
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to a vacuum processing device, used to etch or plate on the base plate, as the glass of liquid crystal display screen (LCD), etc, wherein the invention comprises upper and lower covers which are connected to form one vacuum processing space; one couple of lower horizontal moving units mounted at both sides of lower cover; one couple of upper horizontal moving units rotationally connected to the upper cover on their own lower moving elements, to horizontally separate the upper cover from the lower cover; the lifting unit is mounted on the lower horizontal moving unit, while it can separate the upper cover from lower cover or connect the upper and lower covers via lifting or decreasing the upper horizontal moving unit.
Description
Background of invention
1. technical field
The present invention relates to a kind of vacuum treatment installation, relate in particular to the vacuum treatment installation that is used on substrate, carrying out etch processes or spraying plating processing, for example be used for the on glass of LCDs (LCD) panel, on the semiconductor wafer, or the like.
2. correlation technique
Described vacuum treatment installation is a kind of by use physics or chemical reaction under vacuum state, and for example plasma reaction etc. is carried out the device that etch processes or spraying plating are handled on substrate, for example is used for the on glass of liquid crystal display panel, on the semiconductor wafer.
Described vacuum treatment installation comprises a vacuum chamber, is used for carrying out etch processes or spraying plating and handles on substrate; With a transfer chamber, be used for substrate is transferred to vacuum chamber and substrate is transferred to load lock chambers from vacuum chamber from load lock chambers.
Simultaneously, the vacuum chamber of above-mentioned chamber, particularly described vacuum treatment installation need be opened and maintain or keep in repair.
Fig. 1 is the perspective view of traditional vacuum treatment installation, and its loam cake is openable.
As shown in Figure 1, in vacuum treatment installation, as the semiconductor processing device of main processing small size substrate, loam cake 3 is opened by hinge 5 and cylinder 7 from cavity 1.
But as shown in Figure 1, its very difficult complete opening loam cake 3 is also replaced the internal components of installing in the cavity 1 of vacuum treatment installation.
Particularly, because it is very heavy to be used to handle the internal components that large area substrates installs in semiconductor processing device, use crane to replace internal components.Yet described internal components can not be suspended on the crane, because the loam cake 3 of semiconductor processing device shown in Figure 1 can not overturn.
Although by enlarging semiconductor processing device, the semiconductor processing device loam cake among Fig. 1 can be with 180 ° of angle upsets, defective is that the gate device of semiconductor processing device is also extended, and the open mode instability of semiconductor processing device.
Fig. 2 to Fig. 4 represents the perspective view of another example loam cake opening procedure of traditional vacuum processing unit.
Vacuum treatment installation among Fig. 2, open in Korea S issued patents document NO.10-2001-0067439, it is by providing one to rotate and upgrade the height that equipment 15 lifting loam cakes 13 are scheduled to from cavity 11 to.And as shown in Figure 3, by using a mobile device 17 that loam cake 13 is moved to a rotatable position.Then as shown in Figure 4, rotate and upgrade equipment 15 by use and open loam cake 13.In Fig. 2 to Fig. 4, mobile device 17 comprises the first mobile device 17a and the second mobile device 17b.
Simultaneously, owing to rotate and upgrade equipment and mobile device is to combine in the traditional vacuum processing unit, very difficult installation rotates and upgrades equipment and mobile device.
In addition, although height is installed the not big difficulty of door equipment at the conventional process device of determining scope, on low height, cover very difficulty of direct installation door equipment.
Summary of the invention
In order to address the above problem, the purpose of this invention is to provide a kind of vacuum treatment installation, isolate loam cake by a lifting unit from lower cover, a horizontal movement unit moves horizontally and rotates loam cake, makes the installation of vacuum treatment installation become easy.
Another object of the present invention provides a vacuum treatment installation, by be separated out horizontal movement unit and lifting unit from vacuum chamber, prevents because loam cake moves horizontally the vibration transmission that causes to lower cover.
Another object of the present invention provides a vacuum treatment installation, by perpendicular to loam cake be used for the loam cake that moves up from the connection side that lower cover separates the transfer chamber of loam cake, make the installation more efficient use space of vacuum treatment installation.
Another object of the present invention provides a vacuum treatment installation, and its loam cake can separately not need to promote loam cake from lower cover, and it connects loam cake and lower cover by the space of forming between loam cake and the lower cover, constitutes vacuum treatment installation.
To achieve these goals, the invention provides a vacuum treatment installation, comprise a loam cake and a lower cover, the connection between loam cake and the lower cover is the separable vacuum treatment space of forming; A pair of lower horizontal mobile unit is installed in each side of lower cover separately; A pair of upper level mobile unit, described each upper level mobile unit is rotatable on each bottom mobile unit to be connected with loam cake, and moves the loam cake that separates from lower cover in the horizontal direction; Lifting unit supports by the lower horizontal mobile unit and is mounted thereto, and described lifting unit separates loam cake or connects loam cake and lower cover by promoting or reducing the lower horizontal mobile unit from lower cover.
Each upper level mobile unit comprises that a top guidance unit is at the rotatable connection loam cake of each side of loam cake, with a upper level moving member that is connected to the top guidance unit, make that move horizontally can be along the top guidance unit, the rotatable connection loam cake of this upper level moving member; And each lower horizontal mobile unit comprises a bottom guidance unit, and it is installed in each limit of lower cover with horizontal direction, moves horizontally part with a bottom and is connected the lower guide unit, makes that move horizontally can be along the lower guide unit.Lifting unit comprises that at least one first promotes a terminal lower guide unit that connects of mobile unit, this first lifting mobile unit, its another end connects the top guidance unit, first promotes the mobile unit lifting or reduces the top guidance unit, promote mobile unit, this second lifting mobile unit, one terminal lower horizontal moving member that is connected with at least one second, its another end connects the top moving member, and second promotes the mobile unit lifting or reduce the top moving member.
To achieve these goals, the present invention also provides a vacuum treatment installation, comprise a loam cake and a lower cover, separable connection between loam cake and the lower cover, form a vacuum treatment space, a pair of horizontal movement unit connects each side of loam cake separately, with a pair of guidance unit, each guidance unit is installed in each side of lower cover, and moving horizontally of guiding horizontal movement unit, horizontal movement unit can be moved, and wherein said a pair of guidance unit comprises second guidance unit that is installed in lower cover one side, first guidance unit and comes the support level mobile unit and promote the first guidance unit height by lifting unit.
First guidance unit is mobilizable, and loam cake can be connected with horizontal movement unit, and loam cake can be by rotary drive unit rotation.In addition, lifting unit can be cylinder or jackscrew.
Horizontal movement unit can connect on the closure of adjacent cavity perpendicular to loam cake and moves horizontally loam cake.
To achieve these goals, the present invention also provides a vacuum treatment installation, comprises that a load lock chambers takes to receive from the outside substrate and carry out substrate after vacuum treatment and the transmission process to the outside; One transmission cavity receives substrate from load lock chambers and carries out substrate after vacuum treatment and the transmission process to load lock chambers; Receive substrate with a vacuum chamber from transmission cavity and carry out vacuum treatment, the substrate after using vacuum treatment and transmission process on the substrate is to transmission cavity; Wherein vacuum chamber comprises a loam cake and a lower cover, and the vacuum treatment space is formed in separable connection between loam cake and the lower cover; With a horizontal movement unit, move loam cake by vertical loam cake connection adjacent cavity closure and separate loam cake from lower cover.
To achieve these goals, the present invention also provides a vacuum treatment installation, comprises a loam cake and a lower cover, and described loam cake and lower cover are interconnected with one another, and forms the vacuum treatment space with the space that forms between loam cake and the lower cover; One cavity sealing unit seals and the deblocking vacuum treatment unit by sealing or deblocking space; And one the space holding unit keep the space, the space holding unit is installed in loam cake and lower cover.
The cavity sealing unit comprises, the connecting rod that at least one vertical loam cake is installed on the loam cake sidewall; Handle the seal arm in space with a sealed vacuum, the end of sealing arm and above-mentioned connecting rod is connected, and contacts with the inner surface of loam cake and the inner surface of lower cover.The sealing arm is further contacted by the inner surface of first seal member and loam cake, and the inner surface of second seal member and the lower cover composition that contacts.
The seal arm receiving element forms definite shape according to the shape of seal arm, and its edge at loam cake forms, for seal arm connects loam cake and sealed vacuum processing space.Seal arm can have a tapered cross-section, the inner surface of loam cake can have one with the corresponding to inclined surface in seal arm tapered cross-section.
The cavity sealing unit can comprise that a connecting rod that at least one vertical lower cover is installed and a sealed vacuum are handled the seal arm in space on the lower cover sidewall, the end of sealing arm and above-mentioned connecting rod is connected, and contacts with the inner surface of lower cover and the inner surface of loam cake.
The space holding unit can comprise first bracing frame that is installed in around the lower cover, second bracing frame that is connected with loam cake, and at least one strutting piece one is terminal by the support of first bracing frame, another end support also connects second bracing frame.
In addition, the space holding unit can comprise horizontal movement unit, is used to move in the horizontal direction loam cake and at least one strutting piece, is used to keep the space.
Horizontal movement unit can comprise that first bracing frame is rotatable and be connected with loam cake and second bracing frame is installed in the outer surface of lower cover; And strutting piece is connected with second bracing frame, moves along second bracing frame, and supports first bracing frame.
Description of drawings
Fig. 1 is the perspective view of openable traditional vacuum processing unit one example of expression loam cake.
Fig. 2 to Fig. 4 is the perspective view of another example loam cake opening procedure of expression traditional vacuum processing unit.
Fig. 5 is the perspective view of expression according to the first embodiment of the invention vacuum treatment installation.
Fig. 6 is the perspective view of vacuum treatment installation shown in Fig. 5.
Fig. 7 is the end view of the vacuum chamber of vacuum treatment installation shown in Fig. 5.
Fig. 8 is the perspective view of the vacuum chamber of vacuum treatment installation shown in Fig. 5.
Fig. 9 to 11 is work schematic diagrames of the opening procedure of vacuum chamber shown in Fig. 5.
Figure 12 is the perspective view of vacuum chamber shown in Figure 11.
Figure 13 is the perspective view according to second embodiment of the invention vacuum treatment installation vacuum chamber.
Figure 14 to 17 is work schematic diagrames of vacuum chamber opening procedure shown in Figure 13.
Figure 18 is the profile according to vacuum treatment installation vacuum chamber of the present invention.
Figure 19 is the amplification profile of vacuum treatment installation cavity sealing unit shown in Figure 180.
Figure 20 is the amplification profile that vacuum treatment installation shown in Figure 180 is adjusted the rear chamber sealing unit.
Figure 21 is the amplification profile of another adjustment rear chamber sealing unit of vacuum treatment installation shown in Figure 180.
Figure 22 is that another adjusts the amplification profile of rear chamber sealing unit to vacuum treatment installation shown in Figure 180 again.
Figure 23 is the profile that is parallel to the vacuum chamber of vacuum chamber shown in Figure 180 and transmission cavity closure.
Specific embodiment
Hereinafter, vacuum treatment installation of the present invention is elaborated with reference to the accompanying drawings.
Three vacuum chamber 200 that are used for etching or spraying plating are arranged around transmission cavity 120.Gate valve 102 is installed between transmission cavity 120 and the load lock chambers 130, between transmission cavity 120 and each vacuum chamber 200 and on the outer openings of load lock chambers 130.Gate valve 102 can be airtight or at each opening selectively unlocking.
In the outside of load lock chambers 130 two boxlike support units 104 are arranged, on boxlike support unit 104, be mounted with magazine 108.Carry out vacuum treated substrate 106 and be received in the magazine 108, the intact substrate 106 of vacuum treatment is received in another magazine 108.Magazine 108 can promote or reduction by a lowering or hoisting gear 140, and has only a magazine 108 to be mounted.Having only under magazine 108 situations, the intact substrate 106 of vacuum treatment is returned to the free space of same magazine 108.
One transmitting device 160 that is used for substrate transport 106 is installed in two support units 104 between the magazine 108.Transmission equipment 160 is made of the pedestal 163 of an arm 161,162 that is arranged above and below and a support arm 161,162, the rising that described arm 161,162 can be complete on pedestal 163, landing and rotation.Four convex bodys 164 that are used for supporting substrate 106 are arranged in arm 161,162.Convex body 164 is made such as the synthetic rubber of great friction coefficient by elastomeric material, in order to prevent substrate 106 displacements or to drop.
Each vacuum chamber 200 can comprise a loam cake 210 and a lower cover 220, and it is interconnected to constitute a vacuum treatment space separably, under the step-down of vacuum treatment space substrate 106 is carried out vacuum treatment.Pump that is used for the step-down of vacuum treatment space etc. is installed in vacuum chamber 200, omits the detailed description to them for simplicity.
The transmission cavity 120 of vacuum treatment installation is kept under vacuum chamber 200 step-downs.One transmitting device 121 is installed in the transmission cavity 120.Transmitting device 121 is substrate transport 106 between load lock chambers 130 and three vacuum chamber 200.Transmitting device 121 can be made of the first, the second and the 3rd arm 123,124,125 that extension is installed on the pedestal 122.
One end of the first arm 123 rotatably is connected on the pedestal 122, and an end of second arm 124 rotatably is connected on another end of the first arm 123, and an end of the 3rd arm 125 rotatably is connected on another end of second arm 124.The 3rd arm 125 constitutes the shape that resembles fork and is used for supporting substrate 106.
The the first, the second and the 3rd arm 123,124,125 drives by a driving arrangement (not shown) that is installed in pedestal 122 inside, and makes the 3rd arm 125 can transmit substrate 106.The structure of pedestal 122 make its can more than move, move down and rotate.
Simultaneously, vacuum chamber 200 is kept or repaired to split the coming of vacuum chamber 200 needs that comprises the vacuum treatment installation of loam cake 210 and lower cover 220.
The invention provides various structure partition loam cakes 210 and lower cover 220, the various structures of partition loam cake 210 and lower cover 220 will be described in more detail below.
Fig. 7 to 12 expression is according to the vacuum treatment installation of first embodiment of the invention.
Simultaneously, loam cake 210 and lower cover 220 can have a kind of structure, the container of indent for example, and loam cake 210 can be a smooth panel, i.e. a lid simultaneously.
A pair of lower horizontal mobile unit 410 shown in Fig. 7 and 8, can comprise the lower guide unit 411 that is installed in lower cover 220 each side, and is connected the lower horizontal moving member 412 of lower guide unit 411 separately, and it moves horizontally along lower guide unit 411.
A pair of upper level mobile unit 420 can comprise the top guidance unit 421 that is installed in loam cake 210 each side, with the upper level moving member 422 that is connected each top guidance unit 421, its along top guidance unit 421 move horizontally and with 210 rotatable connections of loam cake.
Pair of rotary shafts 123 is installed in each end of loam cake 210, inserts the through hole 422a that passes through its formation in the upper level mobile unit 422 separately, and has at least this that one of rotating shaft 123 is connected with the rotary drive unit 450 that drives rotating shaft 123 rotations.Described rotary drive 450 as shown in Figs. 5 to 7, can be installed in the upper level mobile unit 422.In addition, rotating shaft 123 is more suitable for being installed on certain point of process loam cake 210 center of gravity line, so that more firmly support loam cake 210.
The structure of lower horizontal mobile unit 410 and upper level mobile unit 420 can be guide rail and slider component or cylinder, the combination of shelf and pinion, chain belt combination, linear movement guide rail or the like.
At least in lower horizontal mobile unit 410 and the upper level mobile unit 420 shown in Fig. 5 to 8, is furnished with CD-ROM drive motor 430 and comes mobile lower horizontal moving member 412 or upper level moving member 422.
Simultaneously, lower horizontal moving member 410 is connected with the sidewall of lower cover 220, and more preferably it separates with lower cover 220, thereby prevents because moving horizontally of loam cake 210 has influence on lower cover 220 caused vibrations etc.
Lifting unit 500, shown in Fig. 7 and 8, at least one first promotes mobile unit 510, these first lifting mobile unit, 510 1 ends are connected with lower guide unit 411, this first another end that promotes mobile unit 510 is connected with top guidance unit 421, this first lifting mobile unit 510 promotes or reduction top guidance unit 421, and at least one second lifting mobile unit 520, this second end that promotes mobile unit 520 is connected with lower horizontal moving member 412, this second another end that promotes mobile unit 520 is connected with upper level moving member 422, and this second lifting mobile unit 520 promotes or reduction upper level mobile unit 422.
It can be any device that can move up and down, for example cylinder or jackscrew etc. that the first lifting mobile unit 510 and second promotes mobile unit 520.
Simultaneously, lower guide unit 411 or lower horizontal moving member 412 can further be furnished with the strutting piece 530 that is used to support lower guide unit 411 or lower horizontal moving member 412, as shown in Figure 7, the first lifting mobile unit 510 and the second lifting mobile unit 520 can be installed on the strutting piece 530.
Simultaneously, the moving direction of vacuum chamber 200 loam cakes 210 in the first embodiment of the invention can be perpendicular to the closure of loam cake 210 connection adjacent cavity, and for example transmission cavity 120, shown in arrow among Fig. 6.
, compare with the structure that is parallel to loam cake 210 closures and moves with loam cake 210 under situation about moving with the closure that connects transmission cavities 120 perpendicular to loam cake 210 at loam cake 210, vacuum treatment installation has been saved the space.
The opening process of vacuum treatment installation vacuum chamber is elaborated with reference to Fig. 9 to 12 in the first embodiment of the present invention.
At first, as shown in Figure 9, loam cake 210 is raised by operation lifting unit 500 and separates from lower cover 220, and this lifting unit 500 comprises that first promotes the mobile unit 510 and the second lifting mobile unit 520.
And as shown in figure 10, by driving CD-ROM drive motor 430, the loam cake 210 that separates from lower cover 220 is moved horizontally.Wherein loam cake 210 is moved horizontally to much larger than the position of loam cake 210 radiuss of turn, thereby prevents that the rotation of loam cake 210 is disturbed.
To be described in more detail moving horizontally of loam cake 210.
CD-ROM drive motor 430 is driven and is used for moving the lower horizontal moving member 412 that is connected with lower guide unit 411.Move according to moving together of lower guide 411 by the second upper level moving member 422 that promotes mobile unit 520 supports.Therefore, the loam cake 210 that is connected with upper level moving member 422 is moved horizontally to a certain position.
Simultaneously, loam cake 210 is moved horizontally to a certain position, shown in Figure 11 and 12, by rotary drive unit 450 rotations.Wherein the direction of rotation of loam cake 210 is convenient to M R loam cake 210 according to the workman, can be clockwise or counterclockwise, and the anglec of rotation of loam cake 210 can be from 0 to 180 °.
Because because vibration of causing of CD-ROM drive motor 430 grades or the like, when mobile loam cake 210 is not directly delivered to lower cover 220, be installed in the influence that interior arrangement in the lower cover 220 or its internal environment can not vibrated etc.
The structure of vacuum treatment installation can be simplified in the first embodiment of the invention, because be used for rotation, and lifting and move horizontally loam cake and do not make up and do not constitute as one from the device that lower cover separates loam cake.
In addition, install one and be used for separating loam cake, especially the equipment of a low height loam cake is not difficult, is not to be installed to loam cake because be used for from the device of lower cover separation and lifting loam cake.
In addition, the loam cake of first embodiment of the invention vacuum treatment installation is applied to the pressure of rotating shaft, can be disperseed and causes loam cake also can be prevented from the caused danger that tilts of a certain direction by support loam cake with a series of parts.
The vacuum plant of Figure 13 to 17 expression second embodiment of the present invention.
Hereinafter, with reference to the accompanying drawings, the vacuum treatment installation in the second embodiment of the present invention is described in detail.Wherein, will be omitted, and will be marked by same numbers with the similar structure of first embodiment with the similar structure of first embodiment.
Guidance unit 720, as shown in figure 13, can comprise first guidance unit 721 that is installed in vacuum chamber 200 1 sides, for example lower cover 220, with second guidance unit 722 of support level mobile unit 710, it can rise to the height of first guidance unit 721 by lifting unit 800.
Simultaneously, be used for first guidance unit 721 and second guidance unit 722 and horizontal movement unit 710 to be connected and to drive can be any structure, be used for moving horizontally described horizontal movement unit 710 along first guidance unit 721 and second guidance unit 722, for example can be guide rail and slider part or track, the combination of shelf and pinion, the chain belt combination, linear movement guide rail or the like.
Be used for the example of the mechanical device of mobile and horizontal mobile unit 710 at another, the horizontal movement unit 710 that is connected with loam cake 210 with rotating shaft 213, can on the horizontal direction of loam cake 210, form by penetrating loam cake 210 pilot hole (not shown) wherein, ball screw axle (not shown) spiral connects and inserts in the pilot hole (not shown), and be used for the CD-ROM drive motor of swing roller helical axis, thereby flatly mobile loam cake 210.
A driver element (not shown) can be installed on the horizontal movement unit 710, so horizontal movement unit 710 can move along first guidance unit 721 and second guidance unit 722.
Lifting unit 800 as shown in figure 13, can comprise that at least one lifting moving unit 810 is fixed on second bracing frame 830 of support and lifting first guidance unit 722.
One lifting moving unit 810, as shown in figure 13, can be preferably a pair of, a kind of device that raises or descend, cylinder for example, the jackscrew of the usefulness servo motor driven described in the hydraulic cylinder or first embodiment.
Simultaneously, second bracing frame 830 can support lower cover 220 together.
The opening process of the vacuum chamber of vacuum treatment installation will be described in detail in the second embodiment of the present invention.
At first, shown in Figure 14 and 15, second guidance unit 722 is by driving the height that lifters 800 is promoted to first guidance unit 721.
As shown in figure 15, when second guidance unit 722 is promoted to the height of first guidance unit 721, lifters 800 stops to drive, and as shown in figure 16, horizontal movement unit 800 is driven, and loam cake 210 is moved to first guidance unit 721 from second guidance unit 722.
As shown in figure 17, when the mobile end of loam cake 210 to first guidance units 72, by driving rotary drive unit 450, loam cake 210 is rotated.
Simultaneously, for the maintenance and repair vacuum treatment installation, be used for comprising the lifting loam cake and after moving horizontally loam cake, rotating loam cake from the separation process of lower cover separation loam cake.
Yet the trend of pending substrate is to enlarge gradually, the vacuum treatment installation needs of substrate that are used to handle expansion are extended, the vacuum treatment space that loam cake and lower cover form is extended, so their weight increases, the result causes loam cake is separated the difficulty that becomes from lower cover.
The present invention also provides a vacuum treatment installation, and its loam cake can and need not promote loam cake from the lower cover separation.
That is to say that the vacuum chamber among the present invention can comprise a loam cake 210 and a lower cover 220, loam cake 210 and lower cover 220 interconnect, and space of formation forms a vacuum treatment space between loam cake 210 and lower cover 220; One by sealing or open the space and seal or open the cavity sealing unit 310 in vacuum treatment space; With one be used to keep the space maintenance unit 320 in space, space holding unit 320 is installed on loam cake 210 and the lower cover 220.
Preferably, connecting rod 312 connects loam cake 210 and comes sealed chamber, leaks and plasma reaction to prevent vacuum pressure.Connecting rod 312 can be made the influence that prevents vacuum treatment space ionic medium precursor reactant by insulating material, and the surface of insulation coating at connecting rod 312 perhaps preferably arranged.
Simultaneously, seal arm 313 can be made with the influence that prevents vacuum treatment space ionic medium precursor reactant or the surface of insulation coating in seal arm 313 preferably arranged by insulating material.
Simultaneously, a direction recess 211 that is used to connecting rod is moved up and down forms at the inner surface of loam cake 210.Preferably can form the step portion of ' L ' shape etc. at the edge of loam cake 210.
That is to say that a seal arm is accepted the shape formation definite shape of unit 214 according to seal arm 313, its edge at loam cake 210 forms, for seal arm 313 contacts with loam cake 210 and sealed vacuum processing space, as shown in figure 18.
Simultaneously, the connecting rod 312 of cavity sealing unit 310 and seal arm 313 are installed in lower cover 220 rather than loam cake 210, as shown in figure 20.230 formation on loam cake 210 wherein enter the mouth.Reference number 221 expressions one direction recess in Figure 20 and 22 is used for making the connecting rod 312 at lower cover 220 to move up and down, and reference number 224 expressions one seal arm is accepted the unit.
In addition, shown in Figure 21 and 22, the seal arm 313 of cavity sealing unit 310 can be that conical in shape is come the enhanced leaktightness effect.
In particular, seal arm 313 can preferably have a tapered cross-section in the face of loam cake 210 or lower cover 220 inner surfaces.
Wherein the inner surface of loam cake 210 or lower cover 220 have one with the corresponding to inclined surface in tapered cross-section of seal arm 313.
Simultaneously, as shown in figure 23, space holding unit 320 can comprise first bracing frame of installing around lower cover 220 321, second bracing frame 322 that is connected with loam cake 210, with at least one strutting piece 323, the one end is supported by first bracing frame 321, and another end support also connects second bracing frame 322.
First bracing frame 321 comprises from lower cover 220 and separating, or the separator frame that is connected with the outer surface of lower cover 220.
Simultaneously, upper level mobile unit among the space holding unit 320 and first embodiment, the structure of lower horizontal mobile unit and lifting unit, with the guide in second specific embodiment and the structure of lifters, or with Korean Patent issued patents document No.10-2001-0067439 in disclosed structure, also shown in Fig. 2 to 4, similar structure is arranged.
That is to say that first bracing frame 321 comprises the guide rail of a pair of connection lower cover 220 outer walls, second bracing frame 322 rotatably supports loam cake 210.
The lifting unit 500,800 among first embodiment and second embodiment and come to separate loam cake 210 wherein from lower cover 220 without any need for additional elevating function.
That is to say, shown in Figure 19 to 22, when needs when lower cover 220 separates loam cakes 210 and comes the maintenance and repair vacuum chamber, seal arm 313 is come deblocking loam cake 210 and lower cover 220 by mobile link 312.
When seal arm 313 deblocking loam cakes 210 and lower cover 220, loam cake 210 among first embodiment and second embodiment can be moved horizontally to a certain definite position, because loam cake 210 and lower cover 220 safeguard between loam cake 210 and lower cover 220 space is arranged under released state.
By being driven in rotation the unit rotation and being exposed to the outside, the loam cake 210 maintained and repairings that move horizontally.
According to mentioned above, when maintenance and repair, the vacuum treatment installation among the present invention moves loam cake and need not lifting, has prevented because loam cake moves the infringement that is brought, and can be simplified according to the structure of vacuum treatment installation of the present invention.
The vacuum treatment installation structure can be simplified among the present invention, because be used for rotation, and lifting and move horizontally loam cake and do not make up and do not constitute as one from the device that lower cover separates loam cake.
In addition, it is not difficult that a device that separates loam cake is installed, and particularly the loam cake of low height is not to be installed to loam cake because be used for from the device of lower cover separation and lifting loam cake.
In addition, the loam cake of vacuum treatment installation of the present invention is applied to the pressure of rotating shaft, can be disperseed and causes loam cake also can be prevented from the caused danger that tilts of a certain direction by support loam cake with a series of parts.
Introduce and described various preferred embodiments at present, but under spirit of the present invention and category, can make various changes and modifications by understanding described technology, therefore correspondingly, category of the present invention is not limited only to scope as described above, and will be according to following claim and equivalent thereof.
Claims (18)
1. a vacuum treatment installation, it comprises:
One loam cake and a lower cover, this loam cake and lower cover interconnect separably, form the vacuum treatment space;
A pair of lower horizontal mobile unit is installed in each side of lower cover respectively;
A pair of upper level mobile unit, each upper level mobile unit is rotatable on bottom moving member separately to be connected with loam cake, and moves loam cake with horizontal direction and separate from lower cover; And
One lifting unit supports and is installed on it by the lower horizontal mobile unit, and this lifting unit separates loam cake or by promoting or reducing the upper level mobile unit loam cake is connected with lower cover from lower cover.
2. vacuum treatment installation as claimed in claim 1, wherein each upper level mobile unit comprises that a top guidance unit rotatably is connected with loam cake in the both sides of loam cake, one upper level moving-member is connected with the top guidance unit, be used for making moving horizontally along the top guidance unit, the upper level moving-member rotatably is connected with loam cake; And
Each lower horizontal mobile unit comprises that one is installed in the lower guide unit of each side of lower cover with horizontal direction, is connected the lower horizontal moving-member of lower guide unit with one, makes to move horizontally along the lower guide unit.
3. vacuum treatment installation as claimed in claim 2, wherein lifting unit comprises that at least one first promotes mobile unit, this first end that promotes mobile unit connects the lower guide unit, its another end connects the top guidance unit, this first lifting mobile unit promotes or reduction top guidance unit, with at least one second lifting mobile unit, this second end that promotes mobile unit connects the lower horizontal moving-member, its another end connects the top moving-member, and this second lifting mobile unit promotes or reduction top moving-member.
4. a vacuum treatment installation, this device comprises a loam cake and a lower cover, loam cake and lower cover interconnect separably, form a vacuum treatment space, a pair of horizontal movement unit is connected to each side and a pair of guidance unit of loam cake, and each guidance unit is installed in each side of lower cover and guides horizontal movement unit to move horizontally, horizontal movement unit can be moved
Wherein this comprises first guidance unit that is installed in lower cover one side to guidance unit, and second guidance unit of support level mobile unit, and this second guidance unit is promoted to the height of first guidance unit by lifting unit.
5. vacuum treatment installation as claimed in claim 4, wherein first guidance unit is mobilizable.
6. as claim 4 or 5 described vacuum treatment installations, wherein loam cake is connected with horizontal movement unit, and loam cake is by rotary drive unit rotation.
7. as claim 4 or 5 described vacuum treatment installations, wherein lifting unit is cylinder or jackscrew.
8. as claim 4 or 5 described vacuum treatment installations, wherein horizontal movement unit is to move horizontally loam cake on the closure that connects adjacent cavity perpendicular to loam cake.
9. a vacuum treatment installation, this device comprises:
One load lock chambers, it is used for receiving from the outside substrate will carry out after vacuum treated substrate and the transmission process to the outside; One transmission cavity, it is used for receiving the substrate will carry out after vacuum treated substrate and the transmission process to load lock chambers from load lock chambers; And a process chamber, it is used for receiving from transmission cavity and will carries out vacuum treated substrate, and the substrate after carrying out vacuum treatment and transmission process on the substrate is to transmission cavity;
Wherein vacuum chamber comprises a loam cake and a lower cover, and this loam cake and lower cover interconnect separably, constitutes a vacuum treatment space; With a horizontal movement unit,, be used for separating loam cake from lower cover by to move horizontally loam cake on the closure that connects adjacent cavity perpendicular to loam cake.
10. a vacuum treatment installation, this device comprises:
One loam cake and a lower cover, this loam cake and lower cover are interconnected with one another, and form the vacuum treatment space with the space that forms between loam cake and the lower cover;
One cavity sealing unit seals and the deblocking vacuum treatment unit by sealing or deblocking space; And
One space holding unit is used for keeping the space, this space holding unit be installed in loam cake and under cover.
11. vacuum treatment installation as claimed in claim 10, wherein the cavity sealing unit comprises, the connecting rod that at least one vertical loam cake is installed on the loam cake sidewall; Handle the seal arm in space with a sealed vacuum, the end of sealing arm and above-mentioned connecting rod is connected, and contacts with the inner surface of loam cake and the inner surface of lower cover.
12. vacuum treatment installation as claimed in claim 11, wherein the sealing arm is further contacted by the inner surface of first seal member and loam cake, and the inner surface of second seal member and the lower cover composition that contacts.
13. claim 11 or 12 described vacuum treatment installations, wherein the seal arm receiving element forms definite shape according to the shape of seal arm, and its edge at loam cake forms, for seal arm touches loam cake and sealed vacuum processing space.
14. as claim 11 or 12 described vacuum treatment installations, wherein seal arm can have a tapered cross-section, the inner surface of loam cake can have one with the corresponding to inclined surface in seal arm tapered cross-section.
15. vacuum treatment installation as claimed in claim 10, wherein the cavity sealing unit comprises, the connecting rod that at least one vertical lower cover is installed on the lower cover sidewall; Handle the seal arm in space with a sealed vacuum, the end of sealing arm and above-mentioned connecting rod is connected, and contacts with the inner surface of lower cover and the inner surface of loam cake.
16. as claim 10,11 or 15 described vacuum treatment installations, wherein the space holding unit comprises first bracing frame that is installed in around the lower cover, second bracing frame that is connected with loam cake, and at least one strutting piece one is terminal by the support of first bracing frame, and another end support also connects second bracing frame.
17. as the described vacuum treatment installation of claim 10,11 or 15, wherein the space holding unit comprises horizontal movement unit, is used to move in the horizontal direction loam cake and at least one strutting piece, is used to keep the space.
18. vacuum treatment installation as claimed in claim 17, wherein horizontal movement unit comprises that first bracing frame is rotatable and is connected with loam cake and second bracing frame is installed in the outer surface of lower cover; And
Support component is connected with second bracing frame, moves along second bracing frame, and supports first bracing frame.
Applications Claiming Priority (4)
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| KR1020050016169 | 2005-02-25 | ||
| KR1020050016169A KR100667598B1 (en) | 2005-02-25 | 2005-02-25 | Apparatus for semiconductor process |
| KR1020050059031 | 2005-07-01 | ||
| KR1020050086577 | 2005-09-16 |
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| CNB2007101883670A Division CN100536070C (en) | 2005-02-25 | 2006-01-17 | Vacuum processing device |
| CN2009101433305A Division CN101615569B (en) | 2005-02-25 | 2006-01-17 | Vacuum processor |
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| CN1825535A true CN1825535A (en) | 2006-08-30 |
| CN100444311C CN100444311C (en) | 2008-12-17 |
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| CN200710188366A Expired - Fee Related CN100578732C (en) | 2005-02-25 | 2006-01-17 | Vacuum processing apparatus |
| CNB2007101883670A Active CN100536070C (en) | 2005-02-25 | 2006-01-17 | Vacuum processing device |
| CN2009101433305A Active CN101615569B (en) | 2005-02-25 | 2006-01-17 | Vacuum processor |
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| CN200710188366A Expired - Fee Related CN100578732C (en) | 2005-02-25 | 2006-01-17 | Vacuum processing apparatus |
| CNB2007101883670A Active CN100536070C (en) | 2005-02-25 | 2006-01-17 | Vacuum processing device |
| CN2009101433305A Active CN101615569B (en) | 2005-02-25 | 2006-01-17 | Vacuum processor |
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| CN2617030Y (en) * | 2003-02-11 | 2004-05-19 | 厦门大学 | Silicon and silicon vacuum bonding device |
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| JP4199062B2 (en) * | 2003-07-07 | 2008-12-17 | 株式会社神戸製鋼所 | Vacuum deposition equipment |
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| KR100640559B1 (en) * | 2004-06-17 | 2006-10-31 | 주식회사 에이디피엔지니어링 | Apparatus for manufacturing fpd |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN100578732C (en) | 2010-01-06 |
| CN101615569A (en) | 2009-12-30 |
| KR20060094746A (en) | 2006-08-30 |
| CN100536070C (en) | 2009-09-02 |
| KR100667598B1 (en) | 2007-01-12 |
| CN101192511A (en) | 2008-06-04 |
| CN100444311C (en) | 2008-12-17 |
| CN101615569B (en) | 2012-05-09 |
| CN101174552A (en) | 2008-05-07 |
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