KR100773720B1 - Vacuum processing system and method for opening and closing the same - Google Patents

Abstract

A vacuum processing system and a method for opening and closing the same are provided to rotate an upper cover by a rotating device having small output by changing the center of gravity of the upper cover, and rotate the upper cover stably regardless of eccentricity of the upper cover and the change of the center of gravity when the center of rotation of the upper cover and the center of gravity do not coincide with each other. A chamber main body(120) has an open upper side. An upper cover(110) is detachably combined with the upper side of the chamber main body. A detaching device separates the upper cover from the chamber main body, and moves the upper cover to rotate the upper cover. A center of gravity moving unit(300) is combined with the upper cover for moving the center of gravity of the upper cover to the center of rotation of the upper cover.

Description

Vacuum Processing System and Method for Opening and Closing the Same}

1 is a perspective view showing a vacuum processing apparatus according to the present invention.

2 is a side view of the vacuum processing apparatus of FIG. 1.

3 to 5 are side views illustrating modified examples of the vacuum processing apparatus of FIG. 1 having a modified center of gravity moving unit.

6A to 6D are side views illustrating an operation process of the vacuum processing apparatus of FIG. 1.

***** Explanation of symbols for main parts of drawing *****

110: upper cover 120: chamber body

300: center of gravity moving portion 310: weight support portion

320: weight

The present invention relates to a vacuum processing system, and more particularly, to a vacuum processing system including a plurality of vacuum processing chambers for etching or depositing a substrate such as a glass substrate or a wafer for an LCD panel.

The vacuum processing system is a device that installs an electrode in a chamber body in which a processing space is formed, and applies a power to the electrode in a vacuum state to form a plasma to deposit and etch a surface of a substrate seated on the electrode. to be.

Conventional vacuum processing apparatus is composed of an upper cover which is detachably coupled to the upper side of the chamber body and the upper side of the chamber body is open. And the upper cover is configured to move and rotate to one side after being separated from the chamber body for maintenance and repair of the vacuum processing chamber.

On the other hand, the size of the glass panel for LCD panel is increasing in accordance with the trend of increasing the size of the LCD, accordingly, the vacuum processing apparatus for processing the glass substrate for the LCD panel as described above is also enlarged.

However, the conventional vacuum processing apparatus as described above has a large increase in the vacuum pressure applied to the inside, the thickness is also increased to withstand the increased vacuum pressure, the overall load is greatly increased, the top cover also the thickness and load This is greatly increased.

The load of the upper cover constituting the vacuum processing apparatus is also increased, and when the upper cover is to be rotated separately, the rotating device having the output that can withstand the load of the upper cover in response to the load of the upper cover (rotary motor, reducer) Etc.) is required.

In particular, when the center of gravity of the upper cover is eccentric from the center of rotation or the center of gravity of the upper cover is changed according to the change in the center of gravity it is necessary to have a rotary device having a larger output.

In addition, if the center of rotation of the upper cover does not match the center of gravity has a problem that the load of the rotary device is applied a lot can reduce the life of the equipment.

It is an object of the present invention to recognize the above problems and needs, to provide a vacuum processing apparatus capable of rotating the upper cover by a rotary device having a small output.

Another object of the present invention is to provide a vacuum processing apparatus capable of rotating a top cover by a rotating device having a small output by changing a change in the center of gravity of the top cover.

Still another object of the present invention is to provide a method of opening and closing a vacuum processing apparatus capable of stably rotating the top cover regardless of the center of gravity of the top cover or eccentricity.

The present invention has been created to achieve the object of the present invention as described above, the present invention is the chamber body is open on the upper side; An upper cover detachably coupled to an upper side of the chamber body; A detachment device for rotating the upper cover after separating and moving from the chamber body; It is coupled to the upper cover discloses a vacuum processing apparatus comprising a weight center moving unit for moving the center of gravity of the upper cover to the rotation center of the upper cover.

Structural reinforcement for reinforcing the structure may be additionally installed on the outside of the upper cover, it may be configured to form a grid-like structure coupled to the upper surface of the upper cover. In this case, the weight center moving part may be installed in the structural reinforcing part.

The detachable device includes an elevating device for elevating the upper cover from the chamber body, and a moving device for horizontally moving the upper cover; It may be configured to include a rotating device for rotating the upper cover.

The center of gravity moving unit may be positioned higher than or equal to the center of rotation.

The weight center moving unit and the weight support portion coupled to the upper surface of the upper cover; It may be configured to include a weight to move the center of gravity of the upper cover coupled to move along the weight support.

The weight may be installed to be movable by the user's operation. The weight center moving unit may include a weight moving device for moving the weight along the weight supporting unit.

The weight may be composed of a plurality of weights detachably coupled to the weight support portion.

In addition, the center of gravity moving unit may be configured to include at least one weight rotatably installed on the upper side of the upper cover, and a rotating device for rotating the weight.

In another aspect, the present invention provides a method of opening and closing a vacuum processing apparatus for opening and closing a vacuum processing apparatus including a chamber body having an upper side and an upper cover detachably coupled to an upper side of the chamber body, wherein the upper cover is removed from the chamber body. A separation step of separating and moving; A center of gravity movement step of moving the center of gravity of the moved upper cover to the center of rotation of the upper cover; Disclosed is a method for opening and closing a vacuum processing apparatus comprising a rotating step of rotating the upper cover.

In the center of gravity movement step, the center of gravity of the upper chamber may be calculated according to the load of the modules installed in the upper chamber, and the calculated center of gravity may be moved to the rotation axis of the upper cover.

In the center of gravity movement step, the center of gravity of the upper chamber may be measured and the measured center of gravity may be moved to the center of rotation of the upper cover.

In the rotating step, the center of gravity of the upper chamber can be rotated by eccentric from the center of rotation of the upper chamber.

Hereinafter, a vacuum processing apparatus and a method of opening and closing the same according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing a vacuum processing apparatus according to the present invention, FIG. 2 is a side view of the vacuum processing apparatus of FIG. 1, and FIGS. 3 to 5 are variations of the vacuum processing apparatus of FIG. 1 having a modified center of gravity moving unit. Side views showing examples.

1 and 2, the vacuum processing apparatus according to the present invention includes a chamber body 120, the upper side of which is open, and an upper cover 110 detachably coupled to the upper side of the chamber body 120. It is configured by.

The chamber body 120 and the upper cover 110 are coupled to each other to form a processing space for vacuum treatment, the upper cover 110 may be manufactured to have a variety of shapes, such as forming a plate, a bowl structure. The chamber body 120 may be supported and installed by the support frame 130.

The upper cover 110 is detachably coupled with the chamber body 120 for maintenance, such as repair or replacement of the devices installed in the chamber, to remove the upper cover 110 from the chamber body 120 Desorption devices are combined or installed around them.

The upper cover 110 may be provided with various modules and devices, such as a gas supply system (not shown) for supplying gas into the processing space, an electrode (not shown) for applying power to form a plasma in the processing space.

On the other hand, the upper cover 110 is manufactured to a thickness enough to withstand the vacuum pressure formed in the processing space. And the structural reinforcement unit 150 for reinforcing the structure may be additionally installed on the outside of the chamber so as to prevent the inner wall of the chamber from being deformed due to the vacuum pressure.

The structural reinforcing part 150 may be configured to form a lattice structure coupled to the upper surface of the upper cover 110, the H beam is coupled to the upper surface of the upper cover 110 by screwing or welding.

The detachable device is a device that rotates after the upper cover 110 is separated from the chamber body 120 and moved, and various configurations are possible, and the upper cover 110 is configured to move up and down, horizontally and rotately. . In this case, the lifting movement and the horizontal movement may be implemented at the same time.

As an example, as shown in FIG. 1, the detachable device is provided on both sides of the chamber body 120 to provide a pair of guide members 210 to guide the movement of the upper cover 110 and the upper cover 110. It may be configured to include a lifting device 240 for elevating, a moving device 220 for moving the upper cover 110 horizontally and a rotating device 230 for rotating the upper cover 110. Here, the lifting device 240, the moving device 220 and the rotating device 230 may be separated from each other according to the design, or may be configured as a single assembly.

The guide member 210 is configured to guide the movement of the upper cover 110, the first guide member 211 is located on the side of the chamber body 120 and protruding from the chamber body 120 is installed It may be configured to include a second guide member (212).

The first guide member 211 and the second guide member 412 may be integrally formed or separated from each other, and the second guide member 212 may be installed to be movable.

The first guide member 211 may be coupled to or separated from the side of the chamber body 120, and may be installed to be elevated by the lifting device 240. In this case, the elevating device 240 is configured to elevate the first guide member 211, but various other configurations are possible.

The second guide member 212 may be configured to guide the upper cover 110 to be moved to a predetermined position, and may be supported and installed on the support frame 140. In this case, the second guide member 212 is installed to have the same height as that of the first guide member 211 when the first guide member 211 is lifted to separate the upper cover 110.

The moving device 220 is configured to move the upper cover 110 along the guide member 210, and is composed of a linear moving device such as screw type, rack and pinion coupling.

The rotating device 230 is composed of a rotating motor in which the rotating shaft 231 is coupled to the upper cover 110, the rotating shaft 231 is directly coupled to the upper cover 110, or as shown, the upper cover ( The bracket 111 is installed on the 110, and the rotation shaft 231 is coupled to the bracket 111.

Meanwhile, the rotating shaft 231 of the rotating device 230 forms the center of rotation R of the upper cover 110, and the center of rotation R coincides with the center of gravity of the upper cover 110. desirable.

By the way, when the rotating shaft 231 is directly coupled to the upper cover 110, the upper cover 110, as the coupling portion becomes structurally weak, so it is necessary to increase the thickness by the bracket 111 on the upper cover 110 It is preferable to be coupled to the rotating shaft 231 by installing).

However, when the upper cover 110 and the rotation shaft 231 are coupled by the bracket 111 as described above, the center of gravity C is located below the rotation center R by that much.

In addition, if a change in weight occurs, such as a gas supply system, an electrode, or the like installed on the upper cover 110, the center of gravity C will not coincide with the center of rotation R.

Therefore, in consideration of the fact that the center of gravity (C) and the rotation center (R) does not match, the rotary motor having a larger output to rotate the upper cover 110, in accordance with the present invention, Combined with the top cover 110 further includes a center of gravity moving unit 300 for moving the center of gravity (C) of the top cover 110 to the center of rotation (R) of the top cover (110).

The center of gravity moving unit 300 is configured to move the center of gravity (C) of the upper cover 110, various configurations are possible according to the design and design, as shown in Figures 1 and 2, the upper It comprises a weight support portion 310 coupled to the upper surface of the cover 110, and the weight 320 to move along the weight support portion 310 to move the center of gravity (C) of the upper cover 110 Can be.

The weight support portion 310 may be composed of one or more members installed on the upper surface of the upper cover 110, preferably the center of gravity (C) can be moved only up and down with the rotation center (R) as an axis The rotating shaft 231 may be installed in pairs facing each other on the combined portion. The weight support part 310 may be installed on the structural reinforcement part 150 when the structural reinforcement part 150 is installed.

On the other hand, the center of gravity moving unit 300 is possible in a variety of configurations and methods, as shown in Figure 2, the weight weight 320 is coupled to the weight support portion 310 is composed of one or more of the user's manual, etc. It can be configured to move up and down along the weight support portion 310 by the operation of.

In addition, as shown in Figure 3, the center of gravity moving unit 300, the weight moving device for moving the weight 320 up and down along the weight support unit 310 by the control of the controller (not shown) ( 330 may be additionally installed. At this time, the weight movement device 330 may be replaced by the weight support portion (310).

In addition, the center of gravity moving unit 300, as shown in Figure 4, at least one weight (320) rotatably installed on the upper side of the upper cover 110, and for rotating the weight (320) It may be composed of a rotating device (340).

Meanwhile, as shown in FIG. 5, the weight 320 has a plurality of weights detachably coupled to the weight support part 310 in consideration of the user's convenience and the load change of the upper cover 110. And 321.

The opening and closing method of the vacuum processing apparatus having the above configuration will be described in detail with reference to FIGS. 6A to 6D.

First, as shown in Figure 6a, the detachable device separates the upper cover 110 from the chamber body 120. In this case, the upper cover 110 may be separated from the chamber body 120 by being driven up and down by the first guide member 211 to the height of the second guide member 212.

After the upper cover 110 is separated from the chamber body 120, as shown in Figure 6b, the upper cover 110 is preset along the guide member 210 by the drive of the moving device 220 Is moved to the location. That is, the upper cover 110 is moved from the first guide member 211 to the second guide member 212.

On the other hand, after being moved to the second guide member 212, the upper cover 110 is rotated by the rotary device 230, where the center of gravity (C) of the upper cover 110 does not match the rotation center (R) If not, as shown in Figure 6c, by transferring the weight 320 by the center of gravity moving unit 300 to match the center of gravity (C) and the center of rotation (C). At this time, the center of gravity (C) may be located higher than the rotation center (C).

And after the center of gravity (C) of the upper cover 110 coincides with the rotation center (C) or moved upward, as shown in Figure 6d, it is rotated by the rotating device 231.

On the other hand, the process of coupling the upper cover 110 to the chamber body 120 is performed in reverse in Figure 6d. At this time, before the upper cover 110 is rotated, the center of gravity C of the upper cover 110 is previously matched with the rotation center C or moved upward in the center of gravity moving part 300.

On the other hand, the opening and closing method of the vacuum processing apparatus according to the present invention having the configuration as described above is separated step (S10) for separating and moving the upper cover 110 from the chamber body 120; A center of gravity movement step (S20) of moving the center of gravity (C) of the moved top cover (110) to the center of rotation (R) of the top cover (110); It may be configured to include a rotating step (S30) for rotating the upper cover (110).

In the center of gravity movement step S20, the center of gravity C of the upper chamber 110 is calculated according to the loads of the modules installed in the upper chamber 110, and the calculated center of gravity C of the upper cover 110 is calculated. Can be moved to the center of rotation (R).

In addition, the center of gravity movement step (S20) may measure the center of gravity (C) of the upper chamber 110, and move the measured center of gravity (C) to the center of rotation (R) of the upper cover (110). .

In addition, in the rotating step (S30) it can be rotated by eccentric from the rotation center (R) of the upper chamber 110 to the center of gravity (C) of the upper chamber (110).

The vacuum processing apparatus according to the present invention has the advantage that the upper cover can be rotated by a rotating device having a small output by matching the center of rotation and the center of gravity of the upper cover.

In addition, the vacuum processing apparatus according to the present invention has the advantage that the upper cover can be rotated by a rotating device having a small output by changing the change in the center of gravity of the upper cover.

In addition, the opening and closing method of the vacuum processing apparatus according to the present invention, if the center of rotation and the center of gravity of the upper cover is inconsistent, the center of gravity and the center of gravity of the upper cover to rotate the upper cover stably regardless of the eccentricity or change There is an advantage to this.

Although the preferred embodiments of the present invention have been described above by way of example, the scope of the present invention is not limited to these specific embodiments, and may be appropriately changed within the scope described in the claims.

Claims (15)

A chamber body having an upper side open; An upper cover detachably coupled to an upper side of the chamber body; A detachment device for rotating the upper cover after separating and moving from the chamber body; And a center of gravity moving unit coupled to the upper cover to move the center of gravity of the upper cover to the center of rotation of the upper cover. The method of claim 1, And the center of gravity moving unit aligns the center of gravity with or higher than the center of rotation. The method of claim 1, The outer side of the upper cover is a vacuum processing apparatus, characterized in that the structural reinforcing portion is further installed to reinforce the structure. The method of claim 3, wherein The structural reinforcing unit is a vacuum processing apparatus, characterized in that to form a grid-like structure coupled to the upper surface of the upper cover. The method of claim 3, wherein And the center of gravity moving part is installed in the structural reinforcing part. The method of claim 1, The detachable device includes an elevating device for elevating the upper cover from the chamber body; A moving device for horizontally moving the upper cover; And a rotary device for rotating the upper cover. The method of claim 1, The center of gravity moving unit A weight support part coupled to an upper surface of the upper cover; And a weight for moving the center of gravity of the combined upper cover by moving along the weight supporting portion. The method of claim 7, wherein And the weight is installed to be movable by a user's operation. The method of claim 7, wherein The weight center moving unit further comprises a weight shifting device for moving the weight along the weight support unit. The method of claim 7, wherein Said weight Vacuum processing apparatus, characterized in that consisting of a plurality of weights detachably coupled to the weight support portion. The method of claim 7, wherein The center of gravity moving unit One or more weights rotatably installed on an upper side of the upper cover; And a rotating device for rotating the weight. As a method of opening and closing a vacuum processing apparatus for opening and closing a vacuum processing apparatus including a chamber body having an upper side and an upper cover detachably coupled to an upper side of the chamber body, A separation step of separating and moving the upper cover from the chamber body; A center of gravity movement step of moving the center of gravity of the moved upper cover to the center of rotation of the upper cover; Opening and closing method of the vacuum processing apparatus comprising a rotating step of rotating the upper cover. The method of claim 12, In the center of gravity movement step, the opening and closing method of the vacuum processing apparatus, characterized in that to calculate the center of gravity of the upper chamber in accordance with the load of the modules installed in the upper chamber, and to move the calculated center of gravity to the axis of rotation of the upper cover . The method of claim 12, In the center of gravity movement step, the center of gravity of the upper chamber is measured, and the opening and closing method of the vacuum processing apparatus, characterized in that for moving the measured center of gravity to the center of rotation of the upper cover. The method of claim 12, In the rotating step Opening and closing method of the vacuum processing apparatus, characterized in that the center of gravity of the upper chamber to rotate from the center of rotation of the upper chamber.

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