CN101615569A - Vacuum treatment installation - Google Patents
Vacuum treatment installation Download PDFInfo
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- CN101615569A CN101615569A CN200910143330A CN200910143330A CN101615569A CN 101615569 A CN101615569 A CN 101615569A CN 200910143330 A CN200910143330 A CN 200910143330A CN 200910143330 A CN200910143330 A CN 200910143330A CN 101615569 A CN101615569 A CN 101615569A
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- lower cover
- vacuum treatment
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- 238000009489 vacuum treatment Methods 0.000 title claims abstract description 78
- 238000009434 installation Methods 0.000 title claims abstract description 60
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- 230000009467 reduction Effects 0.000 claims description 4
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- 239000004065 semiconductor Substances 0.000 abstract description 10
- 230000008569 process Effects 0.000 abstract description 8
- 238000007747 plating Methods 0.000 abstract description 5
- 238000005507 spraying Methods 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 description 18
- 238000012545 processing Methods 0.000 description 15
- 238000007789 sealing Methods 0.000 description 11
- 230000014509 gene expression Effects 0.000 description 8
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- 239000000376 reactant Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
Abstract
Herein disclosed is a kind of vacuum treatment installation, it is used for carrying out on substrate etch processes or spraying plating is handled, for example be used for the on glass of LCDs (LCD) panel, on the semiconductor wafer, or the like, it comprises a loam cake and a lower cover, and this loam cake and lower cover are interconnected to form a vacuum treatment space separably; A pair of lower horizontal mobile unit, this lower horizontal mobile unit is installed in each side of lower cover respectively; A pair of upper level mobile unit, this each upper level mobile unit is connected with loam cake on bottom mobile unit separately, moves loam cake with horizontal direction it is separated from lower cover; Lifting unit supports by the lower horizontal mobile unit and is mounted thereto, and lifting unit separates loam cake or by promoting or reducing the upper level mobile unit loam cake is connected with lower cover from lower cover.
Description
The application is that application number is the dividing an application once more of divide an application (application number is 200710188367.0) of 200610001041.8 patent of invention.The application of this division according to the auditor for proposing about monistic defective in the notification of examiner's opinion first time of divide an application (application number is 200710188367.0).
The original bill applying date: on January 17th, 2006.
Original bill application number: 200610001041.8.
Original bill denomination of invention: vacuum treatment installation.
Division is submitted day to: on November 20th, 2007.
The number of dividing an application: 200710188367.0.
Division denomination of invention: vacuum treatment installation.
Technical field
The present invention relates to a kind of vacuum treatment installation, relate in particular to the vacuum treatment installation that is used on substrate, carrying out etch processes or spraying plating processing, for example be used for the on glass of LCDs (LCD) panel, on the semiconductor wafer, or the like.
Background technology
Described vacuum treatment installation is a kind of by use physics or chemical reaction under vacuum state, and for example plasma reaction etc. is carried out the device that etch processes or spraying plating are handled on substrate, for example is used for the on glass of liquid crystal display panel, on the semiconductor wafer.
Described vacuum treatment installation comprises a vacuum chamber, is used for carrying out etch processes or spraying plating and handles on substrate; With a transfer chamber, be used for substrate is transferred to vacuum chamber and substrate is transferred to load lock chambers from vacuum chamber from load lock chambers.
Simultaneously, the vacuum chamber of above-mentioned chamber, particularly described vacuum treatment installation need be opened and maintain or keep in repair.
Fig. 1 is the perspective view of traditional vacuum treatment installation, and its loam cake is openable.
As shown in Figure 1, in vacuum treatment installation, as the semiconductor processing device of main processing small size substrate, loam cake 3 is opened by hinge 5 and cylinder 7 from cavity 1.
But as shown in Figure 1, its very difficult complete opening loam cake 3 is also replaced the internal components of installing in the cavity 1 of vacuum treatment installation.
Particularly, because it is very heavy to be used to handle the internal components that large area substrates installs in semiconductor processing device, use crane to replace internal components.Yet described internal components can not be suspended on the crane, because the loam cake 3 of semiconductor processing device shown in Figure 1 can not overturn.
Although by enlarging semiconductor processing device, the semiconductor processing device loam cake among Fig. 1 can be with 180 ° of angle upsets, defective is that the gate device of semiconductor processing device is also extended, and the open mode instability of semiconductor processing device.
Fig. 2 to Fig. 4 represents the perspective view of another example loam cake opening procedure of traditional vacuum processing unit.
Vacuum treatment installation among Fig. 2, open in Korea S issued patents document NO.10-2001-0067439, it is by providing one to rotate and upgrade the height that equipment 15 lifting loam cakes 13 are scheduled to from cavity 11 to.And as shown in Figure 3, by using a mobile device 17 that loam cake 13 is moved to a rotatable position.Then as shown in Figure 4, rotate and upgrade equipment 15 by use and open loam cake 13.In Fig. 2 to Fig. 4, mobile device 17 comprises the first mobile device 17a and the second mobile device 17b.
Simultaneously, owing to rotate and upgrade equipment and mobile device is to combine in the traditional vacuum processing unit, very difficult installation rotates and upgrades equipment and mobile device.
In addition, although height is installed the not big difficulty of door equipment at the conventional process device of determining scope, on low height, cover very difficulty of direct installation door equipment.
Summary of the invention
In order to address the above problem, the purpose of this invention is to provide a kind of vacuum treatment installation, isolate loam cake by a lifting unit from lower cover, a horizontal movement unit moves horizontally and rotates loam cake, makes the installation of vacuum treatment installation become easy.
Another object of the present invention provides a vacuum treatment installation, by be separated out horizontal movement unit and lifting unit from vacuum chamber, prevents because loam cake moves horizontally the vibration transmission that causes to lower cover.
Another object of the present invention provides a vacuum treatment installation, by perpendicular to loam cake be used for the loam cake that moves up from the connection side that lower cover separates the transfer chamber of loam cake, make the installation more efficient use space of vacuum treatment installation.
To achieve these goals, the invention provides a vacuum treatment installation, comprise a loam cake and a lower cover, the connection between loam cake and the lower cover is the separable vacuum treatment space of forming; A pair of lower horizontal mobile unit is installed in each side of lower cover separately; A pair of upper level mobile unit, described each upper level mobile unit is rotatable on each bottom mobile unit to be connected with loam cake, and moves the loam cake that separates from lower cover in the horizontal direction; Lifting unit supports by the lower horizontal mobile unit and is mounted thereto, and described lifting unit separates loam cake or connects loam cake and lower cover by promoting or reducing the lower horizontal mobile unit from lower cover.
Each upper level mobile unit comprises that a top guidance unit is at the rotatable connection loam cake of each side of loam cake, with a upper level mobile unit that is connected to the top guidance unit, make that move horizontally can be along the top guidance unit, the rotatable connection loam cake of this upper level mobile unit; And each lower horizontal mobile unit comprises a bottom guidance unit, and it is installed in each limit of lower cover with horizontal direction, is connected the lower guide unit with a bottom horizontal movement unit, makes that move horizontally can be along the lower guide unit.Lifting unit comprises that at least one first promotes a terminal lower guide unit that connects of mobile unit, this first lifting mobile unit, its another end connects the top guidance unit, first promotes the mobile unit lifting or reduces the top guidance unit, promote mobile unit, this second lifting mobile unit, one terminal lower horizontal mobile unit that is connected with at least one second, its another end connects the top mobile unit, and second promotes the mobile unit lifting or reduce the top mobile unit.
To achieve these goals, the present invention also provides a vacuum treatment installation, comprises that a load lock chambers takes to receive from the outside substrate and carry out substrate after vacuum treatment and the transmission process to the outside; One transmission cavity receives substrate from load lock chambers and carries out substrate after vacuum treatment and the transmission process to load lock chambers; Receive substrate with a vacuum chamber from transmission cavity and carry out vacuum treatment, the substrate after using vacuum treatment and transmission process on the substrate is to transmission cavity; Wherein vacuum chamber comprises a loam cake and a lower cover, and the vacuum treatment space is formed in separable connection between loam cake and the lower cover; With a horizontal movement unit, move loam cake by vertical loam cake connection adjacent cavity closure and separate loam cake from lower cover.
Description of drawings
Fig. 1 is the perspective view of openable traditional vacuum processing unit one example of expression loam cake.
Fig. 2 to Fig. 4 is the perspective view of another example loam cake opening procedure of expression traditional vacuum processing unit.
Fig. 5 is the perspective view of expression according to the first embodiment of the invention vacuum treatment installation.
Fig. 6 is the perspective view of vacuum treatment installation shown in Fig. 5.
Fig. 7 is the end view of the vacuum chamber of vacuum treatment installation shown in Fig. 5.
Fig. 8 is the perspective view of the vacuum chamber of vacuum treatment installation shown in Fig. 5.
Fig. 9 to 11 is work schematic diagrames of the opening procedure of vacuum chamber shown in Fig. 5.
Figure 12 is the perspective view of vacuum chamber shown in Figure 11.
Figure 13 is the perspective view according to second embodiment of the invention vacuum treatment installation vacuum chamber.
Figure 14 to 17 is work schematic diagrames of vacuum chamber opening procedure shown in Figure 13.
Figure 18 is the profile according to vacuum treatment installation vacuum chamber of the present invention.
Figure 19 is the amplification profile of vacuum treatment installation cavity sealing unit shown in Figure 180.
Figure 20 is the amplification profile that vacuum treatment installation shown in Figure 180 is adjusted the rear chamber sealing unit.
Figure 21 is the amplification profile of another adjustment rear chamber sealing unit of vacuum treatment installation shown in Figure 180.
Figure 22 is that another adjusts the amplification profile of rear chamber sealing unit to vacuum treatment installation shown in Figure 180 again.
Figure 23 is the profile that is parallel to the vacuum chamber of vacuum chamber shown in Figure 180 and transmission cavity closure.
Embodiment
Hereinafter, vacuum treatment installation of the present invention is elaborated with reference to the accompanying drawings.
Three vacuum chamber 200 that are used for etching or spraying plating are arranged around transmission cavity 120.Gate valve 102 is installed between transmission cavity 120 and the load lock chambers 130, between transmission cavity 120 and each vacuum chamber 200 and on the outer openings of load lock chambers 130.Gate valve 102 can be airtight or at each opening selectively unlocking.
In the outside of load lock chambers 130 two boxlike support units 104 are arranged, on boxlike support unit 104, be mounted with magazine 108.Carry out vacuum treated substrate 106 and be received in the magazine 108, the intact substrate 106 of vacuum treatment is received in another magazine 108.Magazine 108 can promote or reduction by a lowering or hoisting gear 140, and has only a magazine 108 to be mounted.Having only under magazine 108 situations, the intact substrate 106 of vacuum treatment is returned to the free space of same magazine 108.
One transmitting device 160 that is used for substrate transport 106 is installed in two support units 104 between the magazine 108.Transmission equipment 160 is made of the pedestal 163 of an arm 161,162 that is arranged above and below and a support arm 161,162, the rising that described arm 161,162 can be complete on pedestal 163, landing and rotation.Four convex bodys 164 that are used for supporting substrate 106 are arranged in arm 161,162.Convex body 164 is made such as the synthetic rubber of great friction coefficient by elastomeric material, in order to prevent substrate 106 displacements or to drop.
Each vacuum chamber 200 can comprise a loam cake 210 and a lower cover 220, and it is interconnected to constitute a vacuum treatment space separably, under the step-down of vacuum treatment space substrate 106 is carried out vacuum treatment.Pump that is used for the step-down of vacuum treatment space etc. is installed in vacuum chamber 200, omits the detailed description to them for simplicity.
The transmission cavity 120 of vacuum treatment installation is kept under vacuum chamber 200 step-downs.One transmitting device 121 is installed in the transmission cavity 120.Transmitting device 121 is substrate transport 106 between load lock chambers 130 and three vacuum chamber 200.Transmitting device 121 can be made of the first, the second and the 3rd arm 123,124,125 that extension is installed on the pedestal 122.
One end of the first arm 123 rotatably is connected on the pedestal 122, and an end of second arm 124 rotatably is connected on another end of the first arm 123, and an end of the 3rd arm 125 rotatably is connected on another end of second arm 124.The 3rd arm 125 constitutes the shape that resembles fork and is used for supporting substrate 106.
The the first, the second and the 3rd arm 123,124,125 drives by a driving arrangement (not shown) that is installed in pedestal 122 inside, and makes the 3rd arm 125 can transmit substrate 106.The structure of pedestal 122 make its can more than move, move down and rotate.
Simultaneously, vacuum chamber 200 is kept or repaired to split the coming of vacuum chamber 200 needs that comprises the vacuum treatment installation of loam cake 210 and lower cover 220.
The invention provides various structure partition loam cakes 210 and lower cover 220, the various structures of partition loam cake 210 and lower cover 220 will be described in more detail below.
Fig. 7 to 12 expression is according to the vacuum treatment installation of first embodiment of the invention.
Simultaneously, loam cake 210 and lower cover 220 can have a kind of structure, the container of indent for example, and loam cake 210 can be a smooth panel, i.e. a lid simultaneously.
A pair of lower horizontal mobile unit 410 shown in Fig. 7 and 8, can comprise the lower guide unit 411 that is installed in lower cover 220 each side, and is connected the lower horizontal mobile unit 412 of lower guide unit 411 separately, and it moves horizontally along lower guide unit 411.
A pair of upper level mobile unit 420 can comprise the top guidance unit 421 that is installed in loam cake 210 each side, with the upper level mobile unit 422 that is connected each top guidance unit 421, its along top guidance unit 421 move horizontally and with 210 rotatable connections of loam cake.
Pair of rotary shafts 123 is installed in each end of loam cake 210, inserts the through hole 422a that passes through its formation in the upper level mobile unit 422 separately, and has at least this that one of rotating shaft 123 is connected with the rotary drive unit 450 that drives rotating shaft 123 rotations.Described rotary drive 450 as shown in Figs. 5 to 7, can be installed in the upper level mobile unit 422.In addition, rotating shaft 123 is more suitable for being installed on certain point of process loam cake 210 center of gravity line, so that more firmly support loam cake 210.
The structure of lower horizontal mobile unit 410 and upper level mobile unit 420 can be guide rail and slider component or cylinder, the combination of shelf and pinion, chain belt combination, linear movement guide rail or the like.
At least in lower horizontal mobile unit 410 and the upper level mobile unit 420 shown in Fig. 5 to 8, is furnished with CD-ROM drive motor 430 and comes mobile lower horizontal mobile unit 412 or upper level mobile unit 422.
Simultaneously, lower horizontal mobile unit 410 is connected with the sidewall of lower cover 220, and more preferably it separates with lower cover 220, thereby prevents because moving horizontally of loam cake 210 has influence on lower cover 220 caused vibrations etc.
Lifting unit 500, shown in Fig. 7 and 8, at least one first promotes mobile unit 510, these first lifting mobile unit, 510 1 ends are connected with lower guide unit 411, this first another end that promotes mobile unit 510 is connected with top guidance unit 421, this first lifting mobile unit 510 promotes or reduction top guidance unit 421, and at least one second lifting mobile unit 520, this second end that promotes mobile unit 520 is connected with lower horizontal mobile unit 412, this second another end that promotes mobile unit 520 is connected with upper level mobile unit 422, and this second lifting mobile unit 520 promotes or reduction upper level mobile unit 422.
It can be any device that can move up and down, for example cylinder or jackscrew etc. that the first lifting mobile unit 510 and second promotes mobile unit 520.
Simultaneously, lower guide unit 411 or lower horizontal mobile unit 412 can further be furnished with the strutting piece 530 that is used to support lower guide unit 411 or lower horizontal mobile unit 412, as shown in Figure 7, the first lifting mobile unit 510 and the second lifting mobile unit 520 can be installed on the strutting piece 530.
Simultaneously, the moving direction of vacuum chamber 200 loam cakes 210 in the first embodiment of the invention can be perpendicular to the closure of loam cake 210 connection adjacent cavity, and for example transmission cavity 120, shown in arrow among Fig. 6.
, compare with the structure that is parallel to loam cake 210 closures and moves with loam cake 210 under situation about moving with the closure that connects transmission cavities 120 perpendicular to loam cake 210 at loam cake 210, vacuum treatment installation has been saved the space.
The opening process of vacuum treatment installation vacuum chamber is elaborated with reference to Fig. 9 to 12 in the first embodiment of the present invention.
At first, as shown in Figure 9, loam cake 210 is raised by operation lifting unit 500 and separates from lower cover 220, and this lifting unit 500 comprises that first promotes the mobile unit 510 and the second lifting mobile unit 520.
And as shown in figure 10, by driving CD-ROM drive motor 430, the loam cake 210 that separates from lower cover 220 is moved horizontally.Wherein loam cake 210 is moved horizontally to much larger than the position of loam cake 210 radiuss of turn, thereby prevents that the rotation of loam cake 210 is disturbed.
To be described in more detail moving horizontally of loam cake 210.
CD-ROM drive motor 430 is driven and is used for moving the lower horizontal mobile unit 412 that is connected with lower guide unit 411.Move according to moving together of lower guide unit 411 by the second upper level mobile unit 422 that promotes mobile unit 520 supports.Therefore, the loam cake 210 that is connected with upper level mobile unit 422 is moved horizontally to a certain position.
Simultaneously, loam cake 210 is moved horizontally to a certain position, shown in Figure 11 and 12, by rotary drive unit 450 rotations.Wherein the direction of rotation of loam cake 210 is convenient to M R loam cake 210 according to the workman, can be clockwise or counterclockwise, and the anglec of rotation of loam cake 210 can be from 0 to 180 °.
Because because vibration of causing of CD-ROM drive motor 430 grades or the like, when mobile loam cake 210 is not directly delivered to lower cover 220, be installed in the influence that interior arrangement in the lower cover 220 or its internal environment can not vibrated etc.
The structure of vacuum treatment installation can be simplified in the first embodiment of the invention, because be used for rotation, and lifting and move horizontally loam cake and do not make up and do not constitute as one from the device that lower cover separates loam cake.
In addition, install one and be used for separating loam cake, especially the equipment of a low height loam cake is not difficult, is not to be installed to loam cake because be used for from the device of lower cover separation and lifting loam cake.
In addition, the loam cake of first embodiment of the invention vacuum treatment installation is applied to the pressure of rotating shaft, can be disperseed and causes loam cake also can be prevented from the caused danger that tilts of a certain direction by support loam cake with a series of parts.
The vacuum plant of Figure 13 to 17 expression second embodiment of the present invention.
Hereinafter, with reference to the accompanying drawings, the vacuum treatment installation in the second embodiment of the present invention is described in detail.Wherein, will be omitted, and will be marked by same numbers with the similar structure of first embodiment with the similar structure of first embodiment.
Simultaneously, be used for first guidance unit 721 and second guidance unit 722 and horizontal movement unit 710 to be connected and to drive can be any structure, be used for moving horizontally described horizontal movement unit 710 along first guidance unit 721 and second guidance unit 722, for example can be guide rail and slider part or track, the combination of shelf and pinion, the chain belt combination, linear movement guide rail or the like.
Be used for the example of the mechanical device of mobile and horizontal mobile unit 710 at another, the horizontal movement unit 710 that is connected with loam cake 210 with rotating shaft 213, can on the horizontal direction of loam cake 210, form by penetrating loam cake 210 pilot hole (not shown) wherein, ball screw axle (not shown) spiral connects and inserts in the pilot hole (not shown), and be used for the CD-ROM drive motor of swing roller helical axis, thereby flatly mobile loam cake 210.
A driver element (not shown) can be installed on the horizontal movement unit 710, so horizontal movement unit 710 can move along first guidance unit 721 and second guidance unit 722.
Lifting unit 800 as shown in figure 13, can comprise that at least one lifting moving unit 810 is fixed on second bracing frame 830 of support and lifting first guidance unit 722.
One lifting moving unit 810, as shown in figure 13, can be preferably a pair of, a kind of device that raises or descend, cylinder for example, the jackscrew of the usefulness servo motor driven described in the hydraulic cylinder or first embodiment.
Simultaneously, second bracing frame 830 can support lower cover 220 together.
The opening process of the vacuum chamber of vacuum treatment installation will be described in detail in the second embodiment of the present invention.
At first, shown in Figure 14 and 15, second guidance unit 722 is by driving the height that lifting unit 800 is promoted to first guidance unit 721.
As shown in figure 15, when second guidance unit 722 is promoted to the height of first guidance unit 721, lifting unit 800 stops to drive, as shown in figure 16, horizontal movement unit 800 is driven, and loam cake 210 is moved to first guidance unit 721 from second guidance unit 722.
As shown in figure 17, when the mobile end of loam cake 210 to first guidance units 72, by driving rotary drive unit 450, loam cake 210 is rotated.
Simultaneously, for the maintenance and repair vacuum treatment installation, be used for comprising the lifting loam cake and after moving horizontally loam cake, rotating loam cake from the separation process of lower cover separation loam cake.
Yet the trend of pending substrate is to enlarge gradually, the vacuum treatment installation needs of substrate that are used to handle expansion are extended, the vacuum treatment space that loam cake and lower cover form is extended, so their weight increases, the result causes loam cake is separated the difficulty that becomes from lower cover.
The present invention also provides a vacuum treatment installation, and its loam cake can and need not promote loam cake from the lower cover separation.
That is to say that the vacuum chamber among the present invention can comprise a loam cake 210 and a lower cover 220, loam cake 210 and lower cover 220 interconnect, and space of formation forms a vacuum treatment space between loam cake 210 and lower cover 220; One by sealing or open the space and seal or open the cavity sealing unit 310 in vacuum treatment space; With one be used to keep the space maintenance unit 320 in space, space holding unit 320 is installed on loam cake 210 and the lower cover 220.
Preferably, connecting rod 312 connects loam cake 210 and comes sealed chamber, leaks and plasma reaction to prevent vacuum pressure.Connecting rod 312 can be made the influence that prevents vacuum treatment space ionic medium precursor reactant by insulating material, and the surface of insulation coating at connecting rod 312 perhaps preferably arranged.
Simultaneously, seal arm 313 can be made with the influence that prevents vacuum treatment space ionic medium precursor reactant or the surface of insulation coating in seal arm 313 preferably arranged by insulating material.
Simultaneously, a direction recess 211 that is used to connecting rod is moved up and down forms at the inner surface of loam cake 210.Preferably can form the step portion of ' L ' shape etc. at the edge of loam cake 210.
That is to say that a seal arm is accepted the shape formation definite shape of unit 214 according to seal arm 313, its edge at loam cake 210 forms, for seal arm 313 contacts with loam cake 210 and sealed vacuum processing space, as shown in figure 18.
Simultaneously, the connecting rod 312 of cavity sealing unit 310 and seal arm 313 are installed in lower cover 220 rather than loam cake 210, as shown in figure 20.230 formation on loam cake 210 wherein enter the mouth.Reference number 221 expressions one direction recess in Figure 20 and 22 is used for making the connecting rod 312 at lower cover 220 to move up and down, and reference number 224 expressions one seal arm is accepted the unit.
In addition, shown in Figure 21 and 22, the seal arm 313 of cavity sealing unit 310 can be that conical in shape is come the enhanced leaktightness effect.
In particular, seal arm 313 can preferably have a tapered cross-section in the face of loam cake 210 or lower cover 220 inner surfaces.
Wherein the inner surface of loam cake 210 or lower cover 220 have one with the corresponding to inclined surface in tapered cross-section of seal arm 313.
Simultaneously, as shown in figure 23, space holding unit 320 can comprise first bracing frame of installing around lower cover 220 321, second bracing frame 322 that is connected with loam cake 210, with at least one strutting piece 323, the one end is supported by first bracing frame 321, and another end support also connects second bracing frame 322.
First bracing frame 321 comprises from lower cover 220 and separating, or the separator frame that is connected with the outer surface of lower cover 220.
Simultaneously, upper level mobile unit among the space holding unit 320 and first embodiment, the structure of lower horizontal mobile unit and lifting unit, with the pilot unit in second specific embodiment and the structure of lifting unit, or with Korean Patent issued patents document No.10-2001-0067439 in disclosed structure, also shown in Fig. 2 to 4, similar structure is arranged.
That is to say that first bracing frame 321 comprises the guide rail of a pair of connection lower cover 220 outer walls, second bracing frame 322 rotatably supports loam cake 210.
The lifting unit 500,800 among first embodiment and second embodiment and come to separate loam cake 210 wherein from lower cover 220 without any need for additional elevating function.
That is to say, shown in Figure 19 to 22, when needs when lower cover 220 separates loam cakes 210 and comes the maintenance and repair vacuum chamber, seal arm 313 is come deblocking loam cake 210 and lower cover 220 by mobile link 312.
When seal arm 313 deblocking loam cakes 210 and lower cover 220, loam cake 210 among first embodiment and second embodiment can be moved horizontally to a certain definite position, because loam cake 210 and lower cover 220 safeguard between loam cake 210 and lower cover 220 space is arranged under released state.
By being driven in rotation the unit rotation and being exposed to the outside, the loam cake 210 maintained and repairings that move horizontally.
According to mentioned above, when maintenance and repair, the vacuum treatment installation among the present invention moves loam cake and need not lifting, has prevented because loam cake moves the infringement that is brought, and can be simplified according to the structure of vacuum treatment installation of the present invention.
The vacuum treatment installation structure can be simplified among the present invention, because be used for rotation, and lifting and move horizontally loam cake and do not make up and do not constitute as one from the device that lower cover separates loam cake.
In addition, it is not difficult that a device that separates loam cake is installed, and particularly the loam cake of low height is not to be installed to loam cake because be used for from the device of lower cover separation and lifting loam cake.
In addition, the loam cake of vacuum treatment installation of the present invention is applied to the pressure of rotating shaft, can be disperseed and causes loam cake also can be prevented from the caused danger that tilts of a certain direction by support loam cake with a series of parts.
Introduce and described various preferred embodiments at present, but under spirit of the present invention and category, can make various changes and modifications by understanding described technology, therefore correspondingly, category of the present invention is not limited only to scope as described above, and will be according to following claim and equivalent thereof.
Claims (4)
1. a vacuum treatment installation comprises:
One vacuum chamber comprises a loam cake and a lower cover, and this loam cake and lower cover interconnect separably, constitutes a vacuum treatment space; With
One horizontal movement unit by to move horizontally loam cake on the closure that connects adjacent cavity perpendicular to loam cake, is used for separating loam cake from lower cover.
2. vacuum treatment installation as claimed in claim 1, wherein horizontal movement unit comprises:
A pair of lower horizontal mobile unit is installed in the lower cover opposite side respectively;
A pair of upper level mobile unit, each upper level mobile unit is rotatable on each lower horizontal mobile unit to be connected with loam cake, and moves loam cake with horizontal direction and separate from lower cover; And
One lifting unit supports and is installed on it by the lower horizontal mobile unit, and this lifting unit separates loam cake or by promoting or reducing the upper level mobile unit loam cake is connected with lower cover from lower cover.
3. vacuum treatment installation as claimed in claim 2, wherein each upper level mobile unit comprises that a top guidance unit is connected with loam cake in each side of loam cake, one upper level moving-member is connected with the top guidance unit, be used for making moving horizontally along the top guidance unit of loam cake, the upper level moving-member is connected with loam cake; And
Each lower horizontal mobile unit comprises that one is installed in the lower guide unit of each side of lower cover with horizontal direction, is connected the lower horizontal moving-member of lower guide unit with one, makes moving horizontally along the lower guide unit of lower cover.
4. vacuum treatment installation as claimed in claim 3, wherein lifting unit comprises that at least one first promotes mobile unit, this first end that promotes mobile unit connects the lower guide unit, its another end connects the top guidance unit, and this first lifting mobile unit promotes or reduction top guidance unit; With at least one second promote mobile unit, this second terminal lower horizontal moving-member that connects that promotes mobile unit, its another terminal upper level moving-member that connects, this second promotes mobile unit and promotes or reduce the upper level moving-member.
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| KR1020050016169A KR100667598B1 (en) | 2005-02-25 | 2005-02-25 | Apparatus for semiconductor process |
| KR1020050059031A KR100682738B1 (en) | 2005-07-01 | 2005-07-01 | Apparatus for semiconductor process |
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| KR1020050086577A KR100688954B1 (en) | 2005-09-16 | 2005-09-16 | Opening and shutting structure of plasma processing apparatus |
| KR10-2005-0086577 | 2005-09-16 |
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| CN101615569B CN101615569B (en) | 2012-05-09 |
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| CN200710188366A Expired - Fee Related CN100578732C (en) | 2005-02-25 | 2006-01-17 | Vacuum processing apparatus |
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| CNB2006100010418A Active CN100444311C (en) | 2005-02-25 | 2006-01-17 | Vacuum processor |
| CN200710188366A Expired - Fee Related CN100578732C (en) | 2005-02-25 | 2006-01-17 | Vacuum processing apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3909608B2 (en) * | 1994-09-30 | 2007-04-25 | 株式会社アルバック | Vacuum processing equipment |
| JP3527450B2 (en) * | 1999-12-22 | 2004-05-17 | 東京エレクトロン株式会社 | Processing equipment |
| CN1327493C (en) * | 2000-05-17 | 2007-07-18 | 东京毅力科创株式会社 | Mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism |
| CN2617030Y (en) * | 2003-02-11 | 2004-05-19 | 厦门大学 | Silicon and silicon vacuum bonding device |
| CN2613647Y (en) * | 2003-05-09 | 2004-04-28 | 西安理工大学 | Vacuum seal device for preventing leakage |
| JP4199062B2 (en) * | 2003-07-07 | 2008-12-17 | 株式会社神戸製鋼所 | Vacuum deposition equipment |
| KR100515955B1 (en) * | 2003-11-18 | 2005-09-23 | 주식회사 에이디피엔지니어링 | Processing chamber of FPD manufacturing machine having a device for opening the cover |
| KR100640559B1 (en) * | 2004-06-17 | 2006-10-31 | 주식회사 에이디피엔지니어링 | Apparatus for manufacturing fpd |
-
2005
- 2005-02-25 KR KR1020050016169A patent/KR100667598B1/en active IP Right Grant
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2006
- 2006-01-17 CN CNB2007101883670A patent/CN100536070C/en active Active
- 2006-01-17 CN CN2009101433305A patent/CN101615569B/en active Active
- 2006-01-17 CN CNB2006100010418A patent/CN100444311C/en active Active
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103213815A (en) * | 2013-03-07 | 2013-07-24 | 陈立明 | Embedded rotor spiral speed-regulation constant feeder |
| CN103213815B (en) * | 2013-03-07 | 2015-04-29 | 陈立明 | Embedded rotor spiral speed-regulation constant feeder |
| CN109850573A (en) * | 2018-12-04 | 2019-06-07 | 武汉华星光电半导体显示技术有限公司 | Conveying machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100578732C (en) | 2010-01-06 |
| CN100444311C (en) | 2008-12-17 |
| CN101192511A (en) | 2008-06-04 |
| CN100536070C (en) | 2009-09-02 |
| CN1825535A (en) | 2006-08-30 |
| CN101174552A (en) | 2008-05-07 |
| KR20060094746A (en) | 2006-08-30 |
| KR100667598B1 (en) | 2007-01-12 |
| CN101615569B (en) | 2012-05-09 |
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