CN101093793B - Apparatus for manufacturing flat-panel display - Google Patents
Apparatus for manufacturing flat-panel display Download PDFInfo
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- CN101093793B CN101093793B CN2007101381918A CN200710138191A CN101093793B CN 101093793 B CN101093793 B CN 101093793B CN 2007101381918 A CN2007101381918 A CN 2007101381918A CN 200710138191 A CN200710138191 A CN 200710138191A CN 101093793 B CN101093793 B CN 101093793B
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- loam cake
- chamber
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- vacuum chamber
- drive unit
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Abstract
Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
Description
The application is that No. 200510107980.6, that submitted on September 30th, 2005 are called dividing an application of " equipment that is used to make flat-panel monitor " Chinese invention patent application.
Technical field
The present invention relates to be used to make the equipment (FPD) of flat-panel monitor, it carries out required processing to the FPD substrate after can setting up vacuum atmosphere therein, and relate more specifically to the FPD manufacturing equipment, wherein vacuum chamber is divided into chamber body and loam cake, thereby described loam cake can easily open and close.
Background technology
Flat-panel monitor (FPD) manufacturing equipment is designed to present the FPD substrate to wherein and by using plasma etc. that described FPD substrate is carried out required processing, as etch processes.The example of FPD comprises LCD, PDP, OLED etc.In such FPD manufacturing equipment, common vacuum treatment device comprises three vacuum chambers, comprises load locking room (load lock chamber), transfer chamber and process chamber.
Described load locking room is used to receive from the station, outside that is used for adding carried base board the substrate that will handle at described FPD manufacturing equipment, perhaps is used for making at the processed substrate of FPD manufacturing equipment that is used for unloading described substrate discharging fully.Described transfer chamber is provided with robot, be used between each chamber, presenting substrate, so that it is transported to described process chamber with pending described substrate from described load locking room, perhaps the described substrate that will be handled fully is transported to described load locking room from described process chamber.Described process chamber is used to by using plasma or heat energy to come substrate is carried out film deposition processes or etch processes under vacuum atmosphere.
Because this fact is that multiple gases or plasma use in described process chamber, if repeat a large amount of processing, is provided at then that equipment in the process chamber may be damaged or contaminated, and therefore is necessary periodically to change or repair described equipment.Therefore, as shown in fig. 1, the described process chamber of being indicated by reference number 1 generally includes chamber body 10 and loam cake 20, and the described loam cake 20 of said process chamber 1 can be opened and closed, so that the maintenance and repair of described chamber interior.Traditionally, in order to open and close described loam cake 20, lift (crane) has been installed to the top of the clean room that process chamber 1 wherein is provided, and makes by using the described loam cake 20 of described lift to be opened and closed.Replacedly, described process chamber is equipped with opening/closing apparatus to open and close described loam cake.
Referring to Fig. 2, the example that is used for traditional opening/closing apparatus of described loam cake 20 is illustrated.As shown in Figure 2, described loam cake opening/closing apparatus 50 is provided at the outside of described process chamber 1 to open and close described loam cake 20.Described opening/closing apparatus 50 comprises: vertical drive units, vertically to promote described loam cake 20; Horizontal movement unit is flatly to move described loam cake 20; And rotary unit, to rotate described loam cake 20.In addition, described opening/closing apparatus 50 is provided with and moves horizontally guiding 60 so that the mobile route of described horizontal drive unit to be provided.
Hereinafter, will explain by having opening/closed procedure of the performed loam cake 20 of the described opening/closing apparatus that disposes above 50.At first, be included in described vertical drive units in the described opening/closing apparatus 50 by use, described loam cake 20 is vertically promoted predetermined height.Next, described loam cake 20 the state that is raised along described move horizontally the guiding be horizontally moved.After having finished such moving horizontally, be rotated 180 ° by using the described loam cake 20 of described rotary unit.As a result, the described chamber body 10 and described loam cake 20 boths of described process chamber 1 are opened, so that each equipment that is provided in the described process chamber 1 can be changed or repair.
But the size of the substrate that will be handled by described FDP manufacturing equipment is increased recently, and therefore, the size that is included in the vacuum chamber in the described FDP manufacturing equipment just promptly increases.For example, under the situation of current available vacuum chamber, its loam cake not only has 3 and takes advantage of 4 meters large scale, and has the weight greater than 3 to 4 tons.Therefore, in order vertically to promote described large-sized heavy loam cake of described vacuum chamber, be necessary to provide the vertical drive units of cylinder with high capacity.In addition, the increase that described huge loam cake shows the deficient in stability aspect when by vertical-lift influences the maintenance and repair of described internal vacuum chamber unfriendly.
Summary of the invention
Therefore, the present invention considers the problems referred to above and finishes, and the purpose of this invention is to provide the FPD manufacturing equipment that can easily open/close lid.
According to a first aspect of the invention, above and other purpose can realize by the FPD manufacturing equipment is provided, described FPD manufacturing equipment comprises: vacuum chamber, the upside that comprises the chamber body and be positioned at described chamber body is with the loam cake in the face of described chamber body, and described chamber body is by spaced apart within a predetermined distance with described chamber body; Sealing device is coupled to described loam cake separably to seal the edge of described chamber body and described loam cake; Rotary unit is right, is coupled to the correspondence position of the opposite flank (lateral surface) of described loam cake, and is suitable for rotating described loam cake; The horizontal drive unit is right, is coupled to described rotary unit respectively, and is suitable for supporting to be coupled to the loam cake of described rotary unit and flatly moving described loam cake; Track element is coupled to described horizontal drive unit respectively so that the mobile route of described horizontal drive unit to be provided; And one or more processor unit, be provided in the described vacuum chamber so that the object that loads in the described vacuum chamber is carried out required processing.
According to a second aspect of the invention, above and other purpose can realize by the FPD manufacturing equipment is provided, the required processing of substrate execution during described FPD manufacturing equipment is used for after described chamber produces plasma under vacuum atmosphere loading entered the room, wherein: described chamber comprises: following chamber; And go up the chamber, be arranged on the described chamber down with away from described chamber opening down or be closed to described chamber down, on the moving direction of the coupled surface of described lower and upper chamber chamber on described by downward-sloping; And described FPD manufacturing equipment comprises: the horizontal drive unit is right, be used for level movably mode support the described chamber of going up; And rotary unit is right, is used for supporting rotatably the described chamber of going up.
According to a third aspect of the invention we, above and other purpose can realize by the loam cake opening/closing apparatus that is provided in the FPD manufacturing equipment, described FPD manufacturing equipment is carried out required processing to the substrate that is loaded in the vacuum chamber, described loam cake opening/closing apparatus comprises: the lid loading unit is used to support and rotate the loam cake that separates from described vacuum chamber; And track element, be used to be provided for described lid loading unit is moved to the mobile route of the position of approaching described vacuum chamber, wherein removable is provided at that cover loading unit and part described track element coupling, moves along described track element with the state that is positioned on the described track element to allow described lid loading unit.
According to a forth aspect of the invention, above and other purpose can realize by the loam cake opening/closing apparatus of the loam cake on the vacuum chamber that is provided for out/closes being provided at the FPD manufacturing equipment, described FPD manufacturing equipment is carried out required processing to the substrate that is loaded in the vacuum chamber, described loam cake opening/closing apparatus comprises: be independent of the connection of described loam cake, described connection is coupled to described loam cake to rotate described loam cake along parabolic orbit pivotally, to open or to be closed to described vacuum chamber away from described vacuum chamber.
According to a fifth aspect of the invention, above and other purpose can be carried out the FPD manufacturing equipment of required processing and realize being loaded into substrate in the chamber by being provided under vacuum atmosphere, comprises; Transfer chamber wherein provides transfer robot, substrate is loaded into load locking room or process chamber or substrate is unloaded from load locking room or process chamber; Separable loam cake, the upper end that is provided at described transfer chamber is to move described transfer robot to outside station; And the horizontal drive unit is right, is provided at the opposite side of described transfer chamber, with take level movably mode support described loam cake.
Description of drawings
Above and other purpose of the present invention, feature and other advantages are from understanding below in conjunction with will more clearly obtaining the detailed description of accompanying drawing, wherein:
Fig. 1 is the cross-sectional view that explanation is provided at the process chamber configurations in the prior art FPD manufacturing equipment;
Fig. 2 is the perspective view of the example of the explanation loam cake opening/closing apparatus that can use with the prior art process chamber;
Fig. 3 is the decomposition diagram of explanation according to the FPD manufacturing equipment of the first embodiment of the present invention;
Fig. 4 is the cross-sectional view of explanation according to the internal structure of the FPD manufacturing equipment of the first embodiment of the present invention;
Fig. 5 A is the partial cross sectional view of explanation according to the interchangeable embodiment of sealing device of the present invention to 5C;
Fig. 6 A is the perspective view of the opening of the loam cake that adopted in the FPD manufacturing equipment of explaining according to the first embodiment of the present invention/closed procedure to 6D;
Fig. 7 is the end view of configuration of the FPD manufacturing equipment of explanation a third embodiment in accordance with the invention;
Fig. 8 A and 8B are the partial cross sectional view of operation of the potted component driver element of explanation a third embodiment in accordance with the invention;
Fig. 9 A and 9B are the partial cross sectional view of operation of another potted component driver element of explanation a third embodiment in accordance with the invention;
Figure 10 A and 10B are the partial cross sectional view of operation of the potted component of explanation a third embodiment in accordance with the invention;
Figure 11 A and 11B are that open/view of closed procedure the performed last chamber of FPD manufacturing equipment of explaining a third embodiment in accordance with the invention;
Figure 12 is the configuration of loam cake opening/closing apparatus of explanation a fourth embodiment in accordance with the invention and the vertical view of layout;
Figure 13 is the end view of Figure 12;
Figure 14 A and 14B are the perspective views of the different instances that is included in lid loading unit in the described loam cake opening/closing apparatus and track element of explanation a fourth embodiment in accordance with the invention;
Figure 15 is the perspective view that the configuration of loam cake opening/closing apparatus according to a fifth embodiment of the invention is described;
Figure 16 A to 16E be explanation according to fifth embodiment of the invention by end view as the loam cake opening procedure that connection caused of loam cake opening/closing apparatus;
Figure 17 is the allocation plan that schematically illustrates according to the FPD manufacturing equipment of sixth embodiment of the invention;
Figure 18 is the perspective view of explanation according to the transfer chamber of sixth embodiment of the invention;
Figure 19 A and 19B are the cross-sectional views of opening procedure of the loam cake at the explanation transfer chamber place that is provided at Figure 18;
Figure 20 A and 20B are the part zoomed-in views that explanation is used for promoting from the transfer chamber of Figure 18 the device of described loam cake.
Embodiment
Hereinafter, will explain exemplary embodiment of the present invention with reference to the accompanying drawings.
First embodiment
Referring to explanation Fig. 3 and 4 according to the FPD manufacturing equipment of the first embodiment of the present invention, the FPD manufacturing equipment 100 of described first embodiment comprises: vacuum chamber 110; Sealing device 120; Rotary unit 130; Horizontal drive unit 140; Track element 150; And processor unit 160 and 170.
As a result, gapped between chamber body 114 and loam cake 112.Sealing device 120 is used for sealing this gap by the limit of closed chamber body 114 and loam cake 112.As will be readily understood, in the state that chamber body 114 and loam cake 112 separate each other within a predetermined distance, in vacuum chamber 110, set up vacuum atmosphere and need be used to seal the device in described gap therebetween therein.In the present embodiment, described sealing device 120 removably is coupled to loam cake 112.
For this reason, chamber body 114 provides lower flange (flange) 114a around the surface in the top, its along whole upper end face extend with from the chamber 110 to outer process.Loam cake 112 provides upper flange 112a around its rear surface, its along whole rear surface extend with from the chamber 110 to outer process.Here, the rear surface of the upper end face of chamber body 114 and loam cake 112 is respectively the rear surface of the sidewall of the upper end face of sidewall of chamber body 114 and loam cake 112.
Accordingly, sealing device 120 is provided with upper and lower contact area 122 and 124, and it closely contacts with corresponding upper and lower flange 112a and 114a.For obtain upper and lower contact area 122 and 124 and upper and lower flange 112a and 114a between perfect sealing, the contact surface of respective element that necessary is is shaped to correspond to each other.
But, because the chamber sidewall is usually by the hard material such as the metal fact, though described upper and lower flange and described upper and lower contact area by machine work very subtly, the generation of the areolar between the described contact surface is inevitable.Therefore, be difficult to keep the perfect air-tightness of described chamber.For head it off, it is desirable to upper and lower contact area 122 and 124 and provide sealing auxiliary 126 and 128 respectively at its contact surface.Sealing auxiliary 126 and 128 all is slight flexible line.Therefore, when described sealing device 120 closely contacts with 114a with described upper and lower flange 112a, sealing auxiliary 126 and 128 all slightly is retracted in the state that inserts between upper and lower flange 112a and 114a and upper and lower contact area 122 and 124, to prevent the generation of areolar between all described contact surfaces.In a particular case, for more perfect sealing effectiveness, sealing auxiliary 126 and 128 can be made of two or more lines that are provided with parallel to each otherly respectively.In addition, in order to prevent that sealing auxiliary 126 and 128 moves from their desirable positions, it is desirable to form sealing auxiliary location and holddown groove at described upper and lower contact area 122 and 124.
Hereinafter, explain several examples with reference to Figure 4 and 5 A to 5C according to the contact surface shape of the respective element of present embodiment.
At first, as shown in Figure 4, the upper and lower contact area 122 of described sealing device 120 and 124 limits the cross part of L-shape, so that they flatly are parallel to ground surface.Therefore, will be configured to flatly be parallel to ground surface with 124 upper and lower flange 112a that closely contact and the contact surface of 114a with described contact area 122.
Replacedly, as shown in Fig. 5 A, the upper and lower contact area 122a that sealing device 120a can have an inclination and 124a and will with the corresponding upper and lower flange 112a of described upper and lower contact area 122a and 124a coupling and the angle tilt that 114a can be identical with 124a with contact area 122a.The configuration of this inclination is compared with previously described horizontal arrangement has increased contact area between respective element, and can access the enhancing of sealing effectiveness.In addition, have the upper and lower contact area 122a and the 124a of described inclination of the area of increase, enable a plurality of sealing auxiliary 126a and 128a and be easily positioned on it.
Replacedly, as shown in Fig. 5 B and 5C, one of only upper and lower contact area 122a and 124a have the shape of inclination.
The sealing device 120 of present embodiment also provide with automated manner by the vertical drive units 129 of vertical moving.Particularly, a plurality of vertical drive units 129 bottom of being coupled to sealing device 120 is with moving sealing device 120 vertically.Again referring to Fig. 3, in the present embodiment, the respective corners that four vertical drive units 129 are provided at sealing device 120 is sentenced the just stable vertical moving sealing device 120 to strengthen.Replacedly, two vertical drive units 129 can be provided at the opposite side surfaces (lateral surface) of sealing device 120 respectively.When opening loam cake 112, vertical drive units 129 actions are to move down described sealing device 120, to prevent the friction between loam cake 112 and the sealing device 120.
Each vertical drive units 129 comprises cylinder bar and cylinder as shown in Figure 4.Described cylinder bar is coupled to the bottom of sealing device 120 and is used at vertical direction moving sealing device 120.Described cylinder is coupled to the lower end of described cylinder bar and is used to drive described cylinder bar.Here, cylinder can be pneumatic cylinder or hydraulic cylinder.Therefore, when receiving cylinder pressure, described cylinder bar is vertically moved, and is moved vertically so that be connected to the sealing device 120 of described cylinder bar.
The horizontal drive unit is coupled to corresponding of rotary unit 130 to 140, so that they are used to support loam cake 112 and flatly move the loam cake 112 that is coupled to rotary unit 130.Particularly, horizontal drive unit 140 is coupled to the bottom of the corresponding rotary unit 130 that before is coupled to loam cake 112, so that they not only support loam cake 112 but also flatly mobile loam cake 112 when loam cake 112 is opened.Can't deny ground, horizontal drive unit 140 can directly be coupled to certain part of loam cake 112 and not insert rotary unit 130.Each horizontal drive unit 140 comprises rotary unit coupling unit, supporting axis and is used for the track element coupling unit that it moves horizontally.
Track element is coupled to corresponding of horizontal drive unit 140 to 150, is used to provide the mobile route of horizontal drive unit 140.That is, when needs move horizontally described loam cake 112 when opening loam cake 112, track element 150 provides accurate and stable path for moving horizontally of horizontal drive unit 140.If the accurate and stable mobile route of this horizontal drive unit 140 is not provided, horizontal drive unit 140 can unsafe mode be operated, because the loam cake of being supported by described horizontal drive unit 140 112 has very big size and very heavy weight.As shown in Figure 3, the track element 150 of present embodiment is taked the form of linear guide.Track element 150 is coupled to the lower frame (not shown), and it is installed on the floor of clean room so that vacuum chamber 110 separates from the floor of clean room.Therefore, track element 150 can be installed easily, and does not need the processing of difficulty, bores the installing hole of track element by vacuum chamber 110 sidewalls.
Described processor unit (not shown among Fig. 3) is used for the substrate that is loaded into vacuum chamber 110 is carried out required processing.Here, required processing comprises the deposition process that is used on substrate surface forming the film that material requested makes to substrate, and the etching process of film that is used to remove the described formation of part.Therefore, various treatment facilities be can be applied to, depositing device and etching machines comprised according to the vacuum chamber 110 of present embodiment.For example, as processor unit, dry ecthing equipment comprises: upper and lower electrode is provided at the upper and lower position of chamber; Power supply is used to supply RF (radio frequency) electrical power to described upper and lower electrode; And the gas supply, be used for processing gas is introduced described chamber.
Hereinafter, be provided at opening/closed procedure of loam cake 112 in the FPD manufacturing equipment 100 with describing according to present embodiment.
Be suitable for substrate is carried out required processing according to the FPD manufacturing equipment 100 of present embodiment, described processing is to carry out in the state that chamber body 114 and loam cake 112 sealed devices 120 seal hermetically, as shown in Fig. 6 A.When repairing when being provided at the parts of described indoor, at first, vertical drive units 129 is actuated to that both separate predetermined distance from chamber body 114 and loam cake 112 with sealing device 120, as shown in Fig. 6 B.If sealing device 120 from loam cake 112 separately, loam cake 112 is easily movably in the horizontal direction, because have only rotary unit 130 to contact with loam cake 112.
Subsequently, if sealing device 120 is reduced fully, horizontal drive unit 140 is actuated to the top of loam cake 112 from chamber body 114 separated, as shown in Fig. 6 C.Particularly, horizontal drive unit 140 moves horizontally enough radiuss of turn are provided for loam cake 112 along track element 150.
If enough radiuss of turn of loam cake 112 are guaranteed, rotary unit 130 is actuated to loam cake 112 Rotate 180s °, as shown in Fig. 6 D.As a result, the inside face of loam cake 112 makes progress, so that can carry out the maintenance and repair operation to the various processor units that are arranged in the loam cake 112.
If all maintenance and repair operation is accomplished, by carrying out above-mentioned opening procedure on the contrary, loam cake 112 is closed.
Present embodiment allows loam cake 112 to be opened and closed in automatic mode under the operation of described control unit, so that maintenance and repair operation in chamber can more easily be carried out.
Second embodiment
FPD manufacturing equipment according to present embodiment comprises: vacuum chamber; Sealing device and processor unit.In the same manner as in the first embodiment, described vacuum chamber comprises chamber body and loam cake, and described sealing device is configured to the limit of closed chamber body and loam cake.Described processor unit is set in the vacuum chamber so that substrate is carried out required processing.The configuration of described vacuum chamber, described sealing device and described processor unit and function are all identical with those of first embodiment, and therefore do not provide more description.
Different with first embodiment, the FPD manufacturing equipment of present embodiment does not provide rotary unit, horizontal movement unit and track element.The loam cake of present embodiment separates predetermined distance by using supporting element separately from the chamber body.Supporting element is coupled to above-mentioned lower frame to support described loam cake in its lower end.The upper end of supporting element is coupled to loam cake separably.When needs, four supporting elements can be coupled to the respective corners of loam cake or the opposite flank that two supporting elements can be coupled to the correspondence of loam cake.
Admittedly, it should be noted that loam cake can separate predetermined distance from the chamber body, simultaneously by the sealing device support, rather than by the supporting element support.
In the present embodiment, it is desirable to fixture and be further provided correspondence position in the opposite flank of loam cake.Described fixture is used in the coupling of loam cake opening/closing apparatus, and its FPD manufacturing equipment from present embodiment is provided independently and is operated.Described loam cake opening/closing apparatus is designed to move horizontally and rotate loam cake.Therefore, when described fixture was coupled to the loam cake opening/closing apparatus, described loam cake can be moved horizontally by described opening/closing apparatus and rotate.
The 3rd embodiment
Referring to Fig. 7 of the FPD manufacturing equipment 200 that a third embodiment in accordance with the invention is described, FPD manufacturing equipment 200 comprises: following chamber 210; Last chamber 220; Horizontal drive unit 230 and rotary unit 240.Lower and upper chamber 210 and 220 has downward-sloping coupled surface, and the moving direction of its above chamber 220 extends.That is, lower and upper chamber 210 and 220 both coupled surfaces tilt with specific direction, and the moving direction of promptly above chamber 220 is downward-sloping, rather than flatly is parallel to ground surface.Utilize the coupled surface of the inclination of lower and upper chamber 210 and 220, last chamber 220 can easily be separated from following chamber 210 when it is descending the frictionally horizontal slip that does not have on the chamber 210 therebetween.This has eliminated when opening chamber 220 will go up the necessity that chamber 220 promotes predetermined height in order to prevent to produce friction between lower and upper chamber 210 and 220.Therefore, the FPD manufacturing equipment 200 of present embodiment obtains the structure of simplification and the manufacturing cost of minimizing without any need for vertical drive units.
For the air-tightness of maintenance room firmly, it is desirable to potted component 250 is inserted between the coupled surface of lower and upper chambers 210 and 220.Therefore, one of lower and upper chamber 210 and coupled surface of 220 are formed and are useful on the potted component that inserts potted component 250 depression 260 is set.As Fig. 8 A and 8B, and shown in 9A and the 9B, potted component be provided with depression 260 be set up so that enter the mouth than the inner space of described depression narrow with prevent potted component 250 after insertion unexpectedly from 260 separation of caving in.Be out of shape receiving external force owing to having predetermined flexible potted component 250, potted component 250 can insert so that not by easily from 260 separation of caving in with being stabilized.
In the present embodiment, it is desirable to potted component 250 can be relevant to the coupled surface of chamber and change relative position.Particularly, the part of potted component 250 differently is projected on potted component according to potted component 250 and the position relation between 260 of caving in depression 260 is set, so that the relative position of potted component 250 can change according to the opening of last chamber 220/closed procedure.But, owing to promptly going up chamber 220, this fact only do not have vertical-lifting via moving horizontally to open or close, and when moving horizontally in last chamber 220, potted component 250 is projected on potted component at it and depression is set may be damaged in 260 o'clock.Therefore, when it is desirable to move horizontally in last chamber 220, potted component 250 is reduced fully enters depression 260, and is projected on depression 260 when only having set up vacuum atmosphere in the chamber then, thereby is used to safeguard the air-tightness of described chamber.
In the present embodiment, the relative position of potted component 250 can change with following three kinds of methods.
First method is to utilize potted component driver element 270, and it applies mechanical force to the relative position of potted component 250 with change potted component 250, as shown in Figure 8A and 8B.Potted component driver element 270 is set at potted component and is provided with on the inboard of potted component 250 in the depression 260.Driver element 270 have piston structure with from cave in 260 to the extrapolation potted component 250.The change in location of combination seal element 250, for the air-tightness of maintenance room, the integral body that it is desirable to potted component 250 is by afterburning and displacement equably.For conveying capacity is to the intermediary (mediator) of potted component 250 equably from potted component driver element 270 with acting on, power transfer plate 272 is inserted between potted component 250 and the driver element 270.
With above-mentioned first party method, potted component 250 is located in potted component in the retracted state of piston type driver element 270 and is provided with in the depression 260, as shown in Fig. 8 A.If driver element 270 is extended so that potted component 250 is released depression 260 subsequently, potted component 250 is pushed out depression 260 air-tightness with maintenance room, as shown in Fig. 8 B.
Second method is to utilize at potted component the pressurized seal element drives unit 270a that is held in the depression 260 is set, as shown in Figure 9A and 9B.Pressurized seal element drives unit 270a is connected to the external air pump (not shown), if make that air is injected into wherein then driver element 270a is expanded, and bounces back in air-out.Similarly, preferably power transfer plate 272a is inserted between potted component 250 and the driver element 270.
Therefore, in order to keep the air-tightness of chamber, at first, air is injected among the potted component driver element 270a with expansion driver element 270a by air pump.The driver element 270a of expansion releases potted component with potted component 250 depression 260 is set, and as shown in Fig. 9 A, thereby allows the chamber to seal with being sealed.On the contrary, when the opening of last chamber 220/when closed operation is performed, injects the air of driver element 270a and discharge so that driver element 270a is bounced back by air pump.As a result, potted component 250 is reduced once more goes into depression 260, as shown in Fig. 9 B.
Third party's method is for potted component 250a provides internal air passageway 252a so that potted component 250a can air pressure ground expansion or retraction, as shown in Figure 10A and 10B.In this case, potted component 250a is directly connected to the external air pump (not shown) with expansion or retraction.Therefore, when needing the air-tightness of maintenance room, by using air pump, air is injected into potted component 250a, so that the part of potted component 250a is projected on potted component depression 260 is set, as shown in Figure 10 B.Subsequently, when the opening of last chamber 220/when closed operation is performed, the air that injects potted component 250a is discharged by air pump and is made potted component 250a be bounced back and be contained in groove 260 fully, as shown in Figure 10 A.
Hereinafter, the last chamber 220 that provides in the FPD manufacturing equipment 200 according to present embodiment with reference to Figure 11 A and 11B description opens/closed procedure.
At first, as shown in Figure 11 A, last chamber 220 is moved horizontally.In this case, moving horizontally before the beginning of last chamber 220, by using potted component driver element 270, potted component 250 is lowered to prevent that potted component 250 from contacting with last chamber 220.Subsequently, last chamber 220 is moved to the position that guarantees its enough radius of turn by usage level driver element 230.
Afterwards, as shown in Figure 11 B, last chamber 220 is rotated.Particularly, rotary unit 240 is actuated to last chamber 220 Rotate 180s °, so that the various parts that are provided in the chamber 220 upwards are opened to the outside.
In such state of upwards opening of last chamber 220, carried out about any maintenance and repair operation of last chamber 220.Afterwards, by the above-mentioned opening procedure of reverse execution, last chamber is closed.
The 4th embodiment
Present embodiment provides can be with being set to the loam cake opening/closing apparatus that a plurality of vacuum chambers adjacent one another are use.
Usually, for first loam cake that is coupled arrives the first corresponding vacuum chamber, the loam cake opening/closing apparatus is moved to the position near first vacuum chamber.Equally, for second vacuum chamber from correspondence separates another second loam cake or another second loam cake is coupled to the second corresponding vacuum chamber, described opening/closing apparatus is moved to second vacuum chamber to open second loam cake near the position of second vacuum chamber.
Comprise according to the loam cake opening/closing apparatus of present embodiment and to cover loading unit 320, it is used to support and rotates the loam cake 312 that separates from vacuum chamber 310.
In operation, at first, lid loading unit 320 moves to position near vacuum chamber 310 with the loam cake of fixing it on 312.Subsequently, lid loading unit 320 moves by the use lift and loam cake 312 is coupled to vacuum chamber 310 tops, and described lift is arranged in the upper area of clean room usually.For fixing of lift, (lateral side) provides the extension to upper process to lid loading unit 320 in its opposite flank, each has the central concave that is defined in its upper end, and loam cake 312 provides the pin to outer process in its opposite flank, so that the pin of loam cake 312 is positioned at the upper end of covering loading unit 320.Afterwards, loam cake 312 is rotated the exposure that is used for easily being coupled to vacuum chamber 310 or is used for its inside by the rotary drive unit (not shown) that is provided with around rotating shaft.
The loam cake opening/closing apparatus of present embodiment also comprises the track element 350 as rail.Track element 350 is configured to and allows to cover loading unit 320 when a vacuum chamber 310 moves to another and move closer to corresponding of vacuum chamber 310.
Under each vacuum chamber 310, provide support platform 340, be used for that vacuum chamber 310 is positioned at suitable height and protect vacuum chamber 310 not to be subjected to the influence of external impact simultaneously.Similarly, under lid loading unit 320, provide supporting pieces 330.
As shown in Figure 14 A, the track element 350 of present embodiment comprises: main orbit 352 is set to be parallel to the orientation of a plurality of vacuum chambers 310; And Auxiliary Track 354, be set to perpendicular to main orbit, to limit corresponding one mobile route towards vacuum chamber 310.Main orbit 352 is that rod is right, has public cross section, is parallel to vacuum chamber 310 with the supporting pieces 330 that allows to cover loading unit 320 and moves.Auxiliary Track 354 is vertically be connected to main orbit 352 excellent right, shifts to or move apart corresponding vacuum chamber 310 with the supporting pieces 330 that allows to cover loading unit 320.Here, Auxiliary Track is assigned to a corresponding vacuum chamber 310 to 354.
Foot at lid loading unit 320 promptly at the lower surface of supporting pieces 330, provides removable 332 of depression.Removable 332 of supporting pieces 330 is positioned on the track element 350 and moves with the upper surface state of contact with track element 350 vertical or horizontally.
Removable 332 projection that provides downward extension at its turning of depression.Therefore, for the described projection that prevents when supporting pieces 330 slides on the upper surface of track element 350 removable 332 is run into, the pre-position of track element 350 around the intersection of advocate peace Auxiliary Track 352 and 354 is formed with depression 356.Equally, stopper 358 is provided at the intersection precalculated position on every side of track element 350 supporting pieces 330 is limited in predetermined accurate position, covers loading unit 320 at this place and aims at coaxially with a required vacuum chamber 310.
The contact portion that the spherical friction-decreasing device (not shown) of rigidity is provided between supporting pieces 330 and the track element 350 contacts to roll with the upper surface of the bottom of supporting pieces 330 or track element 350, makes supporting pieces 330 to move with the frictional resistance of minimum.
In addition, the drive unit (not shown) is provided on the track element 350 to provide along the required electrical power of the supporting pieces 330 of track element 350 vertical or horizontal ground removable cover loading units 320.
Described driver element also is used for driving and the control friction-decreasing device.Here, friction-decreasing device is oriented to move on track element 350 vertical or horizontally at Y-axle and X-direction of principal axis.
Figure 14 B shows the track element 350 ' according to alternative embodiment of the present invention.As shown in Figure 14 B, track element 350 ' comprises main orbit 352 ', is set to be parallel to the orientation of vacuum chamber 310; And Auxiliary Track 354 ', be set to perpendicular to main orbit 352 ', so that corresponding one mobile route towards vacuum chamber 310 to be provided.Main orbit 352 is that rod is right, has female cross section, to limit shifting chute 356 ' wherein.Main orbit 352 ' extends and is parallel to vacuum chamber 310 with the supporting pieces 330 ' that allows to cover loading unit 320 ' and moves.Auxiliary Track 354 ' is vertically be connected to main orbit 352 ' excellent right, shifts to or move apart a corresponding vacuum chamber 310 with the supporting pieces 330 ' that allows to cover loading unit 320 '.Each Auxiliary Track 354 ' wherein is formed with shifting chute 356 ', and Auxiliary Track is assigned to a corresponding vacuum chamber 310 to 354 '.
Foot at lid loading unit 320 ' promptly at the lower surface of supporting pieces 330 ', provides cubical removable 332 '.Removable 332 of supporting pieces 330 is positioned at track element 350 ' and upward moves with the upper surface state of contact with track element 350 ' vertical or horizontally.
Removable 332 corner that is provided near the lower surface of supporting pieces 330 '.Be inserted into for removable 332 in the groove 356 ' of track element 350 ' to move vertical or horizontally, make supporting pieces 330 ' to go up at track element 350 ' smoothly and slide, and do not have the danger of accidental separation with track element 350 ' state of contact.
Stopper 358 ' is provided at the intersection precalculated position on every side of the Auxiliary Track of advocating peace of track element 350 '.Stopper 358 ' is used for supporting pieces 330 ' is limited in predetermined accurate position, covers loading unit 320 ' at this place and aims at coaxially with a required vacuum chamber 310.
The contact area that the spherical friction-decreasing device (not shown) of rigidity is provided between supporting pieces 330 ' and the track element 350 ' contacts to roll with the upper surface of the lower surface of supporting pieces 330 ' or track element 350 ', makes supporting pieces 330 ' to move with the frictional resistance of minimum.
Here, it is desirable to described friction-decreasing device has and is suitable in any direction the sphere that moves.
The drive unit (not shown) is provided on the track element 350 ', to provide laterally or the required electrical power of supporting pieces 330 ' of removable cover loading unit 320 ' longitudinally.
According to the processing that will carry out, the quantity of vacuum chamber 310 can increase or reduce, and therefore, and track element 350 or 350 ' quantity and length can increase or reduce.
Hereinafter, describe according to of the present invention by the performed process that loam cake is coupled to corresponding process chamber of loam cake opening/closing apparatus with reference to Figure 12,13,14A and 14B.
For example, when being necessary to repair various parts such as the electrode that is arranged in the vacuum chamber 310 or being necessary to check the inner surface of loam cake 312, loam cake 312 is separated from the top of vacuum chamber 310.Subsequently, after any repairing or checked operation were finished, loam cake 312 must be coupled to the top of vacuum chamber 310 once more.Coupling or separation for loam cake 312, loam cake 312 is positioned at and covers after loading unit 320 or 320 ' goes up under the operation of the rotary drive unit of navigation system, lid loading unit 320 or 320 ' can perhaps can be oriented to shift to another along track element 350 or 350 ' from a vacuum chamber 310 at the X-direction of principal axis in Y-direction of principal axis orientation to shift to or to move apart a corresponding vacuum chamber 310 along track element 350 or 350 '.Track element 350 or 350 ' has the grid pattern in Y-direction of principal axis and the extension of X-direction of principal axis.
Therefore, make that along the position that track element 350 or 350 ' moves on near a required vacuum chamber 310 covering loading unit 320 aims at coaxially with vacuum chamber 310 as operculum loading unit 320 or 320 ', the hook that is provided at the lift in the upper area of clean room is positioned at the connecting ring of the loam cake 312 that covers on loading unit 320 or 320 ' and catches.In this way, loam cake 312 is moved toward vacuum chamber 310 and is lowered to accurate position on vacuum chamber 310 tops, thereby loam cake 312 can easily be coupled to vacuum chamber 310.
Subsequently, when needs are coupled another second loam cake 312 during to corresponding second vacuum chamber 310, lid loading unit 320 or 320 ' is moved to another from a vacuum chamber 310.In this case, the position of covering loading unit 320 or 320 ' is stopped device 358 or 358 ' and limits, so that do not break away from predetermined mobile route.Therefore, lid loading unit 320 or 320 ' can move to and required vacuum chamber 310 coaxillay aligned positions.
In a word, for loam cake 312 is coupled to vacuum chamber 310, the lid loading unit 320 or the 320 ' track element 350 or 350 ' along grid pattern that are equipped with loam cake 312 on it are moved in the mode of sliding, so that lid loading unit 320 or 320 ' and vacuum chamber 310 coaxial alignments, thereby loam cake 312 can move and be coupled to vacuum chamber 310 easily.
The 5th embodiment
Referring to Figure 15, comprise according to the FPD manufacturing equipment of present embodiment: vacuum chamber 410; Loam cake 420 and as the connection 430 of loam cake opening/closing apparatus.Vacuum chamber 410 is positioned at suitable height, and is suitable for the substrate that is positioned at is wherein carried out required processing.Vacuum chamber 410 side thereon has opening, is used to be arranged on the maintenance and repair operation of equipment wherein.The upside that loam cake 420 is arranged on vacuum chamber 410 is with sealed vacuum chamber 410 hermetically.Loam cake 420 is used to open or close the passage that is used for installing and removing the equipment that is arranged on vacuum chamber 410.Connect 430 be arranged on vacuum chamber 410 sides with coupling or separate loam cake 420 to or from described vacuum chamber 410.
Connecting 430 comprises: pedestal 432 places on the described floor; Driving shaft 436 extends between the opposed inside wall of pedestal 432; Drive link to 438, have the lower end of the opposite end that is fixed to driving shaft 436 respectively; Follower axle 444 is parallel to driving shaft 436 and extends between the madial wall of pedestal 432; The follower link has the lower end of the opposite end that is fixed to follower axle 444 respectively to 446, to be parallel to the position rotation that drives link 438; Connect link to 456, the upper end that is used for driving link 438 is hinged to loam cake 420, to support the opposite side of loam cake 420 pivotally; And drive unit 452, have an end that is fixed to driving shaft 436 and the other end that is fixed to pedestal 432, and be suitable for the suitable angle of driving shaft 436 rotations.
Driving shaft 436 has horizontally extending rod.Driving shaft 436 provides three corner connectors 448 with arc opposite end at the center, so that the piston rod of drive unit 452 is connected to connector 448.Be used to drive the fixing lateral wall of link 438 to being provided at the outside of the corresponding madial wall that is used for fixing driving shaft 436 ends.
Each drives link 438 and has the clavate of prolongation, and is divided into fixed-link 440 and removable link 442.Removable link 442 is received in fixed-link 440, little by little to extend fixed-link 440 according to its reciprocal moving.One end of fixed-link 440 is hinged to driving shaft 436, and removable link 442 is hinged to a relevant connection link 456.
Each follower link 446 has the retractable clavate of prolongation.The lower end of follower link 446 is fixed to follower axle 444, and the upper end of follower link 446 is hinged to a relevant connection link 456.Fixing length is kept in follower link 446 usually, but optionally bounces back when loam cake 420 is lowered near described floor.Between follower link 446, be inserted into the connecting rod 450 of one or more rod, to be evenly distributed in the load that is applied to follower link 446 when pivot rotates.
Corresponding driving links 438 and is configured so that fixed-link 440 is extended in removable link 442 gradually and but each follower link 446 reasons with retraction structure are, when link 438 and 446 operations were reduced to the position that is suitable for required maintenance and repair operation with the opposite end of loam cake 420 Rotate 180s ° being supported simultaneously loam cake 420 and operation with loam cake 420 that will reversing, link 438 and 446 can easily reduce to reduce loam cake 420.
Replacedly, drive unit 452 can have jackscrew and replace described cylinder, so that driving shaft 436 is rotated suitable angle pivotally.
The upper end of the upper end of the removable link 442 of driving link 438 and follower link 446 is hinged to each the connection link 456 on it, provides the rotary drive unit (not shown) therein and to provide loam cake 420 is rotated the required actuating force of predetermined angulars.Described rotary drive unit (not shown) is supported that by the projection (not shown) its side surface from loam cake 420 extends to and connects the link 456.
Now with reference to Figure 16 A to 16E describe according to present embodiment by connecting opening/closed procedure of 430 performed loam cakes.At first, loam cake 420 is installed in the state on the top of vacuum chamber 410 therein, and pressure is applied to drive unit 452 so that the piston rod of drive unit 452 collapses in the described cylinder with required length.The connector 448 that driving shaft 436 is coupled to tailpiece of the piston rod simultaneously rotatably is coupled in the piston rod pulling of shrinking, thereby makes connector 448 to drive unit 452 rotations.As a result, connector 448 moves so that driving shaft 436 rotates to drive unit 452.
Afterwards, the driving link 438 of being coupled to the opposite end of driving shaft 436 is rotated together with rotating driveshaft 436, and side by side, follower link 446 is rotated, and described follower link 446 is set at the opposite end that drives link 438 sides and be coupled to follower axle 444.Link 438 causes being connected link 456 with 446 this rotation is moved along parabolic orbit, wherein links 438 and link 446 upper end and be hinged to and described the connection link 456.
Comprise the connection 430 that drives link 438, follower link 446 and connect link 456 by use, when drive unit 452 comes rotating driveshaft 436 by using connector 448 and collapsible piston rod, loam cake 420 arrives suitable position, can rotate predetermined angle under the operation of the rotary drive unit of loam cake 420 in being provided in to connect link 456, promptly 180 °, support by connecting link 456 in its opposite flank simultaneously.Here, the correct position of loam cake 420 is such positions, and in this position, the connecting rod 450 that is inserted between the follower link 446 is not collided with the turning of vacuum chamber 410 when loam cake 420 rotations.
Afterwards, the basal surface of loam cake 420 is right upward if loam cake 420 is rotated, the piston rod of drive unit 452 is retracted at utmost, tilt to drive unit 452 so that drive link 438, and simultaneously, follower link 446 is parallel to and drives link 438 and tilt to drive unit 452 via connecting link 456.In such heeling condition, removable link 442 is inserted in the fixed-link 440, and follower link 446 is bounced back, so that loam cake 420 is lowered to the position that the operator can carry out any maintenance and repair operation on standing in the floor easily.
The 6th embodiment
Referring to Figure 17, comprise according to the FPD manufacturing equipment of present embodiment: box (cassette) (not shown), piling up on it has a plurality of substrate (not shown) of handling treated in the FPD manufacturing equipment; Conveyer, the described substrate that is used for being stacked on the box is loaded into the chamber and is stacked on the substrate of being handled fully in the FPD manufacturing equipment once more on box; Load locking room 510; Transfer chamber 520; And process chamber 530.Each of load locking room 510, transfer chamber 520 and process chamber 530 has going into/exporting of the intercommunication that is used for described chamber, and the family of power and influence is provided to open or closes corresponding one and goes into/export.Transfer chamber 520 provides loam cake 522 and horizontal drive unit in the top to 550, its each have the horizontal guide 554 and the supporter 552 of longitudinal extension.
Explain transfer chamber 520 in more detail, transfer robot 540 is provided in the transfer chamber 520 to transmit substrate to load locking room 510 or process chamber 530.Horizontal guide is provided at upper position on the outer side wall surface of transfer chamber 520 to extend at equidirectional to 554.
As shown in Figure 18,19A and 19B, loam cake 522 is configured to the last end in contact with transfer chamber 520, to open transfer chamber 520 when being necessary to repair the transfer robot 540 that is contained in the transfer chamber 520.Between the coupled surface of loam cake 522 and transfer chamber 520, provide air-tightness element (0).In this case, at least one of the coupled surface of loam cake 522 and transfer chamber 520 is formed with the air-tightness element that is used to insert air-tightness element (0) depression is set.
According to example, the horizontal guide 554 of each horizontal drive unit 550 has square column type and is configured to the process chamber concordant with transfer chamber 520 530 and extends.The supporter 552 of horizontal drive unit 550 is used for moving horizontally loam cake 522 in the upper surface state of contact with horizontal guide 554.
Although do not illustrate, horizontal guide 554 can make progress around position in the middle of it or be folded-out.With such structure, when owing to be provided at that transfer robot 540 in the transfer chamber 520 does not need to repair to open or close loam cake 522 time, half one of the horizontal guide 554 of longitudinal extension can make progress pivotally in the outside in centre position or to inner rotary, influence the operation of another chamber to prevent the flat guiding 554 of water.
Now, explain with reference to Figure 19 A and 19B and be provided at opening/closed procedure of transfer chamber in the apparatus for processing plasma according to present embodiment.
For example, when being necessary when being provided at fault transfer robot 540 in the transfer chamber 520 and moving to the outside repair station, at first, supporter 552 is actuated to slide on horizontal guide 554, so that be set to be pushed with the loam cake 522 of the last end in contact of transfer chamber 520, move with the horizontal guide 554 that extends along the longitudinal, thereby open transfer chamber 520.
If transfer chamber 520 is opened fully, be moved to external maintenance and overhaul stand by using transfer robots 540 such as lift.Subsequently, transfer robot 540 is returned to the home position in the transfer chamber 520 after finishing the maintenance and repair operation, and is closed by reverse execution opening procedure loam cake 522.
In the present embodiment, when loam cake 522 is separated from transfer chamber 520 so that when repairing transfer robot 540, loam cake 522 is moved horizontally simply navigating to transfer chamber 520 sides, rather than by using lift to be reduced to described floor.Therefore, there is not floor space separated loam cake 522 occupied.
Referring to Figure 20 A and 20B, another example of horizontal drive unit 550 has been described.When loam cake 522 when the upper end state of contact with transfer chamber 520 is moved horizontally, between loam cake 522 and transfer chamber 520, cause friction, thereby cause being inserted in the damage of the air-tightness element (0) between transfer chamber 520 and the loam cake 522.Therefore, it is desirable to loam cake 522 and be raised required height to prevent owing to friction damages air-tightness element (0).
In order to promote loam cake 522, vertical drive units (C) is attached to the projection 524 under it.Here, each projection 524 is from the umbo of the outer side wall surface of loam cake 522, and vertical drive units (C) is positioned in the supporter 552 on the upper surface that places horizontal guide 554.If outside gas or hydraulic pressure are applied to vertical drive units (C), the driving shaft of vertical drive units (C) promotes projection 524 upwards, is raised with the gap of qualification with transfer chamber 520 so that have the loam cake 522 of projection 524.
After being raised, loam cake 522 is pushed with by the horizontal guide 554 of the longitudinal extension of supporter 522 in the upper position of the lateral wall of transfer chamber 520 and move horizontally.Thereby loam cake 522 can be moved horizontally simultaneously and separate from transfer chamber 520, thereby prevents owing to friction damages air-tightness element (0).
Simultaneously,, provide friction in lower region thereof and reduce wheel, produce wearing and tearing and noise when preventing that it from moving at each supporter 522 that moves horizontally with horizontal guide 554 rolling state of contact.
As conspicuous, the invention provides following effect from top description.
According to a first aspect of the invention, advantage is that it can easily separate even heavy loam cake from vacuum chamber by the simple component parts that use is provided at the vacuum chamber place, and does not promote described heavy loam cake.Equally, first aspect has another advantage be that the opening of loam cake/closed operation can automatically carried out under the control of control unit in single processing subsequently.
According to a second aspect of the invention, in the situation of maintenance and repair operation, last chamber can be opened and not need the vertical-lift operation.The necessity that this has eliminated big-size air cylinder reaches the structural simplification of big-size FPD manufacturing equipment and reduces manufacturing cost.Equally, the opening of last chamber/closed procedure can be simplified, and is used for the needed time of chamber in the maintenance and repair thereby reduce.
According to a third aspect of the invention we, in order to join loam cake to described vacuum chamber again, described loam cake by from the top portion of vacuum chamber from any equipment moves to outside station the vacuum chamber being provided at, loam cake is moved near the position of vacuum chamber and the rotation of tegmentum loading unit, and described lid loading unit slides along the predetermined mobile route of the track element that is connected to vacuum chamber.Cover loading unit and track element by using, loam cake before being coupled can with the vacuum chamber coaxial alignment.This has the effect that makes things convenient for the loam cake coupling.
According to a forth aspect of the invention, open from vacuum chamber in order to make loam cake, the loam cake opening/closing apparatus is coupled to the FPD manufacturing equipment in independent exercisable mode.The loam cake opening/closing apparatus comprises: pedestal is provided at vacuum chamber side to place described floor; Two couple who is connected to described pedestal drives link and follower link; Connect link, with upper end hinged driving link and the follower link; And drive unit, being used for therein, the opposite side of loam cake rotates described driving link by the state of described connection link support.The loam cake opening/closing apparatus places on the described floor, only occupy little floor space and can be easily with described big-the size loam cake is reduced to the position that can easily carry out required maintenance and handle operation.
According to a fifth aspect of the invention, transfer chamber relative position at an upper portion thereof provides horizontal guide, and loam cake provides supporter at its opposite side, so that supporter slides on the upper surface of horizontal guide with the rolling contact condition.Dispose with this, when being necessary to be positioned at transfer robot in the chamber when moving to outside station, loam cake can easily separate from described chamber and not fall dangerous and not needing is used to keep the space of the loam cake that separates by moving horizontally.
In addition, when the air-tightness element was provided at one of contact surface between transfer chamber and the loam cake and locates, the air-tightness element may be owing to the friction that is caused when loam cake moves horizontally damages.Therefore, for solve out/during closed operation to the damage of air-tightness element, supporter is provided with vertical drive units loam cake is promoted suitable height.
Although disclose the preferred embodiments of the present invention for illustrative purposes, it should be appreciated by those skilled in the art that various modifications under the situation of disclosed scope and spirit of the present invention in not deviating from additional claim, interpolation and replacement are possible.
Claims (3)
1. loam cake opening/closing apparatus is used to out/closes to be provided at the loam cake on the vacuum chamber of FPD manufacturing equipment, and described FPD manufacturing equipment is carried out required processing to the substrate that is loaded in the described vacuum chamber, and described loam cake opening/closing apparatus comprises:
Be independent of the connection of described loam cake, described connection is coupled to described loam cake to rotate described loam cake along parabolic orbit pivotally, and so that it is opened or be closed to described vacuum chamber away from described vacuum chamber, wherein said connection comprises:
Plate shape pedestal;
Driving shaft is parallel to the upper surface of described pedestal and locatees, simultaneously at its two ends by described pedestal support, to rotate predetermined angle;
A pair of driving link is coupled to described drive shaft end respectively, regularly to rotate predetermined angle with described driving shaft;
A pair of follower link is parallel to described driving in the described driving link side with respect to described vacuum chamber and links and be provided with, and links identical angle with rotation with described driving;
A pair of connection link is used for the upper end of described driving link is hinged to described follower link, to rotate described loam cake pivotally, supports the opposite side of described loam cake simultaneously at its side surface place in the face of the opposite side of described loam cake; And
Drive unit has the end supported by the center of described driving shaft and by the other end of rotatably supporting with respect to the center of the described pedestal end of described vacuum chamber, to rotate described driving shaft.
2. loam cake opening/closing apparatus as claimed in claim 1, wherein each drives link and comprises fixed-link and removable link, makes described removable link extend or retract to the described fixed-link from described fixed-link.
3. loam cake opening/closing apparatus as claimed in claim 2, wherein:
Described loam cake provides projection at its opposite side; And
Connection chain is connected on its side surface in the face of the opposite side of described loam cake and provides rotary drive unit respectively, and to provide the predetermined required actuating force of angle of described loam cake rotation, described rotary drive unit is supported by a relevant projection.
Applications Claiming Priority (15)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2004-0079416 | 2004-10-06 | ||
| KR1020040079416A KR100622846B1 (en) | 2004-10-06 | 2004-10-06 | Apparatus for manufacturing fpd |
| KR1020040079416 | 2004-10-06 | ||
| KR1020040083843A KR100648403B1 (en) | 2004-10-20 | 2004-10-20 | Plasma processing apparatus |
| KR1020040083843 | 2004-10-20 | ||
| KR10-2004-0083843 | 2004-10-20 | ||
| KR1020040094230 | 2004-11-17 | ||
| KR1020040094230A KR100700292B1 (en) | 2004-11-17 | 2004-11-17 | Maintenance apparatus for FPD manufacturer |
| KR10-2004-0094230 | 2004-11-17 | ||
| KR1020040102975A KR100856679B1 (en) | 2004-12-08 | 2004-12-08 | Apparatus for manufacturing fpd |
| KR10-2004-0102975 | 2004-12-08 | ||
| KR1020040102975 | 2004-12-08 | ||
| KR1020040111693 | 2004-12-24 | ||
| KR10-2004-0111693 | 2004-12-24 | ||
| KR1020040111693A KR100596339B1 (en) | 2004-12-24 | 2004-12-24 | Maintenance opening and shutting apparatus for FPD manufacturer |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101079806A Division CN100550283C (en) | 2004-10-06 | 2005-09-30 | Be used to make the equipment of flat-panel monitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101093793A CN101093793A (en) | 2007-12-26 |
| CN101093793B true CN101093793B (en) | 2010-10-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2007101381918A Expired - Fee Related CN101093793B (en) | 2004-10-06 | 2005-09-30 | Apparatus for manufacturing flat-panel display |
| CNB2005101079806A Expired - Fee Related CN100550283C (en) | 2004-10-06 | 2005-09-30 | Be used to make the equipment of flat-panel monitor |
| CNB2007101381903A Expired - Fee Related CN100511582C (en) | 2004-10-06 | 2005-09-30 | Apparatus for manufacturing flat-panel display |
| CNB2007101381890A Expired - Fee Related CN100521080C (en) | 2004-10-06 | 2005-09-30 | Apparatus for manufacturing flat-panel display |
| CNA2007101381922A Pending CN101093794A (en) | 2004-10-06 | 2005-09-30 | Apparatus for manufacturing flat-panel display |
Family Applications After (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101079806A Expired - Fee Related CN100550283C (en) | 2004-10-06 | 2005-09-30 | Be used to make the equipment of flat-panel monitor |
| CNB2007101381903A Expired - Fee Related CN100511582C (en) | 2004-10-06 | 2005-09-30 | Apparatus for manufacturing flat-panel display |
| CNB2007101381890A Expired - Fee Related CN100521080C (en) | 2004-10-06 | 2005-09-30 | Apparatus for manufacturing flat-panel display |
| CNA2007101381922A Pending CN101093794A (en) | 2004-10-06 | 2005-09-30 | Apparatus for manufacturing flat-panel display |
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| KR (1) | KR100622846B1 (en) |
| CN (5) | CN101093793B (en) |
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| DE102009007897A1 (en) * | 2009-02-08 | 2010-08-12 | Oerlikon Trading Ag, Trübbach | Vacuum chamber for coating plants and method for producing a vacuum chamber for coating plants |
| JP5526988B2 (en) * | 2010-04-28 | 2014-06-18 | 東京エレクトロン株式会社 | Substrate processing apparatus and substrate processing system |
| JP5560909B2 (en) * | 2010-05-31 | 2014-07-30 | 東京エレクトロン株式会社 | Lid holding jig |
| JP5482500B2 (en) * | 2010-06-21 | 2014-05-07 | 東京エレクトロン株式会社 | Substrate processing equipment |
| KR101985006B1 (en) * | 2010-11-30 | 2019-06-03 | 주식회사 탑 엔지니어링 | Apparatus for additionally sealing flat panel display cell |
| EP2574903B1 (en) * | 2011-09-30 | 2015-08-05 | Mettler-Toledo AG | Measuring device for gravimetric moisture determination |
| CN103021910B (en) * | 2012-11-30 | 2015-09-09 | 北京七星华创电子股份有限公司 | Movable type sealed device |
| CN103552107B (en) * | 2013-11-05 | 2016-03-09 | 金龙机电（东莞）有限公司 | The disassembling apparatus of a kind of touch-screen and LCDs and disassembling method |
| CN104451581B (en) * | 2014-12-29 | 2017-02-22 | 中国科学院长春光学精密机械与物理研究所 | Magnetron sputtering coating vacuum box |
| CN106898535B (en) * | 2015-12-21 | 2018-11-20 | 中微半导体设备(上海)有限公司 | The top cover open method of semiconductor processing equipment, system and semiconductor processing equipment |
| CN109860434B (en) * | 2017-12-04 | 2020-11-03 | 苏州迈创信息技术有限公司 | Manufacturing equipment for stage conveying of OLED (organic light emitting diode) module |
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| US5830272A (en) * | 1995-11-07 | 1998-11-03 | Sputtered Films, Inc. | System for and method of providing a controlled deposition on wafers |
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| KR100372147B1 (en) * | 1999-10-15 | 2003-02-14 | 두산중공업 주식회사 | Pulverized coal burner for reducing NOx |
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| KR100515955B1 (en) * | 2003-11-18 | 2005-09-23 | 주식회사 에이디피엔지니어링 | Processing chamber of FPD manufacturing machine having a device for opening the cover |
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2004
- 2004-10-06 KR KR1020040079416A patent/KR100622846B1/en not_active IP Right Cessation
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- 2005-09-30 CN CN2007101381918A patent/CN101093793B/en not_active Expired - Fee Related
- 2005-09-30 CN CNB2005101079806A patent/CN100550283C/en not_active Expired - Fee Related
- 2005-09-30 CN CNB2007101381903A patent/CN100511582C/en not_active Expired - Fee Related
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6009667A (en) * | 1997-09-30 | 2000-01-04 | Tokyo Electron Limited | Hinge mechanism for supporting the open-close cover of a vacuum-process apparatus |
| US6609877B1 (en) * | 2000-10-04 | 2003-08-26 | The Boc Group, Inc. | Vacuum chamber load lock structure and article transport mechanism |
Non-Patent Citations (2)
| Title |
|---|
| JP平10-89482A 1998.04.07 |
| US 6009667 A,全文. |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1790611A (en) | 2006-06-21 |
| CN100550283C (en) | 2009-10-14 |
| CN100521080C (en) | 2009-07-29 |
| CN101101862A (en) | 2008-01-09 |
| CN101093793A (en) | 2007-12-26 |
| CN100511582C (en) | 2009-07-08 |
| KR100622846B1 (en) | 2006-09-19 |
| CN101093794A (en) | 2007-12-26 |
| CN101093792A (en) | 2007-12-26 |
| KR20060030584A (en) | 2006-04-11 |
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