CN1748879A - 基板处理方法及基板处理装置 - Google Patents
基板处理方法及基板处理装置 Download PDFInfo
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- CN1748879A CN1748879A CN200510102833.XA CN200510102833A CN1748879A CN 1748879 A CN1748879 A CN 1748879A CN 200510102833 A CN200510102833 A CN 200510102833A CN 1748879 A CN1748879 A CN 1748879A
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Images
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- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
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Abstract
Description
Claims (22)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004264935 | 2004-09-13 | ||
JP2004264935A JP2006080417A (ja) | 2004-09-13 | 2004-09-13 | 基板処理方法および基板処理装置 |
JP2004318791 | 2004-11-02 | ||
JP2004318792 | 2004-11-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1748879A true CN1748879A (zh) | 2006-03-22 |
CN100553805C CN100553805C (zh) | 2009-10-28 |
Family
ID=36159602
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200510102833XA Expired - Fee Related CN100553805C (zh) | 2004-09-13 | 2005-09-13 | 基板处理方法及基板处理装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2006080417A (zh) |
CN (1) | CN100553805C (zh) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103240244A (zh) * | 2012-02-02 | 2013-08-14 | 林进诚 | 表面清洁装置与表面清洁方法 |
CN103894354A (zh) * | 2012-12-27 | 2014-07-02 | 北京汉能创昱科技有限公司 | 一种基板清洗装置 |
CN106269756A (zh) * | 2016-08-10 | 2017-01-04 | 京东方科技集团股份有限公司 | 毛刷与玻璃基板之间压力检测方法、装置和玻璃清洗设备 |
CN109332302A (zh) * | 2018-10-20 | 2019-02-15 | 方志兰 | 一种汽车发动机缸体缸孔再制造处理机 |
CN110045522A (zh) * | 2019-03-22 | 2019-07-23 | 湖南飞优特电子科技有限公司 | 一种lcd制程pi粉尘污迹不良的控制装置 |
CN111822409A (zh) * | 2020-07-30 | 2020-10-27 | 衡阳市迪曼电子产品有限公司 | 电源适配器用pcb板生产的清洗设备 |
CN113305067A (zh) * | 2021-07-09 | 2021-08-27 | 钟伟 | 一种解决清洁度较低问题的高效率手机覆膜用清洁装置 |
WO2022021732A1 (zh) * | 2020-07-29 | 2022-02-03 | 苏州晶洲装备科技有限公司 | 超高压洗净装置 |
CN114472273A (zh) * | 2020-11-13 | 2022-05-13 | 杰宜斯科技有限公司 | 显示部用清洗装置及其控制方法 |
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2004
- 2004-09-13 JP JP2004264935A patent/JP2006080417A/ja active Pending
-
2005
- 2005-09-13 CN CNB200510102833XA patent/CN100553805C/zh not_active Expired - Fee Related
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103240244A (zh) * | 2012-02-02 | 2013-08-14 | 林进诚 | 表面清洁装置与表面清洁方法 |
CN103894354A (zh) * | 2012-12-27 | 2014-07-02 | 北京汉能创昱科技有限公司 | 一种基板清洗装置 |
CN106269756A (zh) * | 2016-08-10 | 2017-01-04 | 京东方科技集团股份有限公司 | 毛刷与玻璃基板之间压力检测方法、装置和玻璃清洗设备 |
CN106269756B (zh) * | 2016-08-10 | 2018-09-25 | 京东方科技集团股份有限公司 | 毛刷与玻璃基板之间压力检测方法、装置和玻璃清洗设备 |
CN109332302A (zh) * | 2018-10-20 | 2019-02-15 | 方志兰 | 一种汽车发动机缸体缸孔再制造处理机 |
CN109332302B (zh) * | 2018-10-20 | 2021-06-04 | 柳州五菱柳机铸造有限公司 | 一种汽车发动机缸体缸孔再制造处理机 |
CN110045522A (zh) * | 2019-03-22 | 2019-07-23 | 湖南飞优特电子科技有限公司 | 一种lcd制程pi粉尘污迹不良的控制装置 |
WO2022021732A1 (zh) * | 2020-07-29 | 2022-02-03 | 苏州晶洲装备科技有限公司 | 超高压洗净装置 |
CN111822409A (zh) * | 2020-07-30 | 2020-10-27 | 衡阳市迪曼电子产品有限公司 | 电源适配器用pcb板生产的清洗设备 |
CN114472273A (zh) * | 2020-11-13 | 2022-05-13 | 杰宜斯科技有限公司 | 显示部用清洗装置及其控制方法 |
CN113305067A (zh) * | 2021-07-09 | 2021-08-27 | 钟伟 | 一种解决清洁度较低问题的高效率手机覆膜用清洁装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2006080417A (ja) | 2006-03-23 |
CN100553805C (zh) | 2009-10-28 |
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C56 | Change in the name or address of the patentee |
Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. |
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CP01 | Change in the name or title of a patent holder |
Address after: Kyoto Japan Patentee after: Skilling Group Address before: Kyoto Japan Patentee before: DAINIPPON SCREEN MFG Co.,Ltd. Address after: Kyoto Japan Patentee after: DAINIPPON SCREEN MFG Co.,Ltd. Address before: Kyoto Japan Patentee before: Dainippon Screen Mfg. Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091028 Termination date: 20150913 |
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