CN1712886A - Appearance measuring method and device for light interference surface based on wide band - Google Patents
Appearance measuring method and device for light interference surface based on wide band Download PDFInfo
- Publication number
- CN1712886A CN1712886A CN 200510019154 CN200510019154A CN1712886A CN 1712886 A CN1712886 A CN 1712886A CN 200510019154 CN200510019154 CN 200510019154 CN 200510019154 A CN200510019154 A CN 200510019154A CN 1712886 A CN1712886 A CN 1712886A
- Authority
- CN
- China
- Prior art keywords
- broadband light
- worktable
- interference
- perpendicular displacement
- light interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
A method for measuring surface morphology of wide band light interference includes setting object to be measured on metering vertical operation table placed on X - Y table of common base motion , shining light on measured object surface to generate interference fringe by reflection and reference lights and carrying out non-contact measurement based on wide band interference principle ; placing planar reflecting mirror under objective lens , generating interference fringe by reflection and reference lights of planar mirror and carrying out contact measurement based on wide band light interference principle .
Description
Technical field
The present invention relates to a kind of measuring surface form instrument that constitutes based on the broadband light principle of interference, it not only can carry out contact measurement but also can carry out non-cpntact measurement.
Background technology
Contact and the dual-purpose measuring technique of noncontact to surface topography has been used for commercial prod both at home and abroad, Talyscan150 as Britain, domestic AFS-LIS type contact of under grant of national natural science foundation, developing and the dual-purpose contourgraph of noncontact etc., taking a broad view of the dual-purpose surveying instrument of domestic and international development, is that the instrument of two class different measuring principles is pieced together basically.As Talyscan150 is the combination of inductance type contourgraph and laser triangulation instrument, and AFS-LIS is the combination of a self-focusing dial gauge and a laser interference dial gauge.Its subject matter is: owing to be that sensor with the different measuring principle is put together, its resource sharing degree is not high, complex structure, and efficiency of measurement and Measurement Resolution are lower.
Summary of the invention
The present invention is directed to the problems referred to above, propose a kind ofly based on broadband light interference surface topography measurement method and measuring instrument thereof, it not only can carry out contact measurement but also can carry out non-cpntact measurement, and contact is all adopted with a kind of measuring principle with two kinds of measuring methods of noncontact.Measuring system precision height, measurement range is big, the efficient height, shareable resource is many, and function is strong, and very high cost performance is arranged.
Technical scheme provided by the invention is: a kind of based on broadband light interference surface topography measurement method, adopt the broadband light interference device, measured object is placed on the metering type perpendicular displacement worktable, and metering type perpendicular displacement worktable is placed on the co-baseplane motion X-Y worktable.Measuring light irradiation measured object surface by the reflected light and the reference light generation interference fringe of measured surface, utilizes the broadband light principle of interference to carry out non-contact measurement; Transfer horizontalization face catoptron at object lens, plane mirror moves up and down and swings with probe, and measuring light irradiated plane catoptron produces interference fringe by the reflected light and the reference light of plane mirror, utilizes the broadband light principle of interference to carry out contact type measurement.
A kind of based on broadband light interference surface topography measurement instrument, comprise the broadband light interference device, the broadband light interference device is positioned at metering type perpendicular displacement worktable top, metering type perpendicular displacement worktable is placed on the co-baseplane motion X-Y worktable, it is characterized in that: between broadband light interference device and metering type perpendicular displacement worktable a probe assembly is set, this assembly comprises probe assembly travel mechanism, lever, plane mirror and probe, one end of lever is a plane mirror, the other end is a probe, and the support of lever is connected with probe assembly travel mechanism.
Above-mentioned noncontact system for measuring surface appearance comprises the broadband light interference device, carries out the metering type perpendicular displacement worktable of vertical scanning.Metering type perpendicular displacement worktable divides thick, smart the two poles of the earth to drive, and smart the driving by piezoelectric ceramics carried out, and thick the driving is made up of oblique mechanism and servomotor.Metering type perpendicular displacement worktable uniformly-spaced moves, interference fringe movement therewith in the broadband light interference device, CCD notes down the interference image of each moved further, the metering diffraction grating measuring system of metering type perpendicular displacement worktable writes down each step precise displacement, all images is handled and superposeed can obtain the surface three dimension figure.
Above-mentioned contact surface topography measuring system comprises the broadband light interference device, and probe assembly carries out the metering type perpendicular displacement worktable of vertical scanning, co-baseplane motion X-Y worktable.The plane mirror of probe assembly is placed under the object lens, by plane mirror reflection measurement light, obtain one group of stable interference fringe by adjusting the broadband light interference device, the probe of probe assembly is pressed on the measured workpiece, and system can realize the contact type measurement of two kinds of different measuring scopes and resolution.For the surface profile of peak valley maximum difference less than 5 μ m, metering type perpendicular displacement worktable does not scan.Workpiece is by co-baseplane motion X-Y movable workbench, thereby the interference fringe in the broadband light interference device is moved thereupon, can obtain the peak value of corresponding point by each pixel of CCD, can obtain the three-dimensional appearance on surface according to the peak value of being had a few.For the surface profile of peak valley maximum difference greater than 5 μ m, adopt the measuring method of zero-bit servo tracking, promptly when workpiece should be measured highly greatly, interference fringe shifts out, metering type perpendicular displacement movable workbench, interferogram is retracted original position, and metering type perpendicular displacement worktable is noted the height value sum of mobile height value and probe records, has reflected the change of workpiece height.
Two kinds of methods adopt with a kind of principle, the method that this instrument different from the past adopts the sensor of different measuring principle to piece together.The characteristics of this measuring system are can be for many with resource, and function is strong, the efficiency of measurement height, and contact all can reach 10mm with the range of non-cpntact measurement, and has nano level vertical resolution.The present invention can be to the pattern of engineering surface, comprises that shape, waviness, surfaceness combine and measure, and can satisfy the FR surface shape measuring of engineering surface, all can realize non-cpntact measurement for the physical dimension of MEMS, shape, vibration etc. simultaneously.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention.Wherein, ccd video camera 1, broadband light interference device 2, interchangeable lenses group 3, object lens 4, probe assembly travel mechanism 5, catoptron 6, probe 7, workpiece 8, metering type perpendicular displacement worktable 9, metering diffraction grating 10, piezoelectric ceramics 11, oblique mechanism 12, co-baseplane motion X-Y worktable 13, metering diffraction grating signal processing system 14.
Embodiment
Accompanying drawing 1 is embodiment of the present invention structural drawing.Comprise by the broadband light interference device 2 of interfering microscopic system to make up, ccd video camera 1 that is connected with broadband light interference device 2 and probe assembly 5,6,7; Place measured workpiece 8 on the metering type perpendicular displacement worktable 9; Metering diffraction grating measuring system is made up of metering diffraction grating 10 and metering diffraction grating signal processing system 14, and co-baseplane motion X-Y worktable 13 guarantees that worktable moves all the time on the worktable basal plane.
The broadband light interference device can be that Linnik interferes microscopic system, and Michelson interferes microscopic system or Mirau to interfere measuring systems such as microscopic system.
Probe assembly travel mechanism 5 can be a translation mechanism, also can be rotating mechanism, and what adopt in the present embodiment is the translation mechanism that rolls.
Broadband light interference device 2 and metering type perpendicular displacement worktable 9 constitute the non-contact measurement system of surface topographies.By one group of broadband light interference fringe that the reflected light of measured surface produces in broadband light interference device 2, interference fringe is in aplanatism place light intensity maximum, and is sinusoidal variations, the corresponding surperficial protruding peak of its peak value.Metering type perpendicular displacement worktable 9 uniformly-spaced moves, interference fringe movement therewith, the interference image of ccd video camera 1 each moved further of record, metering diffraction grating measuring system 10 and each step precise displacement of 14 records.Can obtain the surface three dimension figure through processing and stack to all images.
Metering diffraction grating measuring system 10 and 14 adopts the metering diffraction grating of 1200 couples of line/mm, through twice diffraction, and to signal 20 segmentations, can reach the resolution of 5nm.
9 fens thick, smart two-stage drive of metering type perpendicular displacement worktable.The smart driving by piezoelectric ceramics 11 carried out, and its design runlength is 30 μ m; The thick driving is made up of oblique mechanism 12 and servomotor, and the inclined-plane gradient of oblique mechanism is 1:10, and screw mandrel pitch is 1mm, and servomotor is exported 10000 pulse/commentaries on classics, and then per step perpendicular displacement amount is 10nm, and stroke is designed to 10mm.Slightly, the smart displacement that drives is by metering diffraction grating measuring system 10 and 14 meterings.
For nano level surface, this system can adopt the phase shift interference method to realize the Measurement Resolution of Subnano-class simultaneously.
In order to adapt to the measurement of different finished surfaces, different measuring area, different lateral resolutions, can measure by the camera lens that interchangeable lenses group 3 is changed different numerical apertures.
Probe assembly 5,6,7 and broadband light interference device 2 and metering type perpendicular displacement worktable 9 constitute the contact measurement system of surface topography.Traveling probe assembly 5,6,7 places under the object lens 4 catoptron 6 of lever back, by adjusting, obtains one group of stable interference fringe by broadband light interference device 2.Probe 7 is pressed on the measured workpiece 8, and system can realize the contact type measurement of two kinds of different measuring scopes and resolution.
For the surface profile of peak valley maximum difference less than 5 μ m, metering type perpendicular displacement worktable 9 does not scan.Workpiece 8 is moved by co-baseplane motion X-Y worktable 13.The variation of workpiece 8 surface profiles causes the variation of probe 7, thereby interference fringe is moved thereupon, can obtain the peak value of corresponding point by each pixel of ccd video camera 1, and peak value moves the height change of corresponding tables facial contour.The variable quantity of the workpiece height of peak value amount of movement representative is by 9 calibrations of metering type perpendicular displacement worktable.According to the interferogram peak value that working surface is had a few, can obtain the three-dimensional appearance on surface.
For the surface profile of peak valley maximum difference greater than 5 μ m, adopt the measuring method of zero-bit servo tracking, it is highly bigger promptly to work as workpiece 8 corresponding mensuration, when surpassing 5 μ m, interference fringe shifts out the visual field, and metering type perpendicular displacement worktable 9 moves, and interferogram is retracted original position.The height value that metering type perpendicular displacement worktable 9 records move (big number) with height value (decimal) sum of probe 7 records, has reflected the change of workpiece 8 height.This method can realize the composite measurement of curved surface, groove, overall size, shape, waviness, roughness.
Claims (2)
1 one kinds based on broadband light interference surface topography measurement method, adopts the broadband light interference device, and measured object is placed on the metering type perpendicular displacement worktable, and metering type perpendicular displacement worktable is placed on the co-baseplane motion X-Y worktable.Measuring light irradiation measured object surface by the reflected light and the reference light generation interference fringe of measured surface, utilizes the broadband light principle of interference to carry out non-contact measurement; Transfer horizontalization face catoptron at object lens, plane mirror moves up and down and swings with probe, and measuring light irradiated plane catoptron produces interference fringe by the reflected light and the reference light of plane mirror, utilizes the broadband light principle of interference to carry out contact type measurement.
2, a kind of based on broadband light interference surface topography measurement instrument, comprise the broadband light interference device, the broadband light interference device is positioned at metering type perpendicular displacement worktable top, metering type perpendicular displacement worktable is placed on the co-baseplane motion X-Y worktable, it is characterized in that: between broadband light interference device and metering type perpendicular displacement worktable a probe assembly is set, this assembly comprises probe assembly travel mechanism, lever, plane mirror and probe, one end of lever is a plane mirror, the other end is a probe, and the support of lever is connected with probe assembly travel mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100191546A CN100451538C (en) | 2005-07-25 | 2005-07-25 | Appearance measuring method and device for light interference surface based on wide band |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100191546A CN100451538C (en) | 2005-07-25 | 2005-07-25 | Appearance measuring method and device for light interference surface based on wide band |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1712886A true CN1712886A (en) | 2005-12-28 |
| CN100451538C CN100451538C (en) | 2009-01-14 |
Family
ID=35718604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100191546A Expired - Fee Related CN100451538C (en) | 2005-07-25 | 2005-07-25 | Appearance measuring method and device for light interference surface based on wide band |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100451538C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102620690A (en) * | 2012-04-01 | 2012-08-01 | 华中科技大学 | Multi-probe flatness detector and flatness detection method |
| CN116295105A (en) * | 2023-03-28 | 2023-06-23 | 北方工业大学 | Optical interference type micro-machined wafer surface morphology measuring device and measuring method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101975873B (en) * | 2010-09-29 | 2012-09-26 | 华中科技大学 | Microscopic white light interferometry-based nano probe device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010083041A (en) * | 1998-06-02 | 2001-08-31 | 추후 | Methods and apparatus for confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation |
| WO2003078925A2 (en) * | 2002-03-14 | 2003-09-25 | Taylor Hobson Limited | Surface profiling apparatus |
| CN1147703C (en) * | 2002-05-17 | 2004-04-28 | 中国科学院上海光学精密机械研究所 | Phase conjugation interferometer for measuring surface appearance of transparent flat plate |
| AU2003256897A1 (en) * | 2002-08-09 | 2004-02-25 | Angstro Vision, Inc. | Determining topography and composition of a sample by using an interferometer |
-
2005
- 2005-07-25 CN CNB2005100191546A patent/CN100451538C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102620690A (en) * | 2012-04-01 | 2012-08-01 | 华中科技大学 | Multi-probe flatness detector and flatness detection method |
| CN116295105A (en) * | 2023-03-28 | 2023-06-23 | 北方工业大学 | Optical interference type micro-machined wafer surface morphology measuring device and measuring method |
| CN116295105B (en) * | 2023-03-28 | 2024-01-16 | 北方工业大学 | Optical interference type micro-machined wafer surface morphology measuring device and measuring method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100451538C (en) | 2009-01-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109596065B (en) | High-precision micro-nano three-dimensional measurement method based on time domain phase shift algorithm | |
| CN101625231B (en) | White light interference profile meter | |
| Gao et al. | On-machine and in-process surface metrology for precision manufacturing | |
| CN1556371A (en) | Multifunction tridimension displacement laser interference measuring system | |
| WO2012155688A1 (en) | Optical free surface 3d profile high-precision non-contact measurement method and device | |
| CN104730293B (en) | A kind of caliberating device of white light interference atomic force scan-probe and scaling method thereof | |
| CN101504273B (en) | Measuring apparatus and method for object plane micro-nano dimension | |
| CN109520420A (en) | A kind of space coordinate at rotation of rotary table center determines method | |
| CN101000252A (en) | Double-raster displacement sensor | |
| CN105509635A (en) | White light interferometer suitable for measurement of large-range surface appearance | |
| Kim et al. | Reverse engineering: high speed digitization of free-form surfaces by phase-shifting grating projection moiré topography | |
| CN105547184B (en) | A kind of flatness error measuring device and its two-dimensional scanning workbench | |
| CN100451538C (en) | Appearance measuring method and device for light interference surface based on wide band | |
| CN1303396C (en) | Micro-electromechanical system testing device and method based on micro-interference technique | |
| CN201476761U (en) | White light interference three-dimensional outline measuring instrument | |
| CN204269071U (en) | A kind of slim electronic two-dimentional precision surface plate | |
| CN101086442A (en) | Optical non-contact three-dimensional measuring instrument | |
| CN100483071C (en) | Contactless surface topography measuring method and instrument based on vertical displacement scanning | |
| CN109579708A (en) | Nanometer resolution displacement measuring device based on optical wedge interference | |
| CN2867287Y (en) | Non-contact type surface topographic measuring instrument based on vertical displacement scanning | |
| CN100422688C (en) | Contact surface topography measuring method and instrument based on vertical displacement scanning | |
| Chang et al. | Non-contact scanning measurement utilizing a space mapping method | |
| Voicu et al. | 3D MEASURING OF COMPLEX AUTOMOTIVE PARTS USING VIDEO-LASER SCANNING. | |
| Ferrucci et al. | Dimensional metrology | |
| CN2867288Y (en) | Non-contact type surface topographic measuring instrument based on vertical displacement scanning |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090114 Termination date: 20110725 |