CN105509635A - White light interferometer suitable for measurement of large-range surface appearance - Google Patents
White light interferometer suitable for measurement of large-range surface appearance Download PDFInfo
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- CN105509635A CN105509635A CN201510807501.5A CN201510807501A CN105509635A CN 105509635 A CN105509635 A CN 105509635A CN 201510807501 A CN201510807501 A CN 201510807501A CN 105509635 A CN105509635 A CN 105509635A
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Abstract
The invention discloses a white light interferometer vertical scanning measurement instrument system suitable for the measurement of large-range surface appearance, and the system comprises a mechanical system, an optical path system, a circuit system, and a software system. The mechanical system comprises a pedestal, an XY direction displacement platform, a deflection angle device, a Z-direction vertical scanning displacement platform, an inclined block, and a U-shaped mechanism. The optical path system comprises an optical grating metering system and a white light interference optical path system. The circuit system comprises a stepping motor driver, a servo motor driver, and a metering system sampling and displacement calculation module. The software system comprises measurement software and evaluation software. The system controls the servo motor to make uniform motion, and the optical grating metering system carries out metering through external trigger. A high-speed camera collects images, and finally the surface appearance of a tested piece is recovered through employing an appearance recovering algorithm. Meanwhile, the measurement results of a plurality of view fields are jointed through employing a three-dimensional jointing algorithm. The system can guarantee the accurate measurement of the surface appearance, is large in vertical and horizontal measurement ranges, is high in measurement efficiency, and is simple in measurement process.
Description
Technical field
The invention belongs to measuring surface form apparatus field, more specifically, relate to a kind of vertical scanning white light interferometer being applicable to broad surface topography measurement.
Background technology
The method of current measuring surface form is a lot, and can be divided into contact and contactless two kinds by the way of contact, what wherein contact mainly adopted is mechanical contact.Non-contact measurement mainly comprises again non-optical flying-spot microscope mensuration, as scanning electron microscope and scanning probe microscopy, with optical measuring method, as Foucault knife method, out of focus method, light cross-section method, reflectometry, Interference Microscope Method, speckle method, polarized light approach, scattering method etc.The methods such as wherein Interference Microscope Method has misphasing interference microscope, confocal microscope, white light interference microscope.
But, further research and practice shows, at least there is following defect or deficiency in above-mentioned measuring surface form instrument: the first, existing apparatus measures workpiece surface appearance efficiency is very low, such as contact measurement method scan mode is spot scan, sweep time is long, and scan efficiency is low, and its precision actuation of the measuring method of Surface scan or line sweep is mostly Piezoelectric Ceramic, actuating speed is slow, and efficiency is low; The second, limit by visual field during existing white light interference microsurgical instrument measured surface pattern, horizontal survey scope is very little, cannot meet the measurement of horizontal broad surface pattern; Three, complicated operation, need to carry out professional training to user of service, measuring process is loaded down with trivial details.Correspondingly, association area is needed badly and is developed the more perfect measuring surface form instrument of function, effectively to overcome the above problems.
Summary of the invention
For above defect or the Improvement requirement of prior art, the object of the present invention is to provide a kind of white light interferometer being applicable to broad surface topography measurement, wherein mating surface measures the application characteristic of self, the structure of white light interferometer key component and set-up mode thereof are designed, propose a kind of three-dimensional splicing algorithm simultaneously, effectively can overcome in prior art and measure that efficiency is low, horizontal survey scope is little and the problem such as measuring process is loaded down with trivial details, possess the advantages such as compact conformation, high precision and low cost simultaneously.
For achieving the above object, according to the present invention, provide a kind of white light interferometer being applicable to broad surface topography measurement, it is characterized in that, the object lens of this white light interferometer are by driven by servomotor, the displacement driven is measured by grating testing system, high speed camera Quick Catch interference figure while the movement of object lens vertical scanning, then utilize shape recovery algorithm that the interference image captured is reverted to the 3 d surface topography of test specimen, after single visual field test completes, XY horizontal table moves, measure next visual field, the measurement result three-dimensional splicing algorithm splicing of multiple visual field, obtain the measurement result of large horizontal extent, wherein:
Described white light interference instrument system mainly comprises two large cores: white light interference module section and machine driven system part.Wherein white light interference module is mainly by the type selecting of each optical component and the determination of position, thus is combined to form optical measuring system; Machine driven system part mainly comprises vertical scanning mechanical drive train and to unify horizontal shift kinematic train, the former moves by driving white light interference module whole or part of devices thus realizes the scanning process of vertical direction, and latter is by driving measurand move in the horizontal direction thus complete the measuring process to the whole measuring surface of measurand.
Described grating testing system carries out accurate measurement to large range displacement and compensates because of the non-error at the uniform velocity brought of servomotor motion simultaneously, grating motion guide rail being fixed a device drives vertical scan system face to contact with essence, adopts photo-beat frequency interferometric principle to devise a set of displacement measurement system based on reflection grating.
Described vertical scanning driving have employed servomotor and adds ball-screw and the mode being equipped with the segmentation of deceleration skewback, utilizes crossed roller guide rail to lead, promotes white light interference module and carry out micrometric displacement in vertical direction.
The recovery algorithms of described three-dimensional appearance software, is inputted as signal by the interference strength produced under camera CCD dynamic exposure, and actual is interferometric phase integration in time, belongs to continuous phase and moves change.Therefore will under the prerequisite controlling exposure position, research high-speed exposure time and continuous phase move the relation of change, are derived by phase integral, show that the equivalent phase of light intensity is expressed.Meanwhile, by under the accurate location of metering system etc. step pitch external trigger, realize the homogeneity of continuous phase movement, further by the research to phase solution method, obtain accurate surface topography restoration result.Arithmetic accuracy is ensured by two aspects.One is the consistance of equivalent phase in continuous phase shift range of different exposure position.This point can be realized by the scanning distance controlled in exposure time interval, and this distance is shorter, and equivalence is better, therefore, needs under different measurement efficiency requirements, control motor sweep velocity and matches with the adjustment camera exposure time.Two is the homogeneitys of distance between metering external trigger exposure interval.
The noise occurred in the 3-D view that described three-dimensional splicing algorithm utilizes Surface Flaw to cause surface topography to recover, sampled point in 3-D view is divided into noise point and non-noise point, for avoiding the impact of noise point, in the characteristic matching stage, noise is converted into available feature, improve the result of characteristic matching, finally reduce the interference that noise data area merges, obtain the three-dimensional splicing result that precision is higher.
As preferred further, described white light interference optics system, employing centre wavelength is 633nm, and rated power is the led white light source of 3w.Objective lens selects Mirau type object lens, its enlargement factor has 10 ×, 20 × etc. plurality of optional.
As preferred further, the basic parameter of the servomotor that described vertical scan system adopts is as follows: rated voltage 18V, rated speed 9140rpm, nominal torque 28.1Nm.Reducer casing reduction gear ratio is 706:1, maximum input speed 6000rpm, output torque 0.75 to 4.5Nm.Guide screw lead is 0.7mm, and deceleration skewback reduction gear ratio is 11:1.
As preferred further, described XY horizontal position moving stage, by two driving stepper motor, drives X-direction and Y-direction two horizontal directions respectively.XY directional run is 50mm × 50mm.
As preferred further, the image that described high speed camera gathers, directly connects computing machine by gigabit network interface, and the view data simultaneously gathered is stored on solid state hard disc.The frame per second of high speed camera can reach 300f/s, only has the storage speed of solid state hard disc can meet the high speed storing of camera image data.
As preferred further, the displacement data of described grating testing system collection is by being transferred to host computer through USB port after slave computer DSP and FPGA process.The servomotor of vertical scanning is furnished with special purpose driver, and the driving order of servomotor is sent to slave computer by host computer by USB port, is sent to the corresponding port of motor servo driver after the process of slave computer processor.The driving order of the stepper motor of XY horizontal drive is also be sent to slave computer by USB port from host computer.
Accompanying drawing explanation
Fig. 1 is the white light interferometer structure lines block diagram of the broad surface topography measurement according to the preferred embodiment of the present invention;
Fig. 2 is the software and hardware overall framework figure of the white light interferometer of broad surface topography measurement according to the preferred embodiment of the present invention;
Fig. 3 is high-speed and continuous vertical scanning and the dynamic exposure shape recovery process flow diagram of the white light interferometer of broad surface topography measurement according to the preferred embodiment of the present invention;
Fig. 4 is the three-dimensional splicing process flow diagram of the white light interferometer of broad surface topography measurement according to the preferred embodiment of the present invention.
In all of the figs, identical Reference numeral is used for representing identical element or structure, wherein:
1-marble base, 2-marble column, 3-Z drive guide rail, 4-Z to drive servomotor, 7-Z to slightly drive guide rail, 8-Z to slightly drive slide block, 9-Z to thick Driving Stepping Motor, 10-U type mechanism, 11-deceleration skewback, 12-grating measurement displacement sensing module, 13-high speed camera, 14-white light interference light path system module, 15-Mirau object lens, 16-XY horizontal position moving stage, 17-pivot angle device to thick driving arm, 6-Z to essence to smart driving arm, 5-Z to essence.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
Following examples of the present invention relate to the white light interferometer of broad surface topography measurement, particularly relate to can realize on a large scale, measure at a high speed, the white light interferometer of precision surface shape recovery.Fig. 1 is the structure three-dimensional line frame graph of the white light interferometer of broad surface topography measurement according to the preferred embodiment of the present invention.As shown in Figure 1, this white light interferometer is placed on air floating platform, and the mechanical structure portion of instrument mainly comprises the thick drive system of Z-direction, Z-direction essence drive system, grating testing system, white light interference light path system, XY horizontal shift pivot angle structure, marble base.
Specifically, the thick drive system of described Z-direction and marble column 2 are fixed, and comprise the thick Driving Stepping Motor of Z-direction 9, the thick driving arm 5 of Z-direction that Z-direction slightly drives guide rail 7, Z-direction slightly to drive the Z-direction on guide rail 7 slightly to drive slide block 8 and slightly drive slide block 8 fixing with Z-direction; Marble column 2 is fixedly connected with marble base 1, for supporting the thick drive system of whole Z-direction; Z-direction slightly drives guide rail 7 to be fixedly connected with marble column 2, and is provided with the thick Driving Stepping Motor 9 of Z-direction; The rotary motion that the thick Driving Stepping Motor 9 of Z-direction exports, by being connected to the ball-screw on its axle, being converted to the Z-direction be arranged on screw mandrel and slightly driving slide block 8 slightly to drive the rectilinear motion of guide rail 7 along Z-direction; The thick driving arm 5 of Z-direction and Z-direction slightly drive slide block 8 to fix, and for supporting whole smart drive system, make smart drive system entirety fixed thereon guide rail 7 slightly can be driven to move along Z-direction under the driving of the thick Driving Stepping Motor 9 of Z-direction thus.
Described Z-direction essence drive system and the thick driving arm 5 of Z-direction are fixed, and comprise Z-direction essence and drive servomotor 6, U-shaped mechanism 10, deceleration skewback 11, Z-direction essence to drive guide rail 3 and Z-direction essence driving arm 4; Z-direction essence drives the thick driving arm 5 of servomotor 6 and Z-direction to fix, and by being connected to the leading screw on its axle, the rotary motion exported is converted to horizontal rectilinear motion and acts on deceleration skewback 11.Deceleration skewback 11 and the pin linear contact lay be fixed in U-shaped mechanism 10, the horizontal rectilinear motion of deceleration skewback is converted to the Z-direction vertical linear motion of U-shaped mechanism 10, and movement velocity is reduced in deceleration skewback inclination ratio, achieve the straight line precise motion of the Z-direction of U-shaped mechanism 10; Z-direction essence drives the movable part of guide rail 3, Z-direction essence driving arm 4 and U-shaped mechanism 10 three to fix simultaneously, and therefore the straight line precise motion of the Z-direction of U-shaped mechanism 10 is the straight line precise motion of the Z-direction of Z-direction essence driving arm 4 and the white light interference light path module 14 fixing with Z-direction essence driving arm 4.
Described grating testing system 12 is fixed with the thick driving arm 5 of Z-direction, and after slightly having driven, Z-direction slightly drives guide rail 7 locked.Extension rod fixing on the grating motion guide rail of grating testing system contacts with smart drive system face, the real-time displacement Z-direction displacement of smart drive system being converted to grating, cause the movement of interference fringe, and be the change of electric signal by the conversion of photoelectric sensor on metering system, be transferred to slave computer displacement calculating value.
Described white light interference light path system and Z-direction essence driving arm 4 are fixed, and comprise mirau object lens 15, white light interference light path module 14 and high speed camera 13.White light interference light path system drives guide rail 3 Precision Linear Moving along Z-direction essence under Z-direction essence drives the driving of servomotor 6, and high speed camera 13 instantaneous exposure obtains the vertical precision actuation scan image of Z-direction simultaneously, obtains interference image information.
Described XY horizontal shift pivot angle structure is fixed on marble base 1, comprises XY horizontal position moving stage 16 and pivot angle device 17.XY horizontal position moving stage adopts stack-design, is namely connected to form by two one dimension worktable, in order to reduce the volume of worktable as far as possible, is directly designed by lower table table top and becomes upper table base plate.In the design, have employed hollow shaft motor leading screw, namely leading screw directly becomes to be integrated with motor through motor, eliminate shaft coupling and support end bearing, the motor leading screw other end is designed with knob, convenient manual adjustments displacement platform in the power-off state, and on arranging, motor leading screw is positioned at the position of guide rail side, reduce the locus of feed screw nut as far as possible, reduce the height of vertical direction.
Described marble base 1 level is placed on air floating platform, so that the vibrations in the isolation external world are on the impact of measuring process, marble material itself has good rigidity simultaneously, force deformation is little, good stability, internal stress distortion is little, and thermal deformation is little, shock resistance well waits good characteristic, to ensureing that the operating accuracy of instrument plays an important role.
Fig. 2 is the software and hardware overall framework figure of the white light interferometer of broad surface topography measurement according to the preferred embodiment of the present invention.As shown in Figure 2, the control signal of servomotor, stepper motor and the continuous data of grating testing system are transmitted between host computer and slave computer by USB port.The image that high speed camera is caught is passed to host computer by kilomega network oral instructions.
The principle of work of said system is explained as follows: user clicks the button of the thick Driving Stepping Motor of control on upper computer software interface, host computer sends the umber of pulse value of stepper motor to slave computer by USB port immediately, slave computer sends the pulse of respective number to stepper motor driver, and driver control stepper motor moves the displacement of specifying.In vertical scanning measuring process, host computer is transmitted control signal by USB port, control servomotor rotates, drive white light interference light path systematic vertical precise motion, high speed camera continuous exposure simultaneously, the interference image data photographed are passed in host computer by kilomega network oral instructions, and slave computer is gathered grating signal and is transferred in host computer by USB port simultaneously.
Fig. 3 is high-speed and continuous vertical scanning and the dynamic exposure shape recovery process flow diagram of the white light interferometer of broad surface topography measurement according to the preferred embodiment of the present invention.Be different from driving type piezoelectric actuator, stepping-take pictures-step mode, in vertical scanning of the present invention and interference image acquisition methods, continuous sweep and the clockless relation of camera exposure, when servomotor moves, when equidistant position is fixed in each arrival, high-speed CCD carries out motion exposure.The accuracy of the picture-taking position of interference image, be directly connected to the precision of shape recovery, in order to ensure that picture-taking position is equidistant, adopt the method that laser metrology system combines with high-speed CCD, utilize the shift value in metering system monitoring scanning motion process, at equidistant place, external trigger camera is taken pictures, and ensures stability and the accuracy of the exposure position under high-velocity scanning.The controling parameters method to set up measured at a high speed is as follows: first according to measurement range size, drives servomotor to rotate, and in conjunction with slowing-down structure, adjustment input voltage reaches applicable sweep velocity; According to the phase shift step pitch of recovery algorithms setting, provide the position of metering external trigger; Require in conjunction with sweep velocity the time shutter providing high-speed CCD by the precision of continuous phase shift, and then import parameters and algorithm parameter by system software, complete vertical scanning, Image Acquisition and shape recovery.
Fig. 4 is the three-dimensional splicing process flow diagram of the white light interferometer of broad surface topography measurement according to the preferred embodiment of the present invention.Three-dimensional splicing technology is as the key laterally automatically measured on a large scale, and its implementation procedure comprises two major parts.The first, to obtaining multipoint 3-D view from setting large-range measuring parameter, enter the whole control flow that splicing software terminates to splicing.This flow process is directly connected to the reliability automatically measured.The second, the core algorithm of three-dimensional splicing.
Above flow process is soluble as follows: the parameter of splicing setting has, X-direction splicing view field number, Y-direction splicing view field number, stitching direction angle, X-direction splicing motor step distance, Y-direction splicing motor step distance.After optimum configurations is good, the flow process of splicing as shown in Figure 4.Feature extracting method in figure, has two kinds.One utilizes noise point, the producing cause of noise in analyzing three-dimensional image principle, scientifically distinguishes the noise point in 3-D view and non-noise point, in conjunction with the step of 3-D view splicing, research carries out characteristic area when choosing, and how to reduce noise to the regioselective impact of best features.Further, for avoiding the impact of noise point, noise, how in the characteristic matching stage, is converted into available feature, improves the result of characteristic matching by research, finally reduces the interference that noise data area merges, obtains the three-dimensional splicing result that precision is higher.Another kind is, for the three-dimensional method for automatically split-jointing of MEMS distinctive functional structure feature.According to MEMS structure feature, provide the different attribute of 3-D view mid point, try to achieve the probability of occurrence distribution that MEMS 3-D view describes based on different attribute, attribute feature according to different characteristic in MEMS divides event area, utilize Maximum Entropy Principle Method to carry out event area border to MEMS 3-D view to solve, realize the Image Segmentation Methods Based on Features of MEMS 3-D view.And then by the result of Image Segmentation Methods Based on Features, the further feature beyond noise is utilized to be optimized coupling and highly to merge, reduce the impact that noise splices 3-D view, improve splicing precision, research characteristic splits the structural parameters evaluation criterion between later MEMS feature further simultaneously.
To sum up, the three-dimensional appearance of the polished surfaces such as MEMS can be measured efficiently according to the white light interferometer of broad surface topography measurement of the present invention, and the two dimension of effects on surface, three-dimensional coefficient are evaluated.This white light interferometer has that precision is high, scope is large, efficiency is high, automaticity high, and its horizontal resolution reaches as high as 0.38um, and vertical survey scope can reach 3mm, vertical resolution 0.1nm, the about 10 ~ 30um/s of vertical survey efficiency.Test shows that it meets the measuring surface form requirement of high speed on a large scale, and make the Measuring Time of grade exemplar within one minute, precision reaches nanoscale.
Claims (4)
1. one kind is applicable to the white light interferometer of broad surface topography measurement, particularly relate to can realize on a large scale, measure at a high speed, the white light interferometer of precision surface shape recovery, mainly comprise the thick drive system of Z-direction, Z-direction essence drive system, grating testing system, white light interference light path system, XY horizontal shift pivot angle structure, marble base;
The thick drive system of described Z-direction and marble column (2) are fixed, and comprise the thick Driving Stepping Motor of Z-direction (9), Z-direction slightly drives guide rail (7), Z-direction slightly drives the Z-direction on guide rail (7) slightly to drive slide block (8) and the Z-direction thick driving arm (5) fixing with slide block (8); Marble column (2) is fixedly connected with marble base (1), for supporting the thick drive system of whole Z-direction; Z-direction slightly drives guide rail (7) to be fixedly connected with marble column (2), and is provided with the thick Driving Stepping Motor of Z-direction (9); The rotary motion that stepper motor (9) exports, by being connected to the ball-screw on its axle, being converted to the Z-direction be arranged on screw mandrel and slightly driving slide block (8) slightly to drive the rectilinear motion of guide rail (7) along Z-direction; The thick driving arm of Z-direction (5) and Z-direction slightly drive slide block (8) to fix, for supporting whole smart drive system, make smart drive system entirety fixed thereon guide rail (7) slightly can be driven to move along Z-direction under the driving of the thick Driving Stepping Motor of Z-direction (9) thus;
Described Z-direction essence drive system and the thick driving arm of Z-direction (5) are fixed, and comprise Z-direction essence and drive servomotor (6), U-shaped mechanism (10), deceleration skewback (11), Z-direction essence to drive guide rail (3) and Z-direction essence driving arm (4); Z-direction essence drives servomotor (6) to fix with the thick driving arm of Z-direction (5), and by being connected to the leading screw on its axle, the rotary motion exported is converted to horizontal rectilinear motion and acts on deceleration skewback (11); Deceleration skewback (11) and the pin linear contact lay be fixed in U-shaped mechanism (10), the horizontal rectilinear motion of deceleration skewback is converted to the Z-direction vertical linear motion of U-shaped mechanism (10), and movement velocity is reduced in deceleration skewback inclination ratio, achieve the straight line precise motion of the Z-direction of U-shaped mechanism (10); Z-direction essence drives the movable part of guide rail (3), Z-direction essence driving arm (4) and U-shaped mechanism (10) three to fix simultaneously, and therefore the straight line precise motion of the Z-direction of U-shaped mechanism (10) is the straight line precise motion of the Z-direction of Z-direction essence driving arm (4) and the white light interference light path module (14) fixing with Z-direction essence driving arm (4).
2. the white light interferometer of broad surface topography measurement as claimed in claim 1, it is characterized in that, the scheme that topography measurement adopts on a large scale is servo driving vertical scanning, namely vertical scan system compares driven by servomotor by big retarding, slowed down by a deceleration skewback simultaneously, realize the vertical scanning of high-accuracy high-efficiency.
3. the white light interferometer of broad surface topography measurement as claimed in claim 2, is characterized in that, the white light interference scan method that the CCD dynamic exposure based on grating measurement external trigger combines; Servo vertical scanning is continuous dynamic scan, is different from traditional piezoelectricity stepping static scanning method, in the process of dynamic scan, and grating measurement real time measure servoscribe length, and equidistant ignition high-speed CCD dynamic exposure.
4. the white light interferometer of the broad surface topography measurement as described in claim 1-3 any one, it is characterized in that, three-dimensional splicing algorithm is have employed in order to improve cross measure scope, matching stage, noise is converted into available feature, improve the result of characteristic matching, finally reduce the interference that noise data area merges, obtain the three-dimensional splicing result that precision is higher; For the three-dimensional method for automatically split-jointing of MEMS distinctive functional structure feature, utilize Maximum Entropy Principle Method to carry out event area border to MEMS 3-D view to solve, realize the Image Segmentation Methods Based on Features of MEMS 3-D view, and then by the result of Image Segmentation Methods Based on Features, the further feature beyond noise is utilized to be optimized coupling and highly to merge, reduce the impact that noise splices 3-D view, improve splicing precision.
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| CN106323195A (en) * | 2016-08-22 | 2017-01-11 | 中国科学院光电技术研究所 | Scanning system suitable for large-stroke high-precision white-light interferometer |
| CN107907049A (en) * | 2017-11-20 | 2018-04-13 | 北京工业大学 | A kind of measuring method of small gear |
| CN110044296A (en) * | 2018-01-17 | 2019-07-23 | 株式会社三丰 | The automatic tracking method and measuring machine of 3D shape |
| CN111238398A (en) * | 2020-03-02 | 2020-06-05 | 四川大学 | Phase shift error detection method based on probability distribution function |
| CN112894788A (en) * | 2019-12-03 | 2021-06-04 | 苏州铭烨晟精密机械有限公司 | Joint arm robot for white light measurement system |
| CN113607084A (en) * | 2021-08-11 | 2021-11-05 | 浙江大学 | Method for measuring submillimeter groove structure based on white light interference and SPGD |
| CN115325963A (en) * | 2022-10-11 | 2022-11-11 | 三代光学科技（天津）有限公司 | Device and method for measuring three-dimensional morphology of surface of wafer |
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| CN113607084A (en) * | 2021-08-11 | 2021-11-05 | 浙江大学 | Method for measuring submillimeter groove structure based on white light interference and SPGD |
| CN115325963A (en) * | 2022-10-11 | 2022-11-11 | 三代光学科技（天津）有限公司 | Device and method for measuring three-dimensional morphology of surface of wafer |
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