CN106323195A - Scanning system suitable for large-stroke high-precision white-light interferometer - Google Patents
Scanning system suitable for large-stroke high-precision white-light interferometer Download PDFInfo
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- CN106323195A CN106323195A CN201610705672.1A CN201610705672A CN106323195A CN 106323195 A CN106323195 A CN 106323195A CN 201610705672 A CN201610705672 A CN 201610705672A CN 106323195 A CN106323195 A CN 106323195A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The invention discloses a scanning system suitable for a large-stroke high-precision white-light interferometer. A light source (1) transmits parallel light beams through a collimating lens set (2). The parallel light beams are converted to two light beams which are perpendicular to each other, wherein one light beam is directly irradiated to a sample (4). The reflected light is reflected to an imaging objective lens (7) by a light splitting prism. The other light beam is reflected by the light splitting prism and is reflected to a reflector (6). The reflected light penetrates through the light splitting prism and is irradiated to the imaging objective lens (7). An interference between the two reflected light beams occurs, and an interference pattern is generated. The interference pattern is imaged to the focal surface of a high-speed CCD (8) through the imaging objective lens (7). The high-speed CCD (8) transmits the image to a computer for displaying in real time through a PCI port. According to the scanning system, a high-performance stepping motor is used as a driver and a high-precision grating ruler is used as position feedback, thereby settling defects of small stroke and low speed in a traditional PZT moving platform. A requirement for large-stroke scanning movement of the white-light interferometer can be satisfied, and furthermore high scanning positioning precision can be realized.
Description
Technical field
The invention belongs to D surface contouring technical field, be specifically related to one and be applicable to large stroke and high precision white light interference
The scanning system of instrument, applies this system can quickly realize the detection of object dimensional pattern, improves the precision of detection, scope
And efficiency.
Background technology
Along with the fast development of micro-nano device, the fast accurate detection to micro-nano structure is had higher requirement.White light
Interfere detection because of its have that measurement scope is big, precision is high, the advantage such as noncontact, low cost, measuring condition are loose, especially for
There is the surface measurement of the MEMS of the noncontinuous surface such as ladder, groove, be a kind of well 3 d surface topography measurement side
Method.Along with the pattern of micro-nano device is from the most complicated, the resolution measured is had higher requirement.White light
The precision of the Z-direction motion of interferometer directly determines the longitudinal resolution of object to be detected.
In the white light interference detecting system of main flow, Z-direction motion platform is to use PZT to drive at present.Object to be detected is placed on
On PZT motion platform, controlled the Z-direction scanning motion of object to be detected by PZT Control card.Although PZT has the highest essence
Degree, but because its stroke is little, speed slow, and price is noble so that it is and application is confined to the least scope.
Summary of the invention
Deficiency based on above-mentioned PZT motion platform, the present invention devises a white light being applicable to large stroke and high precision and does
Relate to the kinetic control system of detector, using motor as driving, use high-precision grating scale to feed back as position, and set
Count a collection data acquisition, data process and motor is controlled in FPGA Control card integrally, improve white light interferometer
Detection range, detection efficiency and accuracy of detection.
The technical solution used in the present invention is: a kind of scanning system being applicable to large stroke and high precision white light interferometer, bag
Include light source, collimation lens set, Amici prism, motion platform, reflecting mirror, image-forming objective lens, high-speed CCD, workbench, Control card and
Computer；Sample is placed on the table, the collimated battery of lens of light source become collimated light beam, by being divided into after Amici prism
Two restraint mutually perpendicular light beam, and wherein light beam shines directly on sample, is reflected back afterwards, and the prismatic reflection that is split arrives
On image-forming objective lens, another light beam, by scene prismatic reflection, is irradiated on reflecting mirror, the light beam of back reflection through Amici prism,
Being irradiated on image-forming objective lens, the light that two bundles are irradiated on image-forming objective lens interferes, and produces interference pattern, will by image-forming objective lens
Interference image becomes the focal plane to high-speed CCD；High-speed CCD will be shown on Image Real-time Transmission to computer by PCI mouth；Computer
Send a command on Control card, control motion platform by serial ports and do scanning motion along Z-direction, when motion platform moves to each
During individual interval location, triggering Control card is sent ccd image and gathers signal, gather the interference pattern of current location；To gather
Interference pattern store in computer to treat subsequent treatment.
Further, reflecting mirror is fixed on motion platform, drives reflecting mirror to do scanning motion by motion platform.
Further, motion platform uses high performance motor and driver, connects Precision Lead-Screw, and generation is swept
Retouch motion, replace conventional piezoelectric actuator with motor, improve the stroke of system scanning, and can realize quickly
Scanning motion, it is achieved efficient D surface contouring.
Further, Control card comprises CPU module, and JTAG configures module, clock module, memory module,
Power module, reseting module, position feedback module, ccd image acquisition module, limit switch module, motor drive module, first
Serial ports, second serial and computer, JTAG configures module, clock module, memory module, power module, reseting module, position
Feedback module, ccd image acquisition module, limit switch module, motor drive module, first serial, second serial is all with central
Processor module is connected, and CPU module passes through first serial, and second serial is connected with computer.
Further, described CPU module is that the FPGA using Xilinx company realizes, and utilizes FPGA
High-speed parallel disposal ability and programmability flexibly, can quickly improve the real-time of system, the most just with height
The grating scale of precision feeds back as the position of scanning motion, greatly improves the control accuracy of system.
Further, scanning system, during doing scanning motion, uses low speed and the speed planning combined at a high speed,
Improve the definition of system acquisition image, enhance stability and the work efficiency of system.
Present invention advantage compared with prior art is:
(1), the present invention is capable of the D surface contouring of the big stroke of high-accuracy high-efficiency rate.
(2), the present invention is lower compared to traditional white light interferometer cost.
Accompanying drawing explanation
Fig. 1 is a kind of scanning system structure principle chart being applicable to large stroke and high precision white light interferometer of the present invention.
Fig. 2 is the control card module block diagram that the present invention uses.
Detailed description of the invention
In order to be more fully understood that technical scheme, it is described in further detail below in conjunction with accompanying drawing.
A kind of scanning system being applicable to large stroke and high precision white light interferometer of the present invention, including light source 1, collimation lens set
2, Amici prism 3, motion platform 5, reflecting mirror 6, image-forming objective lens 7, high-speed CCD 8, workbench 9, Control card 10 and computer
11；Sample 4 is placed on workbench 9, the collimated battery of lens of light source 12 become collimated light beam, by being divided after Amici prism 3
Becoming the two mutually perpendicular light beams of bundle, wherein light beam shines directly on sample 4, and reflection light is split prismatic reflection to imaging thing
On mirror 7, another light beam is split prismatic reflection, is irradiated on reflecting mirror 6, and reflection light beam, through Amici prism, is irradiated to imaging
On object lens 7, two bundle reflection light interfere, and produce interference pattern, are become interference image to high-speed CCD 8 by image-forming objective lens 7
Focal plane；High-speed CCD 8 will be shown on Image Real-time Transmission to computer 11 by PCI mouth；Computer 11 is sent by serial ports
Control motion platform 5 on Control card 10 is ordered to do scanning motion along Z-direction, when motion platform 5 moves to each gap digit
When putting, triggering Control card 10 is sent ccd image and gathers signal, gather the interference pattern of current location；The interference that will gather
Pattern stores in computer to treat subsequent treatment.Reflecting mirror 6 is fixed on motion platform 5, is driven instead by motion platform 5
Penetrate mirror 6 and do scanning motion.Motion platform 5 uses high performance motor and driver, connects Precision Lead-Screw, produces scanning
Motion, replaces conventional piezoelectric actuator with motor, improves the stroke of system scanning, and can realize quickly sweeping
Retouch motion, it is achieved efficient D surface contouring.Control card 10 comprises CPU module 2.1, and JTAG configures module
2.2, clock module 2.3, memory module 2.4, power module 2.5, reseting module 2.6, position feedback module 2.7, ccd image is adopted
Collection module 2.8, limit switch module 2.9, motor drive module 2.10, first serial 2.11, second serial 2.12 and calculating
Machine 2.13, as in figure 2 it is shown, JTAG configures module 2.2, clock module 2.3, memory module 2.4, power module 2.5, reseting module
2.6, position feedback module 2.7, ccd image acquisition module 2.8, limit switch module 2.9, motor drive module 2.10, first
Serial ports 2.11, second serial 2.12 is all connected with CPU module 2.1, and CPU module 2.1 passes through first serial
2.11, second serial 2.12 is connected with computer 2.13.Described CPU module 2.1 is to use Xilinx company
FPGA realizes, and utilizes high-speed parallel disposal ability and the programmability flexibly of FPGA, can quickly improve system
Real-time, simultaneously the most just with high-precision grating scale as the position feedback of scanning motion, greatly improve the control of system
Precision.Scanning system, during doing scanning motion, uses low speed and the speed planning combined at a high speed, improves system acquisition
The definition of image, enhances stability and the work efficiency of system.
A kind of scanning system being applicable to large stroke and high precision white light interferometer of the present invention, specific works mode is as follows:
Step one: become collimated light beam by light source (1) collimated battery of lens 2, mutual by being divided into two bundles after Amici prism 3
Perpendicular light beam.Wherein light beam shines directly on sample 4, and the reflection light prismatic reflection that is split is on image-forming objective lens 7, separately
Light beam is split prismatic reflection, is irradiated on reflecting mirror 6, and reflection light beam, through Amici prism, is irradiated on image-forming objective lens 7,
Two bundle reflection light interfere, and produce interference pattern, by image-forming objective lens 7, interference image become the focal plane to high-speed CCD 8；High
Speed CCD 8 will be shown on Image Real-time Transmission to computer 11 by PCI mouth.
Step 2: computer 11 sends a command to control motion platform 5 on Control card 10 by serial ports and scans along Z-direction
Motion.Primary commands includes serial port setting, and motor movement speed is arranged, position location, the starting point of scanning motion, terminal and
Every arranging.After basic setup completes, scanned by the most rough total travel, find out and occur near interference fringe substantially
Position.By setting the starting point of scanning motion, terminal and interval, motor starts scanning, and system just starts scanning according to setting
Motion.When motion platform 5 moves to each interval location, triggering Control card 10 is sent ccd image and gathers signal, adopt
The interference pattern of collection current location.
Step 3: store in computer by the interference pattern of collection, by white light interference Image Restoration Algorithm, Ke Yishi
Existing object to be detected high accuracy three-dimensional shape recovery.
Generally, a kind of scanning system being applicable to large stroke and high precision white light interferometer of the present invention, have big
Scope speed adjustability, can improve the efficiency of detection greatly.Have employed simultaneously high accuracy motor as driver with
And high-precision grating feeds back as position, it is possible to achieve the scanning of big stroke, good for having the micro-nano device of deep trouth
Effect.Use FPGA as the Control card of system simultaneously, utilize the high-speed parallel of FPGA, make control system have well
Real-time.Above advantage all greatly improves the performance of white light interferometer.And be verified in actually detected.The present invention is not
The technology elaborated and principle belong to the technology well known to field personnel of the present invention.As long as various changes are wanted in appended right
In seeking the spirit and scope of the present invention limiting and determining, these changes will be apparent from, and all utilize the present invention to conceive
Innovation and creation all at the row of protection.
Claims (6)
1. the scanning system being applicable to large stroke and high precision white light interferometer, it is characterised in that: this scanning system includes light
Source (1), collimation lens set (2), Amici prism (3), motion platform (5), reflecting mirror (6), image-forming objective lens (7), high-speed CCD (8),
Workbench (9), Control card (10) and computer (11)；Sample (4) is placed on workbench (9), collimated by light source (1)
Mirror group (2) becomes collimated light beam, and by being divided into the two mutually perpendicular light beams of bundle after Amici prism (3), wherein light beam is direct
Being irradiated on sample (4), the reflection light prismatic reflection that is split is on image-forming objective lens (7), and another light beam is split prismatic reflection, photograph
Being mapped on reflecting mirror (6), reflection light beam, through Amici prism, is irradiated on image-forming objective lens (7), and two bundle reflection light interfere,
Produce interference pattern, by image-forming objective lens (7), interference image become the focal plane to high-speed CCD (8)；High-speed CCD (8) passes through PCI
Mouth is by upper for Image Real-time Transmission to computer (11) display；Computer (11) is sent a command on Control card (10) by serial ports
Control motion platform (5) and do scanning motion along Z-direction, when motion platform (5) moves to each interval location, control will be triggered
Board (10) sends ccd image and gathers signal, gathers the interference pattern of current location；The interference pattern of collection is stored calculating
To treat subsequent treatment in machine.
The scanning system being applicable to large stroke and high precision white light interferometer the most according to claim 1, it is characterised in that: anti-
Penetrate mirror (6) to be fixed on motion platform (5), drive reflecting mirror (6) to do scanning motion by motion platform (5).
The scanning system being applicable to large stroke and high precision white light interferometer the most according to claim 1, it is characterised in that: fortune
Moving platform (5) uses high performance motor and driver, connects Precision Lead-Screw, produces scanning motion, uses motor
Replace conventional piezoelectric actuator, improve the stroke of system scanning, and quick scanning motion can be realized, improve three-dimensional
The efficiency of Shape measure.
The scanning system being applicable to large stroke and high precision white light interferometer the most according to claim 1, it is characterised in that: control
Making sheet card (10) comprises CPU module (2.1), JTAG configuration module (2.2), clock module (2.3), memory module
(2.4), power module (2.5), reseting module (2.6), position feedback module (2.7), ccd image acquisition module (2.8), spacing
Switch module (2.9), motor drive module (2.10), first serial (2.11), second serial (2.12) and computer
(2.13), JTAG configuration module (2.2), clock module (2.3), memory module (2.4), power module (2.5), reseting module
(2.6), position feedback module (2.7), ccd image acquisition module (2.8), limit switch module (2.9), motor drive module
(2.10), first serial (2.11), second serial (2.12) is all connected with CPU module (2.1), central processing unit mould
Block (2.1) passes through first serial (2.11), and second serial (2.12) is connected with computer (2.13).
The scanning system being applicable to large stroke and high precision white light interferometer the most according to claim 4, it is characterised in that: institute
The CPU module (2.1) stated is that the FPGA using Xilinx company realizes, and utilizes the high-speed parallel of FPGA to process energy
Power and flexibly programmability, can quickly improve the real-time of system, uses high-precision grating scale conduct simultaneously
The position feedback of scanning motion, greatly improves the control accuracy of system.
The scanning system being applicable to large stroke and high precision white light interferometer the most according to claim 1, it is characterised in that: sweep
System of retouching, during doing scanning motion, uses low speed and the speed planning combined at a high speed, improves system acquisition image
Definition, enhances stability and the work efficiency of system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610705672.1A CN106323195A (en) | 2016-08-22 | 2016-08-22 | Scanning system suitable for large-stroke high-precision white-light interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610705672.1A CN106323195A (en) | 2016-08-22 | 2016-08-22 | Scanning system suitable for large-stroke high-precision white-light interferometer |
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| CN106323195A true CN106323195A (en) | 2017-01-11 |
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| CN201610705672.1A Pending CN106323195A (en) | 2016-08-22 | 2016-08-22 | Scanning system suitable for large-stroke high-precision white-light interferometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109596065A (en) * | 2018-12-07 | 2019-04-09 | 中国科学院光电技术研究所 | A kind of high-precision micro-nano method for three-dimensional measurement based on time domain phase shift algorithm |
| CN114111750A (en) * | 2021-11-15 | 2022-03-01 | 天津大学 | Method for expanding measurement range of white light interference system |
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Patent Citations (5)
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| WO2009116359A1 (en) * | 2008-03-17 | 2009-09-24 | 国立大学法人東京農工大学 | Contact area measurement device and method for measuring contact area |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109596065A (en) * | 2018-12-07 | 2019-04-09 | 中国科学院光电技术研究所 | A kind of high-precision micro-nano method for three-dimensional measurement based on time domain phase shift algorithm |
| CN109596065B (en) * | 2018-12-07 | 2021-06-01 | 中国科学院光电技术研究所 | High-precision micro-nano three-dimensional measurement method based on time domain phase shift algorithm |
| CN114111750A (en) * | 2021-11-15 | 2022-03-01 | 天津大学 | Method for expanding measurement range of white light interference system |
| CN114111750B (en) * | 2021-11-15 | 2022-11-18 | 天津大学 | Method for expanding measurement range of white light interference system |
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