CN1680792A - 光子混合器件 - Google Patents
光子混合器件 Download PDFInfo
- Publication number
- CN1680792A CN1680792A CNA2005100648903A CN200510064890A CN1680792A CN 1680792 A CN1680792 A CN 1680792A CN A2005100648903 A CNA2005100648903 A CN A2005100648903A CN 200510064890 A CN200510064890 A CN 200510064890A CN 1680792 A CN1680792 A CN 1680792A
- Authority
- CN
- China
- Prior art keywords
- mixer device
- photonic mixer
- electrode
- read
- modulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005670 electromagnetic radiation Effects 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 14
- 230000006870 function Effects 0.000 claims description 8
- 238000002955 isolation Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims 6
- 239000004411 aluminium Substances 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 9
- 239000002800 charge carrier Substances 0.000 description 29
- 239000000758 substrate Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000009826 distribution Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- 238000005286 illumination Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/28—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices being characterised by field-effect operation, e.g. junction field-effect phototransistors
- H10F30/282—Insulated-gate field-effect transistors [IGFET], e.g. MISFET [metal-insulator-semiconductor field-effect transistor] phototransistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/95—Circuit arrangements
- H10F77/953—Circuit arrangements for devices having potential barriers
- H10F77/957—Circuit arrangements for devices having potential barriers for position-sensitive photodetectors, e.g. lateral-effect photodiodes or quadrant photodiodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J2009/006—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength using pulses for physical measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
- G01S17/894—3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
- Processing Of Solid Wastes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102004016624A DE102004016624A1 (de) | 2004-04-05 | 2004-04-05 | Photomischdetektor |
| DE102004016624.2 | 2004-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1680792A true CN1680792A (zh) | 2005-10-12 |
Family
ID=34895472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2005100648903A Pending CN1680792A (zh) | 2004-04-05 | 2005-04-05 | 光子混合器件 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7361883B2 (enExample) |
| EP (1) | EP1584904B1 (enExample) |
| JP (1) | JP4786924B2 (enExample) |
| CN (1) | CN1680792A (enExample) |
| AT (1) | ATE396388T1 (enExample) |
| DE (2) | DE102004016624A1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7420148B2 (en) * | 2002-09-13 | 2008-09-02 | Conti Temic Microelectronic Gmbh | Method and device for determining a pixel gray scale value image |
| DE102004044581B4 (de) * | 2004-09-13 | 2014-12-18 | Pmdtechnologies Gmbh | Verfahren und Vorrichtung zur Laufzeitsensitiven Messung eines Signals |
| KR101623960B1 (ko) * | 2009-06-04 | 2016-05-25 | 삼성전자주식회사 | 광전자 셔터, 이의 동작 방법 및 광전자 셔터를 채용한 광학 장치 |
| DE102012109548B4 (de) | 2012-10-08 | 2024-06-27 | pmdtechnologies ag | Auslesegate |
| DE102013102061A1 (de) | 2013-03-01 | 2014-09-04 | Pmd Technologies Gmbh | Subpixel |
| DE102013209161B4 (de) | 2013-05-16 | 2025-03-13 | pmdtechnologies ag | Lichtlaufzeitsensor |
| DE102013109020B4 (de) | 2013-08-21 | 2016-06-09 | Pmdtechnologies Gmbh | Streulichtreferenzpixel |
| DE102015108961A1 (de) | 2015-06-08 | 2016-12-08 | Pmdtechnologies Gmbh | Bildsensor |
| US10191154B2 (en) | 2016-02-11 | 2019-01-29 | Massachusetts Institute Of Technology | Methods and apparatus for time-of-flight imaging |
| US10337993B2 (en) | 2016-04-15 | 2019-07-02 | Massachusetts Institute Of Technology | Methods and apparatus for fluorescence lifetime imaging with periodically modulated light |
| CN109216500B (zh) * | 2017-06-26 | 2021-08-17 | 苏州科技大学 | 太赫兹波探测器用衬底及其制备方法 |
| US10310085B2 (en) | 2017-07-07 | 2019-06-04 | Mezmeriz Inc. | Photonic integrated distance measuring pixel and method of distance measurement |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19704496C2 (de) * | 1996-09-05 | 2001-02-15 | Rudolf Schwarte | Verfahren und Vorrichtung zur Bestimmung der Phasen- und/oder Amplitudeninformation einer elektromagnetischen Welle |
| AU715284B2 (en) * | 1996-09-05 | 2000-01-20 | Rudolf Schwarte | Method and apparatus for determining the phase and/or amplitude information of an electromagnetic wave |
| DE19821974B4 (de) * | 1998-05-18 | 2008-04-10 | Schwarte, Rudolf, Prof. Dr.-Ing. | Vorrichtung und Verfahren zur Erfassung von Phase und Amplitude elektromagnetischer Wellen |
| US7071482B2 (en) * | 1999-03-24 | 2006-07-04 | Fuji Photo Film Co., Ltd. | Image read-out method and system, solid image sensor, and image detecting sheet |
| ITMI20010443A1 (it) * | 2001-03-02 | 2002-09-02 | Marconi Comm Spa | Metodo e apparati per la rilevazione e compensazione di parametri della pmd in segnali trasmessi lungo collegamenti a fibre ottiche e sistem |
| GB2389960A (en) * | 2002-06-20 | 2003-12-24 | Suisse Electronique Microtech | Four-tap demodulation pixel |
| DE10230225B4 (de) * | 2002-07-04 | 2006-05-11 | Zentrum Mikroelektronik Dresden Ag | Photomischdetektor und Verfahren zu seinem Betrieb und zu seiner Herstellung |
| DE10393761D2 (de) * | 2002-09-13 | 2005-07-28 | Conti Temic Microelectronic | Verfahren und Vorrichtung zur Ermittlung eines Pixel-Grauwertbildes |
-
2004
- 2004-04-05 DE DE102004016624A patent/DE102004016624A1/de not_active Withdrawn
-
2005
- 2005-03-18 DE DE502005004162T patent/DE502005004162D1/de not_active Expired - Lifetime
- 2005-03-18 AT AT05102192T patent/ATE396388T1/de not_active IP Right Cessation
- 2005-03-18 EP EP05102192A patent/EP1584904B1/de not_active Expired - Lifetime
- 2005-04-04 US US11/098,728 patent/US7361883B2/en not_active Expired - Lifetime
- 2005-04-04 JP JP2005107084A patent/JP4786924B2/ja not_active Expired - Lifetime
- 2005-04-05 CN CNA2005100648903A patent/CN1680792A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006023276A (ja) | 2006-01-26 |
| ATE396388T1 (de) | 2008-06-15 |
| US7361883B2 (en) | 2008-04-22 |
| EP1584904A3 (de) | 2007-05-30 |
| DE502005004162D1 (de) | 2008-07-03 |
| JP4786924B2 (ja) | 2011-10-05 |
| US20050237811A1 (en) | 2005-10-27 |
| EP1584904B1 (de) | 2008-05-21 |
| DE102004016624A1 (de) | 2005-10-13 |
| EP1584904A2 (de) | 2005-10-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20051012 |