DE102004016624A1 - Photomischdetektor - Google Patents

Photomischdetektor Download PDF

Info

Publication number
DE102004016624A1
DE102004016624A1 DE102004016624A DE102004016624A DE102004016624A1 DE 102004016624 A1 DE102004016624 A1 DE 102004016624A1 DE 102004016624 A DE102004016624 A DE 102004016624A DE 102004016624 A DE102004016624 A DE 102004016624A DE 102004016624 A1 DE102004016624 A1 DE 102004016624A1
Authority
DE
Germany
Prior art keywords
gates
modulation
readout
memory
readout electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102004016624A
Other languages
German (de)
English (en)
Inventor
Zhanping Dr.-Ing. Xu
Tobias Dipl.-Ing. Möller
Holger Dipl.-Ing. Kraft
Jochen Dipl.-Ing. Frey
Martin Dipl.-Ing. Albrecht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PMDtechnologies AG
Original Assignee
PMDtechnologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PMDtechnologies AG filed Critical PMDtechnologies AG
Priority to DE102004016624A priority Critical patent/DE102004016624A1/de
Priority to AT05102192T priority patent/ATE396388T1/de
Priority to EP05102192A priority patent/EP1584904B1/de
Priority to DE502005004162T priority patent/DE502005004162D1/de
Priority to US11/098,728 priority patent/US7361883B2/en
Priority to JP2005107084A priority patent/JP4786924B2/ja
Priority to CNA2005100648903A priority patent/CN1680792A/zh
Publication of DE102004016624A1 publication Critical patent/DE102004016624A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/28—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices being characterised by field-effect operation, e.g. junction field-effect phototransistors
    • H10F30/282—Insulated-gate field-effect transistors [IGFET], e.g. MISFET [metal-insulator-semiconductor field-effect transistor] phototransistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/95—Circuit arrangements
    • H10F77/953—Circuit arrangements for devices having potential barriers
    • H10F77/957—Circuit arrangements for devices having potential barriers for position-sensitive photodetectors, e.g. lateral-effect photodiodes or quadrant photodiodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J2009/006—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength using pulses for physical measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
    • G01S17/894—3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
  • Processing Of Solid Wastes (AREA)
DE102004016624A 2004-04-05 2004-04-05 Photomischdetektor Withdrawn DE102004016624A1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE102004016624A DE102004016624A1 (de) 2004-04-05 2004-04-05 Photomischdetektor
AT05102192T ATE396388T1 (de) 2004-04-05 2005-03-18 Photomischdetektor
EP05102192A EP1584904B1 (de) 2004-04-05 2005-03-18 Photomischdetektor
DE502005004162T DE502005004162D1 (de) 2004-04-05 2005-03-18 Photomischdetektor
US11/098,728 US7361883B2 (en) 2004-04-05 2005-04-04 Photonic mixer device
JP2005107084A JP4786924B2 (ja) 2004-04-05 2005-04-04 フォトニックミキサー装置
CNA2005100648903A CN1680792A (zh) 2004-04-05 2005-04-05 光子混合器件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004016624A DE102004016624A1 (de) 2004-04-05 2004-04-05 Photomischdetektor

Publications (1)

Publication Number Publication Date
DE102004016624A1 true DE102004016624A1 (de) 2005-10-13

Family

ID=34895472

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102004016624A Withdrawn DE102004016624A1 (de) 2004-04-05 2004-04-05 Photomischdetektor
DE502005004162T Expired - Lifetime DE502005004162D1 (de) 2004-04-05 2005-03-18 Photomischdetektor

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE502005004162T Expired - Lifetime DE502005004162D1 (de) 2004-04-05 2005-03-18 Photomischdetektor

Country Status (6)

Country Link
US (1) US7361883B2 (enExample)
EP (1) EP1584904B1 (enExample)
JP (1) JP4786924B2 (enExample)
CN (1) CN1680792A (enExample)
AT (1) ATE396388T1 (enExample)
DE (2) DE102004016624A1 (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1635452A1 (de) 2004-09-13 2006-03-15 PMDTechnologies GmbH Verfahren und Vorrichtung zur Laufzeit-sensitiven Messung eines Signals
WO2014056749A1 (de) 2012-10-08 2014-04-17 Pmdtechnologies Gmbh Auslesegate
DE102013102061A1 (de) 2013-03-01 2014-09-04 Pmd Technologies Gmbh Subpixel
DE102013109020A1 (de) 2013-08-21 2015-02-26 Pmdtechnologies Gmbh Streulichtreferenzpixel
DE102015108961A1 (de) 2015-06-08 2016-12-08 Pmdtechnologies Gmbh Bildsensor
CN109004060A (zh) * 2017-06-26 2018-12-14 苏州科技大学 太赫兹波探测器
DE102013209161B4 (de) 2013-05-16 2025-03-13 pmdtechnologies ag Lichtlaufzeitsensor

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7420148B2 (en) * 2002-09-13 2008-09-02 Conti Temic Microelectronic Gmbh Method and device for determining a pixel gray scale value image
KR101623960B1 (ko) * 2009-06-04 2016-05-25 삼성전자주식회사 광전자 셔터, 이의 동작 방법 및 광전자 셔터를 채용한 광학 장치
US10191154B2 (en) 2016-02-11 2019-01-29 Massachusetts Institute Of Technology Methods and apparatus for time-of-flight imaging
US10337993B2 (en) 2016-04-15 2019-07-02 Massachusetts Institute Of Technology Methods and apparatus for fluorescence lifetime imaging with periodically modulated light
US10310085B2 (en) 2017-07-07 2019-06-04 Mezmeriz Inc. Photonic integrated distance measuring pixel and method of distance measurement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19704496C2 (de) * 1996-09-05 2001-02-15 Rudolf Schwarte Verfahren und Vorrichtung zur Bestimmung der Phasen- und/oder Amplitudeninformation einer elektromagnetischen Welle
DE10230225A1 (de) * 2002-07-04 2004-01-15 Zentrum Mikroelektronik Dresden Ag Photomischdetektor und Verfahren zu seinem Betrieb und zu seiner Herstellung
WO2004027359A1 (de) * 2002-09-13 2004-04-01 Conti Temic Microelectronic Gmbh Verfahren und vorrichtung zur ermittlung eines pixel-grauwertbildes

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU715284B2 (en) * 1996-09-05 2000-01-20 Rudolf Schwarte Method and apparatus for determining the phase and/or amplitude information of an electromagnetic wave
DE19821974B4 (de) * 1998-05-18 2008-04-10 Schwarte, Rudolf, Prof. Dr.-Ing. Vorrichtung und Verfahren zur Erfassung von Phase und Amplitude elektromagnetischer Wellen
US7071482B2 (en) * 1999-03-24 2006-07-04 Fuji Photo Film Co., Ltd. Image read-out method and system, solid image sensor, and image detecting sheet
ITMI20010443A1 (it) * 2001-03-02 2002-09-02 Marconi Comm Spa Metodo e apparati per la rilevazione e compensazione di parametri della pmd in segnali trasmessi lungo collegamenti a fibre ottiche e sistem
GB2389960A (en) * 2002-06-20 2003-12-24 Suisse Electronique Microtech Four-tap demodulation pixel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19704496C2 (de) * 1996-09-05 2001-02-15 Rudolf Schwarte Verfahren und Vorrichtung zur Bestimmung der Phasen- und/oder Amplitudeninformation einer elektromagnetischen Welle
DE10230225A1 (de) * 2002-07-04 2004-01-15 Zentrum Mikroelektronik Dresden Ag Photomischdetektor und Verfahren zu seinem Betrieb und zu seiner Herstellung
WO2004027359A1 (de) * 2002-09-13 2004-04-01 Conti Temic Microelectronic Gmbh Verfahren und vorrichtung zur ermittlung eines pixel-grauwertbildes

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1635452A1 (de) 2004-09-13 2006-03-15 PMDTechnologies GmbH Verfahren und Vorrichtung zur Laufzeit-sensitiven Messung eines Signals
DE102004044581B4 (de) * 2004-09-13 2014-12-18 Pmdtechnologies Gmbh Verfahren und Vorrichtung zur Laufzeitsensitiven Messung eines Signals
WO2014056749A1 (de) 2012-10-08 2014-04-17 Pmdtechnologies Gmbh Auslesegate
DE102012109548A1 (de) 2012-10-08 2014-06-12 Pmdtechnologies Gmbh Auslesegate
DE102012109548B4 (de) 2012-10-08 2024-06-27 pmdtechnologies ag Auslesegate
DE102013102061A1 (de) 2013-03-01 2014-09-04 Pmd Technologies Gmbh Subpixel
DE102013209161B4 (de) 2013-05-16 2025-03-13 pmdtechnologies ag Lichtlaufzeitsensor
DE102013109020A1 (de) 2013-08-21 2015-02-26 Pmdtechnologies Gmbh Streulichtreferenzpixel
DE102013109020B4 (de) * 2013-08-21 2016-06-09 Pmdtechnologies Gmbh Streulichtreferenzpixel
US9678200B2 (en) 2013-08-21 2017-06-13 Pmdtechnologies Gmbh Scattered light reference pixel
DE102015108961A1 (de) 2015-06-08 2016-12-08 Pmdtechnologies Gmbh Bildsensor
CN109004060A (zh) * 2017-06-26 2018-12-14 苏州科技大学 太赫兹波探测器

Also Published As

Publication number Publication date
JP2006023276A (ja) 2006-01-26
ATE396388T1 (de) 2008-06-15
US7361883B2 (en) 2008-04-22
EP1584904A3 (de) 2007-05-30
CN1680792A (zh) 2005-10-12
DE502005004162D1 (de) 2008-07-03
JP4786924B2 (ja) 2011-10-05
US20050237811A1 (en) 2005-10-27
EP1584904B1 (de) 2008-05-21
EP1584904A2 (de) 2005-10-12

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OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8139 Disposal/non-payment of the annual fee