CN1663329B

CN1663329B - Production of via hole in flexible circuit printable board

Info

Publication number: CN1663329B
Application number: CN038148994A
Authority: CN
Inventors: 木暮隆一郎; 横泽伊裕; 山口裕章; 中山修
Original assignee: Ube Industries Ltd
Current assignee: Ube Corp
Priority date: 2002-04-24
Filing date: 2003-04-24
Publication date: 2011-05-18
Anticipated expiration: 2023-04-24
Also published as: KR20100101018A; WO2003092344A1; CN1663329A; JP3941573B2; AU2003222457A1; KR20040097387A; US7918021B2; US20050162835A1; JP2003318519A; US20090002953A1

Abstract

A flexible circuit printable board can be favorably produced by a process composed of steps of forming in a polyimide film having a metal coat on each surface side a via hole penetrating at least one metal coat and the polyimide film; and applying a mixture of liquid and abrasive grains under pressure onto the via hole, whereby smoothing an edge of the via hole and cleaning the via hole.

Description

But the manufacturing of via hole on the flexible circuit printed panel

Invention field

The present invention relates to a kind of at flexible circuit (or wiring) but the manufacture method of via hole in the printed panel and further relates to the manufacture method of a kind of flexible circuit (or wiring) printed panel.

Background of invention

Recently, developed the order assembled plate for assembling various electronic components to high-density.The order assembled plate places the circuit printing plate on another piece to constitute by one of polylith.For example blind hole or through hole are made circuit printing plate by making conductive vias in the circuit board that all has predetermined circuit pattern on every side surface.

But the manufacturing of blind hole is by forming the hole with etching method in the metal coating of circuit printed panel, but forms the hole with puncher, drilling machine, carbon dioxide laser, UV-YAG laser or excimer laser then in the dielectric base of circuit printed panel.

The interim publication 10-154730 of Japan has described a kind of method of making blind via hole, comprises step: utilize the photosensitive and corrosion coating that is laid on the copper layer to give bilayer-CCL the copper layer processing graphic pattern of (adopting the copper-clad lamination of polyimide film); Use CO ₂Laser is removed into polyimide film in the graph region to form blind hole; Removing is deposited on the polyimide resin of blind hole bottom; Remove part copper layer and a small amount of polyimide resin via etching or decontamination; Thereby make the blind hole conduction be converted into blind via hole by copper facing.

In the manufacturing of via hole, generate metallic bur power usually.Remove metallic bur power by polishing or dry type sandblast (dry-blasting) subsequently.Decontamination (inside in purge path hole) is undertaken by the wet type decontamination method that adopts the alkaline manganese saline solution.

Polish the non-elongation that causes longitudinal direction (machine direction) wittingly, thereby make the composite membrane of metal/polyimide film produce anisotropic change in size.The polyimides wall should clean by additional decontamination step in the via hole.Dry type sandblast meeting generates dust in the sandblast step, it is not favourable therefore adopting the dry type sandblast in clean room.In addition, hindered adhering to of in photo-lithographical steps subsequently photosensitive and corrosion agent adhering to abrasive grain on metal/polyimide film composite membrane during the sandblast step.Wet type decontamination method is carried out under heating in strong alkali solution, therefore is easy to damage polyimide film and may forms the crack in polyimide film.

Summary of the invention

An object of the present invention is to provide a kind of improved method, be used at flexible circuit (or wiring) but make via hole on the printed panel.

Another object of the present invention provides a kind of improved method, is used to make flexible circuit (or wiring) printed panel.

The invention belongs to make flexible circuit (or wiring) but the method for printed panel comprises step:

All have on every side surface in the polyimide film of metal coating and form via hole, this via hole passes metal coating and polyimide film one of at least; And

The mixture of liquid and abrasive grain is administered on the via hole adding to depress, makes the edge of via hole smooth and clean (being decontamination) via hole thus.

The mixture of liquid and abrasive grain can be called " wet blast (wet-blasting) " adding using of depressing.Make smooth can being undertaken in edge of via hole by removing the metal film burr that in making the via hole step, forms.During the purge path hole, polyimides burr major part is removed from via hole.

In said method, preferably adopt following execution mode:

(1) via hole is that promptly the one side is covered with a metal level with the laser blind hole that forms of carbon dioxide laser, UV-YAG laser or excimer laser for example.

(2) via hole is the through hole that forms with puncher or drilling machine.

(3) polyimide film that all has metal coating on every side surface has thermoplastic polyimide layer by making on the every side surface that metal film is placed multilayer polyimide film on every side surface of this multilayer polyimide film.

(4) metal coating has the terminal of plating with gold or tin.

(5) impose in blind hole diameter and the polyimide film on the side of laser ratio in the face of the blind hole diameter on the side of porose metal film in the metal film in 1.0 to 1.4 scopes.

(6) average diameter of blind hole is in 30 to 200 mu m ranges.

(7) blind hole that forms continuously in layer of metal film and polyimide film has the degree of depth in 20 to 110 mu m ranges.

(8) thickness of metal film is in 1 to 50 mu m range.

(9) thickness of metal film that imposes the laser side and the ratio of the thickness of metal film of opposition side are in 0.02 to 1.0 scope.

(10) polyimide film has three-decker, wherein a polyimide layer on a side surface and a polyimide layer on the opposite side surface, two-layer have an identical linear expansion coefficient.

(11) but all there is perforation on flexible circuit printed panel both sides.

(12) but the flexible circuit printed panel has 1 to 1,000/100mm ²The via hole of quantity.

The present invention further belongs to the method for making the flexible circuit printed panel, and it comprises step:

The mixture of liquid and abrasive grain is administered on the via hole adding to depress, makes the smooth and purge path hole, edge of via hole thus;

With the inside of metal deposition via hole so that the metal coating on the side surface be electrically connected with the lip-deep metal coating of opposite side; And

Every layer of metal coating of etching is to form predetermined circuit pattern.

In above-mentioned method, the following execution mode of preferred employing:

(1) this method further is included in the step that forms solder mask (soldermask) on the circuit pattern.

(2) this method also is included on the solder mask step of plated with gold layer on the step that forms perforate and the metal level in perforate.

(3) solder mask by under the vacuum on circuit pattern laminated photosensitive etchant resist and the step of the etchant resist experience processing predetermined pattern of lamination is formed.

Summary of drawings

Fig. 1 is the flexible circuit printed panel of being made by the inventive method.

Fig. 2 is the photo of expression through the via hole cross section that wet blast method of the present invention is handled.

Fig. 3 is the photo of expression without the via hole cross section of wet blast.

But Fig. 4 is the photo in the cross section, copper-plated via hole of the flexible circuit printed panel of making among the expression embodiment 1.

But Fig. 5 is the photo in the cross section, copper-plated via hole of the flexible circuit printed panel of making among the expression comparative example 1.

Detailed Description Of The Invention

Further describe the present invention with reference to Fig. 1.

Flexible circuit printed panel 1 of the present invention is made by following steps:

(1) form the step of via hole 6 in the polyimide film 4 that all has metal coating 2,3 on every side surface, this via hole passes metal coating 3 and polyimide film 4 one of at least;

(2) mixture of liquid and abrasive grain is depressed the step that is administered on the via hole 6 adding, make thus the smooth of the edge and the purge path hole of via hole;

(3) in via hole, form the coat of metal 5 so that the step that the metal coating 2 on the side surface is electrically connected with the lip-deep metal coating 3 of opposite side with metal; And

(4) every layer of metal coating of etching 2,3 is to form the step of predetermined circuit pattern.

If need, can on circuit pattern, further form solder mask 7. Form a perforate at solder mask 7, then gold layer 8 is plated in this perforate.

Solder mask preferably by under the vacuum on printed circuit pattern laminated photosensitive etchant resist and the step of the etchant resist experience processing predetermined pattern of lamination is formed.

Metal coating on the polyimide film is metal forming or the film that comprises one of copper, aluminium, iron, gold or its alloy. Metal coating preferably is made of rolled copper foil (rolled copper foil), electrolytic copper foil, depositing copper film and/or copper plating film. Copper Foil preferably has according to R_zBe 3 μ m or lower moderate roughness, more preferably in 0.3 to 3 mu m range, most preferably in 1.5 to 3 mu m ranges. Copper Foil with this roughness can trade (brand) name VLP, LP (or HTE) obtain from commerce. The coat of metal preferably has the thickness of 1 to 12 μ m, more preferably 2 to 9 μ m. Metal coating with big thickness is unsuitable for the retrofit of pattern. Can adopt after the surface treatment and have little R_zMetal forming.

Polyimide film can be individual layer polyimide film heat-resisting, flexible, that have glass transition temperature in 275 to 375 ℃ of scopes. Yet, the optimum selecting three-layer polyimide composite film, it has one deck core polyimide film and a pair of thermoplasticity and/or flexible polyimides top layer, and the core polyimide film has 300 ℃ or higher glass transition temperature, and the polyimides top layer has 200 to 300 ℃ glass transition temperature. This three stratas acid imide composite membrane preferably has the thickness and 400 of 7 to 50 μ m to 1000kgf/mm²The tensile modulus of elasticity of (at 25 ℃).

Preferably make by extruding three strata acid imide composite membranes under heating between the pair of metal paper tinsel at the polyimide film that all has metal coating on every side surface, for example use double belt press. Perhaps, the metal vapour phase is deposited on the two sides of single polyimide film or three strata acid imide composite membranes, then the copper layer is laid on by electrolytic coating on the metal level of deposition (being metal gas deposition-copper electroplating method). In the method, the vacuum discharge of polyimide film experience is processed, with in a succession of netted projection of film Surface Creation. Then directly or after placing it for a moment under atmospheric conditions, the using plasma ablution cleans the polyimide film of this process discharge process. On the surface of the polyimide film that is cleaned, be preferably formed at least two-layer gas deposition metal level, implement the metallic copper plating at metal deposition layer subsequently.

Above-mentioned metal gas deposition-copper electroplating method can carry out with the metal of various combinations. The metal deposition film preferably is made of two-layer sedimentary deposit, i.e. bottom and surface layer. Bottom can be made of chromium, titanium, palladium, zinc, molybdenum, nickel, cobalt, zirconium, iron, nickel-copper alloy, nickel-billon and nickel-molybdenum alloy. Surface layer (or intermediate layer) can be made of copper. The coat of metal that forms on the metal deposition layer preferably is made of copper, copper alloy or silver. Copper is optimum. Can form the copper coating layer to cover pin hole by chemical plating. Metal deposition layer can have for example 0.1 to 1.0 μ m of big thickness, and electrolytic coating copper directly can be laid on this thick sedimentary deposit.

Preferably, can be in water-soluble bath of liquid, this aqueous solution contains 50-200g/L copper sulphate, 100 to 250g/L sulfuric acid and a small amount of brightener (further preferred an amount of chlorine), at 15 to 45 ℃ temperature, 0.1 to 10A (ampere)/dm²Current density, Aerated stirring, 0.1 to 2m/min migration velocity and be the electrolytic coating that carries out copper under the condition of negative pole with copper.

In the method for the invention, at least one deck of metal coating or polyimide film, make via hole. Available puncher, drilling machine, carbon dioxide laser, UV-YAG laser instrument or excimer laser are made via hole. Preferred puncher or the UV-YAG laser instrument of using. The UV-YAG laser instrument can be launched the laser in the UV zone (260 to 400nm oscillation wavelength scopes). Laser can be applied on the metal coating face of the polyimide film that scribbles metal, have 20 to 200 μ m, the preferably approximately via hole of the diameter of 30 to 100 μ m thereby form. Laser is applied on the polyimide layer after defocusing simultaneously, thereby forms the hole with same diameter in polyimide film.

During making via hole, metallic bur power generates around via hole, and metallic bur power also is deposited in the via hole. In addition, the polyimides dust also is deposited in the via hole. Remove these burrs and dust by the wet blast method, the method is by the mixture of liquid and abrasive grain is administered to via hole and implements adding to depress.

Can place by the polyimide film that will scribble metal on the sand blasting unit with magnetic cell, the metal cap that utilizes then magnetic force will have predetermined openings places tightly on the polyimide film that scribbles metal and carries out wet blast. Preferable alloy covers on its bottom surface and has for example elastic layer of polyurethane rubber layer, thereby does not damage the metal coating on the polyimide film. An embodiment of this wet blast device is described among the interim publication 9-295266 of Japan.

The mixture that is used for wet blast preferably comprises the abrasive grain with 1 to 10 μ m diameter (for example aluminium powder) of water and 5 to 20 volume %. Mixture under high pressure is coated on the via hole with about flow velocity of 10 to 300m/sec.

Experienced then the via hole of wet blast step with metal deposition, so that the metal coating on the side surface is connected with the lip-deep metal coating of opposite side. Metal deposition in the via hole can carry out according to the method described in the interim publication 11-51425 of Japan.

For example, by forming the inwall of Pd-Sn film activation via hole, preferably plate with metal by the cathode copper plating then. Use palladium-tin colloid catalyst to make the Pd-Sn film, and the Pd-Sn film is immersed in the alkaline accelerator solution that contains reducing agent activates. This step is carried out in DPS (directly plating system) usually.

In detail, adopt following steps to carry out DPS. Via hole with MEA, non-ionic surface active agent, cationic surfactant, is reached the analog washing, so that the metal of via hole and polyimide surface degreasing; Clean with alkaline permanganate solution; With the soft etching of sodium peroxydisulfate solution; Then pre-preg in the mixture of sodium chloride and hydrochloric acid. After these steps are finished, the via hole of processing is immersed in palladium-tin colloid solution to form the Pd-Sn film, this film and then activates in vitriolated acid accelerator solution subsequently in containing the alkaline accelerator solution of sodium carbonate, potash, copper ion and reducing agent. The example of reducing agent comprises aldehyde, for example formaldehyde, acetaldehyde, propionic aldehyde and benzaldehyde; Catechol, resorcinol and ascorbic acid.

Above-mentioned activation step, namely the inwall of via hole is coated with low-resistance Pd-Sn film, and copper plating step subsequently can be carried out in short time durations.

Use then acid elution via hole and electrolytic coating copper. Preferably in solution bath, this solution contains for example combination of thiocarbamide, dextrin or thiocarbamide and molasses of 180-240g/L copper sulphate, 45-60g/L sulfuric acid, 20-80g/L chlorion and additive, 2 to 8A/dm²Current density under carry out electrolytic coating. Thus, form the copper plate with 3 to 30 μ m thickness at via hole (or through hole) wall.

Subsequently, by optical treatment and etched combination, has the basic wiring layer of predetermined pattern in the metal coating formation of a side surface. And then by optical treatment and etched combination, the metal coating on the opposite side surface forms the signal wiring layer with predetermined pattern.

It is upper or at least on the surface of basic wiring layer that photosensitive welding resist layer is pressed in two surfaces, preferred vacuum lamination, and photosensitive welding resist is the form of photoresists dry film preferably. Photosensitive welding resist with lamination is exposed in the light then, to have the solder mask layer of predetermined pattern at signal wiring layer and the formation of basic wiring layer.

Photosensitive welding resist can be photosensitive China ink against corrosion, polyimides (precursor) type photosensitive resin composition for example, the photosensitive hot forming resin combination of epoxy acrylate type described in imidodicarbonic diamide siloxanes (imidesiloxane) the type photosensitive resin composition described in the interim publication 2000-212446 of preferred Japan and the interim publication 2000-109541 of Japan. The photosensitive welding resist of preferred dry-film type.

Specifically, show 100kgf/mm after preferred the shaping²Or the welding resist of low elasticity stretch modulus more, because it serves as the diaphragm that does not show distortion. The preferred example that can serve as the photosensitive welding resist of dry type of diaphragm after the shaping comprises that (photosensitive resin composition mainly is made up of polyurethane rubber and epoxy acrylate, contains fire retardant and polymerization initiator, shows about 40kgf/mm after the shaping for FPC²Elastic tensile modulus) the dry film solder mask and the photosensitive resin composition dry film described in the interim publication 2001-359790 of Japan, said composition is by Epocryl, asymmetric fragrant tetracarboxylic acid dianhydride and α, and the product (oligomer) of ω-two (3-aminopropyl) dimethyl silicone polymer, photoreactive epoxy resin polymerization initiator form that (it shows about 60kgf/mm after shaping²Elastic tensile modulus). From the corrosion stability of plating, need not stamping-out, form fine pattern and adhesive-free oozes out, compare with the lid of previous employing-die bed composition, adopt the photosensitive welding resist of these dry types favourable.

After this, with the copper layer in known electrolytic coating step usefulness nickel/billon and the tin/billon plating solder mask perforate. Thereby make the flexible circuit printed panel of expectation.

Embodiment 1

Complex (the trade (brand) name Upicel N of metal will be scribbled, can be from Ube Industries, Ltd. acquisition) be exposed to (5320 types in the UV-YAG laser, can obtain from ESI, wavelength 355 μ m), thereby in the layer of copper layer and in polyimide film, form the hole simultaneously, 25 μ m) and place electrolytic copper foil (thickness: 9 μ m on each thermoplastic surface under pressurization and heating the complex that scribbles metal is all had thermoplastic surface's three strata acid imide films (thickness: by every side surface, trade (brand) name USLPR2, can be from Nippon Electrolytic Co., Ltd. obtains) form.(aluminium content: mixture 16 volume %) is administered on the hole of gained with wet blast device (can be from Mako Co., Ltd. obtains) under the air pressure of 0.2Mpa, removes metallic bur power and dust in the hole thus for water and aluminium powder subsequently.

Fig. 2 is the cross section in the hole of the above-mentioned wet blast of experience.

Fig. 3 is the cross section in the preceding hole of experience wet blast.

Measure the foursquare vertical and horizontal distance that the wet blast front and back are made up of 1600 holes.The distance of being surveyed is listed in the table 1.In table 1, A is the lateral separation of described zone during without wet blast, and B is the fore-and-aft distance of described zone during without wet blast, and a is the lateral separation of described zone after wet blast, and b is the fore-and-aft distance of described zone after wet blast.

Table 1

(mm)

The difference of wet blast longitudinal separation is listed in the table 2

Table 2

Utilize Ebara Uzilight Co., the Lizatron DPS method of Ltd. forms conductive layer on the inwall in hole.Then by electrolytic coating with copper layer (thickness: 12 μ m) place on conductive layer and the Copper Foil.

Fig. 4 represents the cross section of the via hole with copper plate that forms thus.

Subsequently, form basic wiring layer (cloth string pitch: 80 μ m) by optical treatment on the copper foil layer with being etched in predetermined pattern.Form signal wiring layer (cloth string pitch: 40 μ m) by optical treatment on another copper foil layer with being etched in then with predetermined pattern.

So just made the flexible circuit printed panel.In the flexible circuit printed panel, Copper Foil firmly is connected with the copper coating layer, thereby does not observe separation on the interface at them when heating.

Listed data show the difference of size between the longitudinal direction of wet blast film and horizontal direction and not obvious in the table 1 and 2.This means in photolithographic process subsequently and can easily position.

Fig. 2,3 and 4 photo show that the hole of wet blast has smooth edges and almost do not have burr and dust.

The comparative example 1

Except that omitting wet blast, repeat the step of embodiment 1, form via hole and Copper Foil, the copper coating layer with 12 μ m thickness is arranged on the Copper Foil.

Fig. 5 represents the cross section of the via hole of the copper layer with plating that forms thus.

Then, the step that repeats embodiment 1 is made the flexible circuit printed panel.In the flexible circuit printed panel, Copper Foil is connected unsatisfactorily with the copper coating layer, thereby observes separation on the interface at them when this plate of heating.

Embodiment 2

Repeat the step of embodiment, except in scribbling the polyimide composite film of metal, getting the through hole with puncher.Then with embodiment 1 in same way as, make the through hole experience wet blast that makes thus, form via hole and Copper Foil, the copper coating layer with 12 μ m thickness is arranged on the Copper Foil.

Then, the step that repeats embodiment 1 is made the flexible circuit printed panel.In the flexible circuit printed panel, Copper Foil firmly is connected with the copper coating layer, thereby does not observe separation on the interface at them when this plate of heating.

Industrial applicibility

The invention provides a kind of improved at flexible circuit (or wiring) but printed panel is made the method for via hole, a kind of improved method for making flexible circuit (or wiring) printed panel also is provided.

Claims

1. but method of making the flexible circuit printed panel comprises step:

All have on every side surface in the polyimide film of metal coating and form via hole, this via hole passes metal coating and polyimide film one of at least, wherein generates metallic bur power in via hole edge on metal coating; And

The mixture of liquid and abrasive grain is administered on the via hole adding to depress, removes metallic bur power and purge path hole thus from the edge of via hole.

2. the process of claim 1 wherein that via hole is the blind via hole that is formed by laser.

3. the method for claim 2, wherein laser is carbon dioxide laser, UV-YAG laser or excimer laser.

4. the process of claim 1 wherein that via hole is the through hole that forms with puncher or drilling machine.

5. the method for claim 1, the polyimide film that all has metal coating on every side surface all has thermoplastic polyimide layer by making on the every side surface that metal film is placed multilayer polyimide film on every side surface of this multilayer polyimide film.

6. but the flexible circuit printed panel of making by the method for claim 1.

7. method of making the flexible circuit printed panel, it comprises step:

All have on every side surface in the polyimide film of metal coating and form via hole, this via hole passes metal coating and polyimide film one of at least, wherein generates metallic bur power in via hole edge on metal coating;

The mixture of liquid and abrasive grain is administered on the via hole adding to depress, removes metallic bur power and purge path hole thus from the edge of via hole;

Each metal coating of etching is to form predetermined printed circuit pattern.

8. the method for claim 7, wherein via hole is the blind via hole that is formed by laser.

9. the method for claim 8, wherein laser is carbon dioxide laser, UV-YAG laser or excimer laser.

10. the method for claim 7, wherein via hole is the through hole that forms with puncher or drilling machine.

11. the method for claim 7 further is included in the step that forms solder mask on the printed circuit pattern.

12. the method for claim 11 further is included on the solder mask step of plated with gold layer on the step that forms perforate and the metal level in perforate.

13. the method for claim 11, wherein solder mask by under the vacuum on printed circuit pattern laminated photosensitive etchant resist and the step of the etchant resist experience processing predetermined pattern of lamination is formed.

14. the flexible circuit printed panel of making by the method for claim 7.

15. the flexible circuit printed panel of making by the method for claim 11.