CN1648687A - 用于检测电离辐射的装置 - Google Patents

用于检测电离辐射的装置 Download PDF

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Publication number
CN1648687A
CN1648687A CN200510006180.5A CN200510006180A CN1648687A CN 1648687 A CN1648687 A CN 1648687A CN 200510006180 A CN200510006180 A CN 200510006180A CN 1648687 A CN1648687 A CN 1648687A
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CN
China
Prior art keywords
layer
photodiode
equal
assembly
backlit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200510006180.5A
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English (en)
Chinese (zh)
Inventor
D·M·霍夫曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GE Medical Systems Global Technology Co LLC
Original Assignee
GE Medical Systems Global Technology Co LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GE Medical Systems Global Technology Co LLC filed Critical GE Medical Systems Global Technology Co LLC
Publication of CN1648687A publication Critical patent/CN1648687A/zh
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/20Measuring radiation intensity with scintillation detectors
    • G01T1/2018Scintillation-photodiode combinations
    • G01T1/20183Arrangements for preventing or correcting crosstalk, e.g. optical or electrical arrangements for correcting crosstalk
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/026Wafer-level processing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/107Integrated devices having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189X-ray, gamma-ray or corpuscular radiation imagers
    • H10F39/1895X-ray, gamma-ray or corpuscular radiation imagers of the hybrid type
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189X-ray, gamma-ray or corpuscular radiation imagers
    • H10F39/1898Indirect radiation image sensors, e.g. using luminescent members
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/199Back-illuminated image sensors

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
CN200510006180.5A 2004-01-29 2005-01-31 用于检测电离辐射的装置 Pending CN1648687A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/707984 2004-01-29
US10/707,984 US7075091B2 (en) 2004-01-29 2004-01-29 Apparatus for detecting ionizing radiation

Publications (1)

Publication Number Publication Date
CN1648687A true CN1648687A (zh) 2005-08-03

Family

ID=34749170

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200510006180.5A Pending CN1648687A (zh) 2004-01-29 2005-01-31 用于检测电离辐射的装置

Country Status (6)

Country Link
US (1) US7075091B2 (enExample)
JP (1) JP4974130B2 (enExample)
CN (1) CN1648687A (enExample)
DE (1) DE102005003378A1 (enExample)
IL (1) IL166392A (enExample)
NL (1) NL1028105C2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102365562A (zh) * 2009-03-26 2012-02-29 皇家飞利浦电子股份有限公司 数据采集
CN109541668A (zh) * 2018-12-03 2019-03-29 西安交通大学 一种无电源辐射监测装置及方法
CN115112693A (zh) * 2022-06-24 2022-09-27 明峰医疗系统股份有限公司 一种ct探测器及ct设备

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101166469B (zh) * 2005-04-26 2015-05-06 皇家飞利浦电子股份有限公司 用于光谱ct的双层探测器
US7582879B2 (en) * 2006-03-27 2009-09-01 Analogic Corporation Modular x-ray measurement system
CA2647407A1 (en) * 2006-03-30 2007-10-18 Koninklijke Philips Electronics N.V. Radiation detector array
US20080001246A1 (en) * 2006-05-24 2008-01-03 Dipak Sengupta Single package detector and digital converter integration
DE102006046770A1 (de) * 2006-09-29 2008-04-03 Siemens Ag Bauelement, Bauteil und Verfahren zu dessen Herstellung
US7606346B2 (en) * 2007-01-04 2009-10-20 General Electric Company CT detector module construction
US7851698B2 (en) * 2008-06-12 2010-12-14 Sunpower Corporation Trench process and structure for backside contact solar cells with polysilicon doped regions
JP5450188B2 (ja) * 2010-03-16 2014-03-26 株式会社東芝 放射線検出装置、放射線検出装置の製造方法および画像撮影装置
JP5358509B2 (ja) * 2010-04-15 2013-12-04 浜松ホトニクス株式会社 放射線検出器モジュール
US9022584B2 (en) * 2010-11-24 2015-05-05 Raytheon Company Protecting an optical surface
EP2689269B1 (en) 2011-03-24 2015-05-13 Koninklijke Philips N.V. Production of a spectral imaging detector
US8822262B2 (en) 2011-12-22 2014-09-02 Sunpower Corporation Fabricating solar cells with silicon nanoparticles
WO2014184714A1 (en) 2013-05-16 2014-11-20 Koninklijke Philips N.V. Imaging detector
CN104603640B (zh) * 2013-09-05 2018-03-30 皇家飞利浦有限公司 辐射探测器元件
JP6776024B2 (ja) * 2016-06-30 2020-10-28 キヤノンメディカルシステムズ株式会社 X線検出器、x線検出器モジュール、支持部材及びx線ct装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000294760A (ja) * 1999-04-07 2000-10-20 Nikon Corp 光検出素子
US6512809B2 (en) * 2000-05-02 2003-01-28 Siemens Aktiengesellschaft Radiation detector for an X-ray computed tomography apparatus
JP3713418B2 (ja) * 2000-05-30 2005-11-09 光正 小柳 3次元画像処理装置の製造方法
US6658082B2 (en) * 2000-08-14 2003-12-02 Kabushiki Kaisha Toshiba Radiation detector, radiation detecting system and X-ray CT apparatus
US6426991B1 (en) * 2000-11-16 2002-07-30 Koninklijke Philips Electronics N.V. Back-illuminated photodiodes for computed tomography detectors
JP2003017676A (ja) * 2001-04-27 2003-01-17 Canon Inc 放射線撮像装置およびそれを用いた放射線撮像システム
US6510195B1 (en) * 2001-07-18 2003-01-21 Koninklijke Philips Electronics, N.V. Solid state x-radiation detector modules and mosaics thereof, and an imaging method and apparatus employing the same
US6707046B2 (en) 2002-01-03 2004-03-16 General Electric Company Optimized scintillator and pixilated photodiode detector array for multi-slice CT x-ray detector using backside illumination
JP4237966B2 (ja) * 2002-03-08 2009-03-11 浜松ホトニクス株式会社 検出器
US6933489B2 (en) * 2002-05-10 2005-08-23 Hamamatsu Photonics K.K. Back illuminated photodiode array and method of manufacturing the same
JP4123415B2 (ja) * 2002-05-20 2008-07-23 ソニー株式会社 固体撮像装置
DE10244177A1 (de) * 2002-09-23 2004-04-08 Siemens Ag Bilddetektor für Röntgeneinrichtungen mit rückseitig kontaktierten, organischen Bild-Sensoren
US6762473B1 (en) * 2003-06-25 2004-07-13 Semicoa Semiconductors Ultra thin back-illuminated photodiode array structures and fabrication methods

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102365562A (zh) * 2009-03-26 2012-02-29 皇家飞利浦电子股份有限公司 数据采集
CN102365562B (zh) * 2009-03-26 2014-07-16 皇家飞利浦电子股份有限公司 数据采集
CN109541668A (zh) * 2018-12-03 2019-03-29 西安交通大学 一种无电源辐射监测装置及方法
CN109541668B (zh) * 2018-12-03 2020-05-22 西安交通大学 一种无电源辐射监测装置及方法
CN115112693A (zh) * 2022-06-24 2022-09-27 明峰医疗系统股份有限公司 一种ct探测器及ct设备

Also Published As

Publication number Publication date
NL1028105A1 (nl) 2005-08-01
US20050167603A1 (en) 2005-08-04
US7075091B2 (en) 2006-07-11
NL1028105C2 (nl) 2008-02-25
JP4974130B2 (ja) 2012-07-11
IL166392A (en) 2009-07-20
DE102005003378A1 (de) 2005-08-11
IL166392A0 (en) 2006-01-15
JP2005229110A (ja) 2005-08-25

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