CN1645152B - 用于测量动力学参量的电容传感器 - Google Patents
用于测量动力学参量的电容传感器 Download PDFInfo
- Publication number
- CN1645152B CN1645152B CN2005100509277A CN200510050927A CN1645152B CN 1645152 B CN1645152 B CN 1645152B CN 2005100509277 A CN2005100509277 A CN 2005100509277A CN 200510050927 A CN200510050927 A CN 200510050927A CN 1645152 B CN1645152 B CN 1645152B
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- China
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- substrate
- electrode
- dynamics parameter
- electric capacity
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP012899/04 | 2004-01-21 | ||
JP12899/2004 | 2004-01-21 | ||
JP2004012899 | 2004-01-21 | ||
JP163087/04 | 2004-06-01 | ||
JP163087/2004 | 2004-06-01 | ||
JP2004163087A JP4555612B2 (ja) | 2004-01-21 | 2004-06-01 | 容量型力学量センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1645152A CN1645152A (zh) | 2005-07-27 |
CN1645152B true CN1645152B (zh) | 2011-09-14 |
Family
ID=34752132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2005100509277A Expired - Fee Related CN1645152B (zh) | 2004-01-21 | 2005-01-21 | 用于测量动力学参量的电容传感器 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7216541B2 (zh) |
JP (1) | JP4555612B2 (zh) |
KR (1) | KR101068341B1 (zh) |
CN (1) | CN1645152B (zh) |
TW (1) | TWI355750B (zh) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7669359B2 (en) * | 2005-06-22 | 2010-03-02 | Surefire, Llc | Machine gun accessory mount adapter |
JP4839747B2 (ja) * | 2005-09-20 | 2011-12-21 | 三菱電機株式会社 | 静電容量型加速度センサ |
JP4692373B2 (ja) * | 2006-04-28 | 2011-06-01 | パナソニック電工株式会社 | 静電容量式センサ |
US8919199B2 (en) * | 2010-12-01 | 2014-12-30 | Analog Devices, Inc. | Apparatus and method for anchoring electrodes in MEMS devices |
JP2013250133A (ja) * | 2012-05-31 | 2013-12-12 | Seiko Epson Corp | 電子デバイス及びその製造方法、並びに電子機器 |
US9599471B2 (en) | 2013-11-14 | 2017-03-21 | Analog Devices, Inc. | Dual use of a ring structure as gyroscope and accelerometer |
US9709595B2 (en) | 2013-11-14 | 2017-07-18 | Analog Devices, Inc. | Method and apparatus for detecting linear and rotational movement |
US10746548B2 (en) | 2014-11-04 | 2020-08-18 | Analog Devices, Inc. | Ring gyroscope structural features |
CN105241584A (zh) * | 2015-10-14 | 2016-01-13 | 华东光电集成器件研究所 | 一种电容式压力传感器 |
US11656077B2 (en) | 2019-01-31 | 2023-05-23 | Analog Devices, Inc. | Pseudo-extensional mode MEMS ring gyroscope |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5760290A (en) * | 1994-10-21 | 1998-06-02 | Fuji Electric Co., Ltd. | Semiconductor acceleration sensor and testing method thereof |
US5801313A (en) * | 1995-05-26 | 1998-09-01 | Omron Corporation | Capacitive sensor |
CN1402011A (zh) * | 2002-04-12 | 2003-03-12 | 中国科学院上海微系统与信息技术研究所 | 湿法腐蚀制造微机械电容式加速度传感器及其结构 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62199092A (ja) * | 1986-02-27 | 1987-09-02 | 関西日本電気株式会社 | ハイブリツドic |
JPH06160420A (ja) * | 1992-11-19 | 1994-06-07 | Omron Corp | 半導体加速度センサ及びその製造方法 |
JP3312158B2 (ja) * | 1994-11-08 | 2002-08-05 | オムロン株式会社 | 半導体物理量センサ |
JPH10300775A (ja) * | 1997-04-30 | 1998-11-13 | Matsushita Electric Works Ltd | 静電容量型加速度センサ及びその製造方法 |
JP2001349731A (ja) * | 2000-06-06 | 2001-12-21 | Matsushita Electric Ind Co Ltd | マイクロマシンデバイスおよび角加速度センサおよび加速度センサ |
JP2002055117A (ja) | 2000-08-10 | 2002-02-20 | Yazaki Corp | 静電容量型加速度センサ |
US6759591B2 (en) * | 2001-06-13 | 2004-07-06 | Mitsubishi Denki Kabushiki Kaisha | Silicon device |
EP1522521B1 (en) * | 2003-10-10 | 2015-12-09 | Infineon Technologies AG | Capacitive sensor |
-
2004
- 2004-06-01 JP JP2004163087A patent/JP4555612B2/ja not_active Expired - Fee Related
-
2005
- 2005-01-20 US US11/039,500 patent/US7216541B2/en active Active
- 2005-01-20 TW TW094101696A patent/TWI355750B/zh not_active IP Right Cessation
- 2005-01-21 CN CN2005100509277A patent/CN1645152B/zh not_active Expired - Fee Related
- 2005-01-21 KR KR1020050005912A patent/KR101068341B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5760290A (en) * | 1994-10-21 | 1998-06-02 | Fuji Electric Co., Ltd. | Semiconductor acceleration sensor and testing method thereof |
US5801313A (en) * | 1995-05-26 | 1998-09-01 | Omron Corporation | Capacitive sensor |
CN1402011A (zh) * | 2002-04-12 | 2003-03-12 | 中国科学院上海微系统与信息技术研究所 | 湿法腐蚀制造微机械电容式加速度传感器及其结构 |
Also Published As
Publication number | Publication date |
---|---|
US7216541B2 (en) | 2007-05-15 |
JP2005233926A (ja) | 2005-09-02 |
US20050155428A1 (en) | 2005-07-21 |
CN1645152A (zh) | 2005-07-27 |
KR20050076717A (ko) | 2005-07-26 |
TW200529455A (en) | 2005-09-01 |
TWI355750B (en) | 2012-01-01 |
KR101068341B1 (ko) | 2011-09-28 |
JP4555612B2 (ja) | 2010-10-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160310 Address after: Chiba County, Japan Patentee after: SEIKO INSTR INC Address before: Chiba, Chiba, Japan Patentee before: Seiko Instruments Inc. |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Chiba County, Japan Patentee after: EPPs Lingke Co. Ltd. Address before: Chiba County, Japan Patentee before: SEIKO INSTR INC |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110914 Termination date: 20210121 |