CN1579000A - 非热等离子体狭缝放电设备 - Google Patents

非热等离子体狭缝放电设备 Download PDF

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CN1579000A
CN1579000A CNA028215206A CN02821520A CN1579000A CN 1579000 A CN1579000 A CN 1579000A CN A028215206 A CNA028215206 A CN A028215206A CN 02821520 A CN02821520 A CN 02821520A CN 1579000 A CN1579000 A CN 1579000A
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瑟杰·巴布科－玛尔伊
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Plasmasol Corp
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Abstract

非热常压等离子体反应器包括其中具有至少一个狭缝的主电介质和包括许多电极段的分段电极。每个电极段都靠近相关狭缝放置并与之流体相通。电介质中的狭缝可以用多种方法形成，例如许多狭缝确定在基本平坦的电介质板中。其它结构包括许多组合在一起的电介质段(例如棒、片、环、环状部分)从而在相邻电介质段之间形成狭缝。工作时，在分段电极和靠近主电介质放置的接收电极之间施加电压差以产生等离子体放电。等离子体放电通过主电介质中的狭缝发射出去。本发明的等离子体放电器件结构产生相对较大体积的相对较高的非热等离子体放电，但是制造起来仍相对简单且便宜。

Description

非热等离子体狭缝放电设备
相关申请的交叉参考
本申请要求2001年11月2日提交的U.S.Provisional ApplicationNo.60/336,866的利益，后者的所有内容在此引入作为参考。
技术领域
本发明涉及用于通过电介质材料中的狭缝或孔洞产生非热等离子体(non-thermal plasma)放电的设备及其使用方法。
背景技术
“等离子体”为由离子、电子和中性粒子组成的部分电离气体。物质的这一状态是由相对较高的温度或相对较强的电场——恒定(DC)或随时间变化的(例如RF或微波)电磁场——产生的。放电等离子体是在中性原子/分子背景中的自由电子被电场激发而产生的。这些电子导致电子-原子/分子碰撞，将能量传给原子/分子并形成多种粒子，可包括光子、亚稳态、原子激发态、自由基、分子碎片、单体以及离子。中性气体变成部分或完全电离的，能够传导电流。等离子体粒子具有化学活性并且/或能够从物理上调整材料的表面，从而可用于形成新的化学化合物和/或调整已有化合物。放电等离子体还能产生总量足够的光发射以用于照明。等离子体放电还可以有许多其它用途。
迄今为止，通过使用几何形状不对称的电极结构——例如点-面或线-柱——稳定获得了常压下的放电。这种传统结构在较小的电极附近产生具有高电场强度的区域，而在靠近较大电极的区域中产生具有更低电场强度的相对较大的区域。
2000年12月15日提交的U.S.Patent Application Serial No.09/738,923公开了一种非热常压等离子体放电器件，由主电介质中的许多毛细管以及相邻放置并与相关毛细管流体相通的分段电极构成。毛细管确定为孔径、空洞或开口，所有面(除了顶部和底部开口)都封闭，具有基本沿径向的壁所确定的周长，其中毛细管的横剖面具有基本相等的长度和宽度。这一等离子体放电器件较复杂从而制造起来相对昂贵。
需要研究一种改善的非热常压等离子体放电器件，它容易制造且成本更低，同时还能产生相对较高的每单位面积电流密度以及空间中和电极面积上基本均匀的电流分布。
发明内容
对这一发明来说，术语“狭缝”将定义为孔眼、开口、孔径、空洞、刻槽或沟道，横剖面中宽度小于长度。狭缝并不需要所有面都是封闭的，包括任何(除了顶部和底部开口之外)至少具有一个开口端的通路或沟道。
本发明通过研究具有狭缝或有孔电介质结构的改善的非热常压等离子体放电设备解决了传统等离子体发生器件所具有的前述问题。
本发明的非热常压等离子体放电器件产生每单位电极面积更高的电流密度以及空间中和电极面积上更均匀的电流分布。
此外，本发明的非热常压等离子体放电器件更易制造。
附图说明
图1a为根据本发明的非热常压等离子体放电器件的示例性第一实施方案的透视图，其中电介质板中具有许多狭缝，电极刀片基本平行于各狭缝放置；
图1b为图1a的具有狭缝的主电介质板的顶视图；
图2为根据本发明的非热常压等离子体放电器件的示例性第二实施方案的透视图，其中许多电介质棒组合在一起，相邻棒之间形成狭缝，电极刀片基本垂直于各狭缝放置；
图3a为根据本发明的非热常压等离子体放电器件的示例性第三实施方案的底视图；
图3b为图3a的等离子体放电器件的侧视图；
图4a为根据本发明的非热常压等离子体放电器件的示例性第三实施方案的透视图，主电介质的一部分被切去以暴露主电极；
图4b为图4a的等离子体放电器件的横剖图；
图4c为图4a的等离子体放电器件的纵剖图；
图4d为一放大图，示出集中在图4a主电极锯齿边附近的等离子体放电密度；
图5a为许多图4a的U形电介质狭缝结构非热常压等离子体放电器件排列在旋转中心轮上的示例性排列的侧视图；
图5b为两个图4a的U形电介质狭缝结构非热常压等离子体放电器件基本互相垂直安装的示例性排列的顶视图，组件相对固定的接收电极旋转；
图5c为图4a的U形电介质狭缝结构非热常压等离子体放电器件的堆叠的示例性排列的剖面图；
图6a为非热常压等离子体放电器件的第五示例性实施方案的透视图，该器件具有许多电介质棒，它们之间形成狭缝，电介质棒的一部分被切去以显示内部圆柱形管的结构；以及
图6b为许多非热常压等离子体放电器件的示例性排列的侧视图，每个器件都具有许多电介质棒，电介质棒之间形成狭缝，接收电极板置于相邻等离子体放电器件之间。
具体实施方式
图1a为根据本发明具有狭缝电介质结构的非热常压等离子体放电器件的示例性实施方案。主电介质板11中具有一个或多个狭缝13，如图1b的顶视图中所示。图1b中所示的狭缝13成矩形，然而，其它几何结构也可以采用，也处于本发明的预定领域之中。作为说明性实施例，示出三个狭缝，但是根据需要可使用一个或多个狭缝，狭缝的取向也可以变化。当使用许多狭缝时，每个狭缝可以，但并非必须，是相同尺寸和几何形状的。分段电极12与狭缝13基本平行，靠近且与狭缝13流体相通。作为选择，分段电极12可以与各狭缝基本垂直。在图1a所示的实施例中，分段电极是许多刀片形电极，然而，也可采用其它结构，例如线形或楔形。优选地，刀片具有锥形边或锯齿边来集中高电场以产生等离子体放电。尽管在图1a的实施方案中没有示出，分段电极12可以部分或完全插入各狭缝13中。分段电极与高压电源10相连，之间施加电压差。
接收电极16与主电介质11分开，它们之间形成沟道19，通过它接收要处理的试剂流体。接收电极16也与电源相连，在使用AC或RF电源10的情形中，可用次电介质15覆盖靠近主电介质11的接收电极16的表面。然而，如果使用DC电源10，那么省略次电介质15，以得到分段和接收电极12、16之间的无障碍导电路径。
工作时，试剂流体——例如要处理的气体——通过形成在主电介质11和次电介质15之间的沟道19。电压差施加在分段电极12和接收电极16之间以产生等离子体放电，由狭缝13将其引入沟道19指向接收电极16。
图2为图1a所示的等离子体放电器件的替代实施方案，其中用许多组装在一起的电介质棒或条18——相邻棒之间形成狭缝13——代替具有许多狭缝的单个电介质板。电介质棒可以用线或其它传统手段固定在一起，从而使相邻棒之间形成的狭缝的相反侧保持开口。与上面关于图1a和1b示出并描述的实施方案不同，作为说明，图2所示的实施方案中的电极刀片12基本垂直于狭缝13排列。分段电极相对于各狭缝可基本平行或基本垂直排列。
图3a中示出根据本发明的非热常压等离子体放电器件的示例性第三环形或圆柱形实施方案。在这一实施方案中，主电介质环形管31沿纵向被分成四个径向部分，相邻部分之间隔开预定距离，其间形成沿纵轴方向放置的狭缝33。分段电极32包含星形放置的四个刀片，每个刀片纵向延伸通过主电介质环形管31，靠近相应狭缝33并与之流体相通。接收环形电极35环绕主电介质31，次环形电介质34置于主电介质和接收环形电极35之间。分段电极32和接收环形电极35与电源38相连。在主和次电介质31、34之间分别形成沟道，接收要处理的试剂流体。图3a示出沿纵向被分成四个径向部分的主电介质31，然而，也可以将该电介质分成两个或更多个部分，这也是在本发明的预定领域中的，这些部分可以，但并非必须，是相同尺寸的，从而分段电极32将优选地具有与电介质中的狭缝33数目相同的刀片。如果使用AC或RF电源，含水流体15可漫过并覆盖接收电极的内壁，另外，在DC电源情形中，可使用无水溶液。这种实施方案尤其适用于作为用于处理废气的湿法静电除尘器/洗涤器/非热等离子体放电器件或作为用于流体——例如水——净化/消毒的器件的应用。
作为图3a所示的实施方案的调整，主电介质可沿横向被分开从而将内部圆柱形管分成一系列环31，而不是将主电介质分开在其中形成纵向狭缝。图3b为示例性主电介质结构的透视图，该结构沿横向分成四个部分或环，相邻部分之间形成狭缝。这一替代主电介质结构可代入图3a中用于纵向取向的狭缝主电介质电极。在又一实施方案中，狭缝可以是穿过圆柱形电介质的螺线，线电极与螺线狭缝基本对齐或交叉。
图4a示出非热常压等离子体放电器件的再一实施方案。在这一结构中，主电介质405被去掉一部分以形成基本U形的横剖面沟道415。主电极410至少部分置于沟道415中。在优选实施方案中，主电极410为棒或条，具有朝向沟道415开口的V形或锯齿边420。发应气体注入或穿过沟道415，在其中暴露向通过在主电极410和接收电极425之间施加电压差而产生的非热等离子体。在图4a所示的实施例中，接收电极425为环形柱，然而，根据需要可采用其它结构，例如基本为平面的地电极板。当使用AC或RF电源时，使用次电介质层430并包围接收电极425。选择地，接收电极425可以浸入在非导电流体中。DC电源情形中，省略次电介质层，或者接收电极425可浸入导电流体中。图4b和4c示出图4a的等离子体放电器件的横向和纵向剖面图。主电极410的锯齿边的齿集中了高电场以产生等离子体放电，如图4d所示。
许多具有如图4a所示的U形结构的非热常压等离子体放电器件505可绕中心旋转轮500径向排列，如图5a所示。作为实施例，示出四个等离子体放电器件505，互相成约90度，U形沟道的开口沿径向朝外。系统可进行调整以包括一个或多个等离子体放电器件505，这些器件根据需要绕中心旋转轮放置，无需互相等距分布。每个等离子体放电器件505包括U形主电介质，主电极置于主电介质的U形沟道中，如图4a所示。
一个或多个接收电极515靠近中心旋转轮500放置，从而当它与接收电极之一基本对齐时，从等离子体放电器件505发射出非热等离子体放电。净效果就是脉冲等离子体放电。主和接收电极与电源相连从而在它们之间提供电压差。在RF或AC电源情形中，接收电极515包围在电介质材料520中或浸入非导电流体中。与前述实施方案类似，如果使用DC电源，则对接收电极515不使用电介质材料520。作为选择，接收电极515可浸没在导电流体中。
图5b为替代排列，其中两个U形电介质狭缝结构等离子体放电器件基本互相垂直安装。两个接收电极隔开预定距离放置，基本平行于两个等离子体放电器件所确定的平面。排列等离子体放电器件，以使U形狭缝的开口指向接收电极。随着等离子体放电器件绕固定的接收电极旋转，等离子体放电区沿等离子体器件与各接收电极交叉的区域移动。
图5a和5b所示的前述实施方案描述了绕接收电极旋转的等离子体放电器件。在图5c所示的实施方案中，在堆叠交错排列中，许多U形狭缝电介质等离子体放电器件可互相交错排列。某一等离子体放电器件的分段电极用作相邻等离子体放电器件的接收电极，从而无需使用单独的接收电极。定向箭头指出等离子体放电。
图6a示出根据本发明的非热常压等离子体放电的再一结构，其中许多电介质棒605绕内部圆柱形管610——优选地具有空的中心——的外围沿径向放置。十二根棒绕内部圆柱形管610放置，但是棒的数目可根据需要改变。内部圆柱形管610可由导电或电介质材料制成。电介质棒605之间形成狭缝，试剂流体可从中沿径向向外通过。在优选实施方案中，形成在相邻电介质棒之间的狭缝具有小于或等于大约1mm的宽度以获得所需的扼流效应，如果没有完全消除辉光-弧跃迁(glow-to-arc transition)，这一效应就会大大降低。在内部圆柱形管610由电介质材料制成的情形中，可在狭缝中插入导电线或棒625用作主电极。接收环柱形电极615靠近电介质棒605放置，在内部圆形电极管和接收电极610、615之间施加电压差。与前述实施方案类似，如果使用AC或RF电源，那么接收电极615包围在次电介质层620中或浸入非导电流体中。另一方面，如果使用DC电源，那么不使用次电介质，接收电极615可浸入导电流体中。在主电极610中形成孔径625以使内部中空沟道接收的试剂气体通过。可使用任何形状或多种形状的孔径。例如，图6a所示的孔径625为空洞和/或狭缝。
图6b示出图6a的电介质棒等离子体放电结构稍经调整的实施方案，其中使用了具有电介质棒结构的许多等离子体放电器件，其中相近或相邻等离子体放电器件被接收电极板而不是(如图6a那样的)环柱形接收电极分隔开。
能够预期等离子体放电器件的无数其它实施方案，而且都处于本发明的领域中，只要满足下述概念：电介质作为单个完整单元形成，之间确定了许多狭缝(所有侧面闭合)，或者许多电介质段组合在一起，在相邻段之间形成狭缝(具有开口端)。许多电介质狭缝等离子体放电设备能够以许多种方法排列在系统中，只描述和示出了其中的一些。
本发明的非热常压等离子体放电设备具有许多在任何介质——无论其状态是固态、液态或气态——上的应用。例如，等离子体放电器件可用于处理导电或不导电表面。可处理水溶液、无水溶液或任何其它流体以减少或消除所不需要的杂质。另外，本发明的等离子体放电器件还可用于废气——例如汽车尾气、燃烧废气以及空气中所含的挥发性有机化合物(VOC)和/或其它污染物——的处理中。
这样，虽然没有示出、描述和指出用于本发明的优选实施方案基本的新颖特征，但是应当理解，只要不超出本发明的精神和范围，本领技术人员将能得到所说明的器件的形式和细节中以及其操作中的各种省略、替代和改变。例如，很明显，那些以基本相同的方式执行基本相同的功能以获得相同结果的元件和/或步骤的组合都处于本发明的范围中。将某一已描述的实施方案中的元件替换到另一实施方案也是完全预料和计划中的。还应理解，附图并非一定按比例绘制的，它们实质上仅仅是概念性的。因此，本发明只受其所附权利要求的范围限制。
此处引用的所有专利、专利申请、出版物、期刊文章、书籍和其它参考都完全作为参考引入。

Claims (17)

1.一种等离子体反应器，包含：
主电介质，其中具有至少一个狭缝；以及
分段电极，包括多个电极段，每个电极段靠近相关狭缝放置并与之流体相通。
2.根据权利要求1的等离子体反应器，其中主电介质为基本平坦的电介质板，其中确定了至少一个狭缝，形成开口顶端、开口底端以及所有侧面上的封闭侧壁。
3.根据权利要求1的等离子体反应器，其中主电介质为基本U形的电介质板，U形沟道形成该至少一个狭缝。
4.根据权利要求1的等离子体反应器，其中主电介质为多个组合在一起的电介质段，使得相邻电介质段间隔预定距离以在它们之间形成该至少一个狭缝，相邻电介质段形成在至少一个侧面开口的侧壁。
5.根据权利要求4的等离子体反应器，其中该多个电介质段为下列形状之一：棒、条、板、环形圈、环形楔。
6.根据权利要求1的等离子体反应器，其中电极段为下列之一：刀片、棒或线。
7.根据权利要求6的等离子体反应器，其中电极段基本与主电介质中的各狭缝平行放置。
8.根据权利要求6的等离子体反应器，其中电极段基本与主电介质中的各狭缝垂直放置。
9.根据权利要求1的等离子体反应器，进一步包含接收电极，靠近主电介质放置。
10.根据权利要求1的等离子体反应器，其中至少一部分接收电极被次电介质覆盖。
11.根据权利要求1的等离子体反应器，其中电极段至少部分地插入主电介质的各狭缝中。
12.根据权利要求4的等离子体反应器，其中电介质段为电介质环形管，纵向地分成预定数目的环形部分，相邻部分分隔开以便在其间形成狭缝。
13.根据权利要求4的等离子体反应器，其中电介质段为电介质环行管，横向地分成预定数目的环状部分，相邻环状部分分隔开以便在其间形成狭缝。
14.根据权利要求1的等离子体反应器，其中分段电极具有锯齿边缘。
15.根据权利要求5的等离子体反应器，其中电极段为多个组装在一起的电极棒，以在相邻电极棒之间形成狭缝。
16.根据权利要求15的等离子体反应器，其中该多个电极棒相对于内部圆柱形管布置，该内部圆柱形管具有空的中心和通过其间限定的孔径。
17.一种使用等离子体反应器的方法，该等离子体反应器包括具有至少一个狭缝的主电介质和包括多个电极段的分段电极，每个电极段都靠近相关狭缝放置并与之流体相通，所述方法包含下列步骤：
在分段电极和靠近第一电介质放置的接收电极之间施加电压差，以产生等离子体放电；以及
通过狭缝发射所产生的等离子体放电。
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