CN1547791A - 非对称波导电吸收调制激光器 - Google Patents

非对称波导电吸收调制激光器 Download PDF

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Publication number
CN1547791A
CN1547791A CNA028059972A CN02805997A CN1547791A CN 1547791 A CN1547791 A CN 1547791A CN A028059972 A CNA028059972 A CN A028059972A CN 02805997 A CN02805997 A CN 02805997A CN 1547791 A CN1547791 A CN 1547791A
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China
Prior art keywords
waveguide
laser device
region
doped region
doped
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Pending
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CNA028059972A
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English (en)
Chinese (zh)
Inventor
˹�ٷҡ�R������˹��
斯蒂芬·R·福里斯特
��R���꿨��
米德林·R·戈卡莱
�V���Ʒ�
帕维尔·V·斯图德尼科夫
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Princeton University
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Princeton University
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Publication of CN1547791A publication Critical patent/CN1547791A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0265—Intensity modulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1028—Coupling to elements in the cavity, e.g. coupling to waveguides adjacent the active region, e.g. forward coupled [DFC] structures
    • H01S5/1032—Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1053—Comprising an active region having a varying composition or cross-section in a specific direction
    • H01S5/1064—Comprising an active region having a varying composition or cross-section in a specific direction varying width along the optical axis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H01S5/125—Distributed Bragg reflector [DBR] lasers

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)
CNA028059972A 2001-01-19 2002-01-18 非对称波导电吸收调制激光器 Pending CN1547791A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US26286301P 2001-01-19 2001-01-19
US60/262,863 2001-01-19
US09/891,639 2001-06-26
US09/891,639 US6483863B2 (en) 2001-01-19 2001-06-26 Asymmetric waveguide electroabsorption-modulated laser

Publications (1)

Publication Number Publication Date
CN1547791A true CN1547791A (zh) 2004-11-17

Family

ID=26949512

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA028059972A Pending CN1547791A (zh) 2001-01-19 2002-01-18 非对称波导电吸收调制激光器

Country Status (10)

Country Link
US (1) US6483863B2 (enExample)
EP (1) EP1368870B1 (enExample)
JP (1) JP2004523113A (enExample)
KR (1) KR20030093199A (enExample)
CN (1) CN1547791A (enExample)
AT (1) ATE330346T1 (enExample)
AU (1) AU2002245278A1 (enExample)
CA (1) CA2435330A1 (enExample)
DE (1) DE60212344T2 (enExample)
WO (1) WO2002058251A2 (enExample)

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CN102611000A (zh) * 2012-03-23 2012-07-25 中国科学院长春光学精密机械与物理研究所 高效率非对称光场分布垂直腔面发射半导体激光器
CN103329367A (zh) * 2011-01-18 2013-09-25 索尼公司 半导体激光器件
CN103688428A (zh) * 2011-03-30 2014-03-26 英特尔公司 高效绝缘体上硅光栅耦合器
WO2014101877A1 (en) * 2012-12-31 2014-07-03 Huawei Technologies Co., Ltd. Silicon-on-insulator platform for integration of tunable laser arrays
CN104204880A (zh) * 2012-03-30 2014-12-10 富士通株式会社 光元件、光发送元件、光接收元件、混合波导激光器、光发送装置
CN105826812A (zh) * 2015-01-27 2016-08-03 华为技术有限公司 可调激光器和调谐激光器的方法
CN107046229A (zh) * 2016-02-05 2017-08-15 南京威宁锐克信息技术有限公司 一种激光器阵列的制作方法及激光器阵列
CN107076928A (zh) * 2014-08-15 2017-08-18 康宁光电通信有限责任公司 用于耦合具有相异模场直径的波导的方法和相关设备、部件与系统
CN107710528A (zh) * 2015-06-25 2018-02-16 华为技术有限公司 快速可调谐的可变栅格激光器
CN113126204A (zh) * 2021-04-13 2021-07-16 中山大学 一种可见光波段薄膜铌酸锂光栅耦合器及其制备方法
CN113167968A (zh) * 2018-11-30 2021-07-23 三菱电机株式会社 光栅耦合器和集成式光栅耦合器系统
US20210249840A1 (en) * 2020-02-12 2021-08-12 Sumitomo Electric Industries, Ltd. Semiconductor optical device and method for producing semiconductor optical device
CN114156732A (zh) * 2021-11-29 2022-03-08 青岛海信宽带多媒体技术有限公司 一种激光芯片及光模块
CN114761845A (zh) * 2019-11-26 2022-07-15 思敏光子控股有限责任公司 用于光子集成电路的波导结构

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CN104242052B (zh) * 2013-06-18 2018-01-19 中国科学院苏州纳米技术与纳米仿生研究所 环形腔器件及其制作方法
EP2816679B1 (fr) * 2013-06-21 2022-09-21 Alcatel Lucent Dispositif d'émission laser à modulateur de lumière intégré
JP6173206B2 (ja) * 2013-12-20 2017-08-02 三菱電機株式会社 光集積素子
JP6295762B2 (ja) * 2014-03-25 2018-03-20 日本電気株式会社 光集積回路とその製造方法
US9564733B2 (en) * 2014-09-15 2017-02-07 Emcore Corporation Method of fabricating and operating an optical modulator
US10074959B2 (en) 2016-08-03 2018-09-11 Emcore Corporation Modulated laser source and methods of its fabrication and operation
FR3061961B1 (fr) * 2017-01-19 2019-04-19 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif photonique comportant un laser optiquement connecte a un guide d'onde silicium et procede de fabrication d'un tel dispositif photonique
US10177854B2 (en) 2017-03-20 2019-01-08 Emcore Corporation Modulated optical source and methods of its operation
US11262605B2 (en) * 2017-08-31 2022-03-01 Lightwave Logic Inc. Active region-less polymer modulator integrated on a common PIC platform and method
CN110687694A (zh) * 2018-07-04 2020-01-14 上海新微技术研发中心有限公司 电吸收调制器及半导体器件
EP3696583B1 (en) * 2019-02-15 2022-03-16 EFFECT Photonics B.V. Photonic integrated circuit having improved electrical isolation between n-type contacts
JP7724159B2 (ja) 2019-05-28 2025-08-15 シエナ コーポレーション モノリシック集積利得素子
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CN103329367A (zh) * 2011-01-18 2013-09-25 索尼公司 半导体激光器件
CN103688428B (zh) * 2011-03-30 2016-10-26 英特尔公司 高效绝缘体上硅光栅耦合器
CN103688428A (zh) * 2011-03-30 2014-03-26 英特尔公司 高效绝缘体上硅光栅耦合器
TWI483015B (zh) * 2011-03-30 2015-05-01 Intel Corp 包含高效絕緣層上覆矽光柵耦合器之裝置及系統，以及其之製造方法
CN102611000B (zh) * 2012-03-23 2013-09-25 中国科学院长春光学精密机械与物理研究所 高效率非对称光场分布垂直腔面发射半导体激光器
CN102611000A (zh) * 2012-03-23 2012-07-25 中国科学院长春光学精密机械与物理研究所 高效率非对称光场分布垂直腔面发射半导体激光器
CN104204880A (zh) * 2012-03-30 2014-12-10 富士通株式会社 光元件、光发送元件、光接收元件、混合波导激光器、光发送装置
WO2014101877A1 (en) * 2012-12-31 2014-07-03 Huawei Technologies Co., Ltd. Silicon-on-insulator platform for integration of tunable laser arrays
CN107076928A (zh) * 2014-08-15 2017-08-18 康宁光电通信有限责任公司 用于耦合具有相异模场直径的波导的方法和相关设备、部件与系统
CN105826812A (zh) * 2015-01-27 2016-08-03 华为技术有限公司 可调激光器和调谐激光器的方法
CN105826812B (zh) * 2015-01-27 2020-04-21 华为技术有限公司 可调激光器和调谐激光器的方法
CN107710528A (zh) * 2015-06-25 2018-02-16 华为技术有限公司 快速可调谐的可变栅格激光器
CN107046229A (zh) * 2016-02-05 2017-08-15 南京威宁锐克信息技术有限公司 一种激光器阵列的制作方法及激光器阵列
CN113167968A (zh) * 2018-11-30 2021-07-23 三菱电机株式会社 光栅耦合器和集成式光栅耦合器系统
CN113167968B (zh) * 2018-11-30 2024-01-02 三菱电机株式会社 光栅耦合器和集成式光栅耦合器系统
CN114761845A (zh) * 2019-11-26 2022-07-15 思敏光子控股有限责任公司 用于光子集成电路的波导结构
US12292595B2 (en) 2019-11-26 2025-05-06 SMART Photonics Holding B.V. Waveguide structure for a photonic integrated circuit
US20210249840A1 (en) * 2020-02-12 2021-08-12 Sumitomo Electric Industries, Ltd. Semiconductor optical device and method for producing semiconductor optical device
US11735888B2 (en) * 2020-02-12 2023-08-22 Sumitomo Electric Industries, Ltd. Semiconductor optical device and method for producing semiconductor optical device
CN113126204A (zh) * 2021-04-13 2021-07-16 中山大学 一种可见光波段薄膜铌酸锂光栅耦合器及其制备方法
WO2023093052A1 (zh) * 2021-11-29 2023-06-01 青岛海信宽带多媒体技术有限公司 光模块
CN114156732A (zh) * 2021-11-29 2022-03-08 青岛海信宽带多媒体技术有限公司 一种激光芯片及光模块
CN114156732B (zh) * 2021-11-29 2025-07-04 青岛联智光通信技术有限公司 一种激光芯片及光模块

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Publication number Publication date
DE60212344D1 (de) 2006-07-27
EP1368870B1 (en) 2006-06-14
AU2002245278A1 (en) 2002-07-30
WO2002058251A3 (en) 2002-10-10
EP1368870A2 (en) 2003-12-10
DE60212344T2 (de) 2007-05-10
ATE330346T1 (de) 2006-07-15
KR20030093199A (ko) 2003-12-06
JP2004523113A (ja) 2004-07-29
US6483863B2 (en) 2002-11-19
CA2435330A1 (en) 2002-07-25
US20020097941A1 (en) 2002-07-25
EP1368870A4 (en) 2005-10-05
WO2002058251A2 (en) 2002-07-25

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