CN1527749A - 洗净装置及洗净方法 - Google Patents

洗净装置及洗净方法 Download PDF

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Publication number
CN1527749A
CN1527749A CNA028140990A CN02814099A CN1527749A CN 1527749 A CN1527749 A CN 1527749A CN A028140990 A CNA028140990 A CN A028140990A CN 02814099 A CN02814099 A CN 02814099A CN 1527749 A CN1527749 A CN 1527749A
Authority
CN
China
Prior art keywords
thing
solution
vacuum tank
decontaminating apparatus
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA028140990A
Other languages
English (en)
Chinese (zh)
Inventor
水户清
久
太田胜久
二
增冈真二
浅田裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Sharp Manufacturing Systems Corp
Original Assignee
Sharp Corp
Sharp Manufacturing Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001213459A external-priority patent/JP3818876B2/ja
Priority claimed from JP2001229400A external-priority patent/JP2003039029A/ja
Application filed by Sharp Corp, Sharp Manufacturing Systems Corp filed Critical Sharp Corp
Publication of CN1527749A publication Critical patent/CN1527749A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
CNA028140990A 2001-07-13 2002-07-12 洗净装置及洗净方法 Pending CN1527749A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP213459/2001 2001-07-13
JP2001213459A JP3818876B2 (ja) 2001-07-13 2001-07-13 乾燥装置
JP2001229400A JP2003039029A (ja) 2001-07-30 2001-07-30 洗浄装置
JP229400/2001 2001-07-30

Publications (1)

Publication Number Publication Date
CN1527749A true CN1527749A (zh) 2004-09-08

Family

ID=26618683

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA028140990A Pending CN1527749A (zh) 2001-07-13 2002-07-12 洗净装置及洗净方法

Country Status (2)

Country Link
CN (1) CN1527749A (fr)
WO (1) WO2003006184A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101810458A (zh) * 2010-04-20 2010-08-25 姚建梁 一种超声波真空负压洗净装置
CN102698977A (zh) * 2011-03-28 2012-10-03 东莞新科技术研究开发有限公司 真空清洗装置
CN103635987A (zh) * 2011-06-30 2014-03-12 株式会社日立高新技术 试料的制作装置、制作方法以及使用该制作装置和制作方法的带电粒子线装置
CN108049942A (zh) * 2017-11-03 2018-05-18 宁波行泰环保科技有限公司 一种基于超声波清洗的dpf清理方法
CN114236298A (zh) * 2022-02-24 2022-03-25 山东掌电电力科技有限公司 一种基于互联网的电力设备在线检测装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005143513A (ja) * 2002-04-04 2005-06-09 Sharp Corp 真空超音波洗浄除菌装置
CN103769379B (zh) * 2014-01-04 2015-01-14 福建奇妙电子科技有限公司 家用水雾喷洗设备的制造方法
CN114535210A (zh) * 2022-02-25 2022-05-27 天津市成吉斯宾科技发展有限公司 一种超声波真空表面处理清洗方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0795541B2 (ja) * 1986-07-02 1995-10-11 松下電器産業株式会社 処理方法
JP2977922B2 (ja) * 1991-02-28 1999-11-15 日立プラント建設株式会社 圧力スイング洗浄方法および装置
JP2855043B2 (ja) * 1993-02-25 1999-02-10 大日本スクリーン製造株式会社 基板処理装置
JPH0731942A (ja) * 1993-05-18 1995-02-03 Yoshihide Shibano 超音波洗浄方法及び装置
JPH08309300A (ja) * 1995-05-12 1996-11-26 Suzuki Motor Corp 超音波洗浄装置
JP2000237703A (ja) * 1999-02-18 2000-09-05 Akuatekku:Kk 真空洗浄乾燥方法及び装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101810458A (zh) * 2010-04-20 2010-08-25 姚建梁 一种超声波真空负压洗净装置
CN101810458B (zh) * 2010-04-20 2012-09-19 姚建梁 一种超声波真空负压洗净装置
CN102698977A (zh) * 2011-03-28 2012-10-03 东莞新科技术研究开发有限公司 真空清洗装置
CN103635987A (zh) * 2011-06-30 2014-03-12 株式会社日立高新技术 试料的制作装置、制作方法以及使用该制作装置和制作方法的带电粒子线装置
CN103635987B (zh) * 2011-06-30 2015-07-15 株式会社日立高新技术 试料的制作装置、制作方法以及使用该制作装置和制作方法的带电粒子线装置
CN108049942A (zh) * 2017-11-03 2018-05-18 宁波行泰环保科技有限公司 一种基于超声波清洗的dpf清理方法
CN108049942B (zh) * 2017-11-03 2020-11-17 宁波行泰环保科技有限公司 一种基于超声波清洗的dpf清理方法
CN114236298A (zh) * 2022-02-24 2022-03-25 山东掌电电力科技有限公司 一种基于互联网的电力设备在线检测装置

Also Published As

Publication number Publication date
WO2003006184A1 (fr) 2003-01-23

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