CN1527749A - Washing device and washing method - Google Patents
Washing device and washing method Download PDFInfo
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- CN1527749A CN1527749A CNA028140990A CN02814099A CN1527749A CN 1527749 A CN1527749 A CN 1527749A CN A028140990 A CNA028140990 A CN A028140990A CN 02814099 A CN02814099 A CN 02814099A CN 1527749 A CN1527749 A CN 1527749A
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- decontaminating apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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Abstract
A vacuum ultrasonic washing device capable of easily maintaining airtightness without taking any special consideration by suppressing pressure differences between the inside and outside of major component parts and between the main component parts and providing an excellence in safety against fire and explosion even if inflammable washing fluid is used, wherein a washing tank (6) having a storage part (6a) for storing washing fluid (5) and storing a washed matter (3) in the storage part (6a) and an ultrasonic vibrator unit (7) having a specified space (7a) therein and providing ultrasonic vibration to the washing fluid (5) are installed in a vacuum container (1) allowed to be brought into a vacuum state, and the specified space (7a) of the ultrasonic vibrator unit (7) is open from an inlet (10a) into the vacuum container (1) through a check valve (11).
Description
Technical field
The present invention relates to members such as electronics, machinery, shaping be relevant are cleaned the decontaminating apparatus of usefulness and the method for cleaning of member thereof, particularly relate to by the decontaminating apparatus that applies ultrasonic vibration to the detergent remover that places water under the vacuum or methane series etc., the member that is immersed in detergent remover is cleaned and under vacuum, under vacuum state, its member is carried out the method for cleaning of drying after with the member ultrasonic cleansing again.
Background technology
In the past, as cleaning the detergent remover that member is used, be to use the solution of the chlorine system of the fluorine system of Methyltestosterone etc. and 1.1.1-trichloroethanes etc. mostly.But; these solution after the gasification have the character that damages the ozone layer; 1987; worked out " Montreal Protocol of the relevant material that damages the ozone layer " according to " the Vienna treaty of relevant protection ozone layer "; with specific Methyltestosterone etc. is object, and regulation has been made in the stage reduction of output and restriction etc.Passed through repeatedly revision, implemented the modification that waits in advance of appending and limit schedule restrictive substance thereafter.
Japan has ratified above-mentioned Vienna treaty and Montreal Protocol thereof on September 30th, 1998.Fluorine system for replacement CFC (CFC) in this protocol is the decision that HCFC (HCFC) has also made necessary abolish before the year two thousand twenty, can expect, also will shift to an earlier date more the period for this abolish from now on.Again, relevant with it, system also will revise the restriction of relevant water quality and atmosphere pollution again for chlorine, and this restriction is constantly being strengthened every year.
On the other hand, along with the relevant increase that prevents the activity of greenhouse effects of the earth, in " the preventing the capital of a country meeting of greenhouse effects of the earth " in December, 1997, for saying 6% of the warm oxidizing gases of obligated reduction day originally.As the object of this warm oxidizing gases, also comprised the HCFC (HCFC) and the perfluocarbon of substituent methyl stosterone, and, in the substituent methyl stosterone, also strengthened to discharge limiting inevitably.Therefore, from now on, must give one's full attention to for the restriction trend, strong request simultaneously should be taken measures as soon as possible.
Under this background, in recent years,, need cause following some attention though paid attention to adopting the solution of little water of depletion of the ozone layer possibility or non-fluorine system to carry out cleaning of member.
At first, when making water, the 1st, water itself is very cheap, but the relevant a large amount of auxiliary equipment of pair water treatment must be arranged, and needs a large amount of expenses aspect the installation of auxiliary equipment.As auxiliary equipment, except the decontaminating apparatus body, pre-treatment equipment in the time of for example can listing reservoir, precipitation and purify sludge treatment device, drainage equipment or use the low water of purity, and, also need the space being set and keeping in repair the auxiliary space of usefulness of these equipment.At the aspects such as running, maintenance or drainage management of these auxiliary equipment, in the time of investment in the early stage, also need to keep the funds of usefulness certainly again.Particularly, when the water after will using carries out draining, must consider to meet the water quality a reference value for drainage management.
The 2nd, can not obtain desirable clean effect because of the wettability that water had sometimes.The surface tension of water is 68.74 ± 0.05dyn/cm, is 72.75 ± 0.05dyn/cm that a reference value is quite high in the time of 20 ℃ in the time of 45 ℃.And in the solution that fluorine system commonly used in the past and chlorine are, for example Methyltestosterone CFC113 is that 17dyn/cm, 1.1.1-trichloroethanes are 25dyn/cm in the time of 20 ℃, with respect to water only 1/3～1/4.That is, compare with solution commonly used in the past, water can be described as the material of wettability difference.Therefore, after water is cleaned according to the method identical with tradition, water is not easy to soak into and enters member each other and intersection and driving fit part or be formed at aperture on the member and corner portion etc., be attached to these positions and the dirty grade that exists can't be cleaned clean weak effect.
The 3rd, when cleaning, if had metal ingredient on the member of cleaning, get rusty because of the oxidation of water then easily, so must take rust preventing in the surrounding environment that is mixed with air and under by the environment of the normal pressure of being heated.Particularly under this environment, because of drying time elongated, water mark etc. also takes place easily, also impair outward appearance even clean.
On the other hand, when using chlorine-free to be the solution of silicon system, methane series or ethanol system etc., the 1st, because of its boiling point height, sometimes need about 200 ℃, so the occasion that the vaporized member that carries out the steam formula of this solution is cleaned, steam temperature is high, can take place by the thermal deformation of the member of cleaning and problem such as rotten.And, compare with the solution of chlorine system with the fluorine system that used always in the past, also exist the problem of drying property difference.The 2nd, the solution of methane series is low because of ignition point, is 50～80 ℃, so the security to fire and blast is guaranteed in strong request.
Like this, make the detergent remover occasion of water and chlorine-free that multiple lime light be arranged, particularly from improving cleaning strength and drying property and guaranteeing angle, adopt preferably that detergent remover under being positioned over reduced pressure atmosphere applies ultrasonic vibration, carry out the drying device of dry vacuum mode under the decontaminating apparatus of so-called vacuum ultrasonic mode that the member that is immersed in the detergent remover is cleaned and the reduced pressure atmosphere the security of methane series.This is because the decontaminating apparatus and the drying device of formation reduced pressure atmosphere are that a kind of airtight construction that contains the piping system of vacuum tank is so-called closed system, by piping system inside is remained in negative pressure, make its inner oxygen concentration extremely low, can restrain and ignite, even just in case damage location in piping system, occurred, can not spill to the outside yet, can guarantee security owing to this negative pressure makes inner solution and steam.Use the occasion of decontaminating apparatus, when when detergent remover applies ultrasonic vibration, if place decompression down detergent remover, the cavitation as cleaning strength can take place easily then, therefore can help the raising of cleaning strength, again, use the occasion of drying device, under reduced pressure make the saturated vapor drops, can make substantive decline of boiling point of solution, with compare under the atmospheric pressure environment, solution is evaporated easily, help improving drying property.
At this, at first as Figure 14, shown in Figure 15, for example open the decontaminating apparatus of traditional vacuum ultrasonic mode of 2000-33349 communique according to the Japan Patent spy, have lid and storing the oscillating plate 103 that is equipped with on the diapire of ablution groove 101 of detergent remover 102 with lid 107 one, one end of pipe arrangement 106 is communicated with magnetic valve 104 and vavuum pump 105, pipe arrangement 106a from the other end branch of pipe arrangement 106,106b respectively with ablution groove 101, lid 107 links (with reference to Figure 14), be equipped with the ticker 108 (throw-in type) that is covered by housing, pipe arrangement 106a in the inside of ablution groove 101,106b respectively with ablution groove 101, ticker 108 links (with reference to Figure 15).
By making vavuum pump 105 starts open magnetic valve 104, to reducing pressure in the ablution groove 101, and detergent remover 102 is placed under the vacuum, from oscillating plate 103 and ticker 108 ultrasonic vibration is added to this detergent remover 102, the quilt of dipping can be cleaned thing and clean.Meanwhile, owing to make the inner pressure relief of the housing that covers lid 107 and ticker 108 by same pipe arrangement 106, in the inside of the housing that covers lid 107 and ticker 108 and ablution groove 101, do not produce pressure differential, therefore, even do not thicken the housing that covers lid 107 and ticker 108, can not cause the deflection or the distortion of these parts yet.
Yet in this decontaminating apparatus, what pay particular attention to is, because of the inside and outside generation pressure differential of the lid 107 in inside and outside and Figure 14 of ablution groove 101 and pipe arrangement 106a, 106b, so should keep the mutual air-tightness of these members.For example, for air-tightness, in the weak relatively especially part of air-tightness be pipe arrangement 106a and ablution groove 101 linking part, oscillating plate 103 and lid 107 linking part, pipe arrangement 106b and lid 107 (with reference to Figure 14) or with the linking part of ablution groove 101 (with reference to Figure 15) etc., important item of design aspect is that the envelope of selecting the aspect of suitable encapsulant, welding material and assembly parts class etc. is ended material and sealed only method, and, also must fully take into account for ending material along with these envelopes of long-term use and sealing the deterioration of ending method.
Again, after the clean end under vacuum, normally (hereinafter referred to as " ventilating gas ") such as Compressed Gas and atmosphere imported in the ablution groove 101, under vacuum state, implement to return the action (hereinafter referred to as " ventilation ") of normal pressure.This is because in that take out from ablution groove 101 when being cleaned thing must first uncap, but if still keeping vacuum state in the ablution groove 101, then lid just becomes the state of being pressed, extremely difficult uncap.In order to implement this ventilation, if begin ventilating gas is imported in the ablution groove 101, the vaporific detergent remover 102 that then swims in ablution groove 101 attracted to pipe arrangement 106a, 106b under suction function, and constantly arrive to cover lid 107 and ticker 108 housing inside and accumulate.In general, oscillating plate 103 and the electric driving of ticker 108 reasons, and the charging part of controlling its electric driving is contained in the inside of the housing that covers lid 107 and ticker 108, therefore, also have 1 shortcoming be for example as detergent remover 102 when using the detergent remover of flammable methane series, charging part becomes ignition source, is accumulated in its charging part vaporific detergent remover 102 on every side and ignites, and very likely causes fire and blast.
Secondly, in the drying device of traditional vacuum mode, by being positioned in the vacuum tank with the thing that is dried of detergent remover, make it become vacuum state, the detergent remover that is attached on the thing that is dried is captured the required heat (evaporation latent heat) of gasification on one side from the thing that is dried, seethe with excitement, evaporate carry out vacuum drying on one side.On the other hand, carrying out along with evaporation, the composition temperature of thing of being dried descends gradually, when this composition temperature is reduced under the saturated vapour pressure temperature, if the vacuum in the vacuum tank is in same state, then the boiling of detergent remover and evaporation stop at this time point, for fear of this phenomenon, usual way is further to improve the vacuum ability, improves the composition temperature of the thing that is dried that arrives vacuum or improve the vacuum suction time point or the thing supply heat that is dried in vacuum suction.
For example, as improving the straightforward procedure of composition temperature that vacuum suction begins the thing that is dried of time point, can adopt the warm wind heating means that in vacuum tank, are blown into warm wind.Yet, when the heating of finite time, because the temperature of vacuum tank sidewall has entered drying regime under the state that does not fully rise as yet, therefore, the gas of detergent remover of evaporation contact with this sidewall and cools off and condensing, remains under this condensing state of maintenance and exists the problem that impairs drying in the vacuum tank.And, when the thing that is dried to the tubule and the shape of the complexity with built-in type shape carries out drying, particularly each position is easy to generate temperature difference, make the drying regime heterogeneity at each position because of this temperature difference, become the ring mark and the principal element of getting rusty, exist that obvious damage is cleaned, the problem of the outward appearance of the dried thing that is dried.Again, as method for distinguishing, the vapour injection mode of heating of the also oriented mandatory jet vapor of thing that is dried, but vaporized required equipment and the pump that sprays usefulness must be set, cost is risen.
Summary of the invention
In view of the above-mentioned problems, the objective of the invention is to, a kind of inside and outside and mutual pressure differential of these members of main member of restraining is provided, need not specially take measures easily to keep air-tightness, even and at the decontaminating apparatus of the occasion of having used flammable detergent remover to the also good vacuum ultrasonic mode of the security that prevents fire and blast.
Again, another object of the present invention is to, provide a kind of for members such as electronics, machinery, shaping are relevant, from cleaning the method for cleaning that can obtain high efficiency and safety to dry.
To achieve these goals, decontaminating apparatus of the present invention is a kind of to placing the detergent remover under the vacuum to apply ultrasonic vibration, the quilt that impregnated in described detergent remover is cleaned the device that thing is cleaned, it is characterized in that, cleanly having in vacuum tank of can obtaining vacuum state: store described detergent remover, accommodate the described ablution groove of being cleaned thing; And inner have decide the space, apply the vibrating body of ultrasonic vibration to described detergent remover, described vibrating body decide the space to the described clean vacuum tank inner opening of using.Like this, because ablution groove and vibrating body are placed under the same pressure, and at change the inside and outside of a little members pressure differential can not take place, therefore, need not specially take measures easily to keep air-tightness.
In general, its vibrating body decide to have in the space and produce the charging part that ultrasonic vibration is used, but at the sort of flammable detergent remover that uses methane series as detergent remover, because of this detergent remover spill and ventilation etc. be present in decide the occasion in space, charging part becomes ignition source, generation causes the danger of fire and blast, thus preferably have to described decide the space supply with to purify described vibrating body decide the feedway that purifies air of the Purge gas used in the space.
Again, from being convenient to be provided with the viewpoint of vibrating body, preferably by the oscillating plate that transmits ultrasonic vibration and be installed in that lid on this oscillating plate forms describedly decide the ticker that ultrasonic vibration is sent in setting in the space, described oscillating plate is configured to decide the space towards the described ablution groove outside with described, formation is with the state of the diapire of described ablution groove or the opening obturation on the sidewall, simultaneously, inserting logical bolt the circumference from described oscillating plate runs through the through hole of the diapire of described ablution groove or sidewall fixes.At this moment, the detergent remover that stores in ablution groove may spill by through hole, yet, even this detergent remover spills by through hole, only however invade decide in the space, just can significantly reduce charging part that ticker is subjected to etch or will has a ticker as ignition source and the danger of breaking out of fire and blast, therefore, described lid is installed in the described through hole of ratio center side more on the described oscillating plate.
And, from the purpose that prevents from more reliably to invade to deciding space from the detergent remover that its through hole spills, the central portion that preferably makes described oscillating plate, is installed in described lid on the described central portion of described oscillating plate to lower recess than the described more relatively ablution groove of the circumference with described through hole.
Again, from detergent remover, when the quilt after the taking-up of the top of ablution groove is cleaned is cleaned thing, the part of detergent remover is attached on one side to be cleaned to take out of on the thing and drips and making dirty on every side or passing and flow down to the sidewall outer of ablution groove and by mistake corrode the vibrating body of being located on sidewall and the diapire ablution groove irregularly, for fear of this phenomenon, preferably with the upper end of the sidewall of described ablution groove below warpage laterally, the detergent remover that forms bootable drippage is recycled to ablution groove or makes its state away from the sidewall of ablution groove.
Again, flow down, also can not be back to the diapire that is provided with vibrating body etc. even the detergent remover of drippage passes to the sidewall outer of ablution groove, for this purpose, as long as the side wall lower ends portion of described ablution groove is protruded downwards than diapire.And, if can be collected in institute's allocation, then reclaim and be more prone to passing the detergent remover flow down to sidewall outer, for example, also can make the edge of the side wall lower ends portion of described ablution groove concavo-convex or relatively horizontal plane be inclination.
Again, decontaminating apparatus of the present invention is made of decontaminating apparatus and drying device, and described decontaminating apparatus is cleanly having in vacuum tank of can obtaining vacuum state: store described detergent remover, accommodate the described ablution groove of being cleaned thing; And inner have decide the space, apply the vibrating body of ultrasonic vibration to described detergent remover, described vibrating body decide the space to the described clean vacuum tank inner opening of using, to placing the described detergent remover under the vacuum to apply ultrasonic vibration, cleaned by clean thing impregnated in described in this detergent remover, described drying device comprises: will describedly be cleaned thing and accommodate, extract into the drying vacuum tank of vacuum state as the thing that is dried by what this decontaminating apparatus was cleaned; With the solution heating container of accommodating after the heating; And with the described dry pipe arrangement that is communicated with described heating container with vacuum tank, one end of described pipe arrangement is towards the described thing opening that is dried, the other end of described pipe arrangement is immersed in the described solution, when the vacuum tank of described drying is in vacuum state, described pipe arrangement is open, described solution described end from described pipe arrangement under fluidized state sprays to the described thing that is dried, and this thing that is dried is carried out drying.Like this, cleaned thing and under vacuum, carried out ultrasonic cleansing safely by decontaminating apparatus earlier, then, under vacuum state, provided heat expeditiously, carried out drying at short notice by drying device as being dried thing.
The composition temperature of thing does not reach the low solution of evaporation latent heat that such height also can evaporate even the solution that sprays to the thing that is dried preferably is dried, and for example, described solution can be the solution of methane series.
Again, during heated solution, if the thermal source of heater etc. is directly contacted with solution, the possibility that fire and blast are then arranged is a purpose from avoiding this phenomenon, preferably described heating container is divided into 2 chambers with the next door, one side accommodates described solution, the opposing party is provided with thermal source, offers described solution from the heat of thermal source by described next door, and described solution is heated.
Viewpoint from the composition state of temperature stabilisation of the state of the solution of the fluidized state that sprays to the thing that is dried and the thing that is dried, preferably in the path of described pipe arrangement, driver's valve is set, according to described dry with the pressure in the vacuum tank, accommodate the pressure in the described heating container of described solution and the temperature of described solution, the switching degree of described driver's valve is regulated.
Again, if can provide heat and condensing solution is vaporized once more to the thing that is dried, heat is provided or improves temperature in the vacuum tank more apace to the thing that is dried, then better effects if if described dry with vacuum tank medial surface and at least 1 face in the bottom surface on heater is set.
Again, from the viewpoint of supression to the job costs of the solution of the thing injection that is dried, consider under the situation of not damaging SOLUTION PROPERTIES and utilize again, preferably be provided with: spray, the vaporized described solution that is present in the described dry vacuum tank is reclaimed and the condensing condensing device of solution to the described thing that is dried; And the feedway that will supply with to described heating container by the condensing described solution of the condensing device of described solution.
Again, preferably will be in the new liquid status of purification all the time, reclaim and the solution discharger of discharging spraying to the described thing that is dried, stockpile in the described solution of described dry vacuum tank bottom surface as long as be provided with to the solution that the thing that is dried sprays.
And, to achieve these goals, method of cleaning of the present invention is characterized in that, be made up of clean operation and drying process, described clean operation is cleanly having in vacuum tank of can obtaining vacuum state: store detergent remover, accommodate the ablution groove of being cleaned thing; And inner have decide the space, apply the vibrating body of ultrasonic vibration to described detergent remover, described vibrating body decide the space to the described clean vacuum tank inner opening of using, to placing the described detergent remover under the vacuum to apply ultrasonic vibration, cleaned by clean thing impregnated in described in this detergent remover, described drying process is to have: will describedly be cleaned thing and accommodate, extract into the drying vacuum tank of vacuum state as the thing that is dried by what this clean operation was cleaned; With the solution heating container of accommodating after the heating; And with the described dry pipe arrangement that is communicated with described heating container with vacuum tank, one end of described pipe arrangement is towards the described thing opening that is dried, the other end of described pipe arrangement is immersed in the described solution, when described drying is in vacuum state with vacuum tank, described pipe arrangement is open, described solution described end from described pipe arrangement under fluidized state sprays to the described thing that is dried, and this thing that is dried is carried out drying.
The simple declaration of accompanying drawing
Fig. 1 is the integrally-built pie graph of decontaminating apparatus among expression the present invention the 1st embodiment.
Fig. 2 wants portion's profile for the clean portion in the decontaminating apparatus of expression the 1st embodiment.
Fig. 3 is the ideograph of the state that spills of expression detergent remover.
Fig. 4 is the ideograph of the drippage state of expression detergent remover.
Fig. 5 wants portion's profile for the ablution groove bottom in the decontaminating apparatus of expression the 2nd embodiment.
Fig. 6 wants portion's profile for the clean portion in the decontaminating apparatus of expression the 3rd embodiment.
Fig. 7 is the enlarged drawing of the A state that spills, Fig. 6 the portion of modal representation detergent remover.
Fig. 8 is the side view of the ablution groove bottom in the decontaminating apparatus of expression the 4th embodiment.
Fig. 9 is the side view of the detergent remover bottom in the decontaminating apparatus of expression the 5th embodiment.
Figure 10 is the figure of rerum natura one example of expression detergent remover.
Figure 11 is the integrally-built pie graph of decontaminating apparatus among expression the 6th embodiment.
Figure 12 wants portion's profile for the drying section in the drying device of expression the 6th embodiment.
Figure 13 wants portion's profile for the drying section in the drying device of expression the 7th embodiment.
Figure 14 is for wanting portion's profile in the traditional decontaminating apparatus of expression.
Figure 15 wants portion's profile for the traditional another kind of decontaminating apparatus of expression.
The specific embodiment
Describe decontaminating apparatus and drying device in the embodiment of the invention with reference to the accompanying drawings in order in detail.At first the decontaminating apparatus to the present invention the 1st embodiment describes.Fig. 1 is expression decontaminating apparatus integrally-built pie graph, Fig. 2 be in the presentation graphs 1 clean portion want portion's profile.As shown in Figure 1, decontaminating apparatus is broadly divided into the portion of cleaning and distiller.Distiller is by distiller, and one time groove, discharge launder, reheater, condensed device, cooling water, warm water, moisture are removed formations such as unit, because of not having direct relation with the present invention, the explanation that the Therefore, omited is detailed.
Following explanation is earlier cleaned wants portion's structure.The 1st, vacuum tank (below be sometimes referred to as " clean use vacuum tank ", to make difference) with vacuum tank 201 described later, the 2nd, the lid of vacuum tank 1, the 3rd, the quilt of electronics, machinery, shaping associated components etc. is cleaned thing, the 4th, be incorporated with the cage frame of being cleaned thing 3, the 5th, the detergent remover of hydrocarbon system, the 6th, accommodate the ablution groove of being cleaned thing 3, the 7th, the ultrasonic vibration subelement.
That opens on vacuum tank 1 forms is cylindric, and internal configurations has ablution groove 6 and ultrasonic vibration subelement 7, and having with standard shaft 2a1 in open upper end is the lid 2 that reverses in the center.That is, under the state of opening in that lid 2 is reversed, putting into the netted cage frame 4 of being cleaned thing 3 can be in the inside and outside discrepancy of vacuum tank 1, and under closing state, vacuum tank 1 is being sealed.In addition, be formed with vaccum exhaust outlet 1a on the diapire of vacuum tank 1, lid 2 is provided with the pressure sensor 17 that detects the pressure in the vacuum tank 1.
Again, the upper end 6c of the sidewall 6b of ablution groove 6 is the below warpage laterally, and bottom 6e then protrudes downwards from diapire 6d.
On the diapire 6d of the 6a of storage tank portion, be formed with opening 6j, oscillating plate 8 is configured to the top state with this opening 6i obturation by the central portion 8a of oscillating plate 8, not shown through hole is inserted the circumference 8b of oscillating plate 8, the diapire 6d of ablution groove 6 and liner 13 perforations that are clamped in teflon (R) system between these positions on logical bolt 12 and is carried out affixed in this through hole.Have the charging part 9a that supplies with its electric driving in the end of each ticker 9 of electric property driving, on lid 10, be formed with air entry 10a and exhaust outlet 10b, but this exhaust outlet 10b and only check-valves 11 bindings of open interior space 7a to vacuum tank 1 in.
An end that has the vacuum exhaust pipe arrangement 20 of magnetic valve 21,22 in the vaccum exhaust outlet 1a of vacuum tank 1 and the pathway links, and the other end of this vacuum exhaust pipe arrangement 20 and vavuum pump 25 link.And, be provided with gas-liquid separator 26 in the downstream of vavuum pump 25.Vacuum exhaust pipe arrangement 20 is branch between magnetic valve 21 and 22, and is formed with the pipe arrangement 20a of branch that links with the opening 6i of discharge recoverer 6h, has magnetic valve 23 on the pipe arrangement 20a of this branch.That is, make decompression in the vacuum tank 1, under ablution groove 6 and 7 decompressions of ultrasonic vibration subelement, also make the inner space 7a decompression of ultrasonic vibration subelement 7 through check-valves 11 by opening magnetic valve 21,22.On the other hand, by opening magnetic valve 23, will be attracted to the pipe arrangement 20a of branch to the detergent remover 5 that discharge recoverer 6h flows out.
The detailed content aftermentioned of the air entry 10a of lid 10, it can be used in flexibly in decompression beginning inner space 7a to clean between tailend, ultrasonic vibration subelement 7 purifies and clean in the ventilation after finishing, and is connected with an end of air-breathing pipe arrangement 46.This air-breathing pipe arrangement 46 has flowmeter 47 and check-valves 48 in the path, the other end branches into 2 the tunnel, the one square tube overregulates device 41 and magnetic valve 42 and is connected with the gas bomb 40 that the non-active gas of nitrogen etc. is sealed, and the opposing party is communicated with by magnetic valve 44 and check-valves 45 and compressed air with by the air 43 of the atmosphere of opening etc.That is, the decontaminating apparatus of present embodiment is a kind of catharsis and the shared form of draught effect.And, be a kind of form that can both select to the gas in the gas bomb 40 and air 43 as purifying and ventilating with gas, only need have once square enough certainly.In addition, from the viewpoint of prevention secure context, preferably adopt non-active gas as purifying and ventilation gas.
The following describes this structure decontaminating apparatus action and the action in form.As shown in Figure 1 and Figure 2, be housed in the ablution groove 6 that vacuum tank 1 is had, and be immersed in and store in the detergent remover 5 of the 6a of storage tank portion, make lid 2 be in closed condition putting into the cage frame 4 of being cleaned thing 3.Secondly, if open magnetic valve 21,22 when making vavuum pump 25 starts, then the air in the vacuum tank 1 is attracted to vavuum pump 25 from vaccum exhaust outlet 1a via vacuum exhaust pipe arrangement 20, the beginning vacuum suction.At this moment, by magnetic valve 42 grades or the magnetic valve 44 of opening air-breathing pipe arrangement 46, the inner space 7a of ultrasonic vibration subelement 7 constantly is attracted via check-valves 11 and reduces pressure from exhaust outlet 10b when purifying in that this Purge gas of gas in the gas bomb 40 or air 43 is imported from air entry 10a.Again, the magnetic valve 23 of the pipe arrangement 20a of branch is also opened, and attracts to flow out to the detergent remover 5 of discharge recoverer 6h.
Thereafter, if reaching institute's definite value (vacuum state) time point, the pressure in the vacuum tank 1 that is detected by pressure gauge 17 makes oscillating plate 8 starts, then ultrasonic vibration imposes on detergent remover 5 by the transmission of oscillating plate 8, in its detergent remover 5 cavitation takes place, and the quilt of dipping is cleaned thing 3 clean.
After process institute fixes time, finish to be cleaned the clean of thing 3 and travel to ventilation.The magnetic valve 22 or the magnetic valve 21,23 of vacuum exhaust pipe arrangement 20 are closed, then open magnetic valve 42 grades or the magnetic valve 44 of air-breathing pipe arrangement 46 again, then this ventilating gas of gas in the gas bomb 40 or air 43 imports from check-valves 11 via the air entry 10a and the exhaust outlet 10b of ultrasonic vibration subelement 7, makes the pressure in the vacuum tank 1 return normal pressure.Uncap 2 then, take out and finish from vacuum tank 1 putting into cage frame 4 that clean quilt cleans thing 3.
The vaporific detergent remover 5 that flows out to the detergent remover 5 of discharge recoverer 6h and be present in the pressure vessel 1 attracts to vavuum pump 25 through vacuum exhaust pipe arrangement 20 from the vaccum exhaust outlet 1a of vacuum tank 1 and the opening 6i of discharge recoverer 6h, and purifies via gas-liquid separator 26 and distiller.Thereafter, be provided with heating with coil 31 and cooling with temperature adjustment in the detergent remover temperature adjustment groove 30 of coil 32 to about 40 ℃, feed flow pipe arrangements 35 by being provided with in the path such as solution feed pump 36, filter 37 and magnetic valve 18, and supply with to the 6a of storage tank portion from detergent remover supply port 6g.This supply makes magnetic valve 18 starts such as grade of solution feed pump 36 by the output from the liquid level sensor 15 of being located at the 6a of storage tank portion.
As vavuum pump 25, can list the vavuum pump 25 of reciprocating type, liquid-seal type, swinging etc., in the decontaminating apparatus of present embodiment, because of following former thereby adopted the vavuum pump 25 of liquid-seal type.Even this is because the vavuum pump 25 of liquid-seal type sucks to flow out to the detergent remover 5 of discharge recoverer 6h and be present in pressure vessel 1 interior vaporific detergent remover 5 from the opening 6f of the 6a of storage tank portion also separates liquid and contact with the blowback transfer part, so it is different with common sealed vavuum pump 25, the spark and the heat that are taken place by the friction of metal sliding surface are few, security is good, also obstacle can not take place.On the other hand, the vavuum pump 25 of liquid-seal type is if useful vacuum degree reaches the saturated vapour pressure of bulking liquor, the noise of the fierceness that causes because of cavitation then can take place, lose the durability of use, for fear of this phenomenon, normally air ejector is configured in the leading portion in path and air is sucked, but in the decontaminating apparatus of present embodiment, substitute the effect of this air ejector with the supply of Purge gas.
Because the inner space 7a of ultrasonic vibration subelement 7 is except the supply of Purge gas and ventilating gas, to interrupt from the intrusion of outside, therefore, the vaporific detergent remover 5 that is present in the pressure vessel 1 can not invaded in the 7a of this inner space, again owing to remain purification and ventilation state, even so, also can forcibly discharge via exhaust outlet 10b from check-valves 11 because of the damaged grade of oscillating plate 8 escapes in the 7a of inner space detergent remover 5.That is, can not take place fully following state promptly, the charging part 9a of the ticker 9 that has in the 7a of this inner space becomes ignition source, detergent remover 5 is caught fire and causes fire and blast.When detergent remover 5 adopted hydrocarbon system, explosive range was about (with reference to Figure 10) about 0.8～5.5vol.%, purified and ventilation state because of can all the time inner space 7a being in the decontaminating apparatus of present embodiment, so can avoid this explosive range.
Again, because the lid 10 that will be formed with the inner space 7a of ultrasonic vibration subelement 7 is installed on the oscillating plate 8 than bolt 12 more close center side, even event detergent remover 5 spills (the hachure portion of Fig. 3) by the through hole and the liner 13 of bolt 12, can not invade in the 7a of inner space yet.And the central portion 8a protuberance by with oscillating plate 8 helps more to preventing in the inner space 7a that invades the above-mentioned detergent remover that spills 5.Again owing to increased the deformation drag of oscillating plate 8 itself from its vpg connection, so when the bolted of oscillating plate 8, be not easy to take place the distortion of the fluctuation of the oscillating plate 8 that causes because of tightening torque and distortion etc., also can obtain so-called effect of cutting down the management of prudent tightening torque significantly.For example, in present inventor's experiment, realized that the installation work-hour number reduces by 2 one-tenth degree.
Main member is that ablution groove 6 and ultrasonic vibration subelement 7 are placed under the same vacuum in the vacuum tank 1 together, and separately inside and outside all pressure differential can not take place simultaneously, so the associated components of Lian Yuqi binding does not produce load yet.For example, for the thickness of slab of oscillating plate 8, the intensity of relative pressure difference and the transmission efficiency of ultrasonic vibration have normally been considered, thickness of slab is about 3～4mm, but in the decontaminating apparatus of present embodiment, because of not needing to consider pressure differential, so the thickness of slab about the about 2～3mm under the use normal pressure is just enough.
As shown in Figure 4, when the clean thing 3 of the quilt after will cleaning takes out above ablution groove 6 from detergent remover 5, the part of detergent remover 5 is attached to be cleaned on thing 3 and the cage frame 4, when taking out, become the drop 5a of drippage, can irregularly make dirty ablution groove 6 around or pass to the outside of the sidewall 6b of ablution groove 6 and flow down, causing by mistake gets wet is located at ultrasonic vibration subelement 7 on sidewall 6b and the diapire 6d.Particularly in the 7a of the inner space of ultrasonic vibration subelement 7 because of having the charging part 9a of the ticker 9 that becomes ignition source, so, preferably avoid this situation from viewpoint for the security of fire and blast.For this reason, in the decontaminating apparatus of present embodiment, utilize the upper end 6c of the sidewall 6b of the ablution groove 6 of below warpage laterally, can make the sidewall 6b of drop 5a away from ablution groove 6; Perhaps utilize the downstream portion 6e of the sidewall 6b that protrudes from the diapire 6d of ablution groove 6 downwards, transmit the outside of the sidewall 6b that makes at ablution groove 6 and the drop 5a that flows down does not reflux to the diapire 6d that is provided with ultrasonic vibration subelement 7.
The decontaminating apparatus of the present invention the 2nd embodiment is described below with reference to Fig. 5.Fig. 5 wants portion's profile for the ablution groove bottom in the decontaminating apparatus of expression the 2nd embodiment.In addition, the title identical with the decontaminating apparatus of the 1st embodiment and have the part mark prosign of identical function among the figure omitted the explanation of its repetition.Difference is described.Also be the same in the decontaminating apparatus of the 3rd～the 5th embodiment described later.
The decontaminating apparatus of the 2nd embodiment is characterised in that the inner face with diapire 6d of the ablution groove 6 in the decontaminating apparatus that makes the 1st embodiment becomes with ultrasonic vibration subelement 7 simultaneously.The central portion 8a of the protuberance of oscillating plate 8 is embedded among the opening 6j of ablution groove 6, and the inner face that oscillating plate 8 is mounted to diapire 6d becomes with one side.Like this, because of being not easy precipitation,, guarantee high-grade detergency so it is all to diffuse to detergent remover 5 apace from foreign matter and the residue that is entered the detergent remover 5 by clean thing 3.And, also be convenient to cleaning and maintaining.
The decontaminating apparatus of the present invention the 3rd embodiment is described below with reference to Fig. 6, Fig. 7.Fig. 6 wants portion's profile for the clean portion in the decontaminating apparatus of expression the 3rd embodiment, and Fig. 7 is the enlarged drawing of A that spill, Fig. 6 the portion that represents detergent remover.
The decontaminating apparatus of the 3rd embodiment is characterised in that, ablution groove 6 is made elongate shape, is provided with ultrasonic vibration subelement 7 on the sidewall 6b of this ablution groove 6.Ablution groove is shared with a diapire 6d and a sidewall 6b, roughly is divided into 6a of storage tank portion and discharge recoverer 6h.On the sidewall 6b of the 6a of storage tank portion, be formed with opening 6k, oscillating plate 8 is configured to the shape with this opening 6k obturation by the central portion 8a of oscillating plate 8, not shown through hole connects the circumference 8b of oscillating plate 8, the upper side wall 6b of ablution groove 6 and the liner 13 that is clamped between these positions, inserts logical bolt 12 and carry out affixed in this through hole.And, the lug boss 8c that bolt 12 is surrounded groove-like shape, that be convexly set in full week is set on the circumference 8b of oscillating plate 8.
Like this, be that to be used for silk screen plate that serigraphy uses etc. the sort of during than relatively large and elongated shape when cleaning thing 3, can be under the upright state of the clean thing of this quilt 3 apply ultrasonic vibration, but high efficiency is cleaned from the side.Again, even through hole and the liner 13 of detergent remover 5 by bolt 12 spills (the hachure portion of Fig. 3), because of accepting, so can not invade in the inner space 7a of ultrasonic vibration subelement 7 by the lug boss 8c of the groove-like of being located at oscillating plate 8.
Again, in the decontaminating apparatus of present embodiment, quilt after the upper end 6c of the sidewall 6b of the ablution groove 6 of warpage will clean below can utilizing is laterally cleaned the drop that drips when thing 3 takes out and is recycled to ablution groove 6 or makes its sidewall 6b away from ablution groove 6, therefore, can by mistake not get wet and be located at ultrasonic vibration subelement 7 on a sidewall 6b and the sidewall 6b.That is, even detergent remover 5 is flammable, the charging part 9a that also can not be located at the ticker 9 among the inner space 7a of ultrasonic vibration subelement 7 becomes the such situation of ignition source, can guarantee the security for fire and blast.
The decontaminating apparatus of the present invention the 4th, 5 embodiment is described below with reference to Fig. 8, Fig. 9.Fig. 8 is the side view of the ablution groove bottom in the decontaminating apparatus of expression the 4th embodiment, and Fig. 9 is the side view of the detergent remover bottom in the decontaminating apparatus of expression the 5th embodiment.
4th, the decontaminating apparatus of the 5th embodiment is characterised in that, distortion has been done at the edge of the bottom 6e of the ablution groove among the 1st embodiment 6.In the decontaminating apparatus of the 4th embodiment, as shown in Figure 8, the edge of bottom 6e is formed concavo-convex, the outside of the sidewall 6b of the drop 5a guiding ablution groove 6 of drippage when the quilt after cleaning is cleaned thing 3 and taken out and flowing down utilizes deadweight to be collected in male member and drips.In the decontaminating apparatus of the 5th embodiment, as shown in Figure 9, the edge of bottom 6e with respect to the horizontal plane is inclination, and the outside of the sidewall 6b of drop 5a guiding ablution groove 6 and flowing down utilizes deadweight to be collected in minimum sloping portion and drips.Like this, the fixed-site of dripping because of drop 5a is so reclaim this drop 5a easily.
Then, the drying device to the present invention the 6th embodiment describes.Figure 11 is expression drying device integrally-built pie graph, and Figure 12 wants portion's profile for the drying section among expression Figure 11.As shown in figure 11, drying device is broadly divided into drying section and distiller.Distiller is by distiller, and reheater, condensed device, Cooling and Heat Source, warm source, moisture are removed formations such as unit, because of not having direct relation with the present invention, the explanation that the Therefore, omited is detailed.
Earlier the explanation drying section wants portion's structure.The 201st, vacuum tank (below be sometimes referred to as " clean use vacuum tank ", to distinguish) with vacuum tank 1 described later, the 202nd, the lid of vacuum tank 201, the 203rd, by the clean electronics of detergent remover, machinery, the quilt of shaping associated components etc. is cleaned thing (that for example uses above-mentioned decontaminating apparatus cleans thing 3 by detergent remover 5 clean quilts), the 204th, be incorporated with the cage frame of being cleaned thing 203, the 205th, heating container, the 206th, the solution of hydrocarbon system, the 207th, the heater of coiled type, the 208th, heat medium, the 209th, the connection pipe arrangement that vacuum tank 201 is communicated with heating container 205, the 210th, make to be communicated with the gas-powered valve that pipe arrangement 209 opens and closes.
Being communicated with pipe arrangement 209 is that vacuum tank 201 is communicated with heating container 205, and upper end 209a is at the bottom surface of vacuum tank 201 opening, and lower end 209b is immersed in the solution 206, is provided with gas-powered valve 210 in its path.
The exhaust outlet 205d of the vaccum exhaust outlet 201a of vacuum tank 201 and the last chamber 205a of heating container 205 links with 2 ends from vacuum exhaust pipe arrangement 250 branches respectively, in the path of the vacuum exhaust pipe arrangement 250 of its branch, be provided with each gas-powered valve 251,252 separately, and the other end of vacuum exhaust pipe arrangement 250 and vavuum pump 253 link.And, be provided with separator(-ter) 254 in the downstream of vavuum pump 253.That is, can reduce pressure by the last chamber 205a that opens and closes each the gas-powered valve 251 or the 252 pairs of vacuum tanks 201 or heating container 205.
The vacuum state that the air entry 201b of vacuum tank 201 can be used in the vacuum tank 201 after the drying that is described in detail later finishes flexibly is back in the normal pressure (ventilation), and is connected with an end that ventilates with gas pipe arrangement 261.This ventilation branches into 2 the tunnel with the other end of gas pipe arrangement 261, the one square tube is crossed gas-powered valve 262 and adjuster 263 grades and is connected with the gas bomb 40 that the non-active gas of nitrogen etc. is sealed, and the opposing party is communicated with by check-valves 265 and gas driver's valve 266 and compressed air with by the air 287 of the atmosphere of opening etc.That is, the drying device of present embodiment is a kind ofly can only need have once just enough certainly as the form that both select with the gas in gas, the gas bomb 264 and air 267 of ventilating.In addition, the viewpoint from the prevention secure context preferably adopts non-active gas as ventilation gas.
The following describes this structure drying device action and the action in form.As shown in figure 11, be housed in vacuum tank 201, lid 202 is closed, when making vavuum pump 253 starts, open each gas-powered valve 251,252 putting into the cage frame 204 of being cleaned thing 203.Like this, air in the vacuum tank 201 attracts to vavuum pump 253 via vacuum exhaust pipe arrangement 250 from vaccum exhaust outlet 201a, the beginning vacuum suction, the interior air of the last chamber 205b of heating container 205 attracts and begins to reduce pressure to vavuum pump 253 via vacuum exhaust pipe arrangement 250 from exhaust outlet 205d.Again, make heater 207 starts of the following chamber 205c of heating container 205, the solution 206 that is contained in chamber 205b is heated.
Then, the pressure in the pressure in the vacuum tank 201, the last chamber 205b of heating container 205 and the temperature of solution 206 arrive in institute's definite value, and the gas-powered valve 210 that is communicated with pipe arrangement 209 is opened.Like this, as shown in figure 12, solution 206 is drawn onto upper end 209a hastily from the lower end 209b that is communicated with pipe arrangement 209, under the state of boiling, spray upward, temperature in the vacuum tank 201 rises rapidly, simultaneously provide heat, the thing 203 that is dried is heated rapidly to the thing 203 that is dried that is positioned at cage frame 204.At this moment, provide the solution 206 of heat to lose enthalpy and fall to the thing 203 that is dried, and constantly stockpile in the bottom surface of vacuum tank 201, but for the solution 206 that sprays from the upper end 209a that is communicated with pipe arrangement 209, keeping the injection that yet has the active effect that froths can not become substantial obstacle.But the amount as if surpassing to a certain degree then has harmful effect, so adopt liquid level sensor 233 that its amount is detected.
Secondly, the temperature of the thing 203 that is dried reaches about about 80～100 ℃, has passed through after institute fixes time, the heating of the thing 203 that finishes to be dried and travel to drying process.At this moment, stockpile in the solution 206 of vacuum tank 201 bottom surfaces and exist bad influence, therefore,, must discharge from vacuum tank 201 in advance when drying is divided a word with a hyphen at the end of a line for drying.For this reason, in the drying device of present embodiment, open again and be located at the gas-powered valve 252 that is provided with on the vacuum exhaust pipe arrangement 250, make the interior constantly decompression of last chamber 205b of heating container 205.Like this, injection from the solution 206 of the upper end 209a that is communicated with pipe arrangement 209 little by little descends, pressure on heating container 205 by the time in the 205b of chamber is with the pressure in the vacuum tank 201 when equal, stockpiles in the last chamber 205b that the solution 206 of vacuum tank 201 bottom surfaces can utilize deadweight to be drawn to get back to heating container 205 from vacuum tank 201 discharges.In order to shorten this efflux time, effective method is the vacuum suction that stops vacuum tank 201, also can provisionally close gas-powered valve 251.
To stockpile after the solution 206 of vacuum tank 201 bottom surfaces is discharged, close the gas-powered valve 210 that is communicated with pipe arrangement 209, proceed the vacuum suction of vacuum tank 201, at this moment, attached to by the detergent remover on the thing 203 that is dried of heating (for example, using above-mentioned decontaminating apparatus to carry out the detergent remover 5 of clean occasion) on one side and solution 206 one side siphon away evaporation latent heat from the thing 203 that is dried and evaporate and carry out drying.Certainly the last chamber 205b of heating container 205 places the environment of negative pressure all the time.
In case dry the end then closed the gas-powered valve 251 of vacuum exhaust pipe arrangement 250.Then, opening the gas-powered valve 262 or 266 that ventilates with gas pipe arrangement 261, the air entry 201b from vacuum tank 201 imports with the gas in the gas gas bomb 264 or gas 267, makes the pressure in the vacuum tank 201 return normal pressure.Uncap 202 again, the cage frame 204 that is placed with the dry thing 203 that is dried is taken out from vacuum tank 201 and finish.
In the heating and dry run of the thing 203 that is dried, the vaporized detergent remover and the solution 206 that are present in the vacuum tank 201 attract to vavuum pump 253 through vacuum exhaust pipe arrangement 250 from vaccum exhaust outlet 201a, after being cleaned via separator(-ter) 254 and distiller, filter 256 and gas driver's valve 257 by being provided with the feed flow pipe arrangement 255 of gas-powered valve 257 in the pathway, are dropped into the last chamber 205b of heating container 205 from supply opening 205e.Because the negative pressure that this input has utilized vavuum pump 253 to be produced, so, only need also can carry out by the on-off action of gas-powered valve 257 even special-purpose pump is not set.This gas-powered valve 257 carries out start by the output from liquid level sensor 243.
As vavuum pump 253, can list the vavuum pump of reciprocating type, liquid-seal type, swinging etc., in the drying device of present embodiment, because of following former thereby adopted the vavuum pump of liquid-seal type.Even this is because the detergent removers that gasify in the suction vacuum tank 201 also separate liquid with solution 206 and contact with the blowback transfer part, so it is different with common sealed vavuum pump, the spark and the heat that are taken place by the friction of metal sliding surface are few, and security is good, also obstacle can not take place.
With stockpiling its purpose that is heated to be that is used in the thing 203 that is dried in the solution 206 of vacuum tank 201 bottom surfaces again, in the drying device of present embodiment, be provided with heater 221 in the bottom surface of vacuum tank 201.Stockpile in the solution 206 of vacuum tank 201 bottom surfaces vaporizedly by heater 221 heating, diffusion in the vacuum tank 201 provides heat to the thing 203 that is dried once more.In present inventor's experiment, can shorten for 20～25% drying time, this works very well, and, raise fast in order to make the temperature in the vacuum tank 201, be provided with heater 222 at the medial surface of vacuum tank 201.In general, because of the thermal capacity of the side of vacuum tank 201 big, be not easy to heat up, if be present in vaporized solution 206 and its contacts side surfaces, condensing and remaining in the vacuum tank 201, then might hinder drying, but make moderate progress by this heater 222 is set, in present inventor's experiment, can shorten for about 5% drying time.
Be arranged at the gas-powered valve 210 that is communicated with pipe arrangement 209, according to regulating the switching degree automatically from the pressure sensor 231 of vacuum tank 201, the pressure sensor 241 of heating container 205 and the value of temperature sensor 242 outputs.Therefore, can be with the state of temperature all-the-time stable of the state of the solution 206 of the fluidized state that sprays to the thing 203 of being dried and the thing 203 that is dried in suitable positive status.Certainly, also can not have the governor motion of this switching degree, but gas-powered valve 210 is maintained at open mode, spray to solution 206 all the time.Particularly in thing 203 occasions that are dried of complicated shape, for example, when having the solution of making 206 intermittences and spray the sort of governor motion, utilize the effect of rising or descending rapidly of spraying, enlarge the effective zone that solution 206 sprays, spray the position that is difficult to arrive in the time of also can easily arriving normality, so we can say that the efficient of this governor motion is high.
The drying device of the present invention the 7th embodiment is described below with reference to Figure 13.Figure 13 wants portion's profile for the drying section in the drying device of expression the 7th embodiment.In addition, the title identical with the drying device of the 6th embodiment and have the part mark prosign of identical function among the figure omitted the explanation of its repetition.Difference is described.
The purpose that at first relates to the drying device of present embodiment.In general, implementing the clean thing of clean quilt can not be that foreign matter is removed fully with dirty and attachment certainly.Though also will be according to shape, size or pollution level as the member of being cleaned thing, but if dirty and adhesion weight foreign matter are made expression as 100 index, even if then by clean can be with 70～80% degree dirty and foreign matter remove well, the dirty and foreign matter of 20～30% remaining degree residues in by clean thing and is brought in the drying device.Promptly, dirty and the foreign matter that these are brought into, even cleaning thing for 1 quilt is trace, but being cleaned thing for several then must not ignore, along with carrying out drying repeatedly, particularly sneak into heating and cleaned in the solution of thing and accumulated, finally remain in and driedly cleaned the surface of thing and reduce aesthetic appearance.For this reason, in the drying device of present embodiment, then can address this problem.
In the drying device of present embodiment, be provided with condensing coil 271 at the medial surface of vacuum tank 201, have next door 272 cylindraceous in the inboard of this condensing coil 270.The bottom of next door 272 is formed with groove-like part 272a, is formed with vaccum exhaust outlet 201a near this groove-like part 272a.Again, heating container 205 is divided into 205h of right ventricle and left chamber 205i by next door 205g, is provided with heater 207 in the 205h of right ventricle, is accommodating and is utilizing this heater 207 direct-fired solution 206.Certainly, even heat also harmless indirectly by heat medium.In the 205h of right ventricle, be formed with exhaust outlet 205jd, supply opening 205e and outlet 205f, be provided with temperature sensor 242, cross heating up prevents switch 246 and liquid level sensor 243.Connection pipe arrangement 209 its upper end 209a that vacuum tank 201 is communicated with the 205h of right ventricle of heating container 205 run through the bottom surface of vacuum tank 201, and to the inside opening of vacuum tank 201, lower end 209b is immersed in the solution 206.
On the other hand, left side chamber 205i can play and will stockpile the effect of the collection box that reclaims in the solution 206 of aftermentioned vacuum tank 201 bottom surfaces, be communicated with vacuum tank 201 by reclaiming pipe arrangement 211, this upper end 211a that reclaims pipe arrangement 211 is to the bottom surface of vacuum tank 201 opening, and end 211b is the top opening of chamber 205i left.In left chamber 205i, be formed with exhaust outlet 205j and outlet 205k, be provided with liquid level sensor 247.
Expressly action describes to the drying device of this structure below.The 1st, in the heating and dry run of the thing 203 that is dried, be present in the detergent remover of the gasification in the vacuum tank 201 and solution 206 be used to attraction from vaccum exhaust outlet 201a from the top by the sidewall and the gap in next door 272 of vacuum tank 201, and utilize condensing coil 271 to cool off and liquefy.The solution 206 of this liquefaction concentrates on groove-like part 272a, from vaccum exhaust outlet 201a via vacuum exhaust pipe arrangement 250, attract to vavuum pump 253 by injector 257 etc., after being cleaned via separator(-ter) 254, by being provided with the feed flow pipe arrangement 255 of filter 256 and gas driver's valve 257 in the path, drop into to the 205h of the right ventricle of heating container 205 from supply opening 205e.
The 2nd, stockpile solution 206 in vacuum tank 201 bottom surfaces as the drying device of the 6th embodiment, can not return by being communicated with pipe arrangement 209, but to be recovered to collection box be among the left chamber 205i by reclaiming pipe arrangement 211.This can realize by the following method: open the gas-powered valve 256,258 that leads to vacuum exhaust pipe arrangement 250 settings of vavuum pump 253 from exhaust outlet 205j, constantly to reducing pressure in the left chamber 205i.Like this, be dried thing 203 and sneaked into dirty foreign matter and grease etc. though stockpile after the solution 206 of vacuum tank 201 bottom surfaces is being cleaned, to residue in, but by being recovered in the collection box (left chamber 205i) separately, the solution 206 that is arranged in the 205h of right ventricle can be kept the new liquid status of not contaminated purification all the time, for example, even carry out drying repeatedly, can not damage the dried aesthetic appearance of being cleaned thing fully yet.
In addition, the present invention does not limit above-mentioned the 1st～the 7th embodiment, can do various changes without departing from the spirit and scope of the present invention.For example, in the decontaminating apparatus in the 1st～the 5th embodiment, also can have ultrasonic vibration subelement 7 (throw-in type), will run through ablution groove 6 with the check-valves 11 that the exhaust outlet 10b of this ultrasonic vibration subelement 7 is communicated with and in vacuum tank 1, open in the inside of the 6a of storage tank portion of ablution groove 6.Also oscillating plate 8 can be made the writing board shape that the relative circumference 8b of central portion 8a does not swell again.
In addition, in the drying device of the 6th, the 7th embodiment,,,, but consider drying property, preferably use the relative water of evaporation latent heat to have only the solution of the extremely low hydrocarbon system about 1/10 with the solution of replacement hydrocarbon system also applicable to noncombustible water as solution 206.Again, also can not contain clean operation in drying device, at this moment, the solution 206 that uses in clean used detergent remover before the drying and the drying process is preferably of the same race.And, can heat and evaporation stockpiling as long as be arranged at the heater 221 of vacuum tank 201 bottom surfaces in the solution 206 of this vacuum tank 201 bottom surfaces, then also can adopt the heater of the thimble tube that the vacuum tank bottom surface is covered.
Certainly, also can be with the decontaminating apparatus and the drying device appropriate combination of the foregoing description, in this occasion, because of all efficiently and safely implementing, so works very well from cleaning to drying.
Utilizability on the industry
Decontaminating apparatus of the present invention and method of cleaning thereof are fit to cleaning of the members such as electronics, machinery, shaping be relevant And Dryly use.
Claims (16)
1. a decontaminating apparatus is characterized in that to placing the detergent remover under the vacuum to apply ultrasonic vibration, the quilt that impregnated in described detergent remover is cleaned the device that thing is cleaned for a kind of,
Cleanly having in vacuum tank of can obtaining vacuum state: store described detergent remover, accommodate the described ablution groove of being cleaned thing; And inner have decide the space, apply the vibrating body of ultrasonic vibration to described detergent remover, described vibrating body decide the space to the described clean vacuum tank inner opening of using.
2. decontaminating apparatus as claimed in claim 1 is characterized in that, have to described decide the space supply with to purify described vibrating body decide the feedway that purifies air of the Purge gas used in the space.
3. decontaminating apparatus as claimed in claim 1 or 2 is characterized in that, by the oscillating plate that transmits ultrasonic vibration and be installed in that lid on this oscillating plate forms describedly decide to be provided with in the space ticker that sends ultrasonic vibration,
Described oscillating plate is configured to decide the space towards the described ablution groove outside with described, formation is with the state of the diapire of described ablution groove or the opening obturation on the sidewall, simultaneously, the circumference from described oscillating plate runs through the through hole of the diapire of described ablution groove or sidewall, insert logical bolt and fix, described lid is installed in the described through hole of ratio center side more on the described oscillating plate.
4. decontaminating apparatus as claimed in claim 3 is characterized in that, the central portion that makes described oscillating plate, is installed in described lid on the described central portion of described oscillating plate to lower recess than the described more relatively ablution groove of the circumference with described through hole.
5. as claim 1,2 or 4 each described decontaminating apparatus, it is characterized in that, the upper end of the sidewall of described ablution groove below warpage laterally.
6. as claim 1,2 or 4 each described decontaminating apparatus, it is characterized in that, the side wall lower ends portion of described ablution groove is protruded downwards than diapire.
7. decontaminating apparatus as claimed in claim 6 is characterized in that, the edge of the side wall lower ends portion of described ablution groove is concavo-convex.
8. decontaminating apparatus as claimed in claim 6 is characterized in that, the relative horizontal plane in edge of the side wall lower ends portion of described ablution groove is inclination.
9. a decontaminating apparatus is characterized in that, constitute by decontaminating apparatus and drying device,
Described decontaminating apparatus is cleanly having in vacuum tank of can obtaining vacuum state: store detergent remover, accommodate the ablution groove of being cleaned thing; And inner have decide the space, apply the vibrating body of ultrasonic vibration to described detergent remover, described vibrating body decide the space to the described clean vacuum tank inner opening of using, to placing the described detergent remover under the vacuum to apply ultrasonic vibration, cleaned by clean thing impregnated in described in this detergent remover
Described drying device comprises: will be by the clean described drying vacuum tank of being accommodated, extract into vacuum state by clean thing as the thing that is dried of this decontaminating apparatus; With the solution heating container of accommodating after the heating; And with the described dry pipe arrangement that is communicated with described heating container with vacuum tank, one end of described pipe arrangement is towards the described thing opening that is dried, the other end of described pipe arrangement is immersed in the described solution, when the vacuum tank of described drying is in vacuum state, described pipe arrangement is open, described solution described end from described pipe arrangement under fluidized state sprays to the described thing that is dried, and this thing that is dried is carried out drying.
10. decontaminating apparatus as claimed in claim 9 is characterized in that, described solution is the solution of methane series.
11., it is characterized in that described heating container is divided into 2 chambers with the next door, and a side accommodates described solution as claim 9 or 10 described decontaminating apparatus, the opposing party is provided with thermal source,
Heat from described thermal source offers described solution by described next door, and described solution is heated.
12., it is characterized in that as claim 9 or 10 described decontaminating apparatus, in the path of described pipe arrangement, be provided with driver's valve,
According to described dry with the pressure in the vacuum tank, accommodate the pressure in the described heating container of described solution and the temperature of described solution, the switching degree of described driver's valve is regulated.
13. as claim 9 or 10 described decontaminating apparatus, it is characterized in that, described dry with vacuum tank medial surface and at least 1 face in the bottom surface on heater is set.
14. as claim 9 or 10 described decontaminating apparatus, it is characterized in that, be provided with: spray, the vaporized described solution that is present in the described dry vacuum tank is reclaimed and the condensing condensing device of solution to the described thing that is dried; And the feedway that will supply with to described heating container by the condensing described solution of the condensing device of described solution.
15. decontaminating apparatus as claimed in claim 14 is characterized in that, also is provided with: will spray to the described thing that is dried, stockpile in the described solution of described dry vacuum tank bottom surface and reclaim and the solution discharger of discharging.
16. a method of cleaning is characterized in that, forms by clean operation and drying process,
Described clean operation is for cleanly having in vacuum tank of can obtaining vacuum state: store detergent remover, accommodate by the ablution groove of clean thing; And inner have decide the space, apply the vibrating body of ultrasonic vibration to described detergent remover, described vibrating body decide the space to the described clean vacuum tank inner opening of using, to placing the described detergent remover under the vacuum to apply ultrasonic vibration, cleaned by clean thing impregnated in described in this detergent remover
Described drying process has: will be via the described drying vacuum tank of being accommodated, extract into vacuum state by clean thing as the thing that is dried of this clean operation; With the solution heating container of accommodating after the heating; And with the described dry pipe arrangement that is communicated with described heating container with vacuum tank, one end of described pipe arrangement is towards the described thing opening that is dried, the other end of described pipe arrangement is immersed in the described solution, when described drying is in vacuum state with vacuum tank, described pipe arrangement is open, described solution described end from described pipe arrangement under fluidized state sprays to the described thing that is dried, and this thing that is dried is carried out drying.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP213459/2001 | 2001-07-13 | ||
| JP2001213459A JP3818876B2 (en) | 2001-07-13 | 2001-07-13 | Drying equipment |
| JP229400/2001 | 2001-07-30 | ||
| JP2001229400A JP2003039029A (en) | 2001-07-30 | 2001-07-30 | Cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1527749A true CN1527749A (en) | 2004-09-08 |
Family
ID=26618683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA028140990A Pending CN1527749A (en) | 2001-07-13 | 2002-07-12 | Washing device and washing method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN1527749A (en) |
| WO (1) | WO2003006184A1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101810458A (en) * | 2010-04-20 | 2010-08-25 | 姚建梁 | Ultrasonic vacuum negative pressure cleaning device |
| CN102698977A (en) * | 2011-03-28 | 2012-10-03 | 东莞新科技术研究开发有限公司 | Vacuum cleaning device |
| CN103635987A (en) * | 2011-06-30 | 2014-03-12 | 株式会社日立高新技术 | Sample creation device, creation method, and charged particle beam device using same |
| CN108049942A (en) * | 2017-11-03 | 2018-05-18 | 宁波行泰环保科技有限公司 | A kind of DPF method for cleaning based on ultrasonic cleaning |
| CN114236298A (en) * | 2022-02-24 | 2022-03-25 | 山东掌电电力科技有限公司 | Power equipment on-line measuring device based on internet |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005143513A (en) * | 2002-04-04 | 2005-06-09 | Sharp Corp | Ultrasonic vacuum washing/sterilizing device |
| CN103769379B (en) * | 2014-01-04 | 2015-01-14 | 福建奇妙电子科技有限公司 | Manufacturing method of household water mist spraying equipment |
| CN114535210A (en) * | 2022-02-25 | 2022-05-27 | 天津市成吉斯宾科技发展有限公司 | Ultrasonic vacuum surface treatment cleaning method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0795541B2 (en) * | 1986-07-02 | 1995-10-11 | 松下電器産業株式会社 | Processing method |
| JP2977922B2 (en) * | 1991-02-28 | 1999-11-15 | 日立プラント建設株式会社 | Pressure swing cleaning method and apparatus |
| JP2855043B2 (en) * | 1993-02-25 | 1999-02-10 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| JPH0731942A (en) * | 1993-05-18 | 1995-02-03 | Yoshihide Shibano | Method for ultrasonic washing and device therefor |
| JPH08309300A (en) * | 1995-05-12 | 1996-11-26 | Suzuki Motor Corp | Ultrasonic washer |
| JP2000237703A (en) * | 1999-02-18 | 2000-09-05 | Akuatekku:Kk | Vacuum washing/drying method and device |
-
2002
- 2002-07-12 CN CNA028140990A patent/CN1527749A/en active Pending
- 2002-07-12 WO PCT/JP2002/007137 patent/WO2003006184A1/en active Application Filing
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101810458A (en) * | 2010-04-20 | 2010-08-25 | 姚建梁 | Ultrasonic vacuum negative pressure cleaning device |
| CN101810458B (en) * | 2010-04-20 | 2012-09-19 | 姚建梁 | Ultrasonic vacuum negative pressure cleaning device |
| CN102698977A (en) * | 2011-03-28 | 2012-10-03 | 东莞新科技术研究开发有限公司 | Vacuum cleaning device |
| CN103635987A (en) * | 2011-06-30 | 2014-03-12 | 株式会社日立高新技术 | Sample creation device, creation method, and charged particle beam device using same |
| CN103635987B (en) * | 2011-06-30 | 2015-07-15 | 株式会社日立高新技术 | Sample creation device, creation method, and charged particle beam device using same |
| CN108049942A (en) * | 2017-11-03 | 2018-05-18 | 宁波行泰环保科技有限公司 | A kind of DPF method for cleaning based on ultrasonic cleaning |
| CN108049942B (en) * | 2017-11-03 | 2020-11-17 | 宁波行泰环保科技有限公司 | DPF cleaning method based on ultrasonic cleaning |
| CN114236298A (en) * | 2022-02-24 | 2022-03-25 | 山东掌电电力科技有限公司 | Power equipment on-line measuring device based on internet |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2003006184A1 (en) | 2003-01-23 |
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