CN1517312A - Sliding slot heat treatment device - Google Patents

Sliding slot heat treatment device Download PDF

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Publication number
CN1517312A
CN1517312A CNA031598943A CN03159894A CN1517312A CN 1517312 A CN1517312 A CN 1517312A CN A031598943 A CNA031598943 A CN A031598943A CN 03159894 A CN03159894 A CN 03159894A CN 1517312 A CN1517312 A CN 1517312A
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China
Prior art keywords
slit
workpiece
treated
open
wicket
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CNA031598943A
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CN1219712C (en
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田中秀树
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Espec Corp
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Espec Corp
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/02—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a discontinuous way
    • C03B29/025—Glass sheets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Tunnel Furnaces (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Furnace Charging Or Discharging (AREA)

Abstract

A thermal treatment unit 1 is a device for carrying out a thermal treatment of a works W by supporting the works W on supporting frames of the unit 1 to multi-stages as 31 stages and taking in and out the works w. The unit comprises an isolating plate 4 fitted with 6 slits 41 of 411 to 416, small doors 5 divided in 6 pieces of 51 to 56 to open and close the slits, an up and down device 6 for the plate 4, an open and close device 7 for the small doors 5, etc. The work W is put in and out without leakage of hot air in a thermal treatment room 2 by opening, for example, only the door 56 maintaining the other small doors closed when putting in and out the work W through the slit 46. A height of the unit is kept low as the plate 4 moves vertically only the distance corresponding to 5 stages of the works.

Description

Slip clearance type thermal treatment unit
Technical field
The present invention relates to a kind of in thermal chamber the object being treated of set bracing or strutting arrangement upper support multi-layer planar shape and slip slit (slit) the formula thermal treatment unit that picks and places above-mentioned object being treated one by one, heat-treats from the peristome of above-mentioned thermal chamber.
Background technology
As in thermal chamber, supporting flat workpiece such as multilayer LCD glass substrate and it being picked and placeed the thermal treatment unit that purifies stove that is commonly referred to of heat-treating one by one, the such formation of general in the past use, promptly pick and place the slot-shaped opening that workpiece is used in the certain position setting, on the liftable stowage unit that is called hanging basket (condola), load multilayer workpiece at certain intervals, the position of the workpiece after Lifting basket finishes thermal treatment aligns opening part, pick and place workpiece with mechanical manipulator again, and successively repeatedly should action.(for example, with reference to patent documentation 1).
But, in this thermal treatment unit, owing to make the hanging basket that supports multilayer workpiece only carry out lifting with its number of plies part, so the height of thermal treatment unit uprises, limitation in height based on decontamination chamber that it is set etc., and the loading number of packages of restriction workpiece, because low, the former big problem of occupation rate change that exists installation cost to become higher or the place is set of the charging ratio of workpiece.
Thus, propose a kind of thermal treatment unit, be provided with at two places up and down and pick and place the opening that workpiece is used, so that half of its height of a hanging basket lifting picks and places workpiece simultaneously from two openings, and realize highly integrated and high efficiency.(with reference to patent documentation 2).
According to this device, though the problem of height is to a certain degree improved, the part that opening only is set at two places just makes the stopping property in the thermal chamber reduce, and also still has the problem that highly uprises simultaneously.In recent years, as being gigantism by the size of the glass substrate of heat treated workpiece, having occurred this as 1800mm * 1500mm is the large-scale workpiece of several times of the area of former substrate.Thus, the weight of the hanging basket the when size of hanging basket and lift-launch workpiece becomes very big, positional precision, the lifting motivating force that is difficult to guarantee to be used for the three-D that its lifting and posture keep becomes big or mass force becomes big, so must slow down rising or falling speed etc., and there are the reliability of the design that is not easy to obtain hoisting appliance or action, the problem of property rapidly.
On the other hand, as the workpiece stowage unit being remained on the thermal treatment unit that certain position does not carry out the form of lifting, a kind of structure is proposed, the brace table 3 that supports the object being treated P that multilayer is made of substrate is fixedly installed in the stove 1, and make the component parts 5a of the closed block 5 that constitutes by 5 fan wickets leave sealing member 14 with hook (hook) parts 27 etc. picking and placeing opening 4 places that object being treated uses, and utilize synergetic along the vertical direction 5 cylinders 12 to carry out lifting, compartment is is separately only opened and closed with 1 part of component parts, for the corresponding multi-disc object being treated of the component parts of this 1 part, when picking and placeing wherein arbitrary object being treated, only open the opening of 1 part of component parts.(with reference to patent documentation 3)
But, in this device, owing to when picking and placeing object being treated, only open big opening, and leave the state that seals all component parts on it from opening position at interval this moment, so exist the interior hot gas leakage of stove to become the problem of many temperature distribution variation with 1 part of component parts.
In addition, a kind of multistory frame 3 that is provided with in body of heater 2 is proposed, and the gate (shuter) 4 offered rectangular-shaped slit 5 is installed on free lifting ground on the open surface of body of heater, so that this louver carries out the firing furnace (with reference to patent documentation 4) that lifting picks and places workpiece from the orlop of framework to the superiors.
In this device owing to just be provided with the slit at a place of gate, so compare with the device of above-mentioned patent documentation 3, inner hot gas leakage is few, and since be lifting gate, event can be little motivating force just can move easily and promptly.But, owing to make gate, so the problem that the identical height that has a thermal treatment unit with hanging basket lift device uprises only with height part lifting of the whole layer of framework.In addition, the slit of opening is often with the outside is conducted, often have hot gas leakage, and the problem of the generation hot gas leakage that existence and patent documentation 3 are identical when the gate lifting.
Patent documentation 1: the spy opens flat 6-66715 communique
Patent documentation 2: the spy opens flat 9-250883 communique
Patent documentation 3: the spy opens 2000-169169 communique (especially Fig. 3～Fig. 6 and related description)
Patent documentation 4: the spy open flat 9-72677 communique (especially Fig. 4,5 etc. and related description)
Summary of the invention
Therefore, the invention solves the problems referred to above of prior art, its purpose is to provide a kind of hot gas leakage that can not increase height of devices and prevent thermal chamber, temperature distribution in the holding chamber well, and pick and place the thermal treatment unit that the motivating force of closing mechanism of peristome of object being treated is little, can work reliably rapidly.
The present invention to be located at that bracing or strutting arrangement in the thermal chamber supports the object being treated of multi-layer planar shape and to pick and place one by one from the peristome of above-mentioned thermal chamber the thermal treatment unit that above-mentioned object being treated heat-treats, is characterized in that to achieve these goals:
Above-mentioned bracing or strutting arrangement is set as and remains on certain position, above-mentioned multilayer is made of a plurality of layers of a plurality of group of forming, it comprises: the slit parts of the lifting carried out that is provided with in the mode of stopping up above-mentioned peristome, its have by correspondingly a plurality ofly constitute with above-mentioned many groups, the desirable slit of stating object being treated of putting;
In the outside of relative these slit parts of above-mentioned opening relative with above-mentioned slit parts to the ground setting and with the corresponding many fan wickets of above-mentioned many groups, can open and close corresponding slit respectively and to surround the formation of above-mentioned peristome ground when the sealing from the above-mentioned outside; Liftable above-mentioned slit parts are so that above-mentioned a plurality of slit can stop at the hoisting appliance of above-mentioned each layer of multiwalled position; And the closing mechanism that can open and close above-mentioned many fan wickets respectively.
Description of drawings
Fig. 1 is the explanatory view of cross section state of the purification stove of the expression example that is suitable for thermal treatment unit of the present invention.
Fig. 2 is the explanatory view of the side profile status of expression said apparatus.
Fig. 3 is the front of the above-mentioned purification stove of expression and the explanatory view of front profile status.
Fig. 4 is the explanatory view of the multiple layer combination state of the above-mentioned purification stove of expression.
Fig. 5 (a) and (b) be the explanatory view of representing the part in the positive surface state of the masking shield of above-mentioned purification stove and hoisting appliance and slit respectively.
Fig. 6 is the stereographic map of the schematic configuration of expression masking shield of above-mentioned purification stove and little door section.
Fig. 7 is the cross-sectional view of the part of above-mentioned masking shield of expression and little door section.
Fig. 8 is the stereographic map of schematic configuration of the closing mechanism of the above-mentioned wicket of expression.
Fig. 9 is the front view of the part of above-mentioned closing mechanism of expression and wicket.
Figure 10 is the explanatory view of cross section state of the part of expression above-mentioned closing mechanism and wicket and masking shield.
Figure 11 is the explanatory view of the open and-shut mode of the above-mentioned wicket of expression.
Among the figure: 1-thermal treatment unit, 1a-opening surface (peristome), 2-thermal chamber, 3-supporter (bracing or strutting arrangement), 4-masking shield (slit parts), 5,5 1～5 6-wicket, 6-hoisting appliance, 7,7 1～7 6-closing mechanism, 41,41 1～41 6-slit, N-multilayer, n, n 1, n 2-multilayer, m, m 1, m 2-many groups, a plurality of, multi-disc, W-workpiece (object being treated).
Embodiment
Fig. 1～Fig. 3 represents the suitable thermal treatment unit of the present invention of conduct, is commonly referred to as an integrally-built example of the thermal treatment unit that purifies stove.
Thermal treatment unit 1, be a kind ofly to pick and place the device of heat-treating as flat object being treated one by one at the LCD substrate or at workpiece W such as glass substrate that the manufacturing process of PDP is handled and the opening surface 1a on the one side that is formed on thermal chamber in this example as the peristome of thermal chamber 2 to support multilayers as the supporter 3 that is located at the bracing or strutting arrangement in the thermal chamber 2, wherein be 31 layers in this example as multilayer, it has masking shield 4 as the slit parts, wicket 5, hoisting appliance 6, and closing mechanism 7.
In the both sides of the wide directions X of thermal chamber 2 and up and down the bottom of Z direction has the air-conditioning part, the order of the flow direction of the hot blast of representing by arrow, and common identical being provided with: 4 fans 8 and the motor 81 thereof that are provided in the bottom in this example, be provided with the access road portion 9 of guiding channel etc. as required for the balance that reaches air quantity, separated in this example 9 high-performance filters 10, for below make with the hot blast of workpiece W split flow to dirty and be provided with the exit passageway portion 11 of guiding channel etc. as required, and be configured in and form hot blasts in the lower space 12 recirculated air for example is heated to the well heater about 250 ℃ 13 etc. Symbol 14 and 15 is respectively thermal wall and door.
Supporter 3, be set as and can as hanging basket, do not carry out lifting and remain on certain position, by be installed in the directions X both sides on the upright pillar 31 that is provided with 31 distolateral Workpiece carrier spares 32 and be installed in 31 * 3 formations such as intermediate piece bearing part 34 that are listed as on the upright pillar 33 that is provided with of inboard institute of front and back Y direction of thermal chamber.
The multilayer N that constitutes by the Workpiece carrier spare 32,34 that is 31 layers in this example, as shown in Figure 4, as multilayer n, by the 1st multilayer n 1=5 layers and become the n that descends group most 2=n 1+ 1=6 layer constitutes, and conduct is by the 1st multilayer n 1=5 layers and become the n that descends group most 2=n 1Many groups m that+1=6 layer forms is by m 1=5 groups and m 26 groups of formations of=1 combination meter.Its result is made as N=nm=n 1m 1+ n 2m 2=25+6=31 layer.
In this example, adopt such n, m value to be because to count N=31 consistent with the multilayer that goods specification by 1 reality determines.For example, if N=30, then n all is n 1Be 5, m all is m 1Be 6, if N=32, then n 1=5, n 2=6, m 1=4, m 2=2, N=n 1* m 1+ n 2* m 2=20+12=32 layer.
As mentioned above, multilayer, more than the 1st groups of being made up of the 1st multilayer constitute (case 1) or the many groups of formations (case 2) of the 2nd multilayer total that more than the 1st groups is made up of the 1st multilayer as described in precedent and the 2nd multilayer (the 1st multilayer+1) are formed.The number of the group of more than the 2nd when this case 1 or case 2 and case 2, the corresponding N that requires as the goods of reality stipulates.
Fig. 5 is that the summary of expression masking shield 4 and hoisting appliance 6 thereof constitutes, and Fig. 6 represents the schematic configuration of masking shield 4 and wicket 5 parts.
Masking shield 4 is provided with in the mode of stopping up opening surface 1a as shown in Figure 1, 2, has the slit 41 of the desirable part W that knocks off.Slit 41, by making arm 101 on the moving body 100 that is installed in not shown automation have the 41a of deep trouth portion at 4 places that surplus ground passes through to form, so that can pick and place workpiece W by mechanical manipulator in this example with the last gap 41b that can make the workpiece W that is supported on the arm 101 have surplus ground to pass through.The 41a of deep trouth portion reaches the vertical separation h1 and the h2 that go up gap 41b and is made as respectively as the very little size about 60mm and 30mm.
This slit 41, a plurality of m that organized m by correspondence constitute more.That is, in this example, as shown in Figure 4, the multilayer N=31 that utilizes Workpiece carrier spare 32,34 supporting workpiece W is by 41 1～41 5 Form 5 and 41 6Constitute, wherein, 41 1～41 5Correspondence is made as n 1=5, organize m more 1=5 from organize most 5 groups the layer position, 41 6Corresponding to n 2=n 1+ 1=6 forms descends group m most 2=1 group layer position.
Masking shield 4 with this slit 41 is constituted and can be carried out lifting by deckle board 42 and panel 43 mounted thereto.In addition, though omitted diagram in Fig. 5, slit 41 is formed quadrate slit parts 41A as shown in the figure and is embedded in the panel 43.Deckle board 42, in order to carry out lifting, and be installed on the hoisting appliance 6 described later, and also as shown in Figure 7 by the moving body 45 guiding lifting that combines with the groove 46 of the auxiliary linear guide part of Z direction up and down, to move along the lifting direction reliably by board 44.
Fig. 8～Figure 11 is the configuration example of expression wicket 5 and closing mechanism 7 thereof.
Wicket 5, relative to the outside of the relative masking shield 4 that is arranged on thermal chamber 2 with masking shield 4 as Fig. 1～Fig. 3 and shown in Figure 10, the multi-disc of organizing m as correspondence is the m=6 sheet in this example.This wicket 5, also as shown in Figure 4, with 5 1～5 6Can be respectively open and close corresponding slit 41 successively from last 1～41 6Mode form.Thus, in this example, segment difference section branch around wicket 5 is equipped with sealing member 51 (representing its central position with single line in Fig. 9), and they are provided with 1b of agent structure portion and two ends that purify stove and the contacted mode of stop member 1c that is installed in wherein.
This wicket 5 is installed in mounting plate 52 on the arm 78 of closing mechanism 7 described later by bolt 53 by 2 places, and with distolateral being installed on the turning axle 77 of arm 78, is that the center rotates corresponding slit 41 if turning axle 77 rotations then can open and close with this axle.
Hoisting appliance 6, liftable masking shield 4 make a plurality of slits 41 1～41 6Stop at respectively as n in this example of multilayer 1=5 layers and n 2Each layer position of=6 layers.Like this as hoisting appliance 6, air cylinder device, rack rails and pinion gear mechanism, screw mechanism, the steel wire known various linear moving apparatus such as mechanism of slinging, but use ball screw framework in this example.
This routine hoisting appliance 6, as shown in Figure 5, by the servomotor 61 of being with step-down gear, utilize the rotation transmitter shaft 62 of both sides of the wide directions X of this motor rotation, transmit the ball-screw cylinder apparatus 63 of this rotation, though with omitted detailed icon in this device restriction Z direction position and be screwed by the ball nut of rotary electric axle 62 rotations and limit it on one side by cylinder body 63a and rotate the ballscrew shaft 63b that an edge Z direction guiding carries out lifting up and down, match with this and to transmit the lifting shaft 64 of its lifting action, support this bearing 65 of lifting along the vertical direction, and be installed on the deckle board 42 of lifting shaft 64 and masking shield 4 and the formations such as above-mentioned board 44 that bond them together.
Closing mechanism 7 is as shown in Figure 3 at wicket 5 1～5 6On be respectively equipped with 7 1～7 6, to open and close in this example by 6 respectively 1～6 6 Many fans wicket 5 of forming of 6 fans.These closing mechanisms 7 1～7 6All identical, in Fig. 8～Figure 11, be expressed as closing mechanism 7.
This routine closing mechanism 7, by cylinder 71, the L shaped parts 73 that on its bar 71a, can reciprocatingly be provided with as the direction of arrow by floating junction 72, fixed thereon prolong along the vertical direction and as the raised line in this example of side's side component of the linear guide part that is formed on face side, equally be formed on the inside side rack rails 75, channel parts 76 that guiding embeds the linear guide part of raised line 74, have with rack rails 75 mutually the pinion(gear) 77a of interlock above-mentioned turning axle 77 and on this, fix an above-mentioned arm 78 etc. distolateral and that wicket 5 is installed and constitute.
In addition, closing mechanism as the wicket that opens and closes slit 41, also can replace the mechanism that uses cylinder and rack rails pinion(gear) as described above, use motor directly to order about the mechanism of turning axle 77 rotations or combining 2 metaactions so that the suitable structures such as travel mechanism that wicket 5 leaves the slit face and slides along the Z direction by the band step-down gear.In addition, the switching direction during as rotation mode also can be selected any mode of upwards opening or opening downwards.
Above-mentioned thermal treatment unit 1 turns round as following and brings into play its action effect.
In thermal chamber 2, with described state before at the workpiece W of 31 layers of Workpiece carrier spare 32,34 upper supports, and sealing as shown in Figure 3, Figure 4 by 5 1～5 6 Whole wickets 5 of forming.And, start fan 8 and well heater 13, as recycle gas air is circulated by thermal chamber 2 via as shown by arrows high-performance filter 10, workpiece is heat-treated.At this moment,, make masking shield 4, be in 6 slits 41 respectively as Fig. 2 and shown in Figure 4 1～41 6With by W 1～W 5And W 1～W 65 layers and 6 layers composition multiwalled from 1. last～6. shown in each undermost workpiece W of 6 groups of workpiece W 5And W 6The corresponding section, position.
Under this state, if the heat treatment time from stipulating by the sequence number process down among 31 layers the workpiece W is then changed thermal treatment old workpiece that finishes and the new workpiece that then should heat-treat by their sequence number.
At first, changing the 6. workpiece W of group 6The time, open wicket 5 6Thus, the cylinder 71 of driven opening mechanism 7 makes L shaped parts 73 rise, move on rack rails (rack) 75 along its direction, and makes and its pinion(gear) 77a rotation, 77 rotations of driven rotary axle of interlock mutually, makes arm 78 rotations drive wicket 5 6Slit 41 is opened in rotation 6In Fig. 2, represent this state with solid line.
At this moment, by slit 41 6 Thermal chamber 2 and its outside 200 are conducted, and indoor hot gas escapes to the outside.But,, keeping sealing wicket 5 as the integral body of thermal treatment 2 1～5 5State, thereby, the sealing slit 41 1～41 5, can not produce hot gas leakage from this part, and since slit 41 by only can form with the local 41a of deep trouth portion that 4 places are set on directions X by the last gap 41b of workpiece W and mechanical manipulator 101, port area is little, so the hot gas leakage prevention is a minute quantity.Its result, the atmosphere in the thermal chamber 2 is not chaotic, can keep its temperature distribution well.In addition, because masking shield 4 forms dual heat-insulating and sealing with wicket 5, so effect of heat insulation improves.
And, in this case, in being suitable for the device of of the present invention example, because only need open corresponding wicket 5, so can be simply and promptly carry out its operation in order to open slit 41.Thereby, can make the heat treatment efficiency of workpiece good.In addition, can reduce the motivating force that is used to open and close.Relative therewith, in the thermal treatment unit of the door open and close type that is provided with existing wicket, because in order to open the compartment of a plurality of wickets, and make up opening surface that leaves a plurality of wickets and the action that moves up and down, so action is complicated, consuming time, and motivating force also becomes big.In the device of this example, improved significantly aspect these.
If open wicket 56, then as shown in Figure 2 the moving body 100 of automation from the slit 41 64 mechanical manipulators 101 (as shown in Figure 1) are inserted in below to workpiece, rise slightly and lift workpiece W 6Be moved out to outside the thermal chamber 2, reprint the workpiece alignment that not shown thermal treatment finishes, never the heat treated part line lift new workpiece, from same slit 41 6Place it on the Workpiece carrier spare 32,34.Finish the 6. workpiece W of group thus 6Exchange.In addition, in this example,, also can become the both sides of Y direction before and after wicket 5 grades are located at, pick and place the such device of workpiece from both sides though only pick and place workpiece in the one side of thermal chamber 2.
At the 6. workpiece W of group that continues 6, through the workpiece W of this group 5Heat treatment time, when picking and placeing the workpiece of this part, to open wicket 5 6State, make masking shield 4 i.e. 1 spacing of 1 layer of part of workpiece that only rises, make slit 41 6Be in the 6. workpiece W of group 5The position.At this moment, make motor rotation stated number, rotation transmitter shaft 62 by both sides passes to ball-screw apparatus 63 with this rotation, make 1 spacing of ball-screw 63b rising by ball screw framework, its motion is passed to the deckle board 42 of masking shield 4 from lifting shaft 64 by board 44, by linear guide part 46 along up and down Z direction guiding on one side make masking shield 4 rise 1 spacing on one side.
This vertical motion because motor 61 is rotated a little, can be carried out simply, rapidly and reliably.In addition, only forming the slit and promote can abundant light-weighted masking shield 4, and need not to carry the big stowage unit of workpiece W lifting weight large-scale as existing apparatus, so the motor 61 of rising usefulness can be set as for example abundant little output about 400 watts.
In view of the above, with workpiece W 6The identical workpiece W that picks and places 5Exchange.At this moment, because wicket 5 1～5 5Close, so can not produce the problem of hot gas leakage.In addition, at this moment, 1.～5. Zu slit 41 1～41 5Become the workpiece W of group separately 4The position.
Like this, make masking shield 41 spacing that rises one by one, the exchange workpiece is at the 6. workpiece W of the superiors of group of exchange 1The time, the 4a ' shown in the two point that 6 spacings of upper end 4a rising of masking shield 4 are in Fig. 4 is drawn locates.Thereby, must consider the position of this 4a ' as the height that purifies stove 1.But this moment is because the height of these 6 spacing parts compares comparatively about 1/5 with the whole loading height of workpiece, so can not have problems in fact fully.
Relative therewith, at the device of existing hanging basket lift or make in the device of 1 slit lifting, only must there be unnecessary height the top of device height part of whole work-piece, and the charging ratio of workpiece is reduced.In addition, only part of upper end rising becomes the position that lower end 4b descends, but because this part is made as conditioned space or mechanical space usually in thermal treatment unit, can not cause the height of thermal treatment unit to uprise so this part accounts for unnecessary space.
If 6. the thermal treatment of 6 workpiece W of group finishes, then press from W 1To W 5Order or opposite order change the 5. workpiece W of group.At this moment, if close wicket 5 6And open wicket 5 5, then make masking shield 41 spacing of decline or 5 spacings.In view of the above, the slit of 5. organizing 41 5Be in workpiece W with this group 1Or W 5Corresponding position, position, and wicket 5 5Open, open slit 41 5, pick and place workpiece W 1Or W 5
Like this, the workpiece W that picks and places holostrome successively heat-treats, and, so repeatedly operation, continuously, excellent in efficiency workpiece is heat-treated.In addition, each machine of thermal treatment unit 1 or the action of automatic machine are automatizations usually, so that workpiece W is automatically heat-treated.
(invention effect)
According to the present invention as mentioned above, in one of invention, the bracing or strutting arrangement of the object being treated of multilayer support plate shape is arranged to remain on certain position.Thereby multilayer supports the not lifting of bracing or strutting arrangement of the Heavy Weight of object being treated.Its result need not to be located at bracing or strutting arrangement hoisting appliance on the existing hanging basket lift thermal treatment unit, that need big motivating force, complex large-sized structure.Thereby, even especially the object being treated as large-scale glass substrate also can support easily reliably.
In addition, because bracing or strutting arrangement remains in certain position, so when the high bracing or strutting arrangement of making precision, can former state keep its precision.Its result can will be made as narrow interval in the slit as by part when thermal chamber picks and places flat object being treated.
And, because the many groups of multilayers of forming by multilayer that constitute bracing or strutting arrangement, and the relevant hoisting appliance that is provided with slit parts, wicket, slit parts with it, and the closing mechanism of wicket, heat-treat so can will pick and place the object being treated thermal chamber with splendid state.
Promptly, because the slit parts are provided with in the mode of the peristome of obstruction thermal chamber, have by correspondence a plurality of slits that constitute, can pick and place object being treated of organizing more, also can carry out lifting, so for example, if slit position component, the slit is positioned at the undermost position of multiwalled separately in organizing be in more, then the undermost slit from any many group picks and places object being treated corresponding with it, then make on the slit and rise 1 layer, pick and place and the corresponding object being treated in slit at this moment, can successively make like this on the slit to rise, successively pick and place object being treated.In this case, because the hoisting appliance liftable slit parts of slit parts make a plurality of slits can be parked in each layer of multiwalled position, so can pick and place object being treated as described above.
At this, because on the parts of slit, be provided with a plurality of slits, so can use these a plurality of slits to pick and place object being treated with many groups are corresponding.Thereby the slit parts need not the whole number of plies part of lifting multiwalled as long as only lifting constitutes multilayer part of many groups separately.Its result, though make slit parts lifting, its adjustable height is one of many parts of whole layer height part, and the height of thermal treatment unit can be reduced significantly with comparing of existing hanging basket or slit lift.
Then be conducted if be provided with a plurality of slits at these portion of hot treatment chambers and its outside, but because in the outside of the relative opening of slit parts the relative many fans wicket organized corresponding that is provided with to ground with it more, the slit that can open and close each wicket correspondence is to surround peristome from the outside, so the atmosphere that can fully reduce in the thermal chamber leaks into the outside when sealing.In addition, can carry out double seal to the atmosphere of thermal chamber improves effect of heat insulation.And, can keep the temperature distribution of the atmosphere in the thermal chamber well.
Promptly, by only open with a plurality of slits in the corresponding wicket in the slit that picks and places object being treated, and keep and other the corresponding wicket in slit is a closed state, and for other slit, even they and thermal chamber are conducted, wicket also surrounds the sealing and the peristome of exterior, therefore can prevent by the conducting between other slit inside and outside.In this case, because closing mechanism can open and close many fan wickets respectively, so can only open and close the essential as described above slit that opens and closes.
In above, because the slit parts, only be formed with the slit and can be made into abundant light weight, thus can reduce to make the motivating force of the hoisting appliance of its lifting, and accelerate responsiveness.In addition,, closing mechanism is divided into a plurality of wickets, so the motivating force that can reduce equally to be used to open and close is accelerated opening and closing speed owing to can opening and closing.Its result, under the prerequisite of few power consumption, can shorten object being treated heat treated chamber the time that picks and places, heat treatment efficiency is improved.

Claims (1)

1. thermal treatment unit supports the object being treated of multi-layer planar shape and picks and places described object being treated one by one from the peristome of described thermal chamber and heat-treat to be located at bracing or strutting arrangement in the thermal chamber, it is characterized in that:
Described bracing or strutting arrangement is set as and remains on certain position, and described multilayer is made of a plurality of layers of many group of forming,
Comprise: the slit parts of the lifting carried out that is provided with in the mode of stopping up described peristome, its have by with the corresponding a plurality of slits that constitute, can pick and place described object being treated of described many groups;
In the outside of relative these slit parts of described opening relative with described slit parts to the ground setting and with the corresponding many fan wickets of described many groups, it is can open and close corresponding slit respectively and to surround the formation of described peristome ground when the sealing from the described outside;
Liftable described slit parts are so that described a plurality of slit can stop at the hoisting appliance of described each layer of multiwalled position; And
Can open and close the closing mechanism of described many fan wickets respectively.
CNB031598943A 2003-01-16 2003-09-27 Sliding slot heat treatment device Expired - Fee Related CN1219712C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003008733 2003-01-16
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CN108439776A (en) * 2018-06-11 2018-08-24 陈灿灿 A kind of equipment that tempered glass layering back and forth takes material
CN108707734A (en) * 2018-06-29 2018-10-26 浙江今飞凯达轮毂股份有限公司 Heat-treatment furnace for heat-treatable aluminum alloy workpiece
CN116475034A (en) * 2022-01-24 2023-07-25 芝浦机械电子装置株式会社 Heat treatment device and heat treatment method

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KR100755429B1 (en) * 2006-05-26 2007-09-04 주식회사 케이피씨 Shutter for heating furnace
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CN104733353A (en) * 2013-12-23 2015-06-24 泰拉半导体株式会社 Batch processing type substrate processing device
CN108439776A (en) * 2018-06-11 2018-08-24 陈灿灿 A kind of equipment that tempered glass layering back and forth takes material
CN108707734A (en) * 2018-06-29 2018-10-26 浙江今飞凯达轮毂股份有限公司 Heat-treatment furnace for heat-treatable aluminum alloy workpiece
CN108707734B (en) * 2018-06-29 2023-12-22 浙江今飞凯达轮毂股份有限公司 Heat treatment furnace for heat treatment of aluminum alloy workpieces
CN116475034A (en) * 2022-01-24 2023-07-25 芝浦机械电子装置株式会社 Heat treatment device and heat treatment method

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TWI232922B (en) 2005-05-21
KR100616298B1 (en) 2006-08-28
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CN1219712C (en) 2005-09-21
KR20040065972A (en) 2004-07-23
TW200413682A (en) 2004-08-01

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