KR20020072762A - Multi-stage heating plate type thermal treatment unit - Google Patents

Abstract

PURPOSE: To improve thermal performance by downsizing a heat treatment apparatus for glass substrates, etc. CONSTITUTION: The heat treatment apparatus is composed of heating plates 1 spaced by intervals c and supported by spacer pins 2 and a support beam 11, workpieces W supported by support tubes 13 above the heating plates 1, rotational elevator shafts 3 whose rotation and vertical movement are controlled by rotational and elevator systems 5 and 6, a respectively, pawl members 4 fixed to the shaft 3 corresponding to the intervals c which are formed so that either of them enters the interval c and brackets 15 positioned below the support tubes 13 and fixed to the heating plates 1 to support them by ascending or descending. The shafts 3 are successively rotated and moved vertically to insert the pawl members 4 inside the intervals c. This raises the heating plates positioned above the intervals, opens the intervals c to enlarge the spaces above and beneath the workpieces W and therefore enables removal and insertion of the workpieces W. The interval at a normal state is minimized to improve the thermal performance and to downsize the device.

Description

Multi-stage Heated Plate Heat Treatment System {MULTI-STAGE HEATING PLATE TYPE THERMAL TREATMENT UNIT}

The present invention relates to a multi-stage heating plate heat treatment apparatus for heating and heat-treating a plate-shaped workpiece supported by a support member provided at the interval by a plate-shaped heating member supported in multiple stages at intervals in the vertical direction. The present invention relates to a technology for miniaturizing a multi-stage clean oven for baking liquid crystal glass substrates for flat panel displays, increasing processing capacity, and improving thermal performance.

As a conventional multi-stage heating type heat treatment apparatus, as shown in FIG. 13, a radiant heating plate 1 such as an electric heating type is fixedly installed in multiple stages in the heat treatment chamber 8, and a work (W) such as a glass substrate is formed within each interval. ) Is supported by the support tube 13, the workpiece W is heated by the upper and lower radiant heating plates 1, and the workpiece which has been heat-treated is sequentially replaced with the untreated workpiece by a robot hand (not shown), and 1 to 1 tact. The apparatus which heat-processed the workpiece every time was common.

In such an apparatus, for example, when mounting a workpiece, the workpiece is supported on the robot hand, the robot hand is inserted into the heat treatment chamber 8, and the robot hand is lowered to move the workpiece W onto the support tube 13. In order to safely remove and lift the robot hand, the thickness of the hand, the thickness of the workpiece, the amount of warpage when the workpiece becomes an uneven shape, the lifting distance of the hand associated with them, and the like are considered. Usually, the interval of about 60 mm-80 mm was set.

Therefore, in the conventional heat treatment apparatus, the height becomes high, the heat radiation from the periphery of a workpiece increases, the temperature distribution performance at the time of workpiece heating becomes bad, and it is necessary to enlarge the dimension of a radiation heating plate in order to prevent this. As a result, there are problems such as increasing the plane dimension of the device, increasing heat dissipation from the periphery of the gap and the whole device, and increasing the loss of thermal energy.

On the other hand, as a multi-stage heating plate type heat treatment apparatus, in addition to the above-described conventional apparatus, two apparatuses having the structure as shown in Fig. 13 are combined to enable them to be lifted and rotated, and to carry in and carry out the work W at a predetermined level. A rotary gondola type multi-stage heating plate type sheet heat treatment apparatus has been proposed (see Japanese Patent Laid-Open No. 5-203365).

In this apparatus, however, the workpiece can be moved in and out at a predetermined position, but the robot hand is brought in and taken out in the same manner as described above, so that the spacing of the radiant heating plate is about the same as that of the conventional apparatus. do. Furthermore, since the device mounted in the gondola shape is lifted and rotated, and only one side of the upper and lower sides and one side of the rotation are used substantially as the work mounting space, the size of the device is about four times that of a normal device having the same processing capacity. . Therefore, such a device has a problem that the device becomes larger than a conventional device.

This invention solves the said problem in the prior art, and makes it a subject to provide the multi-stage heating plate type heat processing apparatus by which size is largely reduced, processing capacity is large, and energy saving is also aimed at.

1 is a perspective view showing an example of an internal structure portion of the heat treatment apparatus to which the present invention is applied;

2 is a perspective view showing a state in which the apparatus is spaced apart from the heating plate;

3 is an enlarged side view showing a part of the internal structural part;

4 is an enlarged plan view showing a part of the internal structural part;

5 is a side view showing the overall structure of another example of a heat treatment apparatus to which the present invention is applied;

6 is a front view showing a left part from the center of the apparatus;

7 is a plan view of the central portion of the device,

8 is an explanatory view showing a planar state of a rotary lifting mechanism portion of the apparatus;

9 is an explanatory diagram of the operation of the apparatus of FIG. 1;

10 is an explanatory diagram of an operating state of a robot hand used in the apparatus;

11 is a plan view showing a relation between a click member and a heating plate used in the apparatus of FIG. 5;

12 is an explanatory diagram showing still another example of the heat treatment apparatus to which the present invention is applied; and

13 is a side view showing a schematic shape of a conventional general heat treatment apparatus.

(Explanation of symbols for the main parts of the drawing)

1: radiant heating plate, heating plate (heating member) 2: spacer pin (position support member)

3: rotating shaft (shaft member, gap changing means)

4: Click member (side position supporting member, gap changing means)

5: Rotating mechanism (rotating means, interval changing means)

6: Axial lifting mechanism (spacing change means) 11: Support beam (position support means)

15: support pipe lifting bracket, bracket (below spacer)

41: tip portion c: spacing

W: Workpiece (Z) Z: Up and down direction

The present invention is to solve the above problems, the invention of claim 1 is to heat and heat the plate-shaped workpieces supported in each of the intervals by the plate-shaped heating member supported in multiple stages at intervals in the vertical direction. In the multi-stage heating plate type heat treatment apparatus,

A position support member for supporting the heating member separably between the respective intervals, and a shaft member installed in the up-down direction including the interval at at least three positions of the periphery of the heating member and supported to be rotatable; And the tip portion of any one of the displacement value supporting members is inserted into one of the intervals by being attached to the shaft member as the number of displacement value supporting members equal to the number of the intervals and the shaft member being rotated. The displacement value support member formed so that the distal end portion of the displacement value support member is outside the interval, the rotation means for rotating the shaft member, and the tip portion of the displacement value support member is any one of the intervals. When entering, it is possible to expand and restore any one of the gaps together with the one displacement member. It characterized by having a gap changing means to.

In the invention of claim 2, in the multi-stage heating plate type heat treatment apparatus for heating and heat-treating the plate-shaped workpieces supported in each of the above intervals by the plate-shaped heating members supported in multiple stages at intervals in the vertical direction,

A position support member for supporting the heating member separably between the respective intervals, and a shaft member installed in the up-down direction including the interval at at least three positions of the periphery of the heating member and supported to be rotatable; WHEREIN: As a displacement value support member of the divided number which divided the number of the said intervals into an integer of 2 or more, it is attached to the said shaft member, and this tip | tip part of the said displacement value support member is any one of the said space | intervals by rotating this shaft member. A displacement supporting member having a non-engaging position in which the distal end of the other displacement supporting member is out of the interval, and all displacement supporting members are out of the interval, and the shaft member is rotatable. Rotation means and said tip portion of said one displacement value supporting member entered into said one of said intervals It has a group interval change means for with one of the sides where the supporting member can be the one of the distance-up and restoration.

In addition to the features of the invention of claim 1, the invention of claim 3 is a lower spaced member attached to the second or more stages of the multi-stage heating member attached to the heating member on the upper side of the gap at this interval. And a lower spacer formed to be capable of lifting and lowering the object from a position spaced below.

Embodiment of the Invention

Fig. 1 shows a structural example of a mounting portion of the heat treatment apparatus to which the present invention is applied, and Fig. 2 shows a state where one interval of the loading portion is widened. 3 and 4 show an enlarged partial structure. 5 to 8 show another example of a heat treatment apparatus having the same rotating and elevating mechanism portion and contour structure portion as the apparatus of FIG. 1 and having a structural portion different from that of FIG. It demonstrates, referring another figure based on FIG. 1, FIG.

The heat treatment apparatus which is the normal clean oven of a multistage heating plate type | mold is the radiant heating plate 1 which is a plate-shaped heating member supported by 7 steps in FIG. 1 as the space | interval c in the up-and-down Z direction, and is simply a "heating plate 1 hereafter. A workpiece W (such as a liquid crystal glass substrate for a flat panel display) as a plate-shaped workpiece supported in each of the gaps c by the " " ) Is a device for heating and heat treatment, as a mechanical structure portion, a spacer pin (2) as a position support member, a rotary lifting shaft (3) as a shaft member, a click member (4) as a displacement value support member, Fig. 5, 6 and 8, a rotating mechanism 5 as a rotating means shown in detail in FIG. 6, and an axis elevating mechanism 6 serving as a gap changing means together with these.

As shown in Figs. 5 to 8, the mechanical structure portion is formed in the machine chamber 9 formed of the heat treatment chamber 8 and the structural member 91 surrounded by a casing 7 formed of a structural member and mounted with a heat insulating material. It is arranged. The front door which enters and exits the heating plate 1 in the casing 7 is an automatic door 10. That of the lowest end of the heating plate (1) a group consisting of a multi-stage ₍₁₁₎ is extended from the casing (7) is turned installed and carried on the support beam 11 is in position with the support means and the spacer pin.

The workpiece | work W is the support tube carried by the V-shaped support tube holder 12 shown also in the part of FIG. 3 and FIG. 4 attached to the both end surfaces of the heating plate 1 to the left-right length Y direction in FIG. It is supported by (13). As shown in Fig. 4, a collar ring 14 is fixed to the support tube 13 to prevent movement and dropping in the length Y direction. In the heat treatment apparatus of the present example, a support tube elevating bracket (hereinafter simply referred to as a "bracket") 15 as a spaced apart member below one of _two or more of the second stage of the seven-stage heating plate 1 includes a support tube 13. Is attached so that the front end side of the collar ring 14 in () can be supported.

As the heating plate 1, a heat transfer type in which a heat generating element is enclosed in a metal casing and formed in a panel shape through an insulator is suitably used. However, other types such as heat pump type may be used.

The spacer fin 2 is formed of a tubular body having a lower end fixed to the lower heating plate and an upper end carrying the upper heating plate, and arranged in four corners of the heating plate 1, and the heating plate 1 being spaced at each interval ( c) detachably supported therebetween. The thing of FIG. 3 is equipped with the conical part into which the hole shape part of the said heating plate is inserted. The spacer fin may be of any structure. In addition, the position support member may have a structure such that a cylinder is used as a spacer instead of a spacer pin 2 provided independently between the stages, and a cylinder freely fitted therein. One ₍₁₁₎ of the lowest end of the heating plate (1), is supported by the support beam 11. The heating plate 1 is entirely supported by these.

The rotary lifting shaft 3 is at least three positions in the periphery of the heating plate 1, and in this example, at both positions in the vicinity of both ends in the Y direction in the longitudinal direction as the outside of both ends in the X direction in the width direction in FIG. In the upper and lower Z directions including the six-stage gap, the bearing is supported by the bearing of the rotating elevating mechanism portion described later to enable rotation. Since the rotary lifting shaft 3 of this example also serves as the interval changing means, it is supported to be able to lift and lower. In addition, although four rotary lifting shafts 3 are normally equipped like this example, four or more are provided as needed depending on the magnitude | size of a heating plate 1, the number of steps, etc. In some cases, three may be the minimum number for flat support.

The number of click members 4 is the same as the number of the intervals c, and thus, six in the example of the apparatus of the seven stages of the heating plate of FIG. 1 are provided as six intervals, and are attached to the rotary lifting shaft 3, and this shaft By this rotation, the tip portion 41 of the _second click member 4 ₂ from the bottom in the example of FIG. 1 as any one of the click members 4 is spaced c ₂ as one of the intervals c. The inside of the crest is formed so that the tip of the other part is outside the gap (c). This state is clearly shown in FIG. 4 when the click member 4 is viewed in plan. As shown in Figs. 3 and 4, the front end portion 41 is provided with a support projection 41a which is spherically supported so that the support surface is inclined freely.

In this way, the click member 4 is configured to be allowed to go in and out of the interval c. In this example, as shown in FIG. 4, the click member at the position corresponding to each of the intervals c ₁ to c _{6 is} shown. (4 ₁ to 4 ₆ ) are attached to the rotary lifting shaft 3 by shifting the angles of 60 ° from each other in the circumferential direction as viewed from above, and the length L thereof is the tip of the one click member 4 ₂ . The part of the length L ₁ of the side enters into the space c, and the length of the other click members including the click members 4 ₁ and 4 ₃ on both sides adjacent thereto is outside the range of the space c. have.

Although the click member 4 of such a shape may be directly attached to the rotary lifting shaft 3 as shown in FIG. 1, the shaft 3 may be 6 as shown in FIGS. The piece 16 may be inserted in this, and it may be attached to the outer surface by making it into angular axes, such as each. In that case, six pieces 16 of the same shape to which the click member 4 is fixed are manufactured, and they are fitted to the shaft 3 by shifting each angle of 60 degrees sequentially from the bottom, so that it is easy and accurate. The click member can be attached. In addition, fabrication of the parts also facilitates the use. Moreover, also with respect to the apparatus in which the number of space | intervals c and a dimension differ, it can respond easily by changing the number of pieces 16 and adjusting length.

It is also possible to insert a separate outer shaft in the shape of a sleeve into the rotary lifting shaft 3, and attach the click member 4 to the outer shaft to rotate it. In that case, the outer shaft is a shaft member rotatably supported.

The rotary mechanism 5 is a means for enabling the rotary lifting shaft 3 to be rotatable, and as shown in FIGS. 5, 6, and 8, the pivot mechanism fixedly installed from the structural member 91 through an attachment member not shown. Shaft in which sleeve 31 is fitted for rotation of timing belt 53 and pulley 52b wound around pulley 52b on four shafts 3 side from dedicated motor 51 and pulley 52a with motor. A lower bearing 55 having a rotary ball spline structure which transmits to (3) and supports the shaft 3 by rotation and lifting freedom, and an upper bearing 56 which similarly supports the shaft 3 by rotation and lifting freedom, casing The upper and lower support plates 57 and 58 attached to the structure of (7) to which the bearings 55 and 56 are mounted, the thrust bearing 59 which can support the full weight which hangs on the shaft 3, etc. are comprised. Reference numeral 52c denotes a tension pulley.

The lifting mechanism 6 is the click member 4 as the click member 4 as described above, for example, when the click member 4 ₂ of FIG. 1 enters the interval c ₂ at any interval. ₂ ) together with the mechanism for enabling expansion and restoration of the interval c ₂ , and in this example, the interval changing means is constituted together with the rotary lifting shaft 3, the click member 4, and the rotation mechanism 5. .

As shown in Figs. 5, 6, and 8, the elevating mechanism 6 has a width X direction from the motor 61 and the pulley 62a for motors attached to the support plate 58, respectively. A timing belt 63 wound around two pulleys 62b provided at both ends, a ball screw shaft 64 to which rotation of the pulley 62b is transmitted, and a ball screw shaft 64 attached to the support plate 58 to rotate. And a bearing nut 65 for free support, a ball nut 66 for screwing with the ball screw shaft 64, a movable plate 67 attached thereto, and the thrust bearing 59 attached thereto. Reference numeral 62c denotes a tension pulley.

The rotary mechanism 5 and the elevating mechanism 6 are usually installed in a heat treatment apparatus that automatically processes the number of workpieces W by one tactile one by one, and to a control device not shown so as to perform the necessary rotation and elevating at a necessary timing. Drive control.

The support pipe elevating bracket 15 is a heating plate 1 on the upper side of the interval c, for example, the bracket 15 ₂ attached to the heating plate 1 _{3 on} the upper side of the interval c ₂ is the interval. It is formed so as to be (c ₂₎ a workpiece (W ₂₎ through a support tube (13 ₂₎ from the position (H ₁₎ away from the lower side of the workpiece on the lift. That is, as shown in the detailed shape in FIG. 3, the bracket 15 is attached to the heating plate 1 at the upper end of the gap c, and the groove 15a is received to receive the support tube 13 at the tip. it includes, and is formed to be in a position below as H ₁ from the support pipe 13, the depth of the corresponding groove. In addition, as shown in FIG. 4, the groove | channel 15a can support the front end side of the support tube 13 in the length X direction at the position of the collar ring 14, and is adjacent to the bracket 15 as shown in FIG. The top and bottom ends are in shape and attachment position so as not to interfere.

The heat treatment apparatus as described above is operated as follows to exert its effect.

First, mainly with reference to FIG. 9, and the left end of the figure as a reference state, mounting the workpiece (W ₂₎ to the support tube (13 ₂₎ of the second interval of the second (c ₂₎ from below in the figure as any stage, or The operation of each part at the time of exchange is demonstrated.

In the reference state of the left end drawing, the heating plates 1 at each end are at equal intervals. When the workpiece | work W is mounted and heat-processed on the support pipe 13 in this state, the space | interval of the workpiece | work W and the heating plate 1 of the upper and lower sides is supported as shown in FIG. the lower side corresponding to the tube height is h ₁ and h ₂ to the upper side. According to the present invention varies also depending on the dimensions of the heating plate and the work can be in the distance (h _1, h ₂₎ all the dimensions of the narrow enough lowest limit of about 10mm.

As a result, when heat-processing a certain number of workpiece | work W, the height of a heat processing apparatus can be made into the minimum dimension. On the other hand, when making the height of a heat processing apparatus constant, the maximum number of workpiece | work W can be heat-processed. Moreover, since the space | interval of the workpiece | work W and the heating plate 1 at the time of heat processing is minimum, when using the workpiece | work W of the constant plane dimension and the heating plate 1, heat transfer efficiency will become the maximum and the The heat dissipation from a peripheral part is few, and the workpiece | work W can be heated uniformly. On the other hand, when the heat treatment performance is maintained at a constant condition, the workpiece W of the maximum dimension can be processed by a heating plate of constant size, and when the workpiece W of a constant size is processed, the size of the heating plate can be minimized. . Therefore, according to the heat treatment apparatus of this example, effects such as minimizing the device dimensions, improving the heat treatment performance, expanding the dimension of the heat treatable workpiece, and the like can be obtained.

For example, when the workpiece W ₂ is first mounted on the support tube 13 ₂ of the _second interval c ₂ , or when the workpiece W ₂ , which has undergone heat treatment, is replaced with a new workpiece W, the left end is used. As shown in the figure, from the state in which the click member 4 ₂ does not enter the space c ₂ , first, the motor 51 for shaft rotation rotates 60 ° from the state of the left end drawing, Through the torque transmission mechanism and the rotary lifting shaft 3, the click member 4 ₂ is rotated by 60 degrees as shown by the dashed-dotted line in the center drawing, and the tip portion 41 enters the gap c ₂ . . At this time, the portions other than the shaft 3 and the click member 4 are still in the left end view, and the groove-shaped portion 15a and the support tube 13 ₂ of the bracket 15 ₂ have a depth of the groove. Only (H ₁ ) is spaced apart. This state is also shown in FIG.

Next, the motor 61 for shaft raising and lowering rotates, the ball screw shaft 64 rotates through a torque transmission mechanism, such as a pulley, and the ball nut 66 which screwes with this raises, and the movable attached to this is moved. With the plate 67, the rotary lifting shaft 3 is raised and lowered through the thrust bearing 59, and the click member 4 ₂ is moved to a predetermined height (H = H ₁ ) to the state of the left end drawing via the state of the central drawing. + H ₂ ) to rise. This state is shown in FIG. In addition, in FIG. 2, the state of the heating plates 1 ₂ and 1 _{3 which} were raised and spaced apart is shown.

Here, the click member ₍₄₂₎ is of the step rise H ₁ As shown, the heating plate ₍₁₃₎ and bracket (15 ₂₎ of the groove-shaped portion (15a) is also left end of the figure by the solid line in the middle diagram of FIG. 9 H ₁ raised from the state, in contact with the bottom portion of the support tube (13 _2), it is to lift this position. And at this time, the support tube (13 ₂₎ is still do not rise, the upper space of the heating plate ₍₁₃₎ and support tube (13 ₂₎ is a h ₂ + h ₂ from the H ₁ is as large as H _1.

When the click member 4 _{2 at} the position of the solid line of the center drawing shown by the dashed-dotted line as shown in the left end drawing is further raised to the position of the solid line, this time is lifted by the bracket 15 ₂ in addition to the heating plate 1 ₃ . so raised so raised support tube (13 ₂₎ is also the distance of the support tube (13 ₂₎ and the heating plate (1 ₂₎ H ₂ rises, and the upper distance is not changed the lower interval is in h ₁ + H ₂ from h ₁ H _{It is} as big as _two . In addition, when opening the space | interval c ₂ , the space | interval c upper or lower than it does not change. Fig. 3 also shows such a change state of the gap and the dimensions at that time.

The support tube (13 ₂₎ and the upper and lower heating plates the spacing _{(1 3, 1 2) h} 2 + H 1 + H ₂ and ₁ h, respectively, for example, is set to about 30mm and about 30 ~ 40mm. Further, in the above it has been described with respect to the operation of to spread the interval (c _2), an operation of another to spread the interval is exactly the same. When the other intervals are sequentially opened, the rotary lifting shaft 3 sequentially rotates by 60 °, and the click members 4 corresponding to the respective intervals rotate and lift.

When the space c ₂ of the heating plate 1 is expanded as described above, the automatic door 10 moves so that the opening not shown is at the position of the corresponding space c ₂ . Then, through a shutter (not shown) made of a flexible material that is usually provided in the opening, the work W into the heat treatment chamber 8 by the work transfer device such as the robot hand 100 is shown in FIG. 10. Import and export are possible.

When carrying in the workpiece W, the robot hand 100 sucks and supports an unprocessed workpiece loaded on a cassette and carried in a production line, and rotates and lifts a portion of the automatic door 10 corresponding to the interval c ₂ . The opening position is reached, and the support tube 13 shown in FIG. 1 is moved in the longitudinal direction thereof, that is, in the direction of the arrow of ① shown in FIG. 10, and the two support tubes 13 ₂ as shown by the arrow of ②. and to pass between the lowered, carrying moving the workpiece (W ₂₎ to the tubular support between them, as shown by the arrow to pull the fall of ③ is activated, the automatic device to be forced out of the heat treatment. When carrying out the workpiece | work W, it moves like ④-⑤-⑥ in the opposite direction to carrying in.

In the work loading and unloading operation by the robot hand 100, a distance c is required to be about 50 to 70 mm for the amount of warpage of the work W, the thickness of the robot hand, the lifting distance, the upper and lower clearances, and the like. However, by applying the present invention, the gap c can be freely made in accordance with the required dimensions in the actual apparatus. And when the heat processing is carried out without carrying in and carrying out the workpiece | work W, it is possible to heat-process the workpiece | work W satisfactorily by obtaining the best heat transfer conditions at the minimum space | interval as mentioned above, without taking this space | interval. As described above, the height and plane dimensions of the apparatus can be minimized.

Further, by installing the bracket (15) as in this example, the upper and lower interval of the work (W) as described above (h _1, h ₂₎ at the same time, H _1, H and ₂ can be made large enough, the interval as the unit h ₁ , it can be minimized by h _2, but it is, also possible to omit the bracket 15 in order to simplify the structure and operation of the device. In that case, the lower interval h ₁ is made to be about H ₁ . In such a device as well, compared with the conventional device, the size is correspondingly reduced in size. In addition, since the upper gap can be made small, the thermal performance is sufficiently improved.

The opening and closing of the interval c as described above and the carrying in and unloading of the workpiece W by the robot hand 100 are normally performed automatically by a heat treatment apparatus and a control device not shown in the robot. On the other hand, in the heat treatment apparatus, electric power is supplied to the heating plate 1, and the workpiece | work W carried in sequentially is heated for predetermined time, and is heat-processed. Then, when a predetermined heat treatment time has elapsed in the work W of any one of the intervals c, the interval c is opened, and the work W of the heat treatment is carried out by the robot hand, and a new work ( W) is carried in, and such an operation is repeated, and the workpiece | work W is automatically continuously heat-processed one by one in a tact.

5 to 8 and 11 show the overall configuration of the heat treatment apparatus main body portion and the structure of the rotary lifting mechanism portion as described above, and show another example of the multi-stacked structure portion of the heating plate 1.

Compared with the apparatus of FIG. 1, the apparatus of this example differs in the number of click members 4 which are displacement value supporting members with respect to the space | interval c, and the attachment state with respect to the rotary lifting shaft 3 which is an axial member. That is, in this example, as shown in Fig. 11, the click member 4 is divided into two divided by two, which is the number 10 of the interval c, divided by an integer of two or more. And all the click members 4 are provided with the non-engaging position P which is outside the distance c, and differs from the apparatus of FIG. 1 in these respects. Moreover, the apparatus of this example is comprised by the lower loading part A of a 10 space | interval 11 step heating plate, and the upper loading part B which has the same structure on it, and becomes a device with a larger work throughput.

As described further herein with reference to FIG. 6, the upper and lower loading portion (A, B), the respective spacing (c _{1 ~} c ₁₀₎ with the heating plate _(11-111) In this there is provided an array, the drawing state of the distance (c ₁ Corresponding to, c ₃ , c ₅ , c ₇ , c ₉ , the click members 4 ₁ , 4 ₂ , 4 ₃ , 4 ₄ , 4 ₅ are attached to the piece 16 of the rotary lifting shaft 3 In addition, when the click member 4 is viewed from above, as shown in FIG. 11, five click members 4 ₁ to 4 ₅ are arranged at the center angle of 60 °, and at the same time, the horizontal position ( The click member is not installed in the P) part.

The apparatus of the present example is also operated in the same manner as the apparatus of FIG. 1, and when the gap c is opened at the entry and exit of the workpiece W, an operation of raising and lowering the rotary lifting shaft 3 by one interval, that is, one pitch, is added. 1 differs from the apparatus in FIG. 1 in that the workpiece W enters and exits at the same time in the upper and lower mounting portions A and B. FIG.

That is, the upper and lower loading parts of the heating plate ₍₁₉ and ₁₁₎ the workpiece (W ₉ and W ₁₎ the heat treatment is complete, export this new workpiece (W) and the work (W) in order to exchange and transfer of the as shown To do this, the upper and lower click members 4 ₅ and 4 ₁ are inserted below the heating plates 1 ₁₀ and 1 ₂ to open the gaps c ₉ and c ₁ to replace the workpieces W ₉ and W ₁ . Next, when the heat treatment of the workpieces W ₁ , W ₃ of the heating plates 1 ₁ , 1 ₃ of the upper and lower loading portions is completed, and the workpiece W is taken out and brought in to replace the new workpiece W, the upper and lower clicks are carried out. The members 4 ₁ and 4 ₂ are placed under the heating plates 1 ₂ and 1 ₄ to open the gaps c ₁ and c ₃ to replace the workpieces W ₁ and W ₃ .

Successively above and below the workpiece in the same (W _3, W _5, W _7, and W _5, W _7, W ₉₎ non-walk of the click member 4 as shown in the FIG. 11 when the exchange alignment position (P) a heating plate (1 The rotary lifting shaft 3 is rotated so as to be in a position facing the), and the click member 4 is bypassed without engaging the heating plate 1, and then the rotary lifting shaft 3 is raised by one pitch. Each of the click members 4 ₁ to 4 ₅ corresponds to an even number of intervals c ₂ to c _10. This time, the even numbered workpieces W ₂ , W ₄ , W ₆ , W ₈ , W ₁₀ are sequentially It is assumed that the workpieces W are subjected to continuous heat treatment two sheets per one tact.

Further, as the operation method, as described above, continuous heat treatment is performed such as entering and exiting the workpiece at odd intervals, -1 pitch ascending of the rotating shaft, and entering and exiting the workpiece at even intervals, -1 pitch of the rotating shaft, and entering and entering the workpiece at odd intervals. In addition to the method, one pitch up / down movement of the first stage work entry-swivel shaft 1, 1 pitch down the stage of the work shaft – one pitch down the stage of the rotary shaft- It is also possible to use a continuous processing method in which pitch lift is assembled.

The heat treatment apparatus of this example also has the same operational effects as the apparatus of FIG. 1, but can process a larger amount of the workpiece W than the apparatus of FIG. 1. In this case, in this apparatus, one-pitch elevating operation of the rotary elevating shaft 3 is added than in the apparatus of FIG. 1, and since this operation is performed in a short time, there is no influence on the loading and unloading time of the work.

Instead of the device employing the 1 pitch lift and 2 group arrangements shown in Figs. 5 to 8, for example, each group is formed by a 15-step 16-stage heating plate with a 3 group arrangement of top and bottom, respectively. A total of five click members 4 consisting of 15 ÷ 3 = 5 are arranged at positions corresponding to the intervals 1, 4, 7, 10, and 13 of the group, and at the same time, they are engaged with the click members 4 (P) is installed and the first, fourth, seventh, tenth and thirteenth stages of work are moved in and out, and the rotary lifting shaft 3 is raised by one pitch to enter the two, five, eight, eleven, and fourteenth stages of work. It is also possible to set it as the apparatus of the structure which makes the work of 3, 6, 9, 12, and 15 steps | steps in and out by raising the rotary lifting shaft 3 further 1 pitch.

12 shows another example of the interval changing means of the heat treatment apparatus to which the present invention is applied.

In this example, the lowermost heating plate 11 is mounted on a lifting plate 17 provided below, and the lifting plate 17 is lifted by the lifting shaft 18 to open and close the gap c. One device to help. As shown in Fig. 1, the lifting shaft 18 is lifted by a linear movement mechanism such as a combination of a ball screw and a ball nut and a cylinder device, and a linear guide for maintaining the lifting posture is provided as necessary. In the interval changing means of this example, the rotating shaft 3 'which does not change to the rotary lifting shaft 3 shown in Figs. 1 and 5 is used. The click member 4 constituting the gap changing means is the same as that of the apparatus of FIG. The apparatus of this example operates as follows.

In the reference state of the left end drawing, the heating plates at each stage are at equal intervals. This state is the same as the left end view of FIG. Thus, the distance between the workpiece (W) and the upper and lower heating plates is 10mm in both h _2, h _1.

For example, when opening the second interval c ₂ , the click member 4 ₂ is rotated by 60 ° as shown in the center drawing to enter the interval c ₂ below the heating plate 1 ₃ , and then lifts and lowers. The shaft 18 descends, and together with the elevating plate 17, a heating plate of 1 ₂ or less descends to the state of the left end drawing via the state of the central drawing. Central view showing the middle of the lowering operation, the heating plate ₍₁₂₎ and with the support tube (13 ₂₎ is lowered, and the support tube (13 _2), the bracket does not fall it is attached to the heating plate ₍₁₃₎ ( fitted into the groove-like portion (15a) of 15 ₂₎ showing a supported state. In this step, the heating plate ₍₁₂₎ are here and down to the depth (H ₁₎ portions of the groove-shaped portion (15a), the upper space of the heating plate ₍₁₃₎ and support tube (13 ₂₎ h ₂ from h ₂ + It is a H ₁ is as large as H _1.

The right end of the figure, the support tube (13 _2), the bracket (15 ₂₎ in the supported condition the heating plate ₍₁₂₎ is more H ₂ falling from the middle diagram, and me now is the upper space above does not change, but this time the lower side the spacing of the support tube (13 ₂₎ and the spacing of the heating plate ₍₁₂₎ is in h ₁ + H ₂ from h ₁ shows the zoom state as H _2.

Comparing the gap changing means of this example with the gap changing means of Fig. 1, both means differ only in that they raise the heating plate above the gap to be opened or lower the heating plate below. Therefore, the apparatus of FIG. 12 also has the same effect as the apparatus of FIG.

According to the present invention as described above, in the invention of claim 1, the plate-like heating member such as a hot plate is supported by the in-situ support member so as to be detachably supported between the respective intervals in multiple stages at intervals in the vertical direction. At the same time, since the shaft members are provided at at least three positions of the periphery of the heating member, instead of being supported by the in-situ supporting members at certain intervals, the shaft members are supported by the shaft members in a stable state at least at three points. It becomes possible.

And these shaft members are installed in the up and down direction, including the gaps formed in multiple stages, and the displacement member supporting members equal to the number of intervals are attached to these shaft members, so that the heating members of each interval are It is possible to support it via the displacement supporting member. In addition, since these shaft members are supported to be rotatable and provided with rotation means for rotating the shaft members, the displacement support members can be rotated through the shaft members.

Moreover, this displacement value supporting member changes its position as the shaft member is rotated, and the tip portion of any of the displacement value supporting members enters into any one of the gaps, and the tip portion of the other displacement value supporting member is outside the gap. Since it is formed so as to be attached to the shaft member, by rotating the shaft member, it becomes possible to put the tip portion of the displacement value supporting member into the intervals sequentially and support only the heating members of the interval. At this time, the heating members of the gap portions above and below the gap are supported by the in-position support members.

Further, since the distal end means of any one of the displacement value support members is provided with any one of the displacement value support members when the distal end portion of the displacement value support member enters into one of the gaps, By these, the space | interval of a multistage can be expanded sequentially and can be restored to an original space | interval.

In this case, as the interval changing means, the shaft member to which the displacement value support member is attached is lifted up while the heating member on the upper side of any one interval is supported by the displacement value support member and the position support member. By increasing the distance between the lower workpiece and the heating member, or lowering the workpiece and heating member supported by the lower position support member than the heating member supported by the displacement support member, Means for widening the distance from the heating member may be used.

When the object to be processed is moved in and out of the space of the heating member by a transport member such as, for example, a robot hand capable of transporting a plate-shaped object, the transport member needs to be moved up and down in the gap. Due to the warpage, the thickness of the conveying member, the vertical movement of the conveying member, and the like, it is necessary to widen the vertical gap between the object and the heating member rather than simply heating and heating the object. According to the invention of claim 1, the interval between the heating members can be widened as described above, so that the interval between the heat-treated and untreated ones can be changed in and out by sequentially entering and exiting the processed object into the interval, and the interval between the other heating time zones. It can be maintained at narrow intervals without widening. Therefore, as a device, the whole space | interval can be narrowed.

As a result, the height dimension of the heat treatment apparatus becomes small, the throughput becomes large if it is the same height dimension, the plane dimension of the heating member becomes small because good heat transfer conditions are obtained, and the dimensions of the heat treatable object become large. Sufficient effects such as uniform heating of the workpiece, good heat treatment conditions, low heat loss, energy saving, and safe operation of the workpiece. You can get it.

The invention of claim 2 has the same configuration as the invention of claim 1, wherein the displacement value supporting member is divided by the number of intervals divided by an integer of 2 or more, and the shaft member is rotated to support any one of the displacement values. Since the leading end of the member enters into any one of the gaps and the other leading end of the displacement supporting member is outside the gap and all the displacement supporting members have a non-engaged position, For a certain number of displacement value supporting members made up of divided water, for example, the displacement value supporting member is non-aligned with respect to the interval of multiples corresponding to the divided water, such as 2 times for 2 divisions and 3 times for 3 divisions. The position can be used to raise and lower the shaft member without interfering with the heating member, and to correspond the displacement value supporting member to the intervals of all the divided arrangements. There.

Therefore, even if there is a certain limitation on the number of the displacement value supporting members arranged by using the angle difference of one rotation, all the intervals can be changed by the displacement value supporting member with the number of intervals divided by the number of times. As a result, the number of intervals can be increased, the amount of heat treatment of the workpiece can be further increased, and the processing efficiency can be expanded.

In the invention of claim 3, in addition to the invention of claim 1 or 2, the lower spacer is attached to the second or more stages of the multi-stage heating member, and the lower spacer is attached to the heating member above the gap. Is formed so that the workpiece can be lifted from a position spaced below the workpiece in the gap, so that when the gap is widened, for example, if the heating member above the gap is lifted up, the first heating is simply performed. When the member is raised and the gap with the workpiece to be lowered is spaced therebetween, the lower spacer is lifted from the lower spaced position to reach the target to the ascendable position, and further apart. The gap between the heating member and the lower heating member is widened. As a result, the interval between the workpiece and the heating member above and below, i.e., the gap between the upper and lower sides of the workpiece can be increased.

Therefore, at the time of normal heating, the space | interval on either side of the space | interval of a to-be-processed object and a heating element above and below can also be minimized. As a result, it is possible to maximize the effect of the invention of claims 1 and 2, such as minimizing the overall dimensions of the heat treatment apparatus, maximizing the heat transfer efficiency, optimizing the heat treatment conditions, saving the maximum energy, and the like.

Claims (3)

In the multi-stage heating plate heat treatment apparatus for heating and heat-treating the plate-shaped workpieces supported in each of the above intervals by a plate-shaped heating member supported in multiple stages at intervals in the vertical direction, A position support member for supporting the heating member separably between the respective intervals, and a shaft member installed in the up-down direction including the interval at at least three positions of the periphery of the heating member and supported to be rotatable; WHEREIN: As the number of displacement value supporting members is equal to the number of said space | intervals, it is attached to the said shaft member, and this shaft member is rotated, and the front-end | tip part of any one of said displacement value supporting members enters into the space | interval of any one of the said space | intervals, and the like. The displacement value support member is formed so that the distal end value of the displacement value support member is outside the gap, the rotation means for rotating the shaft member, and the tip portion of the displacement value support member may be any one of the displacement value support member. When entering into the gap, it is possible to enlarge and restore the one gap together with the displacement support member. Multi-stage heating plate type heat treatment apparatus having a spacing means for changing. In the multi-stage heating plate heat treatment apparatus for heating and heat-treating the plate-shaped workpieces supported in each of the above intervals by a plate-shaped heating member supported in multiple stages at intervals in the vertical direction, A position support member for supporting the heating member separably between the respective intervals, and a shaft member installed in the up-down direction including the interval at at least three positions of the periphery of the heating member and supported to be rotatable; WHEREIN: As a displacement value support member of the divided number which divided the number of the said intervals into an integer of 2 or more, it is attached to the said shaft member, and this tip | tip part of the said displacement value support member is any one of the said space | intervals by rotating this shaft member. A displacement value support member having a non-engaging position in which the distal end of the other displacement value support member is out of the gap and all of the displacement value support member is out of the gap; Rotation means for enabling and the tip portion of the displacement value supporting member entered into any one of the gaps Wherein any one of the sides where the supporting member and the one of the distance and close-up can be restored to the multi-stage heating, characterized in that with a distance changing means for the plate type heat treatment apparatus with. The lower spaced member attached to the second or more stages of the said multi-stage heating member, and attached to the said heating member above the said space | interval, spaced below the to-be-processed object in this space | interval. And a bottom spacer formed so as to lift and lower the workpiece from a position.