1232922 玖、發明說明： 【明所屬"^技領3 發明領域 本發明涉及一種在熱處理室中所設的支撐裝置上支撐 5多層平板狀的被處理物、並從上述熱處理室的開口部逐個 取放上述被處理物、進行熱處理的滑動縫隙（slit)式熱處理 裝置。 【先前技術3 發明背景 1〇 作爲在熱處理室内支撐多層LCD玻璃基板等平板狀的 工件、並將其逐個取放進行熱處理的通常稱爲淨化爐的熱 處理裝置，以前一般使用這樣的構成，即在一定位置設置 取放工件用的縫隙狀的開口，在可升降的稱爲吊籃(c〇nd〇la) 的裝載裝置上以一定間隔裝載多層工件，升降吊籃使熱處 15理完畢後的工件的位置對正開口處，再用機械手取放工 件，並依次反覆該動作。（例如，參照專利文獻^。 但是，在這種熱處理裝置中，由於使支撐多層工件的 吊籃僅以其層數份進行升降，故熱處理裝置的高度變高， 基於叹置其的淨化至等的南度限制，而限制工件的裝載件 20數，由於工件的裝載率低、故存在裝置成本變得較高、或 設置場所的佔有率變大的問題。 由此’提出-種熱處理裝置’在上下二處設置取放工 件用的開口，以使吊籃只升降其高度的一半，從二處開口 同N·取放工件’而貫現高集成化及高效率化。（參照專利文 1232922 獻2)。 根據該裝置，雖然高度的問題被一定程度改善，但僅 在二處設置開口的部分就使熱處理室内的密封性降低，同 時也仍存在高度變高的問題。近年來，作爲被熱處理的工 5 件的玻璃基板的尺寸呈巨大化’出現了如1800mmx 1500mm 這種是以前的基板的面積的數倍的大型的工件。由此，吊 籃的尺寸及搭載工件時的吊籃的重量變得很大，難以確保 用於其升降及姿勢保持的三次元的位置精度、升降驅動力 變大、或慣性力變大，故必須減緩升降速度等，而存在不 10 容易得到升降機構的設計或動作的可靠性、迅速性的問題。 另一方面，作爲將工件裝載裝置保持在一定位置不進 行升降的形式的熱處理裝置，提出一種結構，將支撐多層 由基板構成的被處理物P的支撐台3固定設置在爐1内，並在 取放被處理物用的開口4處用鈎子(h〇〇k)部件27等使由5扇 15小門構成的閉鎖部件5的構成部件5a離開密封件14，並且利 用沿上下方向疊加的5台氣缸12進行升降，使各自的間隔部 分僅以構成部件1片份進行開閉，對於該1片份的構成部件 對應多片被處理物，在取放其中任一被處理物時、僅打開 構成部件1片份的開口。（參照專利文獻3) 但是’在這種裝置中，由於在取放被處理物時僅以構 成部件1片份打開大開口，並且此時從打開間隔的位置離開 在封其上的所有的構成部件的狀態，故存在爐内的熱氣泄 漏變多溫度分佈變差的問題。 另外’提出一種在爐體2中設有多層框架3，並在爐體 1232922 的開放面上自由升降地安裝開設了矩形狀的縫隙5的閘門 (shuter)4 ’以使該百頁從框架的最下層到最上層進行升降取 放工件的燒成爐（參照專利文獻4)。 在该裝置中’由於只是在閘門的一處設有縫隙，故盘 5 上述專利文獻3的裝置相比較、内部的熱氣泄漏少，並且由 於只是升降閘門、故可以小的驅動力就可容易且迅速地運 動。但是，由於使閘門僅以框架的整個層的高度份升降， 故與吊籃升降式裝置相同存在熱處理裝置的高度變高的問 題。另外，打開著的縫隙經常與外部相導通、經常存在熱 10 氣泄漏，並且在閘門升降時存在與專利文獻3相同的産生熱 氣泄漏的問題。 專利文獻1 :特開平6 — 66715號公報 專利文獻2 :特開平9 — 250883號公報 專利文獻3 :特開2000— 169169號公報（尤其第3〜6圖 15 及相關說明） 專利文獻4 :特開平9—72677號公報（尤其第4、5圖等 及相關說明） 【發明内容3 發明概要 20 因此，本發明解決了現有技術的上述問題，其目的在 於提供一種不會增加裝置的高度、並防止熱處理室的熱氣 泄漏，很好地保持室内的溫度分佈，並且取放被處理物的 開口部的開閉機構的驅動力小、能迅速可靠地工作的熱處 理襞置。 1232922 本發明爲了實現上述目的，在以設在熱處理室内的支 撐裝置支撐多層平板狀的被處理物、並從上述熱處理室的 開口部逐個取放上述被處理物進行熱處理的熱處理裝置 中，其特徵在於： 5 上述支撐裝置被設成保持在一定位置，上述多層由多 個層組成的多個組構成，其包括：以堵塞上述開口部的方 式設置的可進行升降的縫隙部件，其具有由與上述多組相 對應的多個構成、可取放上述被處理物的縫隙； 在上述開口的相對該縫隙部件的外側與上述縫隙部件 10 相對向地設置、並與上述多組相對應的多扇小門，以分別 可開閉相對應的縫隙並在封閉時從上述外側包圍上述開口 部地形成；可升降上述縫隙部件、以使上述多個縫隙可停 止在上述多層的各層位置的升降機構；以及可分別開閉上 述多扇小門的開閉機構。 15 圖式簡單說明 第1圖是表示適用本發明的熱處理裝置的一例的淨化 爐的橫截面狀態的說明圖。 第2圖是表示上述裝置的側剖面狀態的說明圖。 第3圖是表示上述淨化爐的正面及正面剖面狀態的說 20 明圖。 第4圖是表示上述淨化爐的多層組合狀態的說明圖。 第5(a)及(b)圖是分別表示上述淨化爐的遮蔽板與升降 機構的正面狀態及縫隙的一部分的說明圖。 第6圖是表示上述淨化爐的遮蔽板與小門部分的概略 1232922 結構的立體圖。 第7圖是表示上述遮蔽板與小門部分的一部分的橫截 面圖。 第8圖是表示上述小門的開閉機構的概略結構的立體 5 圖。 第9圖是表示上述開閉機構及小門的一部分的主視圖。 第10圖是表示上述開閉機構與小門及遮蔽板的一部分 的橫截面狀態的說明圖。 第11圖是表示上述小門的開閉狀態的說明圖。 10 圖中：1 —熱處理裝置，la—開口面（開口部）’ 2—熱處 理室，3 —支撐體（支撐裝置），4—遮蔽板(縫隙部件），5、 小門，6—升降機構，7、開閉機構，41、 411〜416 —縫隙，N—多層，η、⑴、η〗一多層，m、m丨、m2 —多組、多個、多片，W—工件(被處理物）。 15 【實施方式】 較佳實施例之詳細說明 第1〜3圖表示作爲適用本發明的熱處理裝置、通稱爲 淨化爐的熱處理裝置的整體結構的一例。 熱處理裝置1，是一種以作爲設在熱處理室2内的支撐 20 裝置的支撐體3支撐多層作爲平板狀的被處理物的在LCD 基板或在PDP的製造流程進行處理的玻璃基板等工件W、並 從在本例中形成在熱處理室的一面上的作爲熱處理室2的 開口部的開口面la逐個取放進行熱處理的裝置，其中作爲 多層在本例中爲31層，其具有作爲缝隙部件的遮蔽板4、小 1232922 門5、升降機構6、及開閉機構7。 在熱處理室2的寬X方向的雨側及上下z方向的下部具 有空調部分，按箭頭表示的熱風的流動方向的順序，與通 帛的相同設置有·在本例中配設在下部的4台送風機$及其 5馬達81、爲了達到風量的平衡而根據需要設有導引通道等 的入口通道部9、在本例中被分開的9台高性能篩檢程式 1〇、爲了在下方使與工件W平行流動的熱風向下流而根據 需要設有導引通道等的出口通道部11、以及配置在下部空 間12内形成熱風將迴圈空氣加熱到例如25(rc左右的加熱 10 器13等。符號14及15分別是隔熱壁及門。 支撐體3，被設成不會如吊籃那樣進行升降、而保持在 一疋位置’由安裝在X方向兩側所直立設置的支柱31上的31 個端側工件承載件32、及安裝在熱處理室的前後γ方向的裏 側所直立設置的支柱33上的31個x3列的中間工件承載件34 15 寺構成。 由在本例中爲31層的工件承載件32、34構成的多層N， 如第4圖所示，作爲多層n，由第！多層ηι = 5層及成爲最下 組的η2 = ηι+ΐ = 6層構成，且作爲由第1多層111 = 5層及成爲 最下組的= = 6層形成的多組m，*mi = 5組與m2 = 1 20組合計6組構成。其結果，設爲N = nm = nimi+n2m2 = 25+6 =31 層。 在本例中，採用這樣的n、m值是因爲與由1個實際的 製品規格決定的多層數N=31相一致。例如，如果n二30， 則η全部是111爲5、m均是叫爲6，如果N=32，則ηι = 5、叱 10 1232922 =6、叫二4、m2 = 2，N=niXmi+n2Xm2 = 2〇+12 = 32層。 如上所述，多層，由第丨多層組成的第丨多組構成（箱ι}、 或者由如前例所述第1多層組成的第丨多組與第2多層（第i 多層+1)組成的第2多層合計的多組構成（箱2)。這種箱丨或箱 5 2、以及箱2時的第2多組的數目，對應作爲實際的製品要求 的N來規定。 第5圖疋表示遮蔽板4及其升降機構6的概略構成，第6 圖表示遮蔽板4及小門5部分的概略結構。 遮蔽板4，以堵塞如第丨、2圖所示的開口面“的方式設 10置，具有可取放工件W的縫隙41。縫隙41，由可使安裝在 未圖示的自動機械的移動體100上的手臂1〇1有餘量地通過 的4處的深槽部41a與可使支撐在手臂1〇1上的工件|有餘 i地通過的上間隙41b形成，以便在本例中可由機械手取放 工件W。深槽部41a及上間隙4lb的高度間隔hi及h2分別設 15 爲如60mm及30mm左右的非常小的尺寸。 這種縫隙41，由對應多組1)1的多個^^構成。即，在本例 中，如第4圖所示，利用工件承載件32、34支撐工件w的多 層N=31由4h〜415組成的5個及41ό構成，其中，41ι〜4l5 對應設爲ηι = 5、多組m1 = 5的從最上組到5組的層位置，41ό 20 對應由η2 = ηι+1 = 6組成的最下組m2=l組的層位置。 具有這種縫隙41的遮蔽板4，由框板42及安裝在其上的 面板43構成並可進行升降。此外，雖然在第5圖中省略了圖 示，但縫隙41被形成爲如圖所示的方形的縫隙部件41 a並被 嵌入面板43中。框板42，爲了可進行升降，而通過結合板 1232922 44安裝在後述的升降機構6上，並且也如第7圖所示通過移 動體45與向上下Z方向的辅助的線性導引件的槽46相結合 導引升降，以可靠地沿升降方向運動。 第8〜11圖是表示小門5及其開閉機構7的構成例。 5 小門5，如第1〜3圖及第1〇圖所示，與遮蔽板4相對向 設置在熱處理室2的相對遮蔽板4的外側，作爲對應多組111 的多片在本例中爲m = 6片。該小門5，也如第4圖所示’以 5ι〜56可分別從上依次開閉相對應的縫隙4h〜416的方式 形成。由此，在本例中，在小門5的周圍的段差部分安裝有 10 密封件51(在第9圖中以單劃線表示其中心位置），它們以淨 ，化爐的主體結構部lb及兩端與安裝在其中的阻擋部件lc相 接觸的方式進行設置。 這種小門5，通過2處由螺栓53將安裝板52安裝在後述 的開閉機構7的臂78上，且將臂78的一端側安裝在旋轉轴77 15 上，而若旋轉軸77旋轉則可開閉以該軸爲中心旋轉相對應 的縫隙41。 升降機構6,可升降遮蔽板4使多個縫隙41 !〜416分別停 止在作爲多層本例中1^ = 5層及n2= 6層的各層位置。這樣作 爲升降機構6，氣缸裝置、齒執與小齒輪機構、螺釘機構、 2〇 鋼絲吊起機構等公知的各種直線移動裝置，但在本例中使 用滾珠絲杠機構。 本例的升降機構6，如第5圖所示，由帶減速機的祠服 馬達61、利用該馬達旋轉的寬X方向的兩側的旋轉傳遞軸 62、傳遞該軸的旋轉的滾珠絲杠缸體裝置63、與雖然省略 12 1232922 了詳細圖示但在該裝置中限制上下z方向位置並由旋轉電 動軸62旋轉的球螺母相螺合由紅體咖—邊限制其旋轉一 邊沿z方向導引進行升降的滾珠絲杠轴63b、與該輛相配合 傳遞其升降動作的升降軸64、支撐該軸可沿上下方向升降 5的軸承65、以及安裝在升降軸64與遮蔽板4的框板42上並將 匕們結合在一起的上述結合板44等構成。 開閉機構7，如第3圖所示在小門5ι〜、上分別設有7ι 〜八，以分別開閉在本例中由01〜66的6扇組成的多扇小門 5。這些開閉機構7i〜76全部相同，在第8〜11圖中表示爲開 10閉機構7。 本例的開閉機構7，由氣缸71、在其桿71a上通過浮動 接碩72可如箭頭方向往復移動地設置的L形部件73、固定在 其上沿上下方向延長並作爲形成在表面側的線性導引件的 一方側部件的本例中的凸條、同樣形成在裏面側的齒執 士引肷入凸條7 4的線性導引件的槽部件7 6、具有與齒 軌75相咬合的小齒輪77a的上述旋轉軸77、以及在該軸上固 定—端側並安裝有小門5的上述臂78等構成。 此外，作爲開閉縫隙41的小門的開閉機構，也可取代 如上述那樣使用氣缸與齒軌·小齒輪的機構，使用由帶減 速機的馬達直接驅使旋轉軸77旋轉的機構、或將2個一次元 動作的組合在一起以使小門5離開缝隙面並且沿Z方向滑動 的移動機構等適當的結構。另外，作爲旋轉方式時的開閉 方向’也可選擇向上打開或向下打開的任一種方式。 上述的熱處理裝置1如下述那樣運轉並發揮其作用效 13 1232922 在熱處理室2内，以之前所述的狀態在工件承載件32、 34上支擇31層的工件w，並封閉如第3、4圖所示的由&〜％ 組成的全部小門5。而且，啓動送風機8及加熱器13，作爲 5循壤氣體通常使空氣經由如箭頭所示的高性能筛檢程式10 通過熱處理室2進行迴圈，對工件進行熱處理。此時，如第 2及4圖所示，使遮蔽板4，分別處於6個縫隙“I〜4丨6與由 Wl〜Ws及Wl〜貨6的5層及6層組成的多層的從上①〜⑤所 示6組工件w的各最下層的工件的位置相對應處。 10 在該狀態下，假如31層的工件w中的從下按序號經過 規定的熱處理時間，則按它們的序號更換熱處理完畢的舊 工件與接著應進行熱處理的新工件。 首先，在更換⑥組的工件W6時，打開小門56。由此， 驅動開閉機構7的氣缸71，使L形部件73上升、沿其方向在 15齒軌(mck)75上運動，並使與其相咬合的小齒輪77a旋轉、 帶動旋轉軸77旋轉，使臂78旋轉帶動小門、旋轉，打開缝 隙416。在弟2圖中用實線表示該狀態。 此時，通過縫隙4U使熱處理室2與其外部綱相導通， 至内的熱氣漏出到外部。但是，作爲熱處理2的整體，保持 20著封閉小門5[〜55的狀態，從而，封閉縫隙41t〜415，不會 從該部分産生熱氣泄漏，並且由於縫隙41由僅僅可通過工 件W與機械手1()1的上_仙與在χ方向上局部設置4處的 深槽部4U形成的、開口面積小，故熱氣_阻止爲極少 量。其結果，熱處理室2内的氣氛不混亂，能夠很好地保持 14 1232922 …皿度77佈。另外’因爲遮蔽板4與小門5形成雙重隔熱密 封，所以隔熱效果變好。 而且這種情況下，在適用本發明的本例的裝置中， 爲了打開縫隙41而只需打開相對應的小門5,所以能夠 簡單且1_速地進行其操作。從而，能夠使工件的熱處理效 率子另外，忐夠減小用於開閉的驅動力。與此相對，在 有見有的】、門的門開閉式的熱處理裝置中，由於爲了打 開夕们]門的間隔部分，而進行組合離開多個小門的開口 面〃上下私動的動作，故動作複雜、耗時，並且驅動力也 10變大。在本例的裝置中大幅度地改善了這些方面。 若打開小門50，則如第2圖所示自動機械的移動體1〇〇 伙縫隙4“向工件的下方插入4個機械手ι(如第1圖所 示）稍上升舉起工件We移出到熱處理室2外，轉載到未圖 示的熱處理凡畢的工件線，從未熱處理工件線舉起新工 15件、從相同縫隙4U將其放在工件承載件32 ' 34上。由此完 成⑤組的工件的交換。此外，在本例中，雖然只在熱處 理至2的一面取放工件，但也可成爲將小門5等設在前後γ 方向的兩側，從兩側取放工件這樣的裝置。 在接績⑥組的工件We經過該組的工件貨5的熱處理時 20間、取放該部分的工件時，以打開小門56的狀態，使遮蔽 板4僅上升工件1層份即丨個間距，使縫隙416處在⑤組的工 件W5的位置。此時，使馬達旋轉規定數，通過兩側的旋轉 傳遞轴62將該旋轉傳遞給滾珠絲杠裝置63，由滚珠絲杠機 構使滾珠絲杠63b上升1個間距，將其運動從升降軸64通過 15 1232922 結合板44傳遞給遮蔽板4的框板42，一邊由線性導引件46^l 上下Ζ方向導引一邊使遮蔽板4上升1個間距。 該上升動作’因爲只疋使馬達61稍微旋轉，所以可簡 單、迅速且可靠地進行。另外，僅僅形成縫隙並提升可充 5分輕量化的遮蔽板4,而無需搭載如現有裝置那樣大型的工 件W提升重ΐ大的裝載裝置’所以上升用的馬達61可設成 例如400瓦左右的充分小的輸出。 據此，與工件W6相同取放工件W5進行交換。此時，因 爲小門5ι〜關閉，所以不會産生熱氣泄漏的問題。此外， 10 此時，①〜⑤組的縫隙41 !〜415成爲各自組的工件w4的位 置。 這樣，使遮蔽板4逐次上升1個間距，交換工件，在交 換⑤組的最上層的工件^\^時，遮蔽板4的上端4a上升6個間 距處在第4圖的雙點劃所示的4a，處。從而，作爲淨化爐1的 15 高度必須考慮該4a，的位置。但此時，由於該6個間距份的 高度與工件的整體裝載高度相比較爲1/5左右，故實質上完 全不會産生問題。 與此相對，在現有的吊籃升降式的裝置或使1個縫隙升 降的裝置中，僅整個工件的裝置高度份的上方必須有多餘 20 的高度，最終使工件的裝載率降低。此外，僅上端上升的 份成爲下端4b下降的位置，但因爲該部分在熱處理裝置中 通常設爲空調空間或機械空間，所以該部分占多餘的空間 不會導致熱處理裝置的高度變高。 若⑥組的6片工件w的熱處理完畢，則按從WjgW5的 16 1232922 順序或相反的順序更換⑤組的工件w。此時，若關閉小門 56並打開小門55，則使遮蔽板4下降1個間距或5個間距。據 此’⑤組的缝隙4I5處在與該組的工件界1或\\^的位置相對 應的位置，並且小門55打開，打開縫隙415，取放工件％或 5 W5。 這樣，依次取放全層的工件W進行熱處理，並且，反 復這樣的工序，連續、效率好地對工件進行熱處理。此外， 通常熱處理裝置1的各機器或自動機器的動作是自動化 的，以對工件W自動地進行熱處理。 10 (發明效果） 根據如上所述本發明，在發明之一中，多層支撐平板 狀的被處理物的支撐裝置設置成保持在一定位置。從而， 多層支撐被處理物的重量重的支撐裝置不升降。其結果， 無需設在現有的吊籃升降式熱處理裝置上的、需要大的驅 15動力、複雜大型的結構的支撐裝置升降機構。從而，尤其 即使疋如大型的玻璃基板那樣的被處理物也可容易可靠地 進行支撐。 另外，由於支撐裝置保持於一定位置，故在製作精度 高的支撐裝置時能夠原樣保持其精度。其結果，可將在從 20熱處理室取放平板狀的被處理物時的作爲通過部分的縫隙 設爲窄間隔。 而且，因爲由多層組成的多組構成支撐裝置的多層， 並與其相關設有縫隙部件、小門、縫隙部件的升降機構、 及J門的開閉機構，所以能夠以極佳的狀態將取放被處理 17 1232922 物熱處理室進行熱處理。 即’因爲縫隙部件以堵塞熱處理室的開口部的方式設 置，具有由對應多組的多個構成、可取放被處理物的縫隙、 並可進行升降，所以例如，如果縫隙部件的位置，處於在 多組中縫隙位於各自多層的最下層的位置，則從任一個多 組的最下層的縫隙取放與其相對應的被處理物，接著使縫 隙上升1層，取放與此時的縫隙相對應的被處理物，這樣可 逐層使縫隙上升、逐層取放被處理物。在這種情況下，因 爲縫隙部件的升降機構可升降縫隙部件使多個的縫隙可停 在多層的各層位置，所以能夠如上述那樣取放被處理物。 在此’因爲在縫隙部件上與多組相對應設有多個縫 隙’所以能夠使用該多個縫隙取放被處理物。從而，缝隙 部件只要僅升降構成各自多組的多層份即可無需升降多 層的整個層數份。：i：牡要 μ 15 20 ，、、、α果，雖然使縫隙部件升降，但立升 降高度爲整個層高度份的多 ’、 將熱處理裝置的高度 ==縫隙升降式的相比較能夠大幅度地降低。 通，因爲在相則在思些部分熱處理室與其外部相導 有對應多I::部:的開口的外側咖 閉時從外側包圍開σ ’閉各小門對應的縫隙以在封 氣氛泄漏㈣部。^能夠充分減少熱處理室内的 密封使隔熱效果變奸。 9對…、處理至的氣氛進行雙重 的氣氛的温度分佈。❿且’能夠很好地保持熱處理室内 丁開與多個縫隙中的取放被處理物的縫隙 1232922 相對應的小門，並保持與其他的縫隙相對應的小門爲封閉 狀態，而對於其他的縫隙，即使它們與熱處理室相導通， 小門也包圍封閉與外部相通的開口部，因此能夠防止通過 其他的縫隙的内外之間的導通。在這種情況下，因爲開閉 5 機構可分別開閉多扇小門，所以能夠僅開閉如上述那樣必 需開閉的縫隙。 在以上中，因爲缝隙部件，僅形成有縫隙、而可製作 成充分輕量，所以能夠減小使其升降的升降機構的驅動 力，並加快動作速度。另外，由於開閉機構可開閉分割成 10 多個的小門，故同樣能夠減小用於開閉的驅動力加快開閉 速度。其結果，在少動力消耗的前提下，能夠縮短被處理 物向熱處理室的取放時間、使熱處理效率變好。 【圖式簡單說明】 第1圖是表示適用本發明的熱處理裝置的一例的淨化 15 爐的橫截面狀態的說明圖。 第2圖是表示上述裝置的側剖面狀態的說明圖。 第3圖是表示上述淨化爐的正面及正面剖面狀態的說 明圖。 第4圖是表示上述淨化爐的多層組合狀態的說明圖。 20 第5(a)及(b)圖是分別表示上述淨化爐的遮蔽板與升降 機構的正面狀態及縫隙的一部分的說明圖。 第6圖是表示上述淨化爐的遮蔽板與小門部分的概略 結構的立體圖。 第7圖是表示上述遮蔽板與小門部分的一部分的橫截 19 1232922 面圖。 第8圖是表示上述小門的開閉機構的概略結構的立體 圖。 第9圖是表示上述開閉機構及小門的一部分的主視圖。 5 第10圖是表示上述開閉機構與小門及遮蔽板的一部分 的橫截面狀態的說明圖。 第11圖是表示上述小門的開閉狀態的說明圖。 【圖式之主要元件代表符號表】 1...熱處理裝置 13·.·加熱器 la·.·開口面(開口部） 14...密封件 lb…主體結構部 27...鈎子部件 lc...阻擋部件 31、33...支柱 2...熱處理室 32...端側工件承載件 3···支撐體(支撐裝置） 34...中間工件承載件 4···遮敝板(縫隙部件） 4卜4h〜416…縫隙 5、5^56···小門 41a...深槽部 5a...構成部件 41b...上間隙 6...升降機構 42...框板 7、…開閉機構 43...嵌入面板 8...送風機 44...結合板 9...入口通道部 45...移動體 10…高性能篩檢程式 46...槽 11...出口通道部 51...密封件 12···氣缸 61...伺服馬達 20 1232922 62...旋轉傳遞軸 77...旋轉軸 63...滾珠絲杠缸體裝置 77a...小# 輪 63a...缸體 78…臂 63b...滾珠絲杠軸 81...馬達 64...升降軸 100...移動體 65...車由承 101...手臂 71.··氣缸 200...外部 71a···桿 η ' Πι ' η〗·"多層 72...浮動接頭 m、mi、m2···多組、多個、多片 73..丄形部件 N...多層 74…嵌入凸條 P···被處理物 75.. .齒軌 76.. .槽部件 W···工件(被處理物） 211232922 发明. Description of the invention: [Affiliation of the Ming Dynasty] [Technical Field 3] The present invention relates to a method for supporting five multi-layered flat objects on a support device provided in a heat treatment chamber, and one by one from the opening of the heat treatment chamber. A sliding slit type heat treatment device for taking and placing the object to be processed and performing heat treatment. [Prior Art 3 Background of the Invention 10] A heat treatment device commonly called a purification furnace is generally used as a heat treatment device that supports flat-shaped workpieces such as multi-layer LCD glass substrates in a heat treatment room and heats them one by one. A slot-shaped opening for picking up and placing workpieces is provided at a certain position, and a multi-layer workpiece is loaded at a certain interval on a liftable loading device called a condola. The position of the workpiece is aligned with the opening, and then the robot picks and places the workpiece, and repeats the action in turn. (For example, refer to Patent Document ^. However, in such a heat treatment apparatus, since the basket supporting a multi-layer workpiece is raised and lowered by only a few layers, the height of the heat treatment apparatus becomes high, and the purification is performed based on sighing.) The south degree limit is limited, and the number of workpieces to be loaded is limited to 20. Since the loading rate of the workpiece is low, there is a problem that the cost of the device becomes higher or the occupation rate of the installation site becomes larger. Openings for picking up and placing workpieces are provided at the upper and lower places so that the gondola can only be lifted and lowered by half of its height. The two openings are similar to N · picking and placing workpieces to achieve high integration and high efficiency. Contribution 2) According to this device, although the problem of height is improved to a certain extent, the sealing performance in the heat treatment chamber is reduced only by providing the openings in two places. At the same time, there is still a problem that the height is increased. The size of the heat-treated glass substrate of 5 pieces has become huge, such as 1800mmx 1500mm, which is a large workpiece that is several times the area of the previous substrate. Therefore, the size of the hanging basket The weight of the gondola when the workpiece is mounted becomes very large, and it is difficult to ensure the three-dimensional position accuracy, the driving force for lifting, or the inertial force for lifting and maintaining the posture. Therefore, the lifting speed must be slowed down. It is not easy to obtain the reliability and rapidity of the design or operation of the lifting mechanism. On the other hand, as a heat treatment device that holds the workpiece loading device at a certain position and does not perform lifting, a structure is proposed that supports multiple layers of substrates. The supporting table 3 of the processed object P is fixedly installed in the furnace 1, and the hooks (h00k) members 27 and the like are used to lock the five-door 15 gates at the openings 4 for receiving and placing the processed objects. The component 5a of the component 5 is separated from the seal 14 and lifted up and down by the five cylinders 12 stacked in the up-and-down direction, so that each of the intervals is opened and closed with only one component of the component, and there are many corresponding components for the one component. In the case of a sheet to be processed, when opening any one of the objects, only one opening of the constituent member is opened. (Refer to Patent Document 3) However, in this device, When the object is processed, the large opening is opened with only one piece of the component, and at this time, all the components sealed there are separated from the open interval position, so there is a problem that the hot gas leakage in the furnace increases and the temperature distribution deteriorates. In addition, 'propose a furnace frame 2 provided with a multilayer frame 3, and a shutter 4 with a rectangular gap 5 opened on the open surface of the furnace body 1232922 to be lifted up and down' so that the hundred pages are removed from the frame The firing furnace that lifts and lowers the workpiece from the bottom to the top (see Patent Document 4). In this device, 'Since only a gap is provided at the gate, disc 5 is compared with the device of Patent Document 3, There is less leakage of hot air inside, and because it only lifts the gate, it can move easily and quickly with a small driving force. However, because the gate is lifted only by the height of the entire floor of the frame, it is the same as the basket lift There is a problem that the height of the heat treatment apparatus becomes high. In addition, the opened gap often communicates with the outside, there is often a leak of heat, and there is a problem that a leak of heat occurs when the gate is raised and lowered as in Patent Document 3. Patent Document 1: Japanese Patent Application Laid-Open No. 6-66715 Patent Literature 2: Japanese Patent Application Laid-Open No. 9-250883 Patent Literature 3: Japanese Patent Application Laid-Open No. 2000-169169 (especially 3 to 6 FIG. 15 and related explanations) Patent Literature 4: Japanese Patent Application No. 4 Kaiping Publication No. 9-72677 (especially Figs. 4 and 5 and related descriptions) [Summary of the Invention 3 Summary of the Invention 20] Therefore, the present invention solves the above-mentioned problems of the prior art, and aims to provide a device that does not increase the height of the device, and It prevents heat from leaking in the heat treatment chamber, maintains the temperature distribution in the room well, and has a low heat drive mechanism for opening and closing the opening of the object to be processed, which can work quickly and reliably. 1232922 In order to achieve the above object, the present invention is characterized by a heat treatment device that supports a plurality of flat plate-shaped objects to be treated with a supporting device provided in a heat treatment chamber, and picks and puts the objects to be heat treated one by one from the opening of the heat treatment chamber. It is: 5 The support device is provided to be held in a certain position, and the multilayer is composed of a plurality of groups composed of a plurality of layers, and includes a slit member that can be raised and lowered so as to block the opening portion. The plurality of groups corresponding to the plurality of groups may be configured to receive the slits of the object to be processed; and the plurality of small fans corresponding to the plurality of groups may be provided on the outer side of the opening opposite to the gap member and facing the gap member 10. The door is formed so as to open and close a corresponding slot and surround the opening from the outside when closed; a lifting mechanism that can lift the slot member so that the plurality of slots can be stopped at each position of the multilayer; and Opening and closing mechanisms for opening and closing the multiple small doors, respectively. 15 Brief Description of Drawings Fig. 1 is an explanatory view showing a cross-sectional state of a purification furnace as an example of a heat treatment apparatus to which the present invention is applied. FIG. 2 is an explanatory diagram showing a side sectional state of the device. Fig. 3 is an explanatory view showing a front surface and a sectional state of the front surface of the purification furnace. FIG. 4 is an explanatory diagram showing a multilayer combination state of the purification furnace. Figs. 5 (a) and 5 (b) are explanatory views showing the front state of the shielding plate and the lifting mechanism of the purification furnace and a part of the gap, respectively. Fig. 6 is a perspective view showing a general configuration of a shield plate and a door portion of the purifying furnace 1232922. Fig. 7 is a cross-sectional view showing a part of the shielding plate and the door portion. Fig. 8 is a perspective view 5 showing a schematic configuration of the opening and closing mechanism of the small door. Fig. 9 is a front view showing a part of the opening and closing mechanism and the small door. Fig. 10 is an explanatory view showing a cross-sectional state of the opening / closing mechanism and a part of the small door and the shielding plate. Fig. 11 is an explanatory diagram showing an opened and closed state of the small door. 10 In the picture: 1 — heat treatment device, la — open face (opening) '2 — heat treatment chamber, 3 — support (supporting device), 4 — shielding plate (gap member), 5, small door, 6 — lifting mechanism 7, Opening and closing mechanism, 41, 411 ~ 416 — gap, N — multi-layer, η, ⑴, η — a multi-layer, m, m 丨, m2 — multiple groups, multiple, multiple pieces, W — workpiece (to be processed Thing). 15 [Embodiment] Detailed description of a preferred embodiment Figs. 1 to 3 show an example of the overall structure of a heat treatment device commonly referred to as a purification furnace as a heat treatment device to which the present invention is applied. The heat treatment device 1 is a support body 3 as a support 20 provided in the heat treatment chamber 2. The support body 3 supports a plurality of workpieces such as a glass substrate processed in an LCD substrate or a PDP manufacturing process as a flat object to be processed. A device for heat treatment is taken one by one from the opening surface la which is an opening portion of the heat treatment chamber 2 formed on one side of the heat treatment chamber in this example. Among them, 31 layers are multilayers, which have The shielding plate 4, the small 1232922 door 5, the lifting mechanism 6, and the opening and closing mechanism 7. The heat treatment chamber 2 has an air-conditioning part on the rain side in the wide X direction and the lower part in the up and down z direction. In the order of the direction of the flow of the hot air indicated by the arrow, it is provided in the same way as the general airflow. The air blower and its 5 motors 81 are provided with an inlet channel section 9 such as a guide channel as needed to achieve a balanced air volume. 9 high-performance screening programs 10 are separated in this example. The hot air flowing parallel to the workpiece W flows downward, and an outlet channel portion 11 such as a guide channel is provided as required, and the hot air is arranged in the lower space 12 to form the hot air to heat the loop air to, for example, a heater 10 of about 25 (rc), etc. The symbols 14 and 15 are insulation walls and doors, respectively. The support body 3 is provided so as not to be raised and lowered like a gondola, and is held in a position of 'supported by pillars 31 which are installed upright on both sides in the X direction. Thirty-one end-side workpiece carriers 32 and 31 x 3 rows of intermediate workpiece carriers 34 15 are installed on pillars 33 standing upright on the back side in the front and rear γ directions of the heat treatment chamber. In this example, there are 31 floors. Workpiece carriers 32, 34 As shown in FIG. 4, the multi-layer N is composed of the multi-layer n, which is composed of the multi-layer η = 5 layers and η2 = η + + = 6 which is the lowest group, and is composed of the first multi-layer 111 = 5 layers. And the lowermost group = = 6 groups of m groups, * mi = 5 groups and m2 = 1 20 combined 6 groups. The result is set to N = nm = nimi + n2m2 = 25 + 6 = 31 In this example, the values of n and m are used because they are consistent with the number of layers N = 31 determined by an actual product specification. For example, if n = 30, then η is 111 and 5, m is called 6, if N = 32, then η = 5, 叱 10 1232922 = 6, called two 4, m2 = 2, N = niXmi + n2Xm2 = 2〇 + 12 = 32 layers. As mentioned above, multiple layers , Which is composed of a plurality of groups consisting of a plurality of layers (box), or a plurality of groups consisting of a plurality of layers as described in the previous example and a plurality of layers consisting of a plurality of layers (the ith layer + 1) Multi-group structure (box 2). The number of such second boxes or boxes 5 2 and 2 is specified corresponding to N, which is the actual product requirement. Figure 5 shows the shielding plate 4 and its The schematic structure of the lifting mechanism 6 is shown in FIG. 6 The outline structure of the shield plate 4 and the small door 5. The shield plate 4 is provided in a manner of "10" so as to block the opening surface as shown in Figs. 2 and 2, and has a gap 41 where the workpiece W can be placed and placed. The deep grooves 41a at four places that allow the arm 1001 mounted on the mobile body 100 of the robot (not shown) to pass therethrough marginally, and the workpiece that can be supported by the arm 101 can be passed therethrough. The gap 41b is formed so that the workpiece W can be picked up and placed by the robot in this example. The height intervals hi and h2 of the deep groove portion 41a and the upper gap 4lb are set to 15 with extremely small dimensions, such as about 60 mm and 30 mm, respectively. This gap 41 is composed of a plurality of ^^ corresponding to a plurality of groups 1) 1. That is, in this example, as shown in FIG. 4, the multilayer N = 31 which uses the workpiece carriers 32 and 34 to support the workpiece w is composed of 5 and 41, consisting of 4h to 415, where 41ι to 4l5 correspond to ηι. = 5, multiple groups of m1 = 5 layer positions from the top group to 5 groups, 41ό 20 corresponds to the layer position of the bottom group m2 = l group consisting of η2 = ηι + 1 = 6. The shielding plate 4 having such a slit 41 is composed of a frame plate 42 and a face plate 43 mounted on the shielding plate 4 and can be raised and lowered. In addition, although the illustration is omitted in FIG. 5, the slit 41 is formed as a square slit member 41a as shown in the figure and is embedded in the panel 43. The frame plate 42 is attached to an elevating mechanism 6 to be described later via a coupling plate 1232922 44 so as to be able to be raised and lowered, and as shown in FIG. 7, the moving body 45 and the groove of the auxiliary linear guide in the upward and downward Z directions are also shown. 46 combined guide lift, to reliably move in the lift direction. 8 to 11 show examples of the configuration of the small door 5 and its opening and closing mechanism 7. 5 The small door 5, as shown in Figs. 1 to 3 and Fig. 10, is disposed outside the opposite shielding plate 4 of the heat treatment chamber 2 opposite to the shielding plate 4 as multiple pieces corresponding to multiple groups 111 in this example. For m = 6 pieces. The small door 5 is also formed as shown in FIG. 4 in such a manner that the corresponding slots 4h to 416 can be opened and closed in order from 5 to 56 in order from above. Therefore, in this example, 10 seals 51 (the center position of which is indicated by a single dashed line in FIG. 9) are installed around the step portion around the small door 5. It is provided so that both ends may contact the blocking member lc installed therein. In this small door 5, the mounting plate 52 is attached to the arm 78 of the opening-closing mechanism 7 to be described later by bolts 53 at one end, and one end side of the arm 78 is attached to the rotation shaft 7715. When the rotation shaft 77 rotates, The corresponding slit 41 can be opened and closed with the axis as the center. The lifting mechanism 6 can lift and lower the shielding plate 4 so that the multiple slits 41! To 416 are stopped at the respective positions of 1 ^ = 5 layers and n2 = 6 layers in this example as a multilayer. As the lift mechanism 6, various known linear moving devices such as a cylinder device, a pinion and pinion mechanism, a screw mechanism, and a 20-wire lifting mechanism are used in this manner, but a ball screw mechanism is used in this example. As shown in FIG. 5, the lifting mechanism 6 of this example includes a temple clothes motor 61 with a speed reducer, a rotation transmission shaft 62 on both sides of the width X direction rotated by the motor, and a ball screw that transmits the rotation of the shaft. The cylinder device 63 is screwed with a ball nut that restricts the position in the z direction up and down and is rotated by the rotary electric shaft 62 although the detailed illustration of 12 1232922 is omitted in this device. The ball screw shaft 63b which guides the lifting, the lifting shaft 64 which cooperates with the vehicle to transfer its lifting movement, the bearing 65 which supports the shaft to be able to lift 5 in the vertical direction, and the frame mounted on the lifting shaft 64 and the shielding plate 4 The above-mentioned coupling plate 44 and the like that couple the daggers together on the plate 42 are configured. As shown in FIG. 3, the opening and closing mechanism 7 is provided with small doors 5m ~ and 7m ~ 8 respectively, so as to open and close a plurality of small doors 5 composed of 6 from 01 to 66 in this example. These opening-closing mechanisms 7i to 76 are all the same, and are shown as opening-closing mechanisms 7 in Figs. 8 to 11. The opening and closing mechanism 7 of this example is composed of an air cylinder 71, an L-shaped member 73 provided on the rod 71a of the rod 71a so as to be able to reciprocate in the direction of the arrow, and fixed to it to extend in the up-down direction and formed on the surface side. The ridges in this example of the one side member of the linear guide, the tooth guides also formed on the back side, are drawn into the ridges 7 of the linear guide, and the groove members 76 of the linear guide have an engagement with the rack 75. The rotating shaft 77 of the small pinion 77a, and the above-mentioned arm 78 fixed to the shaft at one end side and mounting the small door 5 are configured. In addition, as the opening and closing mechanism of the small door that opens and closes the gap 41, instead of the mechanism that uses the air cylinder and the rack and pinion as described above, a mechanism that directly drives the rotation shaft 77 by a motor with a reducer, or two A suitable mechanism such as a moving mechanism that combines the one-dimensional actions to move the small door 5 away from the slot surface and slide in the Z direction. In addition, as the opening / closing direction 'when rotating, one of the opening and closing directions can be selected. The above-mentioned heat treatment device 1 operates as follows and exerts its effects. 13 1232922 In the heat treatment chamber 2, the workpiece w of 31 layers is supported on the workpiece carriers 32 and 34 in the state described above, and the workpiece w is closed as described in the third and third embodiments. All the small gates 5 composed of & ~% shown in FIG. 4. In addition, the blower 8 and the heater 13 are started, and the air is usually passed through the heat treatment chamber 2 through a high-performance screening program 10 indicated by an arrow as a five-cycle gas to heat-treat the workpiece. At this time, as shown in Figs. 2 and 4, the shielding plate 4 is placed in six gaps "I ~ 4 丨 6" and a multi-layered structure composed of 5 and 6 layers of W1 ~ Ws and W1 ~ 6, respectively. The positions of the lowest-level workpieces of the six groups of workpieces w shown in ① to ⑤ correspond to each other. 10 In this state, if the predetermined heat treatment time has passed from the lower part of the workpiece w of the 31th layer according to the number, they are assigned according to their numbers. Replace the heat-treated old workpiece and the new one that should be heat-treated next. First, when replacing the workpiece W6 of group ⑥, open the small door 56. As a result, the air cylinder 71 of the opening and closing mechanism 7 is driven, and the L-shaped member 73 is raised and edged. Its direction moves on 15 rack 75 (mck) 75, and the pinion 77a engaged with it rotates, which rotates the rotating shaft 77, and the rotation of the arm 78 drives the small door, rotates, and opens the gap 416. Used in the second figure The solid line indicates this state. At this time, the heat treatment chamber 2 is communicated with its outer frame through the gap 4U, and the internal hot air leaks to the outside. However, as a whole of the heat treatment 2, the closed small door 5 [~ 55] is maintained. Therefore, the closed gap 41t ~ 415 will not generate heat from this part Leakage, and because the gap 41 is formed by only the workpiece W and the upper _sen of the robot 1 () 1 and the deep groove portion 4U which is locally provided at four places in the χ direction, and the opening area is small, the hot gas _ stop is extremely As a result, the atmosphere in the heat treatment chamber 2 is not disturbed, and it can maintain 14 1232922… 77 degrees of cloth. In addition, because the shield plate 4 and the small door 5 form a double heat insulation seal, the heat insulation effect is improved. Furthermore, in this case, in the device to which the present example of the present invention is applied, only the corresponding small door 5 needs to be opened in order to open the slit 41, so that its operation can be performed simply and at a rapid speed. Therefore, it is possible to make the workpiece In addition, the heat treatment efficiency is low enough to reduce the driving force for opening and closing. In contrast, in the door opening and closing type heat treatment device that is known, the door is opened to open the door part of the door. The combination of up and down movements of the opening surfaces leaving a plurality of small doors is complicated and time-consuming, and the driving force is also increased. In the device of this example, these aspects are greatly improved. If the small door 50 is opened, As shown in Figure 2 The moving body 100 of the moving machine has a gap of 4 ", and inserts 4 robotic hands below the workpiece (as shown in Fig. 1). The workpiece is slightly lifted and moved out of the heat treatment chamber 2 and reprinted to a heat treatment (not shown). For Fanbi's workpiece line, 15 new jobs were lifted from the unheat-treated workpiece line and placed on the workpiece carrier 32'34 from the same gap 4U. This completes the exchange of workpieces in group ⑤. In addition, in this example, although the workpiece is picked up and placed only on the heat-treated side to 2, it may be a device in which the wicket 5 and the like are placed on both sides in the front-back γ direction and the workpiece is picked up from both sides. When the workpiece We of the succession group ⑥ has undergone 20 heat treatments for the workpiece 5 of the group, and when the workpiece of this part is picked up, the small door 56 is opened, so that the shielding plate 4 is only raised by one layer of the workpiece. The distance is such that the gap 416 is at the position of the workpiece W5 in the ⑤ group. At this time, the motor is rotated by a predetermined number, and the rotation is transmitted to the ball screw device 63 via the rotation transmission shafts 62 on both sides. The ball screw mechanism 63b is raised by one pitch by the ball screw mechanism, and its movement is lifted from the lift shaft 64. It is transmitted to the frame plate 42 of the shielding plate 4 through the 15 1232922 coupling plate 44, and the shielding plate 4 is raised by one pitch while being guided by the linear guide 46 ^ l in the up-down Z direction. This ascending operation 'simply rotates the motor 61 slightly, so that it can be performed simply, quickly and reliably. In addition, it is only necessary to form a gap and lift the shielding plate 4 which can be filled with 5 points and light weight, without the need to carry a large workpiece such as the existing device. W Lifting heavy loading device. So the lifting motor 61 can be set to about 400 watts, for example. Full small output. Accordingly, the workpiece W5 is picked up and replaced in the same manner as the workpiece W6. In this case, since the small door 5m ~ is closed, there is no problem of hot air leakage. In addition, at this time, the gaps 41 to 415 of the groups ① to ⑤ become the positions of the workpieces w4 of the respective groups. In this way, the shielding plate 4 is raised by one pitch successively, and the workpieces are exchanged. When the workpiece at the top of the group ⑤ is exchanged, the upper end 4a of the shielding plate 4 is raised by six intervals, as shown by the double-dotted line in FIG. 4. 4a, office. Therefore, as the height of the purifying furnace 1, the position of the 4a ′ must be considered. However, at this time, since the height of the six pitch portions is about 1/5 compared with the overall loading height of the workpiece, there is virtually no problem at all. On the other hand, in the existing gondola lifting device or the device for raising and lowering a gap, there must be an excess of 20 above the device height of the entire workpiece, which ultimately reduces the loading rate of the workpiece. In addition, only the portion that is raised at the upper end becomes the position at which the lower end 4b is lowered. However, because the portion is usually set as an air-conditioned space or a mechanical space in the heat treatment device, the excess space of the portion does not cause the height of the heat treatment device to become high. If the heat treatment of the 6 pieces of work w in the ⑥ group is completed, replace the work w of the ⑤ group in the order of 16 1232922 from WjgW5 or the reverse order. At this time, if the small door 56 is closed and the small door 55 is opened, the shielding plate 4 is lowered by one pitch or five pitches. Accordingly, the gap 4I5 of the '⑤ group is at a position corresponding to the position of the workpiece boundary 1 or \\ ^ of the group, and the small door 55 is opened, the gap 415 is opened, and the workpiece% or 5 W5 is placed. In this way, the workpieces W of all layers are sequentially placed and subjected to heat treatment, and such steps are repeated to continuously and efficiently perform heat treatment of the workpieces. In addition, in general, the actions of each machine or automatic machine of the heat treatment apparatus 1 are automated to automatically heat treat the workpiece W. 10 (Effects of the Invention) According to the present invention as described above, in one aspect of the invention, the supporting device for supporting the object to be plate-shaped in a plurality of layers is provided to be held at a predetermined position. Therefore, the heavy-weight support device that supports the object to be processed in multiple layers does not rise and fall. As a result, there is no need for a supporting device lifting mechanism provided on the existing gondola lifting type heat treatment device, which requires a large driving power and a complicated and large structure. Therefore, in particular, even a to-be-processed object such as a large glass substrate can be easily and reliably supported. In addition, since the supporting device is held at a certain position, the accuracy can be maintained as it is when the supporting device with high accuracy is manufactured. As a result, it is possible to set a narrow gap as a passing portion when a flat object to be processed is placed in or out of the 20 heat treatment chamber. In addition, since a plurality of sets of a supporting device are composed of a plurality of layers, and a gap member, a small door, a lifting mechanism of the gap member, and an opening and closing mechanism of the J-door are provided in relation thereto, it is possible to pick and place the cover in an excellent state. Treatment 17 1232922 Heat treatment chamber for heat treatment. That is, 'the slit member is provided so as to block the opening of the heat treatment chamber, and has a plurality of configurations corresponding to a plurality of groups, and the slit can pick up and place the object to be processed, and can be raised and lowered. For example, if the position of the slit member is at The gaps in the multiple groups are located at the bottom of the respective multi-layers, then the corresponding objects to be processed are taken from the gaps in the lower layers of any one of the groups, and then the gap is raised by 1 layer, and the corresponding to the gap at this time In this way, the gap can be raised layer by layer, and the object to be processed can be placed layer by layer. In this case, since the raising and lowering mechanism of the slit member can raise and lower the slit member so that a plurality of slits can be stopped at the respective positions of a plurality of layers, it is possible to pick up and put the object to be processed as described above. Here, because a plurality of slits are provided in the slit member corresponding to a plurality of groups, it is possible to use the plurality of slits to pick and place the object to be processed. Therefore, the gap member need not only lift and lower the entire number of layers of the multi-layer as long as it only lifts and lowers the multi-layers constituting the respective groups. : I: 要 μ 15 20 ，,,, α, although the gap parts are raised and lowered, the height of the vertical lift is more than the height of the entire layer, and the height of the heat treatment device == the gap lift type can be greatly compared. Ground down. This is because in the phase, the heat treatment chamber and its exterior are connected to each other with corresponding I :: 部: When the outside of the opening is closed, the opening from the outside is closed σ 'close the gaps between the small doors to leak in the sealing atmosphere ㈣ unit. ^ It can sufficiently reduce the sealing in the heat treatment room and make the insulation effect worse. 9 The temperature distribution of the double atmosphere is performed for the atmosphere to which the ... is treated. ❿ 'can keep the small door corresponding to the slit 1232922 in multiple slots to pick up and hold the object in the heat treatment room, and keep the small doors corresponding to other slots in a closed state, and for other Even if they are in communication with the heat treatment chamber, the small door encloses the opening that communicates with the outside. Therefore, it is possible to prevent conduction between the inside and the outside through other slits. In this case, since the opening / closing mechanism 5 can separately open and close a plurality of small doors, it is possible to open and close only the gaps which must be opened and closed as described above. In the above, since the gap member is formed with only the gap and can be made sufficiently lightweight, the driving force of the lifting mechanism for raising and lowering can be reduced, and the operating speed can be increased. In addition, since the opening and closing mechanism can be opened and closed divided into more than 10 small doors, the driving force for opening and closing can also be reduced and the opening and closing speed can be reduced. As a result, under the premise of less power consumption, it is possible to shorten the time for taking and placing the object to be treated in the heat treatment chamber, and to improve the heat treatment efficiency. [Brief Description of the Drawings] FIG. 1 is an explanatory view showing a cross-sectional state of a purification 15 furnace as an example of a heat treatment apparatus to which the present invention is applied. FIG. 2 is an explanatory diagram showing a side sectional state of the device. Fig. 3 is an explanatory view showing a front surface and a sectional state of the front surface of the purification furnace. FIG. 4 is an explanatory diagram showing a multilayer combination state of the purification furnace. 20 Figures 5 (a) and (b) are explanatory views showing the front state of the shielding plate and the lifting mechanism of the purification furnace and a part of the gap, respectively. Fig. 6 is a perspective view showing a schematic configuration of a shield plate and a door portion of the purification furnace. Fig. 7 is a cross-sectional view showing a part of the shielding plate and the door portion. Fig. 8 is a perspective view showing a schematic configuration of the opening and closing mechanism of the small door. Fig. 9 is a front view showing a part of the opening and closing mechanism and the small door. 5 Fig. 10 is an explanatory view showing a cross-sectional state of the opening and closing mechanism, a part of the small door, and the shielding plate. Fig. 11 is an explanatory diagram showing an opened and closed state of the small door. [Representative symbol table of main elements of the drawing] 1 ... heat treatment device 13 ·· heater la ··· opening surface (opening portion) 14 ... seal lb ... main structure portion 27 ... hook member lc ... blocking members 31, 33 ... pillars 2 ... heat treatment chamber 32 ... end-side workpiece carrier 3 ... support body (supporting device) 34 ... intermediate workpiece carrier 4 ... Pan plate (gap member) 4 Bu 4h ~ 416 ... gap 5, 5 ^ 56 ... small door 41a ... deep groove portion 5a ... component 41b ... upper gap 6 ... lifting mechanism 42. ..Frame plate 7, ... opening and closing mechanism 43 ... embedded panel 8 ... air blower 44 ... combined plate 9 ... inlet channel 45 ... moving body 10 ... high-performance screening program 46 ... Slot 11 ... Exit passage 51 ... Seal 12 ... Cylinder 61 ... Servo motor 20 1232922 62 ... Rotary transmission shaft 77 ... Rotary shaft 63 ... Ball screw cylinder device 77a ... small #wheel 63a ... cylinder 78 ... arm 63b ... ball screw shaft 81 ... motor 64 ... lifting shaft 100 ... moving body 65 ... carriage 101. .. arm 71 ... cylinder 200 ... outer 71a ... rod η 'Πι' η〗 " multi-layer 72 ... floating joints m, mi, m2 ... · Multi-group, multiple, multi-piece 73..shaped part N ... multi-layer 74 ... embedded ridge P ··· processed object 75. Object to be treated) 21