CN1348541A - 用于校正传感器漂移的设备和方法 - Google Patents
用于校正传感器漂移的设备和方法 Download PDFInfo
- Publication number
- CN1348541A CN1348541A CN00806722A CN00806722A CN1348541A CN 1348541 A CN1348541 A CN 1348541A CN 00806722 A CN00806722 A CN 00806722A CN 00806722 A CN00806722 A CN 00806722A CN 1348541 A CN1348541 A CN 1348541A
- Authority
- CN
- China
- Prior art keywords
- sensor
- pressure
- zero pressure
- nominal zero
- correction factor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/008—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00 with calibration coefficients stored in memory
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/02—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation
- G01D3/022—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation having an ideal characteristic, map or correction data stored in a digital memory
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
- G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Technology Law (AREA)
- Measuring Fluid Pressure (AREA)
- Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/257874 | 1999-02-25 | ||
US09/257,874 | 1999-02-25 | ||
US09/257,874 US6237394B1 (en) | 1999-02-25 | 1999-02-25 | Apparatus and method for correcting drift in a sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1348541A true CN1348541A (zh) | 2002-05-08 |
CN1243954C CN1243954C (zh) | 2006-03-01 |
Family
ID=22978149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB008067228A Expired - Lifetime CN1243954C (zh) | 1999-02-25 | 2000-02-15 | 用于校正传感器漂移的设备和方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US6237394B1 (zh) |
EP (1) | EP1163492B1 (zh) |
JP (1) | JP4898984B2 (zh) |
KR (1) | KR20020000768A (zh) |
CN (1) | CN1243954C (zh) |
AT (1) | ATE409847T1 (zh) |
DE (1) | DE60040385D1 (zh) |
HK (1) | HK1046165A1 (zh) |
WO (1) | WO2000050848A1 (zh) |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100374075C (zh) * | 2004-09-22 | 2008-03-12 | 合世生医科技股份有限公司 | 电子血压机自动校正方法及其装置 |
CN100419381C (zh) * | 2003-12-11 | 2008-09-17 | 扎托里乌斯股份公司 | 测量装置 |
WO2012065386A1 (zh) * | 2010-11-15 | 2012-05-24 | 奇瑞汽车股份有限公司 | 一种用于消除传感器漂移的自适应控制方法及装置 |
CN101859109B (zh) * | 2009-04-09 | 2012-05-30 | 上海富辉精密电子有限公司 | 含有压力传感器的设备的控制方法 |
CN101946158B (zh) * | 2008-02-18 | 2013-03-13 | 法国欧陆汽车公司 | 校准测量传感器的方法 |
CN102087123B (zh) * | 2009-12-04 | 2013-05-29 | 财团法人工业技术研究院 | 电容式感测组件的校正装置与方法 |
CN103257017A (zh) * | 2011-12-29 | 2013-08-21 | 中国燃气涡轮研究院 | 一种传感器温度漂移补偿方法 |
CN104296923A (zh) * | 2014-09-22 | 2015-01-21 | 广东合微集成电路技术有限公司 | 一种晶圆级传感器的测试方法 |
CN105277313A (zh) * | 2014-07-17 | 2016-01-27 | 英飞凌科技股份有限公司 | 利用静电力对电容式压力传感器的自校准 |
CN105723463A (zh) * | 2013-11-13 | 2016-06-29 | 弗兰克公司 | 用于使校准测试流线化的配置文件 |
CN105865504A (zh) * | 2015-02-05 | 2016-08-17 | 赫拉胡克公司 | 用于校准至少一个传感器的方法 |
US9817780B2 (en) | 2013-11-13 | 2017-11-14 | Fluke Corporation | Communicator with profiles |
CN107543654A (zh) * | 2016-06-27 | 2018-01-05 | 北京北方华创微电子装备有限公司 | 获取压力规的误差值的方法和装置、压力控制方法和系统 |
CN108398204A (zh) * | 2017-02-08 | 2018-08-14 | 阿自倍尔株式会社 | 压力传感器 |
CN109738116A (zh) * | 2018-12-20 | 2019-05-10 | 苏州能斯达电子科技有限公司 | 一种柔性压力传感器的校准方法和装置 |
CN111060147A (zh) * | 2018-10-16 | 2020-04-24 | 英飞凌科技股份有限公司 | 用于将感测的物理参数进行自校正的设备和方法 |
CN111886482A (zh) * | 2018-03-22 | 2020-11-03 | 赫尔辛基大学 | 传感器校准 |
CN114136537A (zh) * | 2021-11-04 | 2022-03-04 | 歌尔微电子股份有限公司 | 压力传感器 |
CN116481713A (zh) * | 2023-06-21 | 2023-07-25 | 新光维医疗科技(苏州)股份有限公司 | 气体输送系统中压力检测电路的校准方法、系统及介质 |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020026580A (ko) * | 1999-09-03 | 2002-04-10 | 웰스 러셀 씨 | 차량 시트 센서를 위한 캘리브레이션 |
US6450005B1 (en) * | 2000-12-21 | 2002-09-17 | Honeywell International Inc. | Method and apparatus for the calibration and compensation of sensors |
US6884296B2 (en) * | 2002-08-23 | 2005-04-26 | Micron Technology, Inc. | Reactors having gas distributors and methods for depositing materials onto micro-device workpieces |
US20040040503A1 (en) * | 2002-08-29 | 2004-03-04 | Micron Technology, Inc. | Micromachines for delivering precursors and gases for film deposition |
US20040040502A1 (en) * | 2002-08-29 | 2004-03-04 | Micron Technology, Inc. | Micromachines for delivering precursors and gases for film deposition |
JP4244652B2 (ja) * | 2003-02-13 | 2009-03-25 | 株式会社デンソー | 内燃機関の排気浄化装置 |
JP4454964B2 (ja) * | 2003-06-09 | 2010-04-21 | 東京エレクトロン株式会社 | 分圧制御システム及び流量制御システム |
JP3863505B2 (ja) * | 2003-06-20 | 2006-12-27 | 忠弘 大見 | 圧力センサ及び圧力制御装置並びに圧力式流量制御装置の自動零点補正装置 |
US7282239B2 (en) * | 2003-09-18 | 2007-10-16 | Micron Technology, Inc. | Systems and methods for depositing material onto microfeature workpieces in reaction chambers |
US7202696B1 (en) | 2003-09-26 | 2007-04-10 | Cypress Semiconductor Corporation | Circuit for temperature and beta compensation |
US6935156B2 (en) * | 2003-09-30 | 2005-08-30 | Rosemount Inc. | Characterization of process pressure sensor |
US7647886B2 (en) * | 2003-10-15 | 2010-01-19 | Micron Technology, Inc. | Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers |
DE10351313A1 (de) * | 2003-10-31 | 2005-05-25 | Abb Patent Gmbh | Verfahren zur Nullpunktkorrektur eines Messgerätes |
US7258892B2 (en) | 2003-12-10 | 2007-08-21 | Micron Technology, Inc. | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition |
US7906393B2 (en) | 2004-01-28 | 2011-03-15 | Micron Technology, Inc. | Methods for forming small-scale capacitor structures |
WO2005101281A2 (en) * | 2004-04-06 | 2005-10-27 | Tyco Flow Control, Inc. | Field replaceable sensor module and methods of use thereof |
US8133554B2 (en) | 2004-05-06 | 2012-03-13 | Micron Technology, Inc. | Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces |
US7699932B2 (en) | 2004-06-02 | 2010-04-20 | Micron Technology, Inc. | Reactors, systems and methods for depositing thin films onto microfeature workpieces |
EP1880149A4 (en) * | 2005-04-05 | 2012-09-26 | Product Group Llc | INTELLIGENT CONTROL UNIT FOR AIR CONDITIONING AND REFRIGERATION SYSTEMS |
US20060237138A1 (en) * | 2005-04-26 | 2006-10-26 | Micron Technology, Inc. | Apparatuses and methods for supporting microelectronic devices during plasma-based fabrication processes |
JP2009507224A (ja) | 2005-08-31 | 2009-02-19 | ユニヴァーシティー オブ ヴァージニア パテント ファンデーション | 連続グルコースセンサの精度の改善 |
US7653425B2 (en) | 2006-08-09 | 2010-01-26 | Abbott Diabetes Care Inc. | Method and system for providing calibration of an analyte sensor in an analyte monitoring system |
US9119582B2 (en) | 2006-06-30 | 2015-09-01 | Abbott Diabetes Care, Inc. | Integrated analyte sensor and infusion device and methods therefor |
GB2457660A (en) * | 2008-02-19 | 2009-08-26 | Sphere Medical Ltd | Methods of calibrating a sensor in a patient monitoring system |
EP2901153A4 (en) | 2012-09-26 | 2016-04-27 | Abbott Diabetes Care Inc | METHOD AND DEVICE FOR IMPROVING DELAY CORRECTION FUNCTION DURING IN VIVO MEASUREMENT OF ANALYZ CONCENTRATION WITH ANALYZ CONCENTRATION VARIABILITY AND RANGE DATA |
US9804050B2 (en) * | 2013-03-14 | 2017-10-31 | Kulite Semiconductor Products, Inc. | Systems and methods for sensor drift compensation |
WO2016065190A1 (en) | 2014-10-23 | 2016-04-28 | Abbott Diabetes Care Inc. | Electrodes having at least one sensing structure and methods for making and using the same |
WO2021081553A1 (en) * | 2019-10-22 | 2021-04-29 | Nevada Nanotech Systems Inc. | Methods of operating and calibrating a gas sensor, and related gas sensors |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7507567A (nl) * | 1975-06-25 | 1976-12-28 | Goudsche Machinefabriek Bv | Sondeerinrichting voor bodemonderzoek. |
US4051712A (en) * | 1976-08-20 | 1977-10-04 | National Semiconductor Corporation | Pressure transducer auto reference |
IL55622A0 (en) * | 1978-09-22 | 1978-12-17 | Drori Mordeki | Backflushing fluid filter |
GB2034992B (en) * | 1978-11-17 | 1983-09-01 | Burr Brown Res Corp | Analogue-to-digital converter |
DE3143061C2 (de) * | 1981-10-30 | 1986-07-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München | Verfahren zur individuellen Bemessung der Länge der Zugstange und des Segmenthebels eines Überdruckmeßgerätes |
JPS6072529A (ja) * | 1983-09-28 | 1985-04-24 | 住友ベークライト株式会社 | 生体内圧力・温度測定器 |
JP2579143B2 (ja) * | 1984-02-02 | 1997-02-05 | ハネウエル・インコーポレーテッド | プロセス変数センサのディジタル補正の方法およびそのためのプロセス変数発信器 |
JPS61221613A (ja) * | 1985-03-27 | 1986-10-02 | Shimadzu Corp | 計測装置の零点補正装置 |
JPH0676044B2 (ja) * | 1986-02-18 | 1994-09-28 | 住友電気工業株式会社 | 自動車ブレ−キ用センサの零点ドリフト補正法 |
JPH0780415B2 (ja) * | 1988-03-08 | 1995-08-30 | 三菱電機株式会社 | サスペンション制御装置 |
DE4023760C1 (zh) * | 1990-07-26 | 1991-08-29 | Alexander Wiegand Gmbh & Co., 8763 Klingenberg, De | |
US5469750A (en) * | 1991-03-05 | 1995-11-28 | Aradigm Corporation | Method and apparatus for sensing flow in two directions and automatic calibration thereof |
US5287294A (en) * | 1991-05-20 | 1994-02-15 | Micro Component Technology, Inc. | Apparatus and method for automatically calibrating for temperature an input tray of an integrated circuit handler |
US5422478A (en) * | 1992-04-17 | 1995-06-06 | Fiberoptic Sensor Technologies, Inc. | Fiberoptic pressure sensor having drift correction means for insitu calibration |
US5247171A (en) * | 1992-04-17 | 1993-09-21 | Fiberoptic Sensor Technologies, Inc. | Drift correction for fiberoptic pressure sensors |
US5361218A (en) * | 1992-08-11 | 1994-11-01 | Itt Corporation | Self-calibrating sensor |
US5287254A (en) * | 1993-01-25 | 1994-02-15 | Solman Richard D | Illuminated writing table |
AU707544B2 (en) * | 1995-02-28 | 1999-07-15 | Rosemount Inc. | Pressure transmitter with remote seal diaphragm and correction circuit therefor |
US5551301A (en) * | 1995-06-19 | 1996-09-03 | Cardiometrics, Inc. | Piezoresistive pressure transducer circuitry accommodating transducer variability |
US5668320A (en) * | 1995-06-19 | 1997-09-16 | Cardiometrics, Inc. | Piezoresistive pressure transducer circuitry accommodating transducer variability |
-
1999
- 1999-02-25 US US09/257,874 patent/US6237394B1/en not_active Expired - Lifetime
-
2000
- 2000-02-15 WO PCT/US2000/003857 patent/WO2000050848A1/en not_active Application Discontinuation
- 2000-02-15 CN CNB008067228A patent/CN1243954C/zh not_active Expired - Lifetime
- 2000-02-15 KR KR1020017010715A patent/KR20020000768A/ko not_active Application Discontinuation
- 2000-02-15 EP EP00910193A patent/EP1163492B1/en not_active Expired - Lifetime
- 2000-02-15 JP JP2000601399A patent/JP4898984B2/ja not_active Expired - Fee Related
- 2000-02-15 DE DE60040385T patent/DE60040385D1/de not_active Expired - Lifetime
- 2000-02-15 AT AT00910193T patent/ATE409847T1/de not_active IP Right Cessation
-
2002
- 2002-10-23 HK HK02107681A patent/HK1046165A1/xx not_active IP Right Cessation
Cited By (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100419381C (zh) * | 2003-12-11 | 2008-09-17 | 扎托里乌斯股份公司 | 测量装置 |
CN100374075C (zh) * | 2004-09-22 | 2008-03-12 | 合世生医科技股份有限公司 | 电子血压机自动校正方法及其装置 |
CN101946158B (zh) * | 2008-02-18 | 2013-03-13 | 法国欧陆汽车公司 | 校准测量传感器的方法 |
CN101859109B (zh) * | 2009-04-09 | 2012-05-30 | 上海富辉精密电子有限公司 | 含有压力传感器的设备的控制方法 |
CN102087123B (zh) * | 2009-12-04 | 2013-05-29 | 财团法人工业技术研究院 | 电容式感测组件的校正装置与方法 |
WO2012065386A1 (zh) * | 2010-11-15 | 2012-05-24 | 奇瑞汽车股份有限公司 | 一种用于消除传感器漂移的自适应控制方法及装置 |
RU2534847C1 (ru) * | 2010-11-15 | 2014-12-10 | Чери Автомобиль Ко., Лтд. | Способ самонастраивающегося управления для устранения дрейфа датчика и устройство для осуществления указанного способа |
CN103257017B (zh) * | 2011-12-29 | 2015-04-29 | 中国燃气涡轮研究院 | 一种传感器温度漂移补偿方法 |
CN103257017A (zh) * | 2011-12-29 | 2013-08-21 | 中国燃气涡轮研究院 | 一种传感器温度漂移补偿方法 |
US9817780B2 (en) | 2013-11-13 | 2017-11-14 | Fluke Corporation | Communicator with profiles |
CN105723463A (zh) * | 2013-11-13 | 2016-06-29 | 弗兰克公司 | 用于使校准测试流线化的配置文件 |
CN105940653A (zh) * | 2013-11-13 | 2016-09-14 | 弗兰克公司 | 具有简档的通讯器 |
CN105940653B (zh) * | 2013-11-13 | 2019-11-12 | 弗兰克公司 | 配置智能装置的方法和与智能装置通信的仪器 |
US9909908B2 (en) | 2013-11-13 | 2018-03-06 | Fluke Corporation | Profiles for streamlining calibration test |
CN105723463B (zh) * | 2013-11-13 | 2018-05-04 | 弗兰克公司 | 用于使校准测试流线化的配置文件 |
CN105277313A (zh) * | 2014-07-17 | 2016-01-27 | 英飞凌科技股份有限公司 | 利用静电力对电容式压力传感器的自校准 |
CN105277313B (zh) * | 2014-07-17 | 2018-04-06 | 英飞凌科技股份有限公司 | 利用静电力对电容式压力传感器的自校准 |
CN104296923B (zh) * | 2014-09-22 | 2017-01-25 | 广东合微集成电路技术有限公司 | 一种晶圆级传感器的测试方法 |
CN104296923A (zh) * | 2014-09-22 | 2015-01-21 | 广东合微集成电路技术有限公司 | 一种晶圆级传感器的测试方法 |
CN105865504A (zh) * | 2015-02-05 | 2016-08-17 | 赫拉胡克公司 | 用于校准至少一个传感器的方法 |
CN105865504B (zh) * | 2015-02-05 | 2020-03-20 | 赫拉胡克公司 | 用于校准至少一个传感器的方法 |
CN107543654A (zh) * | 2016-06-27 | 2018-01-05 | 北京北方华创微电子装备有限公司 | 获取压力规的误差值的方法和装置、压力控制方法和系统 |
CN108398204A (zh) * | 2017-02-08 | 2018-08-14 | 阿自倍尔株式会社 | 压力传感器 |
CN111886482A (zh) * | 2018-03-22 | 2020-11-03 | 赫尔辛基大学 | 传感器校准 |
CN111060147A (zh) * | 2018-10-16 | 2020-04-24 | 英飞凌科技股份有限公司 | 用于将感测的物理参数进行自校正的设备和方法 |
CN111060147B (zh) * | 2018-10-16 | 2023-11-10 | 英飞凌科技股份有限公司 | 用于将感测的物理参数进行自校正的设备和方法 |
US11866145B2 (en) | 2018-10-16 | 2024-01-09 | Infineon Technologies Ag | Device and method for self-correcting a sensed physical parameter, drone or unmanned aerial vehicle |
CN109738116A (zh) * | 2018-12-20 | 2019-05-10 | 苏州能斯达电子科技有限公司 | 一种柔性压力传感器的校准方法和装置 |
CN109738116B (zh) * | 2018-12-20 | 2023-09-22 | 苏州能斯达电子科技有限公司 | 一种柔性压力传感器的校准方法和装置 |
CN114136537A (zh) * | 2021-11-04 | 2022-03-04 | 歌尔微电子股份有限公司 | 压力传感器 |
CN114136537B (zh) * | 2021-11-04 | 2024-06-11 | 歌尔微电子股份有限公司 | 压力传感器 |
CN116481713A (zh) * | 2023-06-21 | 2023-07-25 | 新光维医疗科技(苏州)股份有限公司 | 气体输送系统中压力检测电路的校准方法、系统及介质 |
CN116481713B (zh) * | 2023-06-21 | 2023-09-08 | 新光维医疗科技(苏州)股份有限公司 | 气体输送系统中压力检测电路的校准方法、系统及介质 |
Also Published As
Publication number | Publication date |
---|---|
EP1163492A4 (en) | 2004-09-22 |
EP1163492B1 (en) | 2008-10-01 |
WO2000050848A1 (en) | 2000-08-31 |
US6237394B1 (en) | 2001-05-29 |
DE60040385D1 (de) | 2008-11-13 |
JP2002538419A (ja) | 2002-11-12 |
JP4898984B2 (ja) | 2012-03-21 |
ATE409847T1 (de) | 2008-10-15 |
CN1243954C (zh) | 2006-03-01 |
HK1046165A1 (en) | 2002-12-27 |
KR20020000768A (ko) | 2002-01-05 |
EP1163492A1 (en) | 2001-12-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1243954C (zh) | 用于校正传感器漂移的设备和方法 | |
RU2138781C1 (ru) | Датчик с улучшенной компенсацией | |
US9395386B2 (en) | Electronic tilt compensation for diaphragm based pressure sensors | |
US4598381A (en) | Pressure compensated differential pressure sensor and method | |
US4765188A (en) | Pressure transducer with integral digital temperature compensation | |
US7478001B2 (en) | Systems and methods for temperature-compensated measuring of a load | |
EP0649010A2 (en) | Method for measuring pressure differences and device for converting displacements | |
CN101846572B (zh) | 一种减小压力传感器基本误差的方法 | |
US20020078732A1 (en) | Method and apparatus for the calibration and compensation of sensors | |
US5877423A (en) | Method for providing temperature compensation for a wheatstone bridge-type pressure sensor | |
CN1122631A (zh) | 具有完整温度信号的应变仪传感器 | |
JPH11501120A (ja) | 遠隔シールダイアフラムを有する圧力トランスミッタおよびその補正回路 | |
EP3144655A1 (en) | Reduction of non-linearity errors in automotive pressure sensors | |
CN108008152A (zh) | 获取mems加速度计的寄生失配电容的方法及装置 | |
EP3391003B1 (en) | Pressure sensor drift detection and correction | |
CN111721466B (zh) | 一种修正压力传感器零点漂移的方法和系统 | |
JP2882786B1 (ja) | センサの信号処理回路 | |
RU2571445C2 (ru) | Способ коррекции измерения напряжения на контактах датчика | |
CN111480060B (zh) | 用于提供经校准的压力换能器的方法 | |
EP0177491B2 (en) | Pressure compensated differential pressure sensor and method | |
EP4007898A1 (en) | Strain gauge type pressure sensing | |
CN219624951U (zh) | 一种高精度片上补偿的压阻压力传感器 | |
JP2000111425A (ja) | デジタルロードセルの温度補償装置 | |
CN116539214A (zh) | 一种高精度片上补偿的压阻压力传感器及其补偿方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SMC CO., LTD. Free format text: FORMER OWNER: REDWOOD MICROSYSTEMS, INC.; SMC CO., LTD. Effective date: 20060721 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20060721 Address after: Tokyo, Japan, Japan Patentee after: SMC Corp. Address before: American California Co-patentee before: SMC Corp. Patentee before: Redwood Microsystems Inc. |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20060301 |