ATE409847T1 - Vorrichtung und verfahren zur driftkorrektur eines sensors - Google Patents

Vorrichtung und verfahren zur driftkorrektur eines sensors

Info

Publication number
ATE409847T1
ATE409847T1 AT00910193T AT00910193T ATE409847T1 AT E409847 T1 ATE409847 T1 AT E409847T1 AT 00910193 T AT00910193 T AT 00910193T AT 00910193 T AT00910193 T AT 00910193T AT E409847 T1 ATE409847 T1 AT E409847T1
Authority
AT
Austria
Prior art keywords
sensor
drift correction
zero pressure
nominal zero
calibration
Prior art date
Application number
AT00910193T
Other languages
English (en)
Inventor
James Harris
Babak Taheri
Errol Arkilic
Original Assignee
Smc Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Smc Kk filed Critical Smc Kk
Application granted granted Critical
Publication of ATE409847T1 publication Critical patent/ATE409847T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G01L27/005—Apparatus for calibrating pressure sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/008—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00 with calibration coefficients stored in memory
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/02—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation
    • G01D3/022—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation having an ideal characteristic, map or correction data stored in a digital memory
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
AT00910193T 1999-02-25 2000-02-15 Vorrichtung und verfahren zur driftkorrektur eines sensors ATE409847T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/257,874 US6237394B1 (en) 1999-02-25 1999-02-25 Apparatus and method for correcting drift in a sensor

Publications (1)

Publication Number Publication Date
ATE409847T1 true ATE409847T1 (de) 2008-10-15

Family

ID=22978149

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00910193T ATE409847T1 (de) 1999-02-25 2000-02-15 Vorrichtung und verfahren zur driftkorrektur eines sensors

Country Status (9)

Country Link
US (1) US6237394B1 (de)
EP (1) EP1163492B1 (de)
JP (1) JP4898984B2 (de)
KR (1) KR20020000768A (de)
CN (1) CN1243954C (de)
AT (1) ATE409847T1 (de)
DE (1) DE60040385D1 (de)
HK (1) HK1046165A1 (de)
WO (1) WO2000050848A1 (de)

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CN101859109B (zh) * 2009-04-09 2012-05-30 上海富辉精密电子有限公司 含有压力传感器的设备的控制方法
CN102087123B (zh) * 2009-12-04 2013-05-29 财团法人工业技术研究院 电容式感测组件的校正装置与方法
CN102062209B (zh) * 2010-11-15 2014-01-22 奇瑞汽车股份有限公司 一种用于消除传感器漂移的自适应控制方法及装置
CN103257017B (zh) * 2011-12-29 2015-04-29 中国燃气涡轮研究院 一种传感器温度漂移补偿方法
WO2014052136A1 (en) 2012-09-26 2014-04-03 Abbott Diabetes Care Inc. Method and apparatus for improving lag correction during in vivo measurement of analyte concentration with analyte concentration variability and range data
US9804050B2 (en) * 2013-03-14 2017-10-31 Kulite Semiconductor Products, Inc. Systems and methods for sensor drift compensation
CN105723463B (zh) * 2013-11-13 2018-05-04 弗兰克公司 用于使校准测试流线化的配置文件
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US9689770B2 (en) * 2014-07-17 2017-06-27 Infineon Technologies Ag Selfcalibration of capacitive pressure sensors with electrostatic forces
CN104296923B (zh) * 2014-09-22 2017-01-25 广东合微集成电路技术有限公司 一种晶圆级传感器的测试方法
US10598624B2 (en) 2014-10-23 2020-03-24 Abbott Diabetes Care Inc. Electrodes having at least one sensing structure and methods for making and using the same
DE102015001500A1 (de) * 2015-02-05 2016-08-11 Hella Kgaa Hueck & Co. Verfahren zur Kalibration mindestens eines Sensors, insbesondere eines Drucksensors, mit mindestens einer signalleitenden Verbindung zu mindestens einem Signalwandler
CN107543654B (zh) * 2016-06-27 2020-02-11 北京北方华创微电子装备有限公司 获取压力规的误差值的方法和装置、压力控制方法和系统
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Also Published As

Publication number Publication date
EP1163492B1 (de) 2008-10-01
US6237394B1 (en) 2001-05-29
JP4898984B2 (ja) 2012-03-21
CN1243954C (zh) 2006-03-01
DE60040385D1 (de) 2008-11-13
EP1163492A4 (de) 2004-09-22
EP1163492A1 (de) 2001-12-19
KR20020000768A (ko) 2002-01-05
JP2002538419A (ja) 2002-11-12
CN1348541A (zh) 2002-05-08
WO2000050848A1 (en) 2000-08-31
HK1046165A1 (en) 2002-12-27

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