CN1314693C - 对硅制品的氟化学处理 - Google Patents

对硅制品的氟化学处理 Download PDF

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Publication number
CN1314693C
CN1314693C CNB038164051A CN03816405A CN1314693C CN 1314693 C CN1314693 C CN 1314693C CN B038164051 A CNB038164051 A CN B038164051A CN 03816405 A CN03816405 A CN 03816405A CN 1314693 C CN1314693 C CN 1314693C
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CN
China
Prior art keywords
silicon
silicon substrate
minutes
solution
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB038164051A
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English (en)
Chinese (zh)
Other versions
CN1668528A (zh
Inventor
T·D·邓巴
L·A·扎泽拉
M·J·佩勒莱特
L·D·宝德曼
G·G·I·摩尔
M·A·古拉
C·L·S·艾尔斯伯恩德
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of CN1668528A publication Critical patent/CN1668528A/zh
Application granted granted Critical
Publication of CN1314693C publication Critical patent/CN1314693C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0096—For avoiding stiction when the device is in use, i.e. after manufacture has been completed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0005—Anti-stiction coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Micromachines (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
CNB038164051A 2002-05-31 2003-04-01 对硅制品的氟化学处理 Expired - Fee Related CN1314693C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/160,738 2002-05-31
US10/160,738 US6841079B2 (en) 2002-05-31 2002-05-31 Fluorochemical treatment for silicon articles

Publications (2)

Publication Number Publication Date
CN1668528A CN1668528A (zh) 2005-09-14
CN1314693C true CN1314693C (zh) 2007-05-09

Family

ID=29709726

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB038164051A Expired - Fee Related CN1314693C (zh) 2002-05-31 2003-04-01 对硅制品的氟化学处理

Country Status (7)

Country Link
US (1) US6841079B2 (https=)
EP (1) EP1513763A2 (https=)
JP (1) JP2005528234A (https=)
CN (1) CN1314693C (https=)
AU (1) AU2003226168A1 (https=)
CA (1) CA2487715A1 (https=)
WO (1) WO2003101888A2 (https=)

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CN110475602B (zh) 2016-11-17 2022-05-03 特拉波雷技术有限公司 含有高分子量亲水性添加剂的均孔自组装嵌段共聚物膜及其制备方法
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Also Published As

Publication number Publication date
EP1513763A2 (en) 2005-03-16
CA2487715A1 (en) 2003-12-11
JP2005528234A (ja) 2005-09-22
WO2003101888A3 (en) 2004-09-10
AU2003226168A1 (en) 2003-12-19
CN1668528A (zh) 2005-09-14
US6841079B2 (en) 2005-01-11
WO2003101888A2 (en) 2003-12-11
US20030226818A1 (en) 2003-12-11

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