CN1314693C - 对硅制品的氟化学处理 - Google Patents

对硅制品的氟化学处理 Download PDF

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Publication number
CN1314693C
CN1314693C CNB038164051A CN03816405A CN1314693C CN 1314693 C CN1314693 C CN 1314693C CN B038164051 A CNB038164051 A CN B038164051A CN 03816405 A CN03816405 A CN 03816405A CN 1314693 C CN1314693 C CN 1314693C
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CN
China
Prior art keywords
silicon
silicon substrate
minutes
solution
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB038164051A
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English (en)
Chinese (zh)
Other versions
CN1668528A (zh
Inventor
T·D·邓巴
L·A·扎泽拉
M·J·佩勒莱特
L·D·宝德曼
G·G·I·摩尔
M·A·古拉
C·L·S·艾尔斯伯恩德
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of CN1668528A publication Critical patent/CN1668528A/zh
Application granted granted Critical
Publication of CN1314693C publication Critical patent/CN1314693C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0096—For avoiding stiction when the device is in use, i.e. after manufacture has been completed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0005—Anti-stiction coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Micromachines (AREA)
CNB038164051A 2002-05-31 2003-04-01 对硅制品的氟化学处理 Expired - Fee Related CN1314693C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/160,738 2002-05-31
US10/160,738 US6841079B2 (en) 2002-05-31 2002-05-31 Fluorochemical treatment for silicon articles

Publications (2)

Publication Number Publication Date
CN1668528A CN1668528A (zh) 2005-09-14
CN1314693C true CN1314693C (zh) 2007-05-09

Family

ID=29709726

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB038164051A Expired - Fee Related CN1314693C (zh) 2002-05-31 2003-04-01 对硅制品的氟化学处理

Country Status (7)

Country Link
US (1) US6841079B2 (https=)
EP (1) EP1513763A2 (https=)
JP (1) JP2005528234A (https=)
CN (1) CN1314693C (https=)
AU (1) AU2003226168A1 (https=)
CA (1) CA2487715A1 (https=)
WO (1) WO2003101888A2 (https=)

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MX2019005774A (es) 2016-11-17 2020-02-07 Terapore Tech Inc Películas isoporosas de copolímero de bloques autoensamblados que contienen aditivos hidrofílicos de alto peso molecular y métodos para hacer las mismas.
WO2018156731A1 (en) 2017-02-22 2018-08-30 Dorin Rachel M Ligand bound mbp membranes, uses and method of manufacturing
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CN111107924B (zh) 2017-09-19 2022-12-27 特拉波雷技术有限公司 耐化学品的均孔交联嵌段共聚物结构
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US10626013B2 (en) * 2018-04-04 2020-04-21 Canon Kabushiki Kaisha Anti-wetting coating for Si-based MEMS fluidic device, and method of application of same
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Also Published As

Publication number Publication date
WO2003101888A3 (en) 2004-09-10
CA2487715A1 (en) 2003-12-11
JP2005528234A (ja) 2005-09-22
EP1513763A2 (en) 2005-03-16
WO2003101888A2 (en) 2003-12-11
US6841079B2 (en) 2005-01-11
AU2003226168A1 (en) 2003-12-19
CN1668528A (zh) 2005-09-14
US20030226818A1 (en) 2003-12-11

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Granted publication date: 20070509

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