AU2003226168A1 - Fluorochemical treatment for silicon articles - Google Patents

Fluorochemical treatment for silicon articles

Info

Publication number
AU2003226168A1
AU2003226168A1 AU2003226168A AU2003226168A AU2003226168A1 AU 2003226168 A1 AU2003226168 A1 AU 2003226168A1 AU 2003226168 A AU2003226168 A AU 2003226168A AU 2003226168 A AU2003226168 A AU 2003226168A AU 2003226168 A1 AU2003226168 A1 AU 2003226168A1
Authority
AU
Australia
Prior art keywords
fluorochemical treatment
silicon articles
articles
silicon
fluorochemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003226168A
Other languages
English (en)
Inventor
Larry D. Boardman
Timothy D. Dunbar
Cheryl L. S. Elsbernd
Miguel A. Guerra
George G. I. Moore
Mark J. Pellerite
Lawrence A. Zazzera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of AU2003226168A1 publication Critical patent/AU2003226168A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0096—For avoiding stiction when the device is in use, i.e. after manufacture has been completed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0005—Anti-stiction coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Micromachines (AREA)
AU2003226168A 2002-05-31 2003-04-01 Fluorochemical treatment for silicon articles Abandoned AU2003226168A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/160,738 2002-05-31
US10/160,738 US6841079B2 (en) 2002-05-31 2002-05-31 Fluorochemical treatment for silicon articles
PCT/US2003/009894 WO2003101888A2 (en) 2002-05-31 2003-04-01 Fluorochemical treatment for silicon articles

Publications (1)

Publication Number Publication Date
AU2003226168A1 true AU2003226168A1 (en) 2003-12-19

Family

ID=29709726

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003226168A Abandoned AU2003226168A1 (en) 2002-05-31 2003-04-01 Fluorochemical treatment for silicon articles

Country Status (7)

Country Link
US (1) US6841079B2 (https=)
EP (1) EP1513763A2 (https=)
JP (1) JP2005528234A (https=)
CN (1) CN1314693C (https=)
AU (1) AU2003226168A1 (https=)
CA (1) CA2487715A1 (https=)
WO (1) WO2003101888A2 (https=)

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EP1694731B1 (en) * 2003-09-23 2012-03-28 University Of North Carolina At Chapel Hill Photocurable perfluoropolyethers for use as novel materials in microfluidic devices
AU2005220150A1 (en) * 2004-02-13 2005-09-15 The University Of North Carolina At Chapel Hill Functional materials and novel methods for the fabrication of microfluidic devices
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US20050249940A1 (en) * 2004-05-07 2005-11-10 3M Innovative Properties Company Fluoropolyether poly(meth)acryl compounds
US7342080B2 (en) * 2004-05-07 2008-03-11 3M Innovative Properties Company Polymerizable compositions, methods of making the same, and composite articles therefrom
US7101618B2 (en) * 2004-05-07 2006-09-05 3M Innovative Properties Company Article comprising fluorochemical surface layer
US7288619B2 (en) * 2004-05-07 2007-10-30 3M Innovative Properties Company Fluorinated polyether polyamine and method of making the same
US20050249956A1 (en) * 2004-05-07 2005-11-10 Naiyong Jing Stain repellent optical hard coating
US20050272599A1 (en) * 2004-06-04 2005-12-08 Kenneth Kramer Mold release layer
US7682771B2 (en) * 2004-12-29 2010-03-23 3M Innovative Properties Company Compositions containing photosensitive fluorochemical and uses thereof
US7580174B2 (en) 2005-11-23 2009-08-25 Miradia, Inc. Anti-stiction gas-phase lubricant for micromechanical systems
US7471439B2 (en) 2005-11-23 2008-12-30 Miradia, Inc. Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
US7616370B2 (en) * 2005-11-23 2009-11-10 Miradia, Inc. Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US7723812B2 (en) 2005-11-23 2010-05-25 Miradia, Inc. Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US7463404B2 (en) * 2005-11-23 2008-12-09 Miradia, Inc. Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US7618682B2 (en) * 2006-09-25 2009-11-17 Hewlett-Packard Development Company, L.P. Method for providing an anti-stiction coating on a metal surface
US8096665B2 (en) * 2006-10-11 2012-01-17 Miradia, Inc. Spatially offset multi-imager-panel architecture for projecting an image
EP2356082B1 (en) * 2008-10-17 2021-03-17 Surfix BV Photochemical modification of solid materials
EP2638107A1 (en) 2010-11-10 2013-09-18 3M Innovative Properties Company Hydrophobic fluorinated coatings
SG194779A1 (en) 2011-05-04 2013-12-30 Univ Cornell Multiblock copolymer films, methods of making same, and uses thereof
EP2888778A1 (en) 2012-08-21 2015-07-01 Kratos LLC Group iva functionalized particles and methods of use thereof
US9290380B2 (en) 2012-12-18 2016-03-22 Freescale Semiconductor, Inc. Reducing MEMS stiction by deposition of nanoclusters
FR3000069B1 (fr) * 2012-12-21 2015-02-06 Bluestar Silicones France Procede d'hydrosilylation d'un siloxane photocatalyse par un compose polyoxometallate
JP6378203B2 (ja) * 2013-12-13 2018-08-22 Ａｇｃ株式会社 含フッ素エーテル組成物、その製造方法、コーティング液、表面処理層を有する基材およびその製造方法
CA2939114A1 (en) * 2014-02-21 2015-08-27 Kratos LLC Nanosilicon material preparation for functionalized group iva particle frameworks
KR101719340B1 (ko) 2016-01-27 2017-03-23 제이에스아이실리콘주식회사 지문 돋보임 방지 피막용 친수성 및 친유성 기 실리콘 결합제 및 이의 제조 방법
WO2017189697A1 (en) 2016-04-28 2017-11-02 Terapore Technologies, Inc. Charged isoporous materials for electrostatic separations
BR112019000112A2 (pt) 2016-07-05 2019-04-09 Kratos LLC partículas do grupo iva micrônicas e sub-micrônicas pré-litiadas passivadas e métodos de preparação das mesmas
MX2019005774A (es) 2016-11-17 2020-02-07 Terapore Tech Inc Películas isoporosas de copolímero de bloques autoensamblados que contienen aditivos hidrofílicos de alto peso molecular y métodos para hacer las mismas.
WO2018156731A1 (en) 2017-02-22 2018-08-30 Dorin Rachel M Ligand bound mbp membranes, uses and method of manufacturing
WO2018183909A1 (en) 2017-03-31 2018-10-04 Kratos LLC Precharged negative electrode material for secondary battery
CA3062637A1 (en) * 2017-05-12 2018-11-15 Terapore Technologies, Inc. Chemically resistant fluorinated multiblock polymer structures, methods of manufacturing and use
CN111107924B (zh) 2017-09-19 2022-12-27 特拉波雷技术有限公司 耐化学品的均孔交联嵌段共聚物结构
MX2020009506A (es) 2018-03-12 2021-01-15 Terapore Tech Inc Materiales de copolímero de bloques asimétricos mesoporosos isoporosos con macrohuecos y método para fabricarlo.
US10626013B2 (en) * 2018-04-04 2020-04-21 Canon Kabushiki Kaisha Anti-wetting coating for Si-based MEMS fluidic device, and method of application of same
KR20180099609A (ko) 2018-08-29 2018-09-05 제이에스아이실리콘주식회사 플루오로알킬기 또는 퍼플루오로알킬 이더기 치환 비스(실릴)알칸 실리콘 결합제 및 그의 제조방법
CN111074349A (zh) * 2019-07-12 2020-04-28 杭州师范大学 一种光催化含氟单体修饰制备超疏水多孔硅的方法
CN117800801B (zh) * 2023-12-19 2026-03-27 河南师范大学 一种合成单氟烯烃类化合物的方法

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US4094911A (en) * 1969-03-10 1978-06-13 Minnesota Mining And Manufacturing Company Poly(perfluoroalkylene oxide) derivatives
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Also Published As

Publication number Publication date
WO2003101888A3 (en) 2004-09-10
CA2487715A1 (en) 2003-12-11
CN1314693C (zh) 2007-05-09
JP2005528234A (ja) 2005-09-22
EP1513763A2 (en) 2005-03-16
WO2003101888A2 (en) 2003-12-11
US6841079B2 (en) 2005-01-11
CN1668528A (zh) 2005-09-14
US20030226818A1 (en) 2003-12-11

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase