CN1310090C - 新共聚物及光致抗蚀组合物 - Google Patents

新共聚物及光致抗蚀组合物 Download PDF

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Publication number
CN1310090C
CN1310090C CNB028069366A CN02806936A CN1310090C CN 1310090 C CN1310090 C CN 1310090C CN B028069366 A CNB028069366 A CN B028069366A CN 02806936 A CN02806936 A CN 02806936A CN 1310090 C CN1310090 C CN 1310090C
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CN
China
Prior art keywords
groups
photoresist composition
polymer
polymers
photoacid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB028069366A
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English (en)
Chinese (zh)
Other versions
CN1498361A (zh
Inventor
G·G·巴克雷
R·J·卡瓦纳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SIPOREI CORP
Original Assignee
SIPOREI CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SIPOREI CORP filed Critical SIPOREI CORP
Publication of CN1498361A publication Critical patent/CN1498361A/zh
Application granted granted Critical
Publication of CN1310090C publication Critical patent/CN1310090C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
CNB028069366A 2001-02-25 2002-02-25 新共聚物及光致抗蚀组合物 Expired - Fee Related CN1310090C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US27140401P 2001-02-25 2001-02-25
US60/271,404 2001-02-25

Publications (2)

Publication Number Publication Date
CN1498361A CN1498361A (zh) 2004-05-19
CN1310090C true CN1310090C (zh) 2007-04-11

Family

ID=23035399

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028069366A Expired - Fee Related CN1310090C (zh) 2001-02-25 2002-02-25 新共聚物及光致抗蚀组合物

Country Status (7)

Country Link
US (1) US20020187420A1 (enExample)
JP (1) JP2004524565A (enExample)
KR (1) KR20040030511A (enExample)
CN (1) CN1310090C (enExample)
AU (1) AU2002255598A1 (enExample)
TW (1) TWI293402B (enExample)
WO (1) WO2002069044A2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3890989B2 (ja) * 2002-01-25 2007-03-07 住友化学株式会社 レジスト組成物
US7488565B2 (en) 2003-10-01 2009-02-10 Chevron U.S.A. Inc. Photoresist compositions comprising diamondoid derivatives
US7208334B2 (en) * 2004-03-31 2007-04-24 Kabushiki Kaisha Toshiba Method of manufacturing semiconductor device, acid etching resistance material and copolymer
JP4279237B2 (ja) * 2004-05-28 2009-06-17 東京応化工業株式会社 ポジ型レジスト組成物及びレジストパターン形成方法
US20060172223A1 (en) * 2004-11-24 2006-08-03 Rohm And Haas Electronic Materials Llc Photoresist compositions
JP5031310B2 (ja) * 2006-01-13 2012-09-19 東京応化工業株式会社 レジスト組成物およびレジストパターン形成方法
JP5782283B2 (ja) * 2010-03-31 2015-09-24 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ 新規のポリマーおよびフォトレジスト組成物

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1224728A (zh) * 1997-12-02 1999-08-04 三星电子株式会社 光敏聚合物和其化学放大抗蚀组合物
EP0982628A2 (en) * 1998-08-26 2000-03-01 Sumitomo Chemical Company, Limited A chemical amplifying type positive resist composition
CN1261171A (zh) * 1999-01-18 2000-07-26 住友化学工业株式会社 化学放大型正光刻胶组合物
CN1268679A (zh) * 1999-03-29 2000-10-04 日本电气株式会社 化学增强型光刻胶
CN1312488A (zh) * 2000-01-24 2001-09-12 住友化学工业株式会社 化学放大型正光刻胶组合物

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6103445A (en) * 1997-03-07 2000-08-15 Board Of Regents, The University Of Texas System Photoresist compositions comprising norbornene derivative polymers with acid labile groups
US6610465B2 (en) * 2001-04-11 2003-08-26 Clariant Finance (Bvi) Limited Process for producing film forming resins for photoresist compositions

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1224728A (zh) * 1997-12-02 1999-08-04 三星电子株式会社 光敏聚合物和其化学放大抗蚀组合物
EP0982628A2 (en) * 1998-08-26 2000-03-01 Sumitomo Chemical Company, Limited A chemical amplifying type positive resist composition
CN1261171A (zh) * 1999-01-18 2000-07-26 住友化学工业株式会社 化学放大型正光刻胶组合物
CN1268679A (zh) * 1999-03-29 2000-10-04 日本电气株式会社 化学增强型光刻胶
CN1312488A (zh) * 2000-01-24 2001-09-12 住友化学工业株式会社 化学放大型正光刻胶组合物

Also Published As

Publication number Publication date
US20020187420A1 (en) 2002-12-12
WO2002069044A2 (en) 2002-09-06
KR20040030511A (ko) 2004-04-09
TWI293402B (en) 2008-02-11
WO2002069044A3 (en) 2003-02-27
AU2002255598A1 (en) 2002-09-12
CN1498361A (zh) 2004-05-19
JP2004524565A (ja) 2004-08-12

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20070411

Termination date: 20100225