CN1288713C - 加热大气反应器的加热系统及方法 - Google Patents

加热大气反应器的加热系统及方法 Download PDF

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Publication number
CN1288713C
CN1288713C CNB028081706A CN02808170A CN1288713C CN 1288713 C CN1288713 C CN 1288713C CN B028081706 A CNB028081706 A CN B028081706A CN 02808170 A CN02808170 A CN 02808170A CN 1288713 C CN1288713 C CN 1288713C
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CN
China
Prior art keywords
reactor
temperature
heating
deposition
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB028081706A
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English (en)
Chinese (zh)
Other versions
CN1559079A (zh
Inventor
H·伯恩哈德特
T·塞德曼恩
M·斯塔德特米勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies SC300 GmbH and Co KG
ASML US Inc
Original Assignee
Infineon Technologies SC300 GmbH and Co KG
ASML US Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies SC300 GmbH and Co KG, ASML US Inc filed Critical Infineon Technologies SC300 GmbH and Co KG
Publication of CN1559079A publication Critical patent/CN1559079A/zh
Application granted granted Critical
Publication of CN1288713C publication Critical patent/CN1288713C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90—Thermal treatments, e.g. annealing or sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/005—Oxydation

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
CNB028081706A 2001-04-12 2002-04-11 加热大气反应器的加热系统及方法 Expired - Fee Related CN1288713C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP01109146.2 2001-04-12
EP01109164A EP1256973B1 (en) 2001-04-12 2001-04-12 Heating system and method for heating a reactor
EP01109164.2 2001-04-12

Publications (2)

Publication Number Publication Date
CN1559079A CN1559079A (zh) 2004-12-29
CN1288713C true CN1288713C (zh) 2006-12-06

Family

ID=8177130

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028081706A Expired - Fee Related CN1288713C (zh) 2001-04-12 2002-04-11 加热大气反应器的加热系统及方法

Country Status (8)

Country Link
US (1) US6802712B2 (https=)
EP (1) EP1256973B1 (https=)
JP (1) JP2004529497A (https=)
KR (1) KR100561120B1 (https=)
CN (1) CN1288713C (https=)
DE (1) DE60108078T2 (https=)
TW (1) TW541576B (https=)
WO (1) WO2002084711A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7220312B2 (en) * 2002-03-13 2007-05-22 Micron Technology, Inc. Methods for treating semiconductor substrates
FR2847714B1 (fr) 2002-11-27 2005-02-18 Soitec Silicon On Insulator Procede et dispositif de recuit de tranche de semiconducteur
FR2858715B1 (fr) 2003-08-04 2005-12-30 Soitec Silicon On Insulator Procede de detachement de couche de semiconducteur
US8053324B2 (en) * 2007-08-01 2011-11-08 Texas Instruments Incorporated Method of manufacturing a semiconductor device having improved transistor performance
CN102969220A (zh) * 2011-09-02 2013-03-13 上海华虹Nec电子有限公司 使用炉管进行工艺加工的方法
US10741426B2 (en) * 2017-09-27 2020-08-11 Taiwan Semiconductor Manufacturing Co., Ltd. Method for controlling temperature of furnace in semiconductor fabrication process
EP3647459A1 (en) * 2018-10-31 2020-05-06 Petroceramics S.p.A. Method and an assembly by chemical vapor infiltration of porous components
TWI750749B (zh) * 2020-07-28 2021-12-21 華邦電子股份有限公司 化學氣相沉積製程及膜層的形成方法
CN114308947A (zh) * 2020-09-30 2022-04-12 中国科学院微电子研究所 多晶硅生产设备的清洗方法、清洗装置及多晶硅生产设备
CN112941489A (zh) * 2021-01-27 2021-06-11 长鑫存储技术有限公司 薄膜沉积方法以及薄膜沉积装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960001160B1 (ko) * 1987-07-31 1996-01-19 도오교오 에레구토론 가부시끼가이샤 가열로(加熱爐)
US5259883A (en) * 1988-02-16 1993-11-09 Kabushiki Kaisha Toshiba Method of thermally processing semiconductor wafers and an apparatus therefor
US5436172A (en) * 1991-05-20 1995-07-25 Texas Instruments Incorporated Real-time multi-zone semiconductor wafer temperature and process uniformity control system
US5387557A (en) * 1991-10-23 1995-02-07 F. T. L. Co., Ltd. Method for manufacturing semiconductor devices using heat-treatment vertical reactor with temperature zones
US5418885A (en) * 1992-12-29 1995-05-23 North Carolina State University Three-zone rapid thermal processing system utilizing wafer edge heating means
US5775889A (en) * 1994-05-17 1998-07-07 Tokyo Electron Limited Heat treatment process for preventing slips in semiconductor wafers
WO1999059196A1 (en) * 1998-05-11 1999-11-18 Semitool, Inc. Temperature control system for a thermal reactor
US6548378B1 (en) 1998-12-17 2003-04-15 Vishay Semiconductor Itzehoe Gmbh Method of boron doping wafers using a vertical oven system
WO2001061736A1 (fr) * 2000-02-18 2001-08-23 Tokyo Electron Limited Procede de traitement d'une plaquette
US6495805B2 (en) * 2000-06-30 2002-12-17 Tokyo Electron Limited Method of determining set temperature trajectory for heat treatment system
US6572371B1 (en) * 2002-05-06 2003-06-03 Messier-Bugatti Gas preheater and process for controlling distribution of preheated reactive gas in a CVI furnace for densification of porous annular substrates

Also Published As

Publication number Publication date
EP1256973A1 (en) 2002-11-13
US20040157183A1 (en) 2004-08-12
KR20040018352A (ko) 2004-03-03
DE60108078T2 (de) 2005-12-01
EP1256973B1 (en) 2004-12-29
US6802712B2 (en) 2004-10-12
DE60108078D1 (de) 2005-02-03
TW541576B (en) 2003-07-11
JP2004529497A (ja) 2004-09-24
CN1559079A (zh) 2004-12-29
KR100561120B1 (ko) 2006-03-15
WO2002084711A1 (en) 2002-10-24

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Granted publication date: 20061206