CN1281212A - Technology for making piezoelectric ceramic sounder medium - Google Patents
Technology for making piezoelectric ceramic sounder medium Download PDFInfo
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- CN1281212A CN1281212A CN 00123845 CN00123845A CN1281212A CN 1281212 A CN1281212 A CN 1281212A CN 00123845 CN00123845 CN 00123845 CN 00123845 A CN00123845 A CN 00123845A CN 1281212 A CN1281212 A CN 1281212A
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- piezoelectric ceramic
- sounder
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Abstract
A piezoelectric seramic sounder medium is prepared from Pb3O4 (55-75 wt.%), ZrO2 (11-23.5), TiO2 (7.5-20.5), Sb2O5 (0-5), Nb2O5 (0-5), SrCO3 (0-15), MgO (0-2.5), ZnO (0.-2.0), Bi2O3 (0-1) and La2O3 (0-2) through warm vibratory grinding, doctor blading for filming, further laminating and film rolling and sintering at 1080-1280 deg.C. Its advantages are thin thickness (15 microns), high insulating resistance (over to the power 9 ohms), high radical mechanoelectric coupling coefficient (65%) and dieletric constant of 600-5500.
Description
The invention relates to the manufacture method of piezoelectric ceramic sounder medium, more particularly, the invention relates to manufacturing is the method for the ultrathin piezoelectric ceramic sounder medium of base with the lead zirconate titanate.
Piezoelectric ceramic sounder comprises electric monophone, piezoelectric buzzer, piezoelectric sensor, piezoelectricity news Chinese percussion instrument etc., and range of application is very extensive.The same an urgent demand miniaturization of piezoelectric ceramic sounder and chip type with electronic devices and components such as electric capacity, resistance, and realize that the key of piezoelectric ceramic sounder miniaturization and chip type is the ceramic dielectric that can make ultra-thin (less than 50 microns).
The employed medium of piezoelectric ceramic sounder normally lead zirconate titanate is the dielectric material of base.
The conventional fabrication processes of piezoelectric ceramic sounder is, with the raw material ball mill grinding, adds adhesive by prescription, rolls film and becomes green sheet, and sintering in air can obtain fine and close porcelain body.Just can test its electrical property after by electrode polarization on the porcelain body.
The shortcoming of above-mentioned manufacture method is, roll ceramic dielectric that embrane method makes can't reach enough thin (usually greater than 100 microns), consistency of thickness relatively poor (cause device electrical performance difference big), production efficiency lower, can't realize piezoelectric ceramic sounder miniaturization and chip type.
The objective of the invention is to overcome shortcoming of the prior art, a kind of new method of making the piezo-electric ceramic sounding medium is provided.The prepared medium of this method not only thickness can be enough thin (the thinnest reach 15 microns), consistency of thickness is good; Porcelain body density height, electrical property excellence; Production efficiency improves greatly, is conducive to large-scale production; Piezoelectric ceramic sounder miniaturization and chip sheet have successfully been realized.
The manufacture method of piezoelectric ceramic sounder medium of the present invention comprises:
1, the prescription of ceramic dielectric (weight ratio): Pb
3O
4Be 55.0-75.0, ZrO
2Be 11.0-23.5, TiO
2Be 7.5-20.5, Sb
2O
5Be 0-5.0, Nb
2O
5Be 0-5.0, SrCO
3Be 0-15.0, MgO is 0-2.5, and ZnO is 0-2.0, Bi
2O
3Be 0-1.0, La
2O
3Be 0-2.0;
2, the above-mentioned powder with granularity 0.5-2 micron carries out the wet method vibration, adds organic bond, makes the suspension colloidal mixture, and casting film-forming behind ball milling, casting films thickness are the 10-100 micron;
3, the deielectric-coating with above-mentioned flow casting molding builds up the multilayered medium body;
4, above-mentioned multilayered medium body is rolled film, be washed into disk then;
5, above-mentioned disk base substrate 20-300 sheet is superimposed neat, lie against on the load bearing board, at 1080-1280 ℃ of following sintering, be incubated 0.5-2.5 hour.
Described wet method vibration is used zirconia ball in the nylon jar vibration 1-2 hour, and described load bearing board is made by zirconia.
The prescription of above-mentioned ceramic dielectric adopts following three kinds of schemes:
1.Pb
3O
4Be 60.0-75.0, ZrO
2Be 15.0-23.5, TiO
2Be 7.5-18.0, Sb
2O
5Be 0.2-5.0, Nb
2O
5Be 0.2-5.0, SrCO
3Be 0-8.0, MgO is 0.2-2.5;
2.Pb
3O
4Be 55.0-68.0, ZrO
2Be 11.0-23.5, TiO
2Be 10.0-20.5, Sb
2O
5Be 0.2-5.0, Nb
2O
5Be 0.2-5.0, SrCO
3Be 3.0-12.0;
3.Pb
3O
4Be 60.0-70.0, ZrO
2Be 11.0-22.5, TiO
2Be 10.0-20.5, SrCO
3Be 0.5-8.0, Nb
2O
5Be 0.5-5.0, MgO is 0.5-2.5; ZnO is 0.5-2.0, Bi
2O
3Be 0-1.0, La
2O
3Be 0.2-2.0.
The present invention compared with prior art has following advantage:
1, ceramic dielectric can make enough thin (the thinnest reach 15 microns), is conducive to miniaturization and the chip type of piezoelectric ceramic sounder.
2, the uniformity of ceramic dielectric thickness is fine, and can select arbitrarily by the lamination number that changes casting films.
3, the system membrane efficiency improves greatly, helps large-scale production.
4, ceramic dielectric density height, electrical property excellence and high conformity.
5, cost is lower, and main raw material(s) adopts capacitor stage purity can produce ceramic dielectric of the present invention.
In conjunction with the embodiments the present invention is further described now:
Table 1-3 provides three groups of embodiment of the present invention prescription of totally 9 samples.
First group of embodiment (sample 1-3) has the low-k characteristic; Second group of embodiment (sample 4-6) has medium specific inductive capacity characteristic; The 3rd group of embodiment (sample 7-9) has the high-k characteristic.
Table 1
| Specimen coding | Principal ingredient (weight) | |||||||
| Pb 3O 4 | ?ZrO 2 | ?TiO 2 | ?MgO | ?Nb 2O 5 | ?Sb 2O 5 | ?SrCO 3 | ||
| ?1 | ?68．2 | ?20．7 | ?7．9 | ?0．5 | ?0．3 | ?0．3 | ?2．1 | |
| ?2 | ?68．2 | ?18．8 | ?9．5 | ?0．3 | ?0．6 | ?0．5 | ?2．1 | |
| ?3 | ?68．2 | ?19．7 | ?8．3 | ?0．8 | ?0．7 | ?0．2 | ?2．1 | |
Table 2
| Specimen coding | Main component (weight) | |||||
| Pb 3O 4 | ZrO 2 | TiO 2 | Nb 2O 5 | Sb 2O 5 | SrCO 3 | |
| 4 | 61.3 | 22.4 | 10.5 | 0.3 | 0.4 | 5.1 |
| 5 | 61.3 | 22.8 | 10.1 | 0.5 | 0.2 | 5.1 |
| 6 | 61.3 | 21.8 | 11.3 | 0.3 | 0.2 | 5.1 |
Table 3
| Specimen coding | Principal ingredient (weight) | |||||||
| Pb 3O 4 | ?ZrO 2 | ?TiO 2 | MgO | ?SrCO 3 | ?ZnO | ?Bi 2O 3 | ?La 2O 3 | |
| ?7 | ?63．7 | ?13．5 | ?12．6 | ?1．8 | ?3．4 | ?1．2 | ?0．5 | ?0．5 |
| ?8 | ?63．7 | ?12．0 | ?15．1 | ?1．5 | ?3．4 | ?1．6 | ?0．3 | ?0．4 |
| ?9 | ?63．7 | ?11．0 | ?15．2 | ?2．0 | ?2．5 | ?2．0 | ?0．5 | ?0．8 |
The primary raw material of above-mentioned prescription adopts capacitor stage purity.Powder granularity is about 1 micron by above-mentioned prescription mixes with distilled water in the nylon jar, with zirconia ball vibration 2 hours, adds bonding agent, and ball milling is 8 hours then, makes the suspension colloidal mixture, and casting film-forming, the thickness of casting films are the 10-50 micron; Above-mentioned casting films is built up the multilayered medium body, roll film again, be washed into disk; Above-mentioned disk base substrate 20-300 sheet is superimposed neat, lie against on the load bearing board, sample 1-3 is incubated 1 hour at 1180 ℃ of following sintering; Sample 4-6 is incubated 1 hour at 1220 ℃ of following sintering. and sample 7-9 is incubated 1 hour at 1250 ℃ of following sintering.
The electrical property of above-mentioned each sample is shown in the table 4.
Table 4
| Specimen coding | Electromechanical coupling factor (Kp%) | Insulation resistance (R10 9Ω) | Specific inductive capacity (ε 33 T／ε 0) | Dielectric loss (tg δ 10 -4) | Piezoelectric constant (d 13PC／N) |
| 1 | ??66．5 | ????5．8 | ????1480 | ????120 | ????380 |
| ?2 | ??67．4 | ????6．2 | ????1350 | ????140 | ????380 |
| ?3 | ??68．2 | ????5．5 | ????1400 | ????120 | ????400 |
| ?4 | ??70．5 | ????5．6 | ????3000 | ????160 | ????480 |
| ?5 | ??69．8 | ????6．4 | ????3100 | ????150 | ????450 |
| ?6 | ??72．7 | ????6．6 | ????3400 | ????120 | ????520 |
| ?7 | ??65．5 | ????5．8 | ????5100 | ????180 | ????560 |
| ?8 | ??66．0 | ????6．0 | ????4800 | ????200 | ????520 |
| ?9 | ??65．8 | ????6．7 | ????4800 | ????160 | ????550 |
Claims (6)
1, a kind of manufacture method of piezoelectric ceramic sounder medium is characterized in that, this method comprises:
(1) prescription of described ceramic dielectric (weight ratio): Pb
3O
4Be 55.0-75.0, ZrO
2Be 11.0-23.5, TiO
2Be 7.5-20.5, Sb
2O
5Be 0-5.0, Nb
2O
5Be 0-5.0, SrCO
3Be 0-15.0, MgO is 0-2.5, and ZnO is 0-2.0, Bi
2O
3Be 0-1.0, La
2O
3Be 0-2.0;
(2), the above-mentioned powder of granularity 0.5-2 micron is carried out the wet method vibration, add organic bond, make the suspension colloidal mixture, casting film-forming behind ball milling, casting films thickness are the 10-100 micron;
(3), the deielectric-coating with above-mentioned flow casting molding builds up the multilayered medium body;
(4), above-mentioned multilayered medium body is rolled film, be washed into disk then;
(5), above-mentioned disk base substrate 20-300 sheet is superimposed neat, lie against on the load bearing board, at 1080-1280 ℃ of following sintering, be incubated 0.5-2.5 hour.
2, the manufacture method of piezoelectric ceramic sounder medium as claimed in claim 1 is characterized in that, described wet method vibration is used zirconia ball in the nylon jar vibration 1-2 hour.
3, the manufacture method of piezoelectric ceramic sounder medium as claimed in claim 1 is characterized in that, described load bearing board is made by zirconia.
4, the manufacture method of piezoelectric ceramic sounder medium as claimed in claim 1 is characterized in that, the prescription of described medium: Pb
3O
4Be 60.0-75.0, ZrO
2Be 15.0-23.5, TiO
2Be 7.5-18.0, Sb
2O
5Be 0.2-5.0, Nb
2O
5Be 0.2-5.0, SrCO
3Be 0-8.0, MgO is 0.2-2.5.
5, such as the manufacture method of claim 1 or 2 or 3 described piezoelectric ceramic sounder mediums, it is characterized in that the prescription of described medium: Pb
3O
4Be 55.0-68.0, ZrO
2Be 11.0-23.5, TiO
2Be 10.0-7.5-20.5, Sb
2O
5Be 0.2-5.0, Nb
2O
5Be 0.2-5.0, SrCO
3Be 3.0-12.0.
6, the manufacture method of piezoelectric ceramic sounder medium as claimed in claim 1 is characterized in that, the prescription of described medium: Pb
3O
4Be 60.0-70.0, ZrO
2Be 11.0-23.5, TiO
2Be 10.0-20.5, SrCO
3Be 0.5-8.0, Nb
2O
5Be 0.5-5.0, MgO is 0.5-2.5; ZnO is 0.5-2.0, Bi
2O
3Be 0-1.0, La
2O
3Be 0.2-2.0.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00123845 CN1132254C (en) | 2000-08-22 | 2000-08-22 | Technology for making piezoelectric ceramic sounder medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00123845 CN1132254C (en) | 2000-08-22 | 2000-08-22 | Technology for making piezoelectric ceramic sounder medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1281212A true CN1281212A (en) | 2001-01-24 |
| CN1132254C CN1132254C (en) | 2003-12-24 |
Family
ID=4590166
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00123845 Expired - Fee Related CN1132254C (en) | 2000-08-22 | 2000-08-22 | Technology for making piezoelectric ceramic sounder medium |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100347123C (en) * | 2005-12-30 | 2007-11-07 | 中国科学院上海硅酸盐研究所 | High dielectric contant flexible piezoelectric ceramic material and preparation process thereof |
| CN101445367B (en) * | 2008-12-25 | 2011-10-05 | 西安健信电力电子陶瓷有限责任公司 | Dielectric material of AC high voltage ceramic capacitor and preparation method thereof |
| CN102515758A (en) * | 2011-12-12 | 2012-06-27 | 中国振华集团红云器材厂 | Preparation method of piezoelectric ceramic atomizer medium |
| CN102941730A (en) * | 2012-08-27 | 2013-02-27 | 宁波凯普电子有限公司 | Ultrathin piezoelectric ceramic green diaphragm laminate sintering adhesion-isolation agent and coating method thereof |
| CN103011774A (en) * | 2012-12-13 | 2013-04-03 | 成都汇通西电电子有限公司 | High-sensitivity piezoelectric ceramic material, and preparation method and application thereof |
| CN105622085A (en) * | 2015-12-22 | 2016-06-01 | 贵州振华红云电子有限公司 | Method for preparing piezoelectric ceramic dielectric slab of piezoelectric pump |
| CN111018542A (en) * | 2019-12-22 | 2020-04-17 | 贵州振华红云电子有限公司 | Method for improving density of ultrathin piezoelectric ceramic piece |
-
2000
- 2000-08-22 CN CN 00123845 patent/CN1132254C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100347123C (en) * | 2005-12-30 | 2007-11-07 | 中国科学院上海硅酸盐研究所 | High dielectric contant flexible piezoelectric ceramic material and preparation process thereof |
| CN101445367B (en) * | 2008-12-25 | 2011-10-05 | 西安健信电力电子陶瓷有限责任公司 | Dielectric material of AC high voltage ceramic capacitor and preparation method thereof |
| CN102515758A (en) * | 2011-12-12 | 2012-06-27 | 中国振华集团红云器材厂 | Preparation method of piezoelectric ceramic atomizer medium |
| CN102941730A (en) * | 2012-08-27 | 2013-02-27 | 宁波凯普电子有限公司 | Ultrathin piezoelectric ceramic green diaphragm laminate sintering adhesion-isolation agent and coating method thereof |
| CN102941730B (en) * | 2012-08-27 | 2015-12-09 | 宁波凯普电子有限公司 | Ultrathin piezoelectric ceramic green compact diaphragm lamination sintering is every stick and painting method thereof |
| CN103011774A (en) * | 2012-12-13 | 2013-04-03 | 成都汇通西电电子有限公司 | High-sensitivity piezoelectric ceramic material, and preparation method and application thereof |
| CN103011774B (en) * | 2012-12-13 | 2014-06-25 | 成都汇通西电电子有限公司 | High-sensitivity piezoelectric ceramic material, and preparation method and application thereof |
| CN105622085A (en) * | 2015-12-22 | 2016-06-01 | 贵州振华红云电子有限公司 | Method for preparing piezoelectric ceramic dielectric slab of piezoelectric pump |
| CN111018542A (en) * | 2019-12-22 | 2020-04-17 | 贵州振华红云电子有限公司 | Method for improving density of ultrathin piezoelectric ceramic piece |
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| Publication number | Publication date |
|---|---|
| CN1132254C (en) | 2003-12-24 |
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Granted publication date: 20031224 Termination date: 20090922 |