CN102941730B - Ultrathin piezoelectric ceramic green compact diaphragm lamination sintering is every stick and painting method thereof - Google Patents
Ultrathin piezoelectric ceramic green compact diaphragm lamination sintering is every stick and painting method thereof Download PDFInfo
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Abstract
The invention discloses the formula of a kind of piezoelectric ceramics green compact diaphragm lamination sintering every stick, particularly a kind of ultrathin piezoelectric ceramic green compact diaphragm lamination sintering is every stick and painting method thereof; Its goal of the invention to be delaminated qualification rate after promoting ultrathin piezoelectric ceramic green compact diaphragm lamination sintering; It comprises titanium dioxide zirconium powder, and the grain size proportion of described titanium dioxide zirconium powder is as follows: 0.2 μm-4 μm: 45%-50%, 4 μm-25 μm: 11%-16%, 25 μm-100 μm: 14%-19%, 100 μm-500 μm: 20%-25%; After the invention enables the good above-mentioned sintering of the ultrathin piezoelectric ceramic green compact diaphragm lamination every stick of coating, be easy to peel off, qualification rate of delaminating is high, surface smoothness, and bending strength is good.
Description
Technical field
The present invention relates to the formula of a kind of piezoelectric ceramics green compact diaphragm lamination sintering every stick, particularly a kind of ultrathin piezoelectric ceramic green compact diaphragm lamination sintering is every stick and painting method thereof.
Background technology
Because electronic devices and components are in recent years towards miniaturization, piezoelectric ceramic piece also requires more and more thinner, piezoelectric ceramics single-sheet thickness develops into today thickness from original minimum 0.10 ㎜ and reaches 0.015 ㎜, and it is more and more higher that this just requires to manufacture ultrathin piezoelectric ceramic chip technology.
Present flow casting molding technology can make the thickness of piezoelectric ceramic piece reach 0.015mm, but for above-mentioned ultrathin piezoelectric ceramic sheet conventional method lamination sintering, ultrathin piezoelectric ceramic sheet after sintering, not easily peel off, and surface smoothness and ceramics bending strength all very poor, make the qualification rate of delaminating of ultrathin piezoelectric ceramic sheet very low, qualification rate is only 20%, and the piezoelectric ceramic piece of original 0.10mm thickness qualification rate of delaminating is generally 80%.
Summary of the invention
The object of the invention is in order to solve above-mentioned the deficiencies in the prior art provide a kind of can promote ultrathin piezoelectric ceramic green compact diaphragm lamination sintering after qualification rate of delaminating ultrathin piezoelectric ceramic green compact diaphragm lamination sintering every stick and painting method thereof.
To achieve these goals, the ultrathin piezoelectric ceramic green compact diaphragm lamination sintering designed by the present invention is every stick, and it comprises titanium dioxide zirconium powder, and the grain size proportion of described titanium dioxide zirconium powder is as follows:
The titanium dioxide zirconium powder mentioned in above-mentioned is current material, directly can buy and obtain, therefore seldom be described in detail at this.
The invention still further relates to the painting method of above-mentioned ultrathin piezoelectric ceramic green compact diaphragm lamination sintering every stick, it specifically comprises the steps:
A) titanium dioxide zirconium powder weighs by above-mentioned grain size proportion;
B) again the titanium dioxide zirconium powder of proportioning is put into kiln, 1000 DEG C of temperature lower calcinations 3 hours;
C) take respectively again ultrathin piezoelectric ceramic green compact diaphragm and proportioning and calcining after titanium dioxide zirconium powder, all put into ball mill ball milling and mix 15 minutes, wherein proportioning the weight of titanium dioxide zirconium powder after calcining is 0.05% ~ 0.1% of the weight of ultrathin piezoelectric ceramic green compact diaphragm;
D) be placed on the screen cloth in vibratory sieve by the ultrathin piezoelectric ceramic green compact diaphragm mixed in previous step and titanium dioxide zirconium powder, sieve number is 20 orders, vibrates 10 minutes.The titanium dioxide zirconium powder making granularity be greater than 3-4 μm departs from ultrathin piezoelectric ceramic green compact diaphragm, only has the titanium dioxide zirconium powder of granularity 0.2 μm-3 μm to be attached to equably above ultrathin piezoelectric ceramic green compact diaphragm.
The ultrathin piezoelectric ceramic green compact diaphragm provided in said method, its thickness is 0.015-0.05mm.
The ultrathin piezoelectric ceramic green compact diaphragm lamination sintering that the present invention obtains is every stick and painting method thereof, and after making the good above-mentioned sintering of the ultrathin piezoelectric ceramic green compact diaphragm lamination every stick of coating, be easy to peel off, qualification rate of delaminating is high, surface smoothness, and bending strength is good.
Detailed description of the invention
Below in conjunction with embodiment, the present invention is further described.
Embodiment 1:
In the present embodiment, ultrathin piezoelectric ceramic green compact diaphragm adopts lead niobium-stibium zirconate-titanate ternary to be main base material, it is φ 6-φ 25mm that radical length is made in flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
Above-mentioned middle employing lead niobium-stibium zirconate-titanate ternary is the ultrathin piezoelectric ceramic green compact diaphragm of main base material is current material, and piezoelectric ceramics green compact diaphragm is also comparatively ripe prior art by flow casting molding simultaneously, therefore is seldom described in detail at this.
The present embodiment additionally provides the painting method of above-mentioned ultrathin piezoelectric ceramic green compact diaphragm lamination sintering every stick, and it specifically comprises the steps:
A) titanium dioxide zirconium powder weighs by above-mentioned grain size proportion;
B) take the titanium dioxide zirconium powder 100 grams of proportioning again, 100000 grams, ultrathin piezoelectric ceramic green compact diaphragm, put into ball mill ball milling and mix 15 minutes;
C) be placed on the screen cloth in vibratory sieve by the ultrathin piezoelectric ceramic green compact diaphragm mixed and titanium dioxide zirconium powder, sieve number is 20 orders, vibrates 10 minutes.The titanium dioxide zirconium powder making granularity be greater than 3-4 μm departs from ultrathin piezoelectric ceramic green compact diaphragm, only has the titanium dioxide zirconium powder of granularity 0.2 μm-3 μm to be attached to equably above ultrathin piezoelectric ceramic green compact diaphragm.
In concrete enforcement, the ultrathin piezoelectric ceramic green compact diaphragm lamination 100 after above-mentioned steps being terminated sinters; And indeformable during in order to make ultrathin piezoelectric ceramic green compact diaphragm sinter, ultrathin piezoelectric ceramic green compact diaphragm end face presses one piece of thick alumina plate thick for 4mm.
The ultrathin piezoelectric ceramic green compact diaphragm lamination sintering that the present embodiment provides is every stick and painting method thereof, and after making the good above-mentioned sintering of the ultrathin piezoelectric ceramic green compact diaphragm lamination every stick of coating, be easy to peel off, qualification rate of delaminating is high, surface smoothness, and bending strength is good.
Embodiment 2:
In the present embodiment, ultrathin piezoelectric ceramic green compact diaphragm adopts lead niobium-stibium zirconate-titanate ternary to be main base material, it is φ 6-φ 25mm that radical length is made in flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
The present embodiment additionally provides above-mentioned ultrathin piezoelectric ceramic green compact diaphragm lamination sintering every the painting method of stick: its concrete each step is unanimous on the whole with embodiment 1, just step b) in take proportioning again titanium dioxide zirconium powder be 90 grams.
Embodiment 3:
In the present embodiment, ultrathin piezoelectric ceramic green compact diaphragm adopts lead niobium-stibium zirconate-titanate ternary to be main base material, it is φ 6-φ 25mm that radical length is made in flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
The present embodiment additionally provides above-mentioned ultrathin piezoelectric ceramic green compact diaphragm lamination sintering every the painting method of stick: its concrete each step is unanimous on the whole with embodiment 1, just step b) in take proportioning again titanium dioxide zirconium powder be 80 grams.
Embodiment 4:
In the present embodiment, ultrathin piezoelectric ceramic green compact diaphragm adopts lead niobium-stibium zirconate-titanate ternary to be main base material, it is φ 6-φ 25mm that radical length is made in flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
The present embodiment additionally provides above-mentioned ultrathin piezoelectric ceramic green compact diaphragm lamination sintering every the painting method of stick: its concrete each step is unanimous on the whole with embodiment 1, just step b) in take proportioning again titanium dioxide zirconium powder be 70 grams.
Embodiment 5:
In the present embodiment, ultrathin piezoelectric ceramic green compact diaphragm adopts lead niobium-stibium zirconate-titanate ternary to be main base material, it is φ 6-φ 25mm that radical length is made in flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
The present embodiment additionally provides above-mentioned ultrathin piezoelectric ceramic green compact diaphragm lamination sintering every the painting method of stick: its concrete each step is unanimous on the whole with embodiment 1, just step b) in take proportioning again titanium dioxide zirconium powder be 60 grams.
Embodiment 6:
In the present embodiment, ultrathin piezoelectric ceramic green compact diaphragm adopts lead niobium-stibium zirconate-titanate ternary to be main base material, it is φ 6-φ 25mm that radical length is made in flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
The present embodiment additionally provides above-mentioned ultrathin piezoelectric ceramic green compact diaphragm lamination sintering every the painting method of stick: its concrete each step is unanimous on the whole with embodiment 1, just step b) in take proportioning again titanium dioxide zirconium powder be 50 grams.
Claims (3)
1. ultrathin piezoelectric ceramic green compact diaphragm lamination sintering is every a stick, and it is characterized in that: it comprises titanium dioxide zirconium powder, the grain size proportion of described titanium dioxide zirconium powder is as follows:
0.2μm--4μm：45%-50%；
4μm--25μm：11%-16%；
25μm--100μm：14%-19%；
100μm--500μm：20%-25%。
2. ultrathin piezoelectric ceramic green compact diaphragm lamination sintering, every the painting method of stick, is characterized in that: specifically comprise the steps: according to claim 1
A) titanium dioxide zirconium powder weighs by above-mentioned grain size proportion;
B) again the titanium dioxide zirconium powder of proportioning is put into kiln, 1000 DEG C of temperature lower calcinations 3 hours;
C) take respectively again ultrathin piezoelectric ceramic green compact diaphragm and proportioning and calcining after titanium dioxide zirconium powder, all put into ball mill ball milling and mix 15 minutes, wherein proportioning the weight of titanium dioxide zirconium powder after calcining is 0.05% ~ 0.1% of the weight of ultrathin piezoelectric ceramic green compact diaphragm;
D) be placed on the screen cloth in vibratory sieve by the ultrathin piezoelectric ceramic green compact diaphragm mixed in previous step and titanium dioxide zirconium powder, sieve number is 20 orders, vibrates 10 minutes.The titanium dioxide zirconium powder making granularity be greater than 3-4 μm departs from ultrathin piezoelectric ceramic green compact diaphragm, only has the titanium dioxide zirconium powder of granularity 0.2 μm-3 μm to be attached to equably above ultrathin piezoelectric ceramic green compact diaphragm.
3. ultrathin piezoelectric ceramic green compact diaphragm lamination sintering, every the painting method of stick, is characterized in that: the ultrathin piezoelectric ceramic green compact diaphragm provided in said method, its thickness is 0.015-0.05mm according to claim 1.
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| CN103122234B (en) * | 2013-03-14 | 2014-09-17 | 宁波凯普电子有限公司 | Adhesive for gluing piezoelectric ceramic buzzing slice and preparation method |
| CN103640075B (en) * | 2013-11-01 | 2016-04-06 | 宁波凯普电子有限公司 | Thickness is the thin type piezoelectric ceramics sheet rolling formation method of 0.1mm |
| CN107353000B (en) * | 2017-08-14 | 2020-10-02 | 湖南嘉业达电子有限公司 | Isolation powder for sintering lead zirconate titanate piezoelectric ceramic and preparation method thereof |
| CN108847353B (en) * | 2018-05-30 | 2020-12-22 | 广东风华高新科技股份有限公司 | Multilayer ceramic capacitor and preparation method thereof |
| CN111393173B (en) * | 2020-03-18 | 2022-03-22 | 广州凯立达电子股份有限公司 | Adhesive for stacking and sintering piezoelectric ceramics and preparation method thereof |
| CN112222164A (en) * | 2020-10-15 | 2021-01-15 | 中科传感技术(青岛)研究院 | Method for sintering small-size ceramic waste balls as cushion layer of ceramic product |
| CN112960992A (en) * | 2021-03-19 | 2021-06-15 | 徐豪华 | Separation method of piezoelectric ceramic pieces |
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| CN1119632A (en) * | 1994-08-11 | 1996-04-03 | 日本碍子株式会社 | Ceramic diaphragm structure having convex diaphragm portion and method of producing the same |
| CN1133496A (en) * | 1994-11-16 | 1996-10-16 | 日本碍子株式会社 | Ceramic film structure body and making method thereof |
| CN1281212A (en) * | 2000-08-22 | 2001-01-24 | 姜知水 | Technology for making piezoelectric ceramic sounder medium |
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- 2012-08-27 CN CN201210306894.8A patent/CN102941730B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1119632A (en) * | 1994-08-11 | 1996-04-03 | 日本碍子株式会社 | Ceramic diaphragm structure having convex diaphragm portion and method of producing the same |
| CN1133496A (en) * | 1994-11-16 | 1996-10-16 | 日本碍子株式会社 | Ceramic film structure body and making method thereof |
| CN1281212A (en) * | 2000-08-22 | 2001-01-24 | 姜知水 | Technology for making piezoelectric ceramic sounder medium |
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