CN102941730A - Ultrathin piezoelectric ceramic green diaphragm laminate sintering adhesion-isolation agent and coating method thereof - Google Patents
Ultrathin piezoelectric ceramic green diaphragm laminate sintering adhesion-isolation agent and coating method thereof Download PDFInfo
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- CN102941730A CN102941730A CN2012103068948A CN201210306894A CN102941730A CN 102941730 A CN102941730 A CN 102941730A CN 2012103068948 A CN2012103068948 A CN 2012103068948A CN 201210306894 A CN201210306894 A CN 201210306894A CN 102941730 A CN102941730 A CN 102941730A
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Abstract
The invention discloses an ultrathin piezoelectric ceramic green diaphragm laminate sintering adhesion-isolation agent formula and especially discloses an ultrathin piezoelectric ceramic green diaphragm laminate sintering adhesion-isolation agent and a coating method thereof. The ultrathin piezoelectric ceramic green diaphragm laminate sintering adhesion-isolation agent can improve a stripping qualification rate after ultrathin piezoelectric ceramic green diaphragm laminate sintering. The ultrathin piezoelectric ceramic green diaphragm laminate sintering adhesion-isolation agent comprises zirconium dioxide powder, wherein the zirconium dioxide powder comprises 45 to 50% of zirconium dioxide particles having sizes of 0.2 to 4 microns, 11 to 16% of zirconium dioxide particles having sizes of 4 to 25 microns, 14 to 19% of zirconium dioxide particles having sizes of 25 to 100 microns and 20 to 25% of zirconium dioxide particles having sizes of 100 to 500 microns. After being sintered, an ultrathin piezoelectric ceramic green diaphragm laminate coated with the ultrathin piezoelectric ceramic green diaphragm laminate sintering adhesion-isolation agent can be stripped easily and has a high stripping qualification rate, a smooth surface and good bending strength.
Description
Technical field
The present invention relates to a kind of piezoelectric ceramics green compact diaphragm lamination sintering every the prescription of stick, particularly a kind of ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering is every stick and painting method thereof.
Background technology
Because electronic devices and components developed towards microminiaturization in recent years, piezoelectric ceramic piece also requires more and more thinner, the piezoelectric ceramics single-sheet thickness develops into today thickness from original minimum 0.10 ㎜ and has reached 0.015 ㎜, and it is more and more higher that this just requires to make ultra-thin piezoelectric ceramics chip technology.
Present flow casting molding technology can make the thickness of piezoelectric ceramic piece reach 0.015mm, but for above-mentioned ultra-thin piezoelectric ceramic piece conventional method lamination sintering, ultra-thin piezoelectric ceramic piece behind the sintering, be difficult for peeling off, and surface smoothness and ceramics bending strength are all very poor, so that the qualification rate of delaminating of ultra-thin piezoelectric ceramic piece is very low, qualification rate only is 20%, and the piezoelectric ceramic piece of the original 0.10mm thickness qualification rate of delaminating is generally 80%.
Summary of the invention
The objective of the invention is to provide in order to solve above-mentioned the deficiencies in the prior art a kind of ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering of the qualification rate of delaminating behind the ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering that can promote every stick and painting method thereof.
To achieve these goals, the designed ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering of the present invention is every stick, and it comprises the titanium dioxide zirconium powder, and the grain size proportion of described titanium dioxide zirconium powder is as follows:
0.2μm--4μm：45%-50%；
4μm--25μm：11%-16%；
25μm--100μm：14%-19%；
100μm--500μm：20%-25%。
The titanium dioxide zirconium powder of mentioning in above-mentioned is current material, can directly buy to obtain, so seldom be described in detail at this.
The invention still further relates to above-mentioned ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering every the painting method of stick, it specifically comprises the steps:
A) the titanium dioxide zirconium powder carries out weighing by above-mentioned grain size proportion;
B) again will be the titanium dioxide zirconium powder of proportioning put into kiln, 1000 ℃ of temperature lower calcinations 3 hours;
C) take by weighing respectively more ultra-thin piezoelectric ceramics green compact diaphragm and proportioning and the calcining after the titanium dioxide zirconium powder, all put into the ball mill ball milling and mixed 15 minutes, wherein the weight of the titanium dioxide zirconium powder after proportioning and the calcining be ultra-thin piezoelectric ceramics green compact diaphragm weight 0.05% ~ 0.1%;
D) the ultra-thin piezoelectric ceramics green compact diaphragm that mixed in the previous step and titanium dioxide zirconium powder are placed on the screen cloth in the vibratory sieve, sieve number is 20 orders, vibrates 10 minutes.Make granularity break away from ultra-thin piezoelectric ceramics green compact diaphragm greater than the titanium dioxide zirconium powder of 3-4 μ m, only have the titanium dioxide zirconium powder of granularity 0.2 μ m-3 μ m to be attached to equably above the ultra-thin piezoelectric ceramics green compact diaphragm.
The ultra-thin piezoelectric ceramics green compact diaphragm that provides in the said method, its thickness is 0.015-0.05mm.
The ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering that the present invention obtains is every stick and painting method thereof, so that coating is good above-mentioned behind the ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering of stick, is easy to peel off, and the qualification rate of delaminating height, surface smoothness, bending strength is good.
The specific embodiment
The present invention is further described below in conjunction with embodiment.
Embodiment 1:
Ultra-thin piezoelectric ceramics green compact diaphragm employing lead niobium-stibium zirconate-titanate ternary is main base material in the present embodiment, it is φ 6-φ 25mm that radical length is made in the flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select the titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
0.2μm--4μm:45%；
4μm-25μm:12%；
25μm--100μm:18%；
100μm--500μm:25%。
The ultra-thin piezoelectric ceramics green compact diaphragm that above-mentioned middle employing lead niobium-stibium zirconate-titanate ternary is main base material is current material, and the piezoelectric ceramics green compact diaphragm also is comparatively ripe prior art by flow casting molding simultaneously, so seldom be described in detail at this.
Present embodiment also provides the painting method of above-mentioned ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering every stick, and it specifically comprises the steps:
A) the titanium dioxide zirconium powder carries out weighing by above-mentioned grain size proportion;
B) take by weighing titanium dioxide zirconium powder 100 grams of proportioning, ultra-thin piezoelectric ceramics green compact diaphragm 10000 grams are put into the ball mill ball milling and were mixed 15 minutes again;
The ultra-thin piezoelectric ceramics green compact diaphragm that c) will mix and titanium dioxide zirconium powder are placed on the screen cloth in the vibratory sieve, and sieve number is 20 orders, vibrates 10 minutes.Make granularity break away from ultra-thin piezoelectric ceramics green compact diaphragm greater than the titanium dioxide zirconium powder of 3-4 μ m, only have the titanium dioxide zirconium powder of granularity 0.2 μ m-3 μ m to be attached to equably above the ultra-thin piezoelectric ceramics green compact diaphragm.
In implementation, 100 of ultra-thin piezoelectric ceramics green compact diaphragm laminations after the above-mentioned steps end are carried out sintering; And indeformable when making ultra-thin piezoelectric ceramics green compact diaphragm sintering, ultra-thin piezoelectric ceramics green compact diaphragm end face press one thick be the thick alumina plate of 4mm.
The ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering that present embodiment provides is every stick and painting method thereof, so that coating is good above-mentioned behind the ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering of stick, is easy to peel off, and the qualification rate of delaminating height, surface smoothness, bending strength is good.
Following table be ultra-thin piezoelectric ceramics green compact diaphragm by above-mentioned painting method apply that present embodiment provides every the series of parameters of carrying out after the stick drawing after ultra-thin piezoelectric ceramic piece two that ultra-thin piezoelectric ceramic piece one that the lamination sintering obtains and traditional lamination sintering obtain compares.
Embodiment 2:
Ultra-thin piezoelectric ceramics green compact diaphragm employing lead niobium-stibium zirconate-titanate ternary is main base material in the present embodiment, it is φ 6-φ 25mm that radical length is made in the flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select the titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
0.2μm--4μm:46%
4μm-25μm:15%
25μm--100μm:15%
100μm--500μm:24%
Present embodiment also provides the painting method of above-mentioned ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering every stick: its concrete each step is unanimous on the whole with embodiment 1, and just taking by weighing in the step b), the titanium dioxide zirconium powder of proportioning is 90 grams again.
Following table be ultra-thin piezoelectric ceramics green compact diaphragm by above-mentioned painting method apply that present embodiment provides every the series of parameters of carrying out after the stick drawing after ultra-thin piezoelectric ceramic piece two that ultra-thin piezoelectric ceramic piece one that the lamination sintering obtains and traditional lamination sintering obtain compares.
Embodiment 3:
Ultra-thin piezoelectric ceramics green compact diaphragm employing lead niobium-stibium zirconate-titanate ternary is main base material in the present embodiment, it is φ 6-φ 25mm that radical length is made in the flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select the titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
0.2μm--4μm:47%；
4μm-25μm:14%；
25μm--100μm:16%；
100μm--500μm:23%。
Present embodiment also provides the painting method of above-mentioned ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering every stick: its concrete each step is unanimous on the whole with embodiment 1, and just taking by weighing in the step b), the titanium dioxide zirconium powder of proportioning is 80 grams again.
Following table be ultra-thin piezoelectric ceramics green compact diaphragm by above-mentioned painting method apply that present embodiment provides every the series of parameters of carrying out after the stick drawing after ultra-thin piezoelectric ceramic piece two that ultra-thin piezoelectric ceramic piece one that the lamination sintering obtains and traditional lamination sintering obtain compares.
Embodiment 4:
Ultra-thin piezoelectric ceramics green compact diaphragm employing lead niobium-stibium zirconate-titanate ternary is main base material in the present embodiment, it is φ 6-φ 25mm that radical length is made in the flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select the titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
0.2μm--4μm:48%；
4μm-25μm:16%；
25μm--100μm:14%；
100μm--500μm:22%。
Present embodiment also provides the painting method of above-mentioned ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering every stick: its concrete each step is unanimous on the whole with embodiment 1, and just taking by weighing in the step b), the titanium dioxide zirconium powder of proportioning is 70 grams again.
Following table be ultra-thin piezoelectric ceramics green compact diaphragm by above-mentioned painting method apply that present embodiment provides every the series of parameters of carrying out after the stick drawing after ultra-thin piezoelectric ceramic piece two that ultra-thin piezoelectric ceramic piece one that the lamination sintering obtains and traditional lamination sintering obtain compares.
Embodiment 5:
Ultra-thin piezoelectric ceramics green compact diaphragm employing lead niobium-stibium zirconate-titanate ternary is main base material in the present embodiment, it is φ 6-φ 25mm that radical length is made in the flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select the titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
0.2μm--4μm:49%；
4μm-25μm:12%；
25μm--100μm:15%；
100μm--500μm:24%。
Present embodiment also provides the painting method of above-mentioned ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering every stick: its concrete each step is unanimous on the whole with embodiment 1, and just taking by weighing in the step b), the titanium dioxide zirconium powder of proportioning is 60 grams again.
Following table be ultra-thin piezoelectric ceramics green compact diaphragm by above-mentioned painting method apply that present embodiment provides every the series of parameters of carrying out after the stick drawing after ultra-thin piezoelectric ceramic piece two that ultra-thin piezoelectric ceramic piece one that the lamination sintering obtains and traditional lamination sintering obtain compares.
Embodiment 6:
Ultra-thin piezoelectric ceramics green compact diaphragm employing lead niobium-stibium zirconate-titanate ternary is main base material in the present embodiment, it is φ 6-φ 25mm that radical length is made in the flow casting molding backlash, thickness is the green compact diaphragm of 0.015-0.05mm, select the titanium dioxide zirconium powder to do every stick, the grain size proportion of described titanium dioxide zirconium powder is as follows:
0.2μm--4μm:50%；
4μm-25μm:11%；
25μm--100μm:19%；
100μm--500μm:20%。
Present embodiment also provides the painting method of above-mentioned ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering every stick: its concrete each step is unanimous on the whole with embodiment 1, and just taking by weighing in the step b), the titanium dioxide zirconium powder of proportioning is 50 grams again.
Following table be ultra-thin piezoelectric ceramics green compact diaphragm by above-mentioned painting method apply that present embodiment provides every the series of parameters of carrying out after the stick drawing after ultra-thin piezoelectric ceramic piece two that ultra-thin piezoelectric ceramic piece one that the lamination sintering obtains and traditional lamination sintering obtain compares.
Claims (3)
1. a ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering is every stick, and it is characterized in that: it comprises the titanium dioxide zirconium powder, and the grain size proportion of described titanium dioxide zirconium powder is as follows:
0.2μm--4μm：45%-50%；
4μm--25μm：11%-16%；
25μm--100μm：14%-19%；
100μm--500μm：20%-25%。
2. described ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering is characterized in that: specifically comprise the steps: every the painting method of stick according to claim 1
A) the titanium dioxide zirconium powder carries out weighing by above-mentioned grain size proportion;
B) again will be the titanium dioxide zirconium powder of proportioning put into kiln, 1000 ℃ of temperature lower calcinations 3 hours;
C) take by weighing respectively more ultra-thin piezoelectric ceramics green compact diaphragm and proportioning and the calcining after the titanium dioxide zirconium powder, all put into the ball mill ball milling and mixed 15 minutes, wherein the weight of the titanium dioxide zirconium powder after proportioning and the calcining be ultra-thin piezoelectric ceramics green compact diaphragm weight 0.05% ~ 0.1%;
D) the ultra-thin piezoelectric ceramics green compact diaphragm that mixed in the previous step and titanium dioxide zirconium powder are placed on the screen cloth in the vibratory sieve, sieve number is 20 orders, vibrates 10 minutes.Make granularity break away from ultra-thin piezoelectric ceramics green compact diaphragm greater than the titanium dioxide zirconium powder of 3-4 μ m, only have the titanium dioxide zirconium powder of granularity 0.2 μ m-3 μ m to be attached to equably above the ultra-thin piezoelectric ceramics green compact diaphragm.
3. described ultra-thin piezoelectric ceramics green compact diaphragm lamination sintering is every the painting method of stick according to claim 1, and it is characterized in that: the ultra-thin piezoelectric ceramics green compact diaphragm that provides in the said method, its thickness is 0.015-0.05mm.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103122234A (en) * | 2013-03-14 | 2013-05-29 | 宁波凯普电子有限公司 | Adhesive for gluing piezoelectric ceramic buzzing slice and preparation method |
| CN103640075A (en) * | 2013-11-01 | 2014-03-19 | 宁波凯普电子有限公司 | Membrane pressing forming device and forming method for 0.1mm-thick thin piezoelectric ceramic pieces |
| CN107353000A (en) * | 2017-08-14 | 2017-11-17 | 戴承萍 | A kind of lead titanate piezoelectric ceramics sintering insulating powder and preparation method thereof |
| CN108847353A (en) * | 2018-05-30 | 2018-11-20 | 广东风华高新科技股份有限公司 | A kind of multilayer ceramic capacitor and preparation method thereof |
| CN111393173A (en) * | 2020-03-18 | 2020-07-10 | 广州凯立达电子股份有限公司 | Adhesive for stacking and sintering piezoelectric ceramics and preparation method thereof |
| CN112222164A (en) * | 2020-10-15 | 2021-01-15 | 中科传感技术(青岛)研究院 | Method for sintering small-size ceramic waste balls as cushion layer of ceramic product |
| CN112960992A (en) * | 2021-03-19 | 2021-06-15 | 徐豪华 | Separation method of piezoelectric ceramic pieces |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103122234A (en) * | 2013-03-14 | 2013-05-29 | 宁波凯普电子有限公司 | Adhesive for gluing piezoelectric ceramic buzzing slice and preparation method |
| CN103122234B (en) * | 2013-03-14 | 2014-09-17 | 宁波凯普电子有限公司 | Adhesive for gluing piezoelectric ceramic buzzing slice and preparation method |
| CN103640075A (en) * | 2013-11-01 | 2014-03-19 | 宁波凯普电子有限公司 | Membrane pressing forming device and forming method for 0.1mm-thick thin piezoelectric ceramic pieces |
| CN103640075B (en) * | 2013-11-01 | 2016-04-06 | 宁波凯普电子有限公司 | Thickness is the thin type piezoelectric ceramics sheet rolling formation method of 0.1mm |
| CN107353000A (en) * | 2017-08-14 | 2017-11-17 | 戴承萍 | A kind of lead titanate piezoelectric ceramics sintering insulating powder and preparation method thereof |
| CN107353000B (en) * | 2017-08-14 | 2020-10-02 | 湖南嘉业达电子有限公司 | Isolation powder for sintering lead zirconate titanate piezoelectric ceramic and preparation method thereof |
| CN108847353A (en) * | 2018-05-30 | 2018-11-20 | 广东风华高新科技股份有限公司 | A kind of multilayer ceramic capacitor and preparation method thereof |
| CN111393173A (en) * | 2020-03-18 | 2020-07-10 | 广州凯立达电子股份有限公司 | Adhesive for stacking and sintering piezoelectric ceramics and preparation method thereof |
| CN111393173B (en) * | 2020-03-18 | 2022-03-22 | 广州凯立达电子股份有限公司 | Adhesive for stacking and sintering piezoelectric ceramics and preparation method thereof |
| CN112222164A (en) * | 2020-10-15 | 2021-01-15 | 中科传感技术(青岛)研究院 | Method for sintering small-size ceramic waste balls as cushion layer of ceramic product |
| CN112960992A (en) * | 2021-03-19 | 2021-06-15 | 徐豪华 | Separation method of piezoelectric ceramic pieces |
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